Fluid ejection microfluidic device, in particular for ink printing, and manufacturing process thereof

    公开(公告)号:US10946653B2

    公开(公告)日:2021-03-16

    申请号:US16414619

    申请日:2019-05-16

    Abstract: The fluid ejection microfluidic device, has a substrate; a buried cavity within the first substrate; a membrane formed by the first substrate and extending between the buried cavity and a first main surface of the substrate; and an access channel extending through the substrate, laterally and externally to the buried cavity and to the membrane and isolated with respect to the buried cavity. A sealed actuation structure extends over the first main surface of the substrate. A containment layer, of polymeric material, extends over the first main surface of the substrate and forms a fluid containment chamber accommodating the sealed actuation structure. A nozzle body of semiconductor material closes the fluid containment chamber at the top and is traversed by an ejection opening, forming, together with the fluid containment chamber and the access channel, a fluidic path.

    Capacitive micro-electro-mechanical force sensor and corresponding force sensing method

    公开(公告)号:US10024738B2

    公开(公告)日:2018-07-17

    申请号:US14539640

    申请日:2014-11-12

    Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.

    MICROFLUIDIC DIE WITH MULTIPLE HEATERS IN A CHAMBER
    57.
    发明申请
    MICROFLUIDIC DIE WITH MULTIPLE HEATERS IN A CHAMBER 有权
    微波炉与多个加热器在室内

    公开(公告)号:US20150367641A1

    公开(公告)日:2015-12-24

    申请号:US14310898

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

    Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。

    Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

    公开(公告)号:US11614634B2

    公开(公告)日:2023-03-28

    申请号:US16880141

    申请日:2020-05-21

    Abstract: A MEMS actuator includes a monolithic body of semiconductor material, with a supporting portion of semiconductor material, orientable with respect to a first and second rotation axes, transverse to each other. A first frame of semiconductor material is coupled to the supporting portion through first deformable elements configured to control a rotation of the supporting portion about the first rotation axis. A second frame of semiconductor material is coupled to the first frame by second deformable elements, which are coupled between the first and the second frames and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements carry respective piezoelectric actuation elements.

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