Polishing apparatus and polishing method
    51.
    发明申请
    Polishing apparatus and polishing method 有权
    抛光设备和抛光方法

    公开(公告)号:US20090130956A1

    公开(公告)日:2009-05-21

    申请号:US12292453

    申请日:2008-11-19

    IPC分类号: B24B49/12 B24B7/00

    摘要: A polishing apparatus makes it possible to polish and remove an extra conductive film while preventing the occurrence of erosion and without lowering of the throughput. The polishing apparatus includes: a polishing table having a polishing surface; a top ring for holding a workpiece having a surface conductive film, and pressing the conductive film against the polishing surface to polish the conductive film; an optical sensor for monitoring the polishing state of the conductive film by emitting light toward the conductive film of the workpiece held by the top ring, receiving reflected light from the conductive film, and measuring a change in the reflectance of the reflected light; and a control section for controlling a pressure at which the workpiece is pressed on the polishing surface.

    摘要翻译: 抛光装置可以抛光和除去额外的导电膜,同时防止腐蚀的发生而不降低生产量。 抛光装置包括:具有抛光表面的抛光台; 用于保持具有表面导电膜的工件的顶环,并将导电膜压靠在抛光表面上以抛光导电膜; 光传感器,用于通过向由顶环保持的工件的导电膜发射光,接收来自导电膜的反射光并测量反射光的反射率的变化来监测导电膜的抛光状态; 以及控制部,用于控制在抛光面上压入工件的压力。

    Wafer transfer control apparatus and method for transferring wafer
    53.
    发明授权
    Wafer transfer control apparatus and method for transferring wafer 有权
    基板转印控制装置和基板转印方法

    公开(公告)号:US06772029B2

    公开(公告)日:2004-08-03

    申请号:US10181293

    申请日:2002-07-16

    IPC分类号: G06F1760

    摘要: The present invention provides a substrate transfer controlling apparatus which can easily maximize the throughput of a substrate processing apparatus such as a semiconductor fabrication apparatus, and can satisfy a demand for immediacy of actions of a transfer device. The substrate transfer controlling apparatus comprises an input device (12) for inputting times required for actions of transfer devices (1a through 1c) and times required to process substrates in processing devices (3a through 9d), and a schedule calculator (21) for calculating execution times of actions of the transfer devices (1a through 1c) for allowing the time when a final one of the substrates to be processed is fully processed and returned from the substrate processing apparatus to be earliest, based on a predetermined conditional formula including, as parameters, the inputted times. The substrate transfer controlling apparatus further comprises an action commander (24) for instructing the corresponding transfer devices to perform the actions at the calculated execution times of the actions of the transfer devices (1a through 1c).

    摘要翻译: 本发明提供一种能够容易地使半导体制造装置等基板处理装置的生产能力最大化的基板转印控制装置,能够满足对转印装置的动作的即时性的要求。 基板传送控制装置包括:输入装置(12),用于输入传送装置(1a至1c)的动作所需的时间和处理装置(3a至9d)中处理基板所需的时间;以及计算计算器(21),用于计算 基于规定的条件式,将从基板处理装置开始最后处理的基板的处理时间最短的传送装置(1a〜1c)的动作的执行时间作为 参数,输入时间。 基板传送控制装置还包括动作指令器(24),用于指示相应的传送装置在计算出的传送装置(1a至1c)的动作的执行时间执行动作。

    Ink jet printer
    55.
    发明授权
    Ink jet printer 失效
    喷墨打印机

    公开(公告)号:US5700099A

    公开(公告)日:1997-12-23

    申请号:US635317

    申请日:1996-04-19

    CPC分类号: B41J13/10 B41J11/005

    摘要: A paper discharge section for a printer having a printer body includes first and second support portions mounted on the printer body. At least one of the support portions is slidable towards and away from the other support portion. The first support portion can rotate between at least a first position at which the first support portion supports a first bottom side portion of the sheet of paper and at least a second position in which the first support portion does not support the first bottom side portion of a sheet of paper. A slidable edge guide for guiding a first side edge of a sheet of paper is provided and slidable towards the other edge guide. A linkage mechanism links the slidable edge guide to the first support portion to cause the edge guide and first support portion to slide together. A switch for reversibly moving the first support portion from a first position at which the first portion supports a first bottom side portion of a sheet of paper when the edge guide is positioned to accept paper that requires support to a second position at which the first support portion does not support the first bottom side portion of a sheet of paper when the edge guide is positioned to accept paper that does not require support upon discharge, and for moving the first support portion from a second position at which the first support portion does not support the first bottom side portion of a sheet of paper when the edge guide is positioned to accept paper that does not require support upon discharge.

    摘要翻译: 具有打印机主体的打印机的排纸部分包括安装在打印机主体上的第一和第二支撑部分。 支撑部分中的至少一个可朝向和远离另一支撑部分滑动。 第一支撑部分可以在第一支撑部分支撑纸张的第一底侧部分的至少第一位置和至少第二位置之间旋转,在第二位置中第一支撑部分不支撑第一底部侧部分 一张纸。 提供用于引导纸张的第一侧边缘的滑动边缘引导件,并且可朝向另一边缘引导件滑动。 联动机构将可滑动边缘引导件连接到第一支撑部分,以使边缘引导件和第一支撑部分一起滑动。 一种用于当第一部分支撑纸张的第一底侧部分的第一位置可逆地移动第一支撑部分的开关,当边缘引导件被定位成接受需要支撑的纸张到第二位置时,第一支撑件 当边缘引导件定位成接收在排出时不需要支撑的纸张,并且用于将第一支撑部分从第一支撑部分不在第二位置移动的第一支撑部分移动时,部分不支撑一张纸的第一底侧部分 当边缘引导件被定位成接受放电时不需要支撑的纸张时,支撑一张纸的第一底侧部分。

    Method for producing oligosaccharide
    56.
    发明授权
    Method for producing oligosaccharide 失效
    寡糖的制造方法

    公开(公告)号:US4957860A

    公开(公告)日:1990-09-18

    申请号:US112068

    申请日:1987-10-26

    摘要: The present invention provides a method of producing oligosaccharides by the reaction between lactose and .beta.-galactosidase from aspergillus oryzae in which an concentration of lactose in an enzyme reaction mixture is between 50 and 90% (w/v) and a reaction temperature is within the range of 55.degree. C. to the temperature at which the .beta.-galactosidase in the reaction mixture is inactivated. This invention therefore makes it possible to obtain the sugar mixture containing high-purity oligosaccharides, small amounts of unreacted lactose and by produced monosaccharides.

    摘要翻译: 本发明提供了通过乳糖和来自米曲霉的β-半乳糖苷酶之间的反应制备寡糖的方法,其中酶反应混合物中的乳糖浓度为50-90%(w / v),反应温度在 范围为55℃至反应混合物中β-半乳糖苷酶失活的温度。 因此,本发明使得可以获得含有高纯度寡糖,少量未反应的乳糖和产生的单糖的糖混合物。

    Method for producing oligosaccharides
    57.
    发明授权
    Method for producing oligosaccharides 失效
    寡糖的制备方法

    公开(公告)号:US4895801A

    公开(公告)日:1990-01-23

    申请号:US103416

    申请日:1987-10-01

    CPC分类号: C12P19/14 Y10S435/918

    摘要: A method for producing oligosaccharides which are represented by the general formula Gal-(Gal)n-Glc (where Gal is a galactose residue, Glc is a glucose residue, and n is an integer from 1 to 4) which is characterized in that lactose or a lactose-containing substance is treated with at least two kinds of .beta.-galactosidases which are produced by different microorganisms. The present invention provides a method of producing oligosaccharides to obtain sweet saccharide mixture which provide sweetness and add oligosaccharides to food and drinks, with a lower increase in calories than that of conventional additives.

    摘要翻译: 用于制备由通式Gal-(Gal)n-Glc(其中Gal是半乳糖残基,Glc是葡萄糖残基,n是1至4的整数)表示的寡糖的方法,其特征在于,乳糖 或含有乳糖的物质用至少两种由不同微生物产生的β-半乳糖苷酶处理。 本发明提供一种生产低聚糖以获得甜味糖混合物的方法,其提供甜味并向食品和饮料中添加寡糖,卡路里的热量增加比常规添加剂的增加更低。

    Liquid ejection apparatus
    59.
    发明授权
    Liquid ejection apparatus 有权
    液体喷射装置

    公开(公告)号:US08820913B2

    公开(公告)日:2014-09-02

    申请号:US13409481

    申请日:2012-03-01

    IPC分类号: B41J2/01 B41J11/00

    CPC分类号: B41J11/002

    摘要: There is provided a liquid ejection apparatus in which convection generated by a convection generation unit does not give an influence on an irradiation unit, ink can be heated and dried sufficiently, and bleeding can be suppressed from occurring. The liquid ejection apparatus includes a head unit which has a nozzle for ejecting liquid onto a recording medium, a carriage which makes the head unit relatively scan the recording medium, an infrared ray irradiation unit which is provided at a vertically upper side of the carriage in a scanning direction of the carriage and irradiates the recording medium with infrared rays, a convection generation unit which is provided at a vertically upper side of the carriage in the scanning direction of the carriage and generates convection on the recording medium, and a separation wall which is provided between the infrared ray irradiation unit and the convection generation unit.

    摘要翻译: 提供了一种液体喷射装置,其中由对流产生单元产生的对流对照射单元不产生影响,可以充分地加热和干燥油墨,并且可以抑制出血。 液体喷射装置包括:头单元,其具有用于将液体喷射到记录介质上的喷嘴;使头单元相对地扫描记录介质的滑架;设置在滑架的垂直上侧的红外线照射单元 滑架的扫描方向并且用红外线照射记录介质;对流产生单元,其设置在托架的垂直上方沿托架的扫描方向并在记录介质上产生对流;以及分隔壁, 设置在红外线照射单元和对流发生单元之间。

    Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatus
    60.
    发明授权
    Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatus 有权
    调度器,基板处理装置以及在基板处理装置中传送基板的方法

    公开(公告)号:US08655472B2

    公开(公告)日:2014-02-18

    申请号:US13004208

    申请日:2011-01-11

    IPC分类号: G06F19/00 G06Q10/06

    摘要: A scheduler generates not only normal substrate transferring schedules for substrates newly supplied to a substrate processing apparatus, but also substrate transferring schedules for keeping a high production quantity in the event of a failure. The scheduler is used in a substrate processing apparatus including a plurality of substrate processing sections for processing substrates, a transfer device for transferring the substrates, and a controller for controlling the substrate processing units to process the substrates and controlling the transfer device to transfer the substrates. The scheduler is incorporated in the controller for calculating a substrate transferring schedule and has a function to successively calculate substrate transferring schedules for substrates which are newly supplied to the substrate processing apparatus, and, in the event of a fault occurring in the substrate processing apparatus, to recalculate the substrate transferring schedules with an initial state represented by a state including the fault.

    摘要翻译: 调度器不仅产生新提供给基板处理装置的基板的正常的基板转印时间表,而且生成在发生故障的情况下保持高生产量的基板转印时间表。 调度器用于包括用于处理衬底的多个衬底处理部分,用于转移衬底的转移装置和用于控制衬底处理单元以处理衬底并控制转移装置以转移衬底的衬底处理装置 。 调度器被结合在控制器中用于计算衬底传送时间表,并且具有连续地计算新提供给衬底处理设备的衬底的衬底传送时间表的功能,并且在衬底处理设备中发生故障的情况下, 重新计算由包括故障的状态表示的初始状态的基板传送调度。