公开(公告)号：US20130037974A1

公开(公告)日：2013-02-14

申请号：US13633045

申请日：2012-10-01

申请人： HORIBA STEC, CO., LTD.

发明人： Ichiro Nishikawa ,  Takeshi Kawano

IPC分类号： C23C14/00 ,  B01F3/04

CPC分类号： B01F3/04021 ,  B01F5/0451 ,  B01F5/0463 ,  B01F5/0615 ,  C23C16/4481

摘要： A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture, and a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside the gas generated by the vaporization with assistance of the carrier gas, wherein the vaporizing section is configured with an arrangement of one or a plurality of flat plates formed in a spiral shape by an inwardly twisting path. Such an arrangement provides an excellent liquid material vaporizer capable of, even if a liquid material composed of a plurality of materials having different boiling points is vaporized, preventing a residue from being generated, and performing the vaporization in a preferable manner.

摘要翻译： 液体蒸发器包括用于混合液体材料和载气以产生气液混合物的气液混合部分，以及用于从气液混合部分蒸发气液混合物的加热型蒸发部分， 在由载气辅助下通过汽化产生的气体外部，其中蒸发部分被构造成通过向内的扭转路径形成为螺旋形状的一个或多个平板的布置。 这种布置提供了一种优良的液体材料蒸发器，即使由具有不同沸点的多种材料组成的液体材料蒸发也能够防止产生残留物，并且以优选的方式进行蒸发。

公开(公告)号：US20130025715A1

公开(公告)日：2013-01-31

申请号：US13559520

申请日：2012-07-26

申请人： Yuji Yamaguchi ,  Tadahiro Yasuda

发明人： Yuji Yamaguchi ,  Tadahiro Yasuda

IPC分类号： F17D1/00

CPC分类号： H01J37/32449 ,  F17C1/00 ,  F17D1/00 ,  G05D11/132 ,  G05D11/139 ,  H01J37/32009 ,  H01J2237/334 ,  Y10T137/8593 ,  Y10T137/87249 ,  Y10T137/8729 ,  Y10T137/87314

摘要： A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

摘要翻译： 提供一个供气系统。 该系统包括多个组分气体供给管，多个流量控制机构，用于控制在成分气体供给管中流动的成分气体的流量，以及与成分气体供给管的下游端连接的原料气体供给管 并且在下游与气体供给口中的一个连接。 流量控制机构包括流量控制阀，单独的压力传感器以及从上游按顺序设置到成分气体供给管的流体阻力元件，公共压力传感器，以及用于计算气体流动的流量的控制器 在组分气体供应和控制相应的组分气体供应管的流量控制阀中，使得计算的组分气体流量分别接近预定的气体流量。

公开(公告)号：US08296090B2

公开(公告)日：2012-10-23

申请号：US12595821

申请日：2008-04-02

申请人： Junji Aoki ,  Hirokazu Kitaura ,  Said Boumsellek

发明人： Junji Aoki ,  Hirokazu Kitaura ,  Said Boumsellek

IPC分类号： G01L27/00 ,  G01L15/00

CPC分类号： H01J49/0009 ,  G01L21/30 ,  H01J41/02 ,  H01J41/10 ,  H01J49/0027

摘要： A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer to ionize a sample gas, a first ion detector and a second ion detector each configured to detect a respective ion from ionizer, and each being disposed a respective distance from the ionizer on an opposite side of the ionizer, the respective distances being different from each other, a filter interposed between the ionizer and the first ion detector to selectively allow ions from the ionizer to pass therethrough, and an arithmetic device to correct a partial pressure of a specific component obtained from the first ion detector and selected by the filter by using a first total pressure of the sample gas obtained from the first ion detector and a second total pressure of the sample gas obtained from the second ion detector.

摘要翻译： 使用四极质谱法的气体分析仪等设置有电离器，用于离子化样品气体，第一离子检测器和第二离子检测器，每个离子检测器和第二离子检测器被配置为检测来自电离器的相应离子， 电离器在离子交换器的相对侧上，各自的距离彼此不同，插入在离子发生器和第一离子检测器之间以选择性地允许来自离子发生器的离子通过的过滤器，以及用于校正离子发生器的分压的运算装置 由第一离子检测器获得的特定成分，并通过使用从第一离子检测器获得的样品气体的第一总压力和由第二离子检测器获得的样品气体的第二总压力由过滤器选择。

公开(公告)号：US20120174990A1

公开(公告)日：2012-07-12

申请号：US13348745

申请日：2012-01-12

申请人： Tadahiro YASUDA

发明人： Tadahiro YASUDA

IPC分类号： G05D11/13

CPC分类号： G05D11/132 ,  Y10T137/2521 ,  Y10T137/2524 ,  Y10T137/2529 ,  Y10T137/7762

摘要： The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.

摘要翻译： 流量比控制装置包括相同类型的差压流量控制器（MFC1，MFC2）和用于向流量控制器（MFC1，MFC2）发出命令以控制它们的控制处理机构（C）。 流量控制器（MFC1，MFC2）设置有从主流路（ML）的端子沿相反方向分支的各自的分支流路（BL1，BL2）。 布置在分支流路（BL1）中的流量控制器（MFC1）被操作，使得检测压力达到预定的目标压力; 根据总测量流量和预定流量比确定布置在分支流路（BL2）中的流量控制器（MFC2）的目标流量，并且操作流量控制器（MFC2），以实现 目标流量。

公开(公告)号：US20120101744A1

公开(公告)日：2012-04-26

申请号：US13278092

申请日：2011-10-20

申请人： Kazuhiro Matsuura ,  Hiroshi Takakura ,  Yukimasa Furukawa ,  Tadahiro Yasuda

发明人： Kazuhiro Matsuura ,  Hiroshi Takakura ,  Yukimasa Furukawa ,  Tadahiro Yasuda

IPC分类号： G06F19/00 ,  G01F1/00

CPC分类号： G01F15/068 ,  G01F15/005

摘要： This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.

摘要翻译： 本发明是改进具有流体测量装置和控制装置的流体测量系统的维护程序。 流体测量系统具有流体测量装置和用于控制流体测量装置的控制装置，并且流体测量装置包括流体传感器和相关数据存储部分，其被配置为存储用于计算一个或多个流体参数的流体计算相关数据 通过流体传感器获得的测量数据，并且控制装置从相关数据存储部分获得流体计算相关数据，并用流体传感器的测量数据和流体计算相关数据计算一个或多个流体参数。

公开(公告)号：US08015870B2

公开(公告)日：2011-09-13

申请号：US12524158

申请日：2008-01-21

申请人： Masaki Inoue ,  Hidetaka Yada

发明人： Masaki Inoue ,  Hidetaka Yada

IPC分类号： G01F1/68

CPC分类号： G01F1/6847 ,  G01F1/6888

摘要： Provided is a flowmeter with a flow tube through which fluid flows; a cooling apparatus adapted to cool a part of the flow tube; a first temperature detecting section for detecting the temperature of the flow tube cooled by the cooling apparatus; a second temperature detecting section for detecting the temperature of the cooling apparatus; a third temperature detecting section for detecting the temperature of a non-cooling area upstream of a cooling area in the flow tube; and an information processing section, which controls the cooling apparatus make a difference between the temperature detected by the second temperature detecting section and the temperature detected by the third temperature detecting section to be a prescribed value, and calculates the flow rate of the fluid flowing in the flow tube.

摘要翻译： 提供一种具有流体管的流量计，流体流过该流量计; 适于冷却所述流管的一部分的冷却装置; 第一温度检测部，用于检测由冷却装置冷却的流管的温度; 第二温度检测部，用于检测冷却装置的温度; 第三温度检测部分，用于检测流管中冷却区域上游的非冷却区域的温度; 以及信息处理部，其控制所述冷却装置使由所述第二温度检测部检测出的温度与由所述第三温度检测部检测出的温度之间的差为规定值，并且计算流过的流体的流量 流管。

公开(公告)号：US20110127770A1

公开(公告)日：2011-06-02

申请号：US12957270

申请日：2010-11-30

申请人： Miyoshi Kimura ,  Tatsuya Hayashi ,  Yuji Yamaguchi ,  Toshiyuki Himi ,  Kazuhiro Oya

发明人： Miyoshi Kimura ,  Tatsuya Hayashi ,  Yuji Yamaguchi ,  Toshiyuki Himi ,  Kazuhiro Oya

IPC分类号： F16L19/06 ,  F16L23/00 ,  F16L21/00

CPC分类号： F16L23/10 ,  F16L23/18

摘要： A coupling ring is provided, including a series of unit members with adjacent unit members rotatably coupled to each other, and a fastener coupling unit members on both ends to each other. A concave groove provided to extend circumferentially is externally fitted into an outer circumference of each of two opposing flanges. The unit members on the both ends are coupled to each other by the fastener to be turned into an annular state. The fastener is fastened to thereby press an inclined surface. The flanges are pressure-bonded to each other by forces generated during pressing. A stopper member is provided to restrict a separation angle between the unit member on one end and an adjacent unit member to fall within a certain angle in an open state in which the unit members on the both ends are not coupled to each other provided on at least one of the unit members.

摘要翻译： 提供了一个联接环，包括一系列具有可相互连接的相邻单元构件的单元构件，以及两端彼此之间的紧固件联接单元构件。 设置成周向延伸的凹槽外部装配到两个相对的凸缘中的每一个的外圆周中。 两端的单元构件通过紧固件彼此联接以变成环形状态。 紧固件被紧固从而按压倾斜表面。 凸缘通过在压制过程中产生的力相互压合。 设置止动构件以限制一端上的单元构件与相邻单元构件之间的分离角度，使其在两端的单元构件彼此不联接的打开状态下落入一定角度 至少有一个单位成员。

公开(公告)号：US20110115104A1

公开(公告)日：2011-05-19

申请号：US12809051

申请日：2008-12-05

申请人： Hideaki Miyamoto ,  Ichiro Nishikawa

发明人： Hideaki Miyamoto ,  Ichiro Nishikawa

IPC分类号： B01F3/04

CPC分类号： C23C16/4481 ,  B01B1/005 ,  B01D1/0082 ,  B01D1/16

摘要： An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.

摘要翻译： 本发明的目的是提供一种液体材料蒸发装置，其能够增加载气的流量而不改变喷嘴的形状。 液体材料蒸发装置包括混合有液体材料和载气的气液混合室，将液体材料引入气液混合室的液体材料导入路径，导入 载气进入气液混合室，蒸气喷嘴部与气液混合室连通以使液体材料和载气混合物闪蒸，以及与气液混合室连通的混合气体导出路径 所述蒸发喷嘴部分导出由蒸发喷嘴部分蒸发的混合气体。

公开(公告)号：US20100269924A1

公开(公告)日：2010-10-28

申请号：US12809836

申请日：2008-12-16

申请人： Tadahiro Yasuda

发明人： Tadahiro Yasuda

IPC分类号： F16K31/12

CPC分类号： G05D11/132 ,  Y10T137/2521 ,  Y10T137/2524 ,  Y10T137/2529 ,  Y10T137/7762

摘要： An object of this invention is to provide a flow rate ratio controlling apparatus that does not need devices of a plurality of types and that enables reduction of the number of types of components and the manufacturing cost. The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.

摘要翻译： 本发明的目的是提供一种流量比控制装置，其不需要多种类型的装置，并且能够减少部件的类型数量和制造成本。 流量比控制装置包括相同类型的差压流量控制器（MFC1，MFC2）和用于向流量控制器（MFC1，MFC2）发出命令以控制它们的控制处理机构（C）。 流量控制器（MFC1，MFC2）设置有从主流路（ML）的端子沿相反方向分支的各自的分支流路（BL1，BL2）。 布置在分支流路（BL1）中的流量控制器（MFC1）被操作，使得检测压力达到预定的目标压力; 根据总测量流量和预定流量比确定布置在分支流路（BL2）中的流量控制器（MFC2）的目标流量，并且操作流量控制器（MFC2），以实现 目标流量。

公开(公告)号：US20100229965A1

公开(公告)日：2010-09-16

申请号：US12722570

申请日：2010-03-12

申请人： Toshihiro KASHIMA ,  Yutaka YONEDA ,  Yasuhiro ISOBE

发明人： Toshihiro KASHIMA ,  Yutaka YONEDA ,  Yasuhiro ISOBE

IPC分类号： G05D7/00 ,  G01F1/76

CPC分类号： G01F1/6847 ,  G01F5/00 ,  G01F25/0007 ,  G05D7/0635 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An object of this invention is to provide a superior mass flow meter or the like that can flexibly cope with a change of a sample fluid such as a gas kind without requiring a special troublesome labor and that can measure a flow rate with high accuracy. The mass flow meter comprises a sensor section that detects a flow rate of a sample fluid flowing in a flow channel, a setting section that sets a flow rate characteristic function that is intrinsic to each fluid to determine a flow rate based on a flow rate detected value output by the sensor section and an instrumental error correction parameter that is independent from the flow rate characteristic function and common to multiple sample fluids to correct an instrumental error of each mass flow meter, and a flow rate calculating section that calculates a flow rate measurement value of the sample fluid by applying the flow rate characteristic function and the instrumental error correction parameter to the flow rate detected value.

摘要翻译： 本发明的一个目的是提供一种能够灵活应对气体样品流体变化的优质的质量流量计等，而不需要特别麻烦的劳动，并可以高精度地测量流量。 质量流量计包括检测在流路中流动的样品流体的流量的传感器部分，设定部分，其设定每个流体固有的流量特性函数，以基于检测到的流量来确定流量 由传感器部分输出的值和与流量特性函数无关并且与多个样本流体共同以校正每个质量流量计的仪器误差的仪器误差校正参数;以及流量计算部分，其计算流量测量 通过将流量特性函数和仪器误差校正参数应用于流量检测值来获得样品流体的值。