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    MEMS device having an actuator with curved electrodes
    51.
    发明申请
    MEMS device having an actuator with curved electrodes 审中-公开
    MEMS器件具有带弯曲电极的致动器

    公开(公告)号：US20020113281A1

    公开(公告)日：2002-08-22

    申请号：US10025974

    申请日：2001-12-19

    Inventor： Shawn Jay Cunningham ,  Dana R. DeReus

    IPC: H01L029/82

    CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

    Abstract: MEMS Device having an Actuator with Curved Electrodes. According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam attached to the actuating device and having an end attached to the substrate. The electrode beam is flexible between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode attached to the substrate. The electrode has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the electrode.

    Abstract translation: 具有带弯曲电极的致动器的MEMS器件。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平面表面的基板和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极束，并且具有连接到基底的一端。 电极束在致动装置和连接到基板的电极束的端部之间是柔性的。 此外，致动器包括附接到基板的至少一个电极。 电极具有与电极束的长度相邻的位置对齐的弯曲表面，由此当电极束以基本上对应于电极的弯曲表面的弯曲方式移动时，致动装置可在其基本线性方向上移动。

    Rolling shutter optical switch device with latch electrode and slits in shutter
    53.
    发明申请
    Rolling shutter optical switch device with latch electrode and slits in shutter 失效
    具有闩锁电极的卷帘快门光开关装置和快门中的狭缝

    公开(公告)号：US20020018613A1

    公开(公告)日：2002-02-14

    申请号：US09799923

    申请日：2001-03-05

    Inventor： Carl O. Bozler ,  Steven Rabe

    IPC: G02B006/35

    CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

    Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

    Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

    Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
    55.
    发明申请
    Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing 有权
    具有垂直静电梳状驱动器的二维万向扫描执行器用于致动和/或感测

    公开(公告)号：US20010048784A1

    公开(公告)日：2001-12-06

    申请号：US09751660

    申请日：2000-12-28

    Inventor： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

    IPC: G02B006/35

    CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

    Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

    Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

    Bistable microelectromechanical actuator
    57.
    发明授权
    Bistable microelectromechanical actuator 失效
    双稳态微机电致动器

    公开(公告)号：US5867302A

    公开(公告)日：1999-02-02

    申请号：US908639

    申请日：1997-08-07

    Applicant: James G. Fleming

    Inventor： James G. Fleming

    IPC: B81B3/00 ,  G02B26/08 ,  G02B26/00

    CPC classification number: G02B26/0841 ,  B81B3/0054 ,  G02B26/0825 ,  H01G5/16 ,  H01G5/38 ,  H01G5/40 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2203/0109 ,  H01H2001/0042 ,  Y10S359/904

    Abstract: A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

    Abstract translation: 双稳态微机电（MEM）致动器形成在基板上并且包括大致矩形形状的应力膜，其在释放时呈现曲线形横截面形状，这是由于在中间点附接到弹性构件，并且在相对的边缘处与一对细长 支持。 应力膜可以在具有镜像对称性的一对机械状态之间静电切换，在执行编程电压之后，MEM致动器保持静止状态。 根据本发明的各种实施例的双稳态MEM致动器可以用于形成非易失性存储元件，光学调制器（在膜上方支撑并且当膜被切换时同步地移动的一对反射镜），可切换镜 具有在其中间点处支撑在膜上方的单个反射镜）和闭锁继电器（具有一对在膜被切换时打开和关闭的触点）。 双稳态MEM致动器的阵列可以形成用于包括非易失性存储器，光学显示器和光学计算的应用。

    ELECTROSTATIC MEMS MICROMIRROR
    59.
    发明公开
    ELECTROSTATIC MEMS MICROMIRROR 审中-公开

    公开(公告)号：US20240019687A1

    公开(公告)日：2024-01-18

    申请号：US18477744

    申请日：2023-09-29

    Applicant: Huawei Technologies Co., Ltd.

    Inventor： Xiaoshi Dong ,  Jinghui Xu ,  Fengpei Sun

    IPC: G02B26/08 ,  B81B7/02

    CPC classification number: G02B26/0841 ,  B81B7/02 ,  B81B2203/0136 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045

    Abstract: An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are mechanically coupled using the comb frame. Two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam. The drive comb includes at least one comb pair. The comb pair includes a movable comb structure and a stationary comb structure. The movable comb structure includes a plurality of movable combs. One end of the movable comb is fastened to the comb frame.

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