公开(公告)号：US20160103026A1

公开(公告)日：2016-04-14

申请号：US14894709

申请日：2013-06-05

Applicant: EV GROUP E. THALLNER GMBH

Inventor： Boris POVAZAY ,  Antun PEIC

IPC: G01L1/24 ,  G01L1/25

CPC classification number: G01L1/242 ,  G01L1/24 ,  G01L1/241 ,  G01L1/247 ,  G01L1/25 ,  G01L5/0047 ,  G01L9/0076 ,  G01L11/02 ,  G01N23/046 ,  G01N2021/1787 ,  G01N2223/419 ,  G06F3/0325 ,  G06F3/041 ,  G06F3/042 ,  G06F3/0421 ,  G06F3/0423 ,  G06F3/0428 ,  G06F2203/04109 ,  H01L22/12

Abstract: A measuring device for determining a pressure map during application of pressure to at least one measurement layer between a first pressure body and a second pressure body the measuring device comprising: (i) at least one transmitter located on one peripheral edge of the measurement layer for emission of signals in the form of electromagnetic waves along a first signal route which runs through the measurement layer and at least one other signal route which runs through the measurement layer, and (ii) at least one receiver located on the peripheral edge for reception of the signals of the first signal route and other signal route(s), which signals are sent by the transmitter through the measurement layer and can be changed when pressure is applied. Furthermore this invention relates to a corresponding method.

Abstract translation: 一种测量装置，用于在对第一压力体和第二压力体之间的至少一个测量层施加压力时确定压力图，所述测量装置包括：（i）位于所述测量层的一个周边边缘上的至少一个发射器， 沿着穿过测量层的第一信号路径以及穿过测量层的至少一个其它信号路由的电磁波形式的信号的发射，以及（ii）位于外围边缘上的至少一个接收器，用于接收 第一信号路由和其他信号路由的信号，哪些信号由发射机通过测量层发送，并且可以在施加压力时改变。 此外，本发明涉及一种相应的方法。

公开(公告)号：US20150308908A1

公开(公告)日：2015-10-29

申请号：US14794067

申请日：2015-07-08

Applicant: CORNING INCORPORATED

Inventor： Rostislav Vatchev Roussev ,  Emily Elizabeth Young

IPC: G01L1/24 ,  G01N21/41 ,  G01B11/16

CPC classification number: G01L1/24 ,  C03C21/002 ,  G01B11/16 ,  G01L1/241 ,  G01N21/00 ,  G01N21/23 ,  G01N21/41

Abstract: Methods of capturing improved-contrast mode spectra of a double ion-exchanged (DIOX) glass sample using prism coupling of index np. The DIOX glass sample has a refractive index profile with a first region adjacent the surface that satisfies 0.0005 ≤  λ n   n  x  ≤ 0.0009 , where λ is a wavelength of measuring light. The prism-sample interface includes an interfacing liquid of index nf that differs from np by no more than 0.03, and that can exceed np. The mode spectra have a contrast that is higher than that obtained by conventional prism coupling by using gradient illumination or partially blocked illumination that reduces the amount of background reflected light from the coupling prism. The improved-contrast mode spectra can be processed using conventional means to determine at least one stress characteristic of the DIOX glass sample.

Abstract translation: 使用索引np的棱镜耦合捕获双离子交换（DIOX）玻璃样品的改进对比度模式光谱的方法。 DIOX玻璃样品具有与表面相邻的第一区域的折射率分布，该折射率分布满足0.0005≤nλλnνn÷x≤0.0009，其中λ是测量光的波长。 棱镜样品界面包括指数nf的界面液体，其不同于np不超过0.03，并且可以超过np。 模式光谱具有比通过使用梯度照明或部分阻挡照明的常规棱镜耦合获得的对比度，其减少来自耦合棱镜的背景反射光的量。 可以使用常规方法处理改进的对比度模式光谱，以确定DIOX玻璃样品的至少一个应力特性。

公开(公告)号：US20150262352A1

公开(公告)日：2015-09-17

申请号：US14208941

申请日：2014-03-13

Applicant: Southwest Research Institute

Inventor： John T. CARROLA, JR. ,  Warren Carl COUVILLION, JR. ,  Susan M. PORTER ,  David R. CHAMBERS ,  Christopher J. GUERRA

IPC: G06T7/00 ,  G01L1/24 ,  G01B11/16 ,  G06K9/00 ,  G06T7/60 ,  G06K9/46 ,  G06K9/62 ,  G01L1/06 ,  H04N5/33

CPC classification number: G06T7/0012 ,  A61B34/10 ,  G01B11/168 ,  G01L1/06 ,  G01L1/241 ,  G01L1/248 ,  G01N21/21 ,  G01N21/23 ,  G01N21/55 ,  G01N2021/557 ,  G06F3/011 ,  G06K9/00624 ,  G06K9/4642 ,  G06K9/6267 ,  G06T7/60 ,  G09B23/28 ,  H04N5/33

Abstract: A method and system for analysis of a viscoelastic response in a deformable material. The system includes a light source configured to provide linearly polarized light and a polariscope configured to receive said linearly polarized light and to generate an image associated with a viscoelastic response of said deformable material. The system also includes a machine vision system configured to operate on the image to locate the response on the deformable material and to classify the response as one of a plurality of predefined types of responses. A display may then be provide that is configured to provide feedback of the location of the viscoelastic response and classification of the response to a user of said system.

Abstract translation: 用于分析可变形材料中的粘弹性响应的方法和系统。 该系统包括被配置为提供线性偏振光的光源和被配置为接收所述线偏振光并且产生与所述可变形材料的粘弹性响应相关联的图像的偏光镜。 该系统还包括机器视觉系统，其被配置为在图像上操作以定位可变形材料上的响应并将响应分类为多种预定类型的响应之一。 然后可以提供被配置为提供粘弹性响应的位置的反馈和对所述系统的用户的响应的分类的显示。

公开(公告)号：US09109882B1

公开(公告)日：2015-08-18

申请号：US12316238

申请日：2008-12-10

Applicant: Pamela Saha

Inventor： Pamela Saha

IPC: G02B1/04 ,  G02F1/13363 ,  G01B11/16 ,  G01L1/24 ,  A63H33/22 ,  G02F1/01

CPC classification number: G01B11/18 ,  A63H33/22 ,  G01L1/241 ,  G02F1/0131

Abstract: A toy, art object, decoration, ornament, entertainment device, advertising device, paperweight, or other device is made of a soft deformable plastic material in shapes of prisms, lenses, wedges, cubes, pyramids, as well as other forms that display the changing stress patterns formed by deformations of the photoelastic material. Magnets embedded in the material apply forces that create new patterns. Polarizing films within, or covering the clear plastic enhance the viewing effects. External forces, such as manual manipulation, springs, strings, elastic bands, clamps and other devices are used to create interesting optical effects. The viewing effects increase the entertainment and aesthetic value of the devices.

公开(公告)号：US20150177082A1

公开(公告)日：2015-06-25

申请号：US14640022

申请日：2015-03-06

Applicant: KABUSHIKI KAISHA YASKAWA DENKI ,  KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION

Inventor： Renshi SAWADA ,  Toshihiro TAKESHITA ,  Takuma IWASAKI ,  Yuji ARINAGA

IPC: G01L1/24 ,  A61B5/00 ,  B25J9/16 ,  G01L5/00 ,  G01B11/16

CPC classification number: G01L1/241 ,  A61B5/445 ,  B25J9/1697 ,  G01B11/16 ,  G01L1/044 ,  G01L1/24 ,  G01L5/0047 ,  G01L5/166 ,  G01L5/221 ,  Y10S901/47

Abstract: A force sensor according to embodiments includes a light-emitting unit, a pair of first light detectors, a reflector, and a first frame. The light-emitting unit emits diffuse light. The first light detectors are arranged in a first direction with the light-emitting unit interposed therebetween. The reflector is arranged to face the light-emitting unit on an optical axis of the light-emitting unit and reflects the diffuse light emitted from the light-emitting unit toward the first light detectors. The first frame is deformed in the first direction so that a reflection range of the diffuse light reflected by the reflector is displaced in the first direction.

Abstract translation: 根据实施例的力传感器包括发光单元，一对第一光检测器，反射器和第一框架。 发光单元发射漫射光。 第一光检测器被布置在第一方向上，发光单元插入其间。 反射器被布置为在发光单元的光轴上面向发光单元，并将从发光单元发射的漫射光朝向第一光检测器反射。 第一框架在第一方向上变形，使得由反射器反射的漫射光的反射范围在第一方向上移位。

公开(公告)号：US09052775B1

公开(公告)日：2015-06-09

申请号：US13556393

申请日：2012-07-24

Applicant: Curt Michael Salisbury

Inventor： Curt Michael Salisbury

IPC: G01L1/24 ,  G01L3/00 ,  G06F3/042

CPC classification number: G06F3/042 ,  G01L1/24 ,  G01L1/241 ,  G01L5/226 ,  G06F3/0421

Abstract: Various technologies described herein pertain to a tactile sensor that senses normal load and/or shear load. The tactile sensor includes a first layer and an optically transparent layer bonded together. At least a portion of the first layer is made of optically reflective material. The optically transparent layer is made of resilient material (e.g., clear silicone rubber). The tactile sensor includes light emitter/light detector pair(s), which respectively detect either normal load or shear load. Light emitter(s) emit light that traverses through the optically transparent layer and reflects off optically reflective material of the first layer, and light detector(s) detect and measure intensity of reflected light. When a normal load is applied, the optically transparent layer compresses, causing a change in reflected light intensity. When shear load is applied, a boundary between optically reflective material and optically absorptive material is laterally displaced, causing a change in reflected light intensity.

Abstract translation: 本文描述的各种技术涉及感测正常负载和/或剪切载荷的触觉传感器。 触觉传感器包括粘合在一起的第一层和光学透明层。 第一层的至少一部分由光学反射材料制成。 光学透明层由弹性材料（例如透明硅橡胶）制成。 触觉传感器包括分别检测法向载荷或剪切载荷的光发射器/光检测器对。 光发射器发射穿过光学透明层的光并且反射第一层的光反射材料，并且光检测器检测并测量反射光的强度。 当施加正常负载时，光学透明层压缩，导致反射光强度的变化。 当施加剪切载荷时，光反射材料和光吸收材料之间的边界被横向移位，导致反射光强度的变化。

公开(公告)号：US08844367B2

公开(公告)日：2014-09-30

申请号：US13701402

申请日：2011-06-01

Applicant: Kazuki Takashima ,  Masaaki Otsu ,  Mitsuhiro Matsuda ,  Hiroaki Kurahara ,  Hidetaka Maeda ,  Tadahiro Yonekura

Inventor： Kazuki Takashima ,  Masaaki Otsu ,  Mitsuhiro Matsuda ,  Hiroaki Kurahara ,  Hidetaka Maeda ,  Tadahiro Yonekura

IPC: G01L1/24 ,  G01N3/08 ,  G01B11/16 ,  G01N3/06

CPC classification number: G01L1/241 ,  G01B11/162 ,  G01N3/068 ,  G01N3/08 ,  G01N2203/0286 ,  G01N2203/0647

Abstract: A measurement unit for tensile or compressive stress can includes a CCD camera for detecting an interference light, the interference light being formed with a measurement beam from a measured region and a reference beam from a reference mirror. A first objective lens can have the reference mirror. An image processing apparatus can measure the three-dimensional shape of the measured region from the position of the first objective lens at which the interference light provides the maximum contrast and can measure the distance between two gauge points on the basis of the three-dimensional shape. When strain is generated on a micromaterial, the strain against the measured tensile stress is measured on the basis of the tensile stress and the distance between the two gauge points.

Abstract translation: 用于拉伸或压缩应力的测量单元可以包括用于检测干涉光的CCD照相机，干涉光由来自测量区域的测量光束和来自参考反射镜的参考光束形成。 第一物镜可以具有参考镜。 图像处理装置可以从干涉光提供最大对比度的第一物镜的位置测量测量区域的三维形状，并且可以基于三维形状来测量两个测量点之间的距离 。 当在微材料上产生应变时，根据拉伸应力和两个测量点之间的距离测量抵抗测量的拉伸应力的应变。

公开(公告)号：US20140090487A1

公开(公告)日：2014-04-03

申请号：US14118601

申请日：2012-05-10

Applicant: Ludwig-Maximilians-Universitaet Muenchen

Inventor： Philipp Paulitschke

IPC: G01L1/24

CPC classification number: G01L1/241 ,  B82Y15/00 ,  G01B11/165 ,  G01L1/04

Abstract: Shown are a device (26) and a method for detecting the deflection of a plurality of elastic elements (22), wherein the elastic elements (22) can be deflected out of a rest position against a restoring force and are suitable as resonators and/or for measuring a force acting on a respective elastic element (22). The elastic elements (22) are arranged periodically, The arrangement of the elastic elements (22) is illuminated using light, the coherence length of which is larger than the average spacing of adjacent elastic elements (22). A diffraction image is hereby created of the illuminating light scattered on the arrangement of elastic elements (22), and at least a portion of the diffraction image is detected by an optical sensor (32) directly or after interaction with further optical components. The detected image or image signal is subsequently analysed in order to determine information relating to the deflection state of the elastic elements (22) therefrom.

Abstract translation: 示出了一种用于检测多个弹性元件（22）的偏转的装置（26）和方法，其中弹性元件（22）能够克服恢复力而偏离静止位置，并且适合作为谐振器和/ 或用于测量作用在相应的弹性元件（22）上的力。 弹性元件（22）周期性地布置。弹性元件（22）的布置使用光，其相干长度大于相邻弹性元件（22）的平均间距。 因此，产生散射在弹性元件（22）的布置上的照明光的衍射图像，并且至少一部分衍射图像由光学传感器（32）直接或与其它光学部件相互作用后检测。 随后分析检测到的图像或图像信号，以便确定与弹性元件（22）的偏转状态有关的信息。

公开(公告)号：US20120229794A1

公开(公告)日：2012-09-13

申请号：US13046722

申请日：2011-03-12

Applicant: KEN ROBERTS

Inventor： KEN ROBERTS

IPC: G01B11/16

CPC classification number: G01B11/16 ,  G01B11/165 ,  G01L1/24 ,  G01L1/241

Abstract: A system for measuring thin film stress (anisotropic or isotropic), such as from thin film deposition onto semiconductor substrates found in semiconductor manufacturing. The system uses resettled volume difference (V2−V1) of the surface of a material to calculate stress. The system includes A) A means to collect 3D surface point positions of a body by reflecting an image or light from the material surface into a sensor. B) A method to calculate volume from 3D surface points. C) A method to calculate thin film stress from resettled volume difference (V2−V1). D) A 3D Integrated Magnification Environment (3D-IME) to analyze 3D models of a body with a single axis (the height axis) magnified in an effort to observe the effects of stress on the body, before and after stress is applied, such as from film deposition). Calculating stress from resettled volume difference (V2−V1) eliminates the inaccuracy of calculating stress from the change in surface curvature or radius ( 1 R 2 - 1 R 1 ) , caused by the non-spherical deformation of anisotropic materials, such as semiconductor substrates (eg: silicon wafers) in semiconductor manufacturing.

Abstract translation: 用于测量薄膜应力（各向异性或各向同性）的系统，例如从在半导体制造中发现的半导体衬底上的薄膜沉积。 该系统使用材料表面的安置体积差（V2-V1）来计算应力。 该系统包括A）通过将图像或光从材料表面反射到传感器中来收集身体的3D表面点位置的方法。 B）从3D表面点计算体积的方法。 C）从安置体积差（V2-V1）计算薄膜应力的方法。 D）用于分析具有单轴（高度轴）的身体的3D模型的3D集成放大环境（3D-IME）被放大，以便在施加应力之前和之后观察应力对身体的影响，例如 从膜沉积）。 计算应力从安置的体积差（V2-V1）消除了由各向异性材料（如半导体衬底）的非球形变形引起的表面曲率或半径（1 R 2 - 1 R 1）变化计算应力的不精确度 （例如：硅晶片）。

公开(公告)号：US20100253650A1

公开(公告)日：2010-10-07

申请号：US12676621

申请日：2008-09-09

Applicant: Andreas Heinrich Dietzel ,  Harmannus Franciscus Maria Schoo ,  Marinus Marc Koetse

Inventor： Andreas Heinrich Dietzel ,  Harmannus Franciscus Maria Schoo ,  Marinus Marc Koetse

IPC: G06F3/042 ,  G01L1/24

CPC classification number: G01L1/247 ,  G01L1/241

Abstract: According to one aspect, the invention provides an optical sensor for measuring a force distribution, comprising a substrate; one or more light emitting sources and one or more detectors provided on the substrate, the detectors responsive to the light emitted by the sources; wherein a deformable opto-mechanical layer is provided on said substrate with light responsive properties depending on a deformation of the opto-mechanical layer.The design of the sensor and particularly the use of optical components in a deformable layer make it possible to measure the contact force accurately. The sensor is scalable and adaptable to complex shapes. In one embodiment also a direction of the contact force can be determined.

Abstract translation: 根据一个方面，本发明提供了一种用于测量力分布的光学传感器，包括基底; 一个或多个发光源和设置在所述衬底上的一个或多个检测器，所述检测器响应于由所述源发射的光; 其中根据所述光机械层的变形，在所述基板上提供具有光响应特性的可变形的光机械层。 传感器的设计，特别是在可变形层中使用光学部件可以准确地测量接触力。 传感器是可扩展的，适用于复杂的形状。 在一个实施例中，也可以确定接触力的方向。