公开(公告)号：US20090122429A1

公开(公告)日：2009-05-14

申请号：US11983615

申请日：2007-11-09

申请人： Douglas C. Watson ,  Alton H. Phillips

发明人： Douglas C. Watson ,  Alton H. Phillips

IPC分类号： G02B7/185

CPC分类号： G02B7/028 ,  G02B7/008 ,  G02B7/181

摘要： Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.

摘要翻译： 公开了镜子和其它光学元件，其包括限定光学表面（通常为反射表面）和相对的第二表面的主体。 身体有一个热膨胀系数（CTE）。 光学元件包括附接到第二表面并具有CTE的校正部分（例如，层），该CTE在光学元件的加热期间向本体施加弯曲力矩，该弯曲力矩至少部分地抵消光学元件的曲率变化 加热引起的表面。 身体可以内部冷却。 主体和校正部分期望地由可在CTE中稍微变化的相应导热材料制成。 身体期望地具有比校正部分更低的CTE，并且校正部分可以根据身体和/或反射表面的可变特性进行调节。 身体和校正部分期望地以热双金属样的方式协同地起作用。

公开(公告)号：US07192145B2

公开(公告)日：2007-03-20

申请号：US10946799

申请日：2004-09-22

申请人： Mark A. Ealey

发明人： Mark A. Ealey

IPC分类号： G02B5/08 ,  G02B7/183 ,  G02B7/185

CPC分类号： G02B7/183 ,  G02B5/08 ,  G02B26/0825

摘要： An integrated actuator meniscus mirror includes an optical substrate having a mirror surface on one side and a support structure on the other for controllably altering the shape of the mirror surface without a reaction mass.

摘要翻译： 集成致动器弯液面镜包括在一侧具有镜面的光学基底和另一侧的支撑结构，用于可控地改变镜面的形状而没有反作用物质。

公开(公告)号：US07125129B2

公开(公告)日：2006-10-24

申请号：US10872556

申请日：2004-06-22

申请人： Takeharu Oshima ,  Noboru Ito

发明人： Takeharu Oshima ,  Noboru Ito

IPC分类号： G02B7/185

CPC分类号： G02B7/183

摘要： A fluid pressure support mechanism has a container in which fluid pressure is applied and fluid tubes are connected to the fluid pressure support mechanisms and to a fluid pressure control unit in such a way as to make all the fluid pressure support mechanisms communicate with each other, then a fluid pressure control unit applies the fluid pressure to the containers in the respective fluid pressure support mechanisms via the fluid tubes and controls the fluid pressure, and an electrically attractive actuator translates a mirror in an axial direction with one degree of freedom for translation by attracting force produced by a driven member and an electromagnet.

摘要翻译： 流体压力支撑机构具有其中施加流体压力的容器和流体管连接到流体压力支撑机构和流体压力控制单元，使得所有流体压力支撑机构彼此连通， 然后流体压力控制单元通过流体管将流体压力施加到相应的流体压力支撑机构中的容器并控制流体压力，并且电吸引致动器致动器在轴向上平移反射镜，具有一个自由度用于平移 由从动构件和电磁体产生的吸引力。

公开(公告)号：US06967756B2

公开(公告)日：2005-11-22

申请号：US10834834

申请日：2004-04-30

申请人： Antonius Johannes Josephus Van Dijsseldonk ,  Erik Roelof Loopstra ,  Dominicus Jacobus Petrus Adrianus Franken

发明人： Antonius Johannes Josephus Van Dijsseldonk ,  Erik Roelof Loopstra ,  Dominicus Jacobus Petrus Adrianus Franken

IPC分类号： G02B5/10 ,  G02B7/185 ,  G02B26/08 ,  G03F7/20 ,  G03F7/22 ,  H01L21/027 ,  G02B7/182 ,  G02B26/00

CPC分类号： G03F7/70141 ,  G02B7/185 ,  G02B26/0825 ,  G03F7/70258 ,  G03F7/70266

摘要： A lithographic projection apparatus includes an active reflector in a radiation system providing a projection beam of radiation and/or in a projection system. The active reflector includes a body member, a reflective multilayer and at least one actuator controllable to adjust the surface figure of the reflecting multilayer, wherein the actuator exerts a substantial force component in a direction parallel to the surface figure of said reflective multilayer. The actuator may be operative to apply torques to said reflector.

摘要翻译： 光刻投影设备包括在辐射系统中的有源反射器，该辐射系统提供辐射的投影光束和/或投影系统。 主动反射器包括主体构件，反射多层和至少一个可控制的致动器，用于调节反射多层的表面图形，其中致动器沿平行于所述反射多层的表面图形的方向施加显着的力分量。 致动器可操作以将扭矩施加到所述反射器。

公开(公告)号：US12133319B2

公开(公告)日：2024-10-29

申请号：US17562819

申请日：2021-12-27

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Ting-Ya Cheng ,  Chun-Lin Chang ,  Li-Jui Chen ,  Han-Lung Chang

IPC分类号： H05G2/00 ,  G02B7/185 ,  G02B26/06 ,  G02B26/08 ,  G02B27/09 ,  G03F7/00

CPC分类号： H05G2/008 ,  G02B7/185 ,  G02B26/06 ,  G02B26/0858 ,  G02B27/0933 ,  G02B27/0977 ,  G03F7/70033 ,  H05G2/005

摘要： An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

公开(公告)号：US20220334377A1

公开(公告)日：2022-10-20

申请号：US17851297

申请日：2022-06-28

申请人： Infineon Technologies AG

发明人： Richard SCHROEDTER ,  Han Woong YOO ,  David BRUNNER ,  Georg SCHITTER ,  Franz Michael DARRER ,  Marcus Edward HENNECKE

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B7/185 ,  G02B7/182

摘要： An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

公开(公告)号：US08786826B1

公开(公告)日：2014-07-22

申请号：US14157718

申请日：2014-01-17

申请人： Carl Zeiss SMT GmbH

发明人： Sascha Bleidistel ,  Ulrich Schoenhoff ,  Juergen Fischer

IPC分类号： G03F7/20 ,  G02B7/00 ,  G02B7/185

CPC分类号： G03F7/70191 ,  G02B5/0891 ,  G02B7/005 ,  G02B7/181 ,  G02B7/185 ,  G02B26/0825 ,  G02B27/0068 ,  G03F7/7015 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70266 ,  G03F7/70308 ,  G03F7/70825 ,  G03F7/709

摘要： The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (nR) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (nA) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (nA) is greater than the first number (nR). In accordance with one aspect, at least one of the ac-tuators is arranged in a node of at least one natural vibration mode of the optical element.

摘要翻译： 本发明涉及在微光刻投影曝光装置中致动元件的装置。 根据一个方面，用于在微光刻投影曝光装置中致动元件的装置包括第一数量（nR）的自由度，其中在每个自由度中可调节的力可以传递到光学元件，以及 致动器的第二数量（nA），其在每种情况下通过机械耦合耦合到光学元件，用于向光学元件传递力，其中第二数量（nA）大于第一数量（nR） 。 根据一个方面，致动器中的至少一个被布置在光学元件的至少一个固有振动模式的节点中。

公开(公告)号：US20130003202A1

公开(公告)日：2013-01-03

申请号：US13175439

申请日：2011-07-01

申请人： Jean-François Carre

发明人： Jean-François Carre

IPC分类号： G02B7/185

CPC分类号： G02B26/0825

摘要： The invention relates to a bimorph optical device comprising a deformable optical element and active elements made of piezoelectric ceramic provided with electrodes, said elements being controlled in pairs and in opposition so as to produce a compression movement for a first element of a pair and an extension movement for the second element of a pair, the device being characterized in that the optical element (1) presents an optically active first main surface (6) and a second main surface (7) opposite to the first main surface, together with at least first and second opposite lateral faces (2, 3), and in that the ceramic active elements comprise at least two pairs of bars (21, 22; 31, 32) of piezoelectric ceramic placed facing each other on said first and second lateral faces (2, 3), each pair comprising two bars (21, 22; 31, 32) placed on one of the first and second lateral faces (2, 3) on either side of a middle surface of the optical element (1) that constitutes the neutral axis thereof.

摘要翻译： 本发明涉及一种双晶片光学器件，其包括可变形光学元件和由设置有电极的压电陶瓷制成的有源元件，所述元件成对地和相对地被控制，以便产生一对第一元件和延伸部分的压缩运动 所述装置的特征在于，所述光学元件（1）至少呈现出光学活性的第一主表面（6）和与所述第一主表面相对的第二主表面（7） 第一和第二相对的侧面（2,3），并且陶瓷有源元件包括在所述第一和第二侧面上彼此面对的至少两对压电陶瓷棒（21,22; 31,32） 每对包括放置在构成光学元件（1）的中间表面的任一侧上的第一和第二侧面（2,3）中的一个上的两个杆（21,22; 31,32） 中性轴th ereof。

公开(公告)号：US20120211055A1

公开(公告)日：2012-08-23

申请号：US12932185

申请日：2011-02-22

申请人： James Joseph Clair ,  Victor George Weizer

发明人： James Joseph Clair ,  Victor George Weizer

IPC分类号： H01L31/058 ,  G02B7/185

CPC分类号： F24S23/81 ,  F24S25/50 ,  F24S30/20 ,  F24S50/20 ,  F24S2020/23 ,  F24S2023/874 ,  G02B26/0825 ,  H01L31/0547 ,  H02S20/00 ,  Y02E10/47 ,  Y02E10/52

摘要： As the concentration of electromagnetic radiation, especially solar radiation, can be utilized for constructive purposes it becomes desirable to concentrate the radiation in an economical manner. An essentially fixed concentrating reflector whose shape is generated by gravity's effect on flexible members provides an efficient means to collect and concentrate radiation. Historically in optical science aberrations are to be avoided or eliminated, however this device utilizes the aberration of astigmatism. By taking advantage of the astigmatic foci created by obliquely incident radiation falling upon a substantially sphere-like primary, a comparatively large fixed concentrator can be constructed inexpensively. The resulting tangential and sagittal astigmatic foci are linear. The length of the astigmatic foci can be a substantial portion of the diameter of the concentrator, especially at times of lower solar elevation. A toric shaped deformation of the reflective surface reduces the size of the chosen astigmatic focus to yield higher concentration. In the ideal the astigmatic focus is reduced to a point. A receiver located at the reduced astigmatic focus utilizes the concentrated radiation.

摘要翻译： 由于电磁辐射，特别是太阳辐射的浓度可用于建设性目的，所以需要以经济的方式集中辐射。 基本上固定的浓缩反射器，其形状由重力对柔性构件的作用产生，提供收集和集中辐射的有效手段。 历史上，在光学科学中，像差必须被避免或消除，然而，该装置利用散光像差。 通过利用通过倾斜入射的辐射落在基本上为球状的原子上产生的散光焦点，可以廉价地构造相对较大的固定聚光器。 所得到的切向和矢状像散灶是线性的。 散光焦点的长度可以是集中器直径的大部分，特别是在较低太阳高度的时候。 反射表面的复曲面变形减小了所选择的散光焦点的尺寸以产生更高的浓度。 在理想中，散光焦点被减少到一个点。 位于缩小散光焦点处的接收器利用集中辐射。

公开(公告)号：US20120170012A1

公开(公告)日：2012-07-05

申请号：US13332582

申请日：2011-12-21

申请人： Fumitaro Masaki ,  Akira Miyake

发明人： Fumitaro Masaki ,  Akira Miyake

IPC分类号： G03B27/70 ,  B05D5/06 ,  C23C14/54 ,  G02B7/185

CPC分类号： G02B5/0816 ,  B82Y10/00 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70316 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

摘要： A method of manufacturing a mirror includes a first step of arranging, on a substrate, a shape adjusting layer having a layer thickness which changes by heat, a second step of arranging, on the shape adjusting layer, a reflection layer including a first layer, a second layer, and a barrier layer which is arranged between the first layer and the second layer, and prevents a diffusion of a material of the first layer and a material of the second layer, and a third step of bringing a shape of the reflection layer close to a target shape by changing a layer thickness profile of the shape adjusting layer after the second step, the third step including a process of partially annealing the shape adjusting layer.

摘要翻译： 一种制造反射镜的方法包括：在基板上布置具有由热变化的层厚度的形状调整层的第一步骤，在形状调整层上布置包括第一层的反射层的第二步骤， 第二层和布置在第一层和第二层之间的阻挡层，并且防止第一层的材料和第二层的材料的扩散，以及使反射形状的第三步骤 通过在第二步骤之后改变形状调整层的层厚度轮廓，接近目标形状的层，第三步骤包括部分退火形状调节层的过程。