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公开(公告)号:US10418251B2
公开(公告)日:2019-09-17
申请号:US15688885
申请日:2017-08-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jiun Shen , Ssu-I Fu , Yen-Liang Wu , Chia-Jong Liu , Yu-Hsiang Hung , Chung-Fu Chang , Man-Ling Lu , Yi-Wei Chen
IPC: H01L21/8232 , H01L21/308 , H01L27/088 , H01L21/8234 , H01L21/306 , H01L29/66 , H01L21/02
Abstract: A fin-shaped structure includes a substrate having a first fin-shaped structure located in a first area and a second fin-shaped structure located in a second area, wherein the second fin-shaped structure includes a ladder-shaped cross-sectional profile part. The present invention also provides two methods of forming this fin-shaped structure. In one case, a substrate having a first fin-shaped structure and a second fin-shaped structure is provided. A treatment process is performed to modify an external surface of the top of the second fin-shaped structure, thereby forming a modified part. A removing process is performed to remove the modified part through a high removing selectivity to the first fin-shaped structure and the second fin-shaped structure, and the modified part, thereby the second fin-shaped structure having a ladder-shaped cross-sectional profile part is formed.
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公开(公告)号:US20190276930A1
公开(公告)日:2019-09-12
申请号:US15950152
申请日:2018-04-10
Applicant: United Microelectronics Corp.
Inventor: Neng-Hsing Shen , Chien-Wen Yang , Chun-Man Li , Ji-Fu Kung , Ching-Pei Lin
Abstract: An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.
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公开(公告)号:US10411110B1
公开(公告)日:2019-09-10
申请号:US16053657
申请日:2018-08-02
Applicant: United Microelectronics Corp.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang
IPC: H01L29/732 , H01L29/66 , H01L29/10 , H01L29/08
Abstract: A semiconductor structure including a substrate, a BJT, a first interconnect structure and a second interconnect structure is provided. The substrate has a first side and a second side opposite to each other. The BJT is located at the first side. The BJT includes a collector, a base and an emitter. The collector is disposed in the substrate. The base is disposed on the substrate. The emitter is disposed on the base. The first interconnect structure is located at the first side and electrically connected to the base. The second interconnect structure is located at the second side and electrically connected to the collector. The first interconnect structure further extends to the second side. The first interconnect structure and the second interconnect structure are respectively electrically connected to an external circuit at the second side. The semiconductor structure can have better overall performance.
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公开(公告)号:US20190273117A1
公开(公告)日:2019-09-05
申请号:US16297698
申请日:2019-03-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ching-Wen Hung , Yu-Ping Wang
IPC: H01L27/22 , G11C11/16 , H01F41/34 , H01F10/32 , H01L43/12 , H01L23/522 , H01L43/08 , H01L23/528 , H01L43/02
Abstract: A semiconductor device and method of forming the same, the semiconductor device includes a substrate, first plug, a magnetoresistive random access memory (MRAM) structure, a spacer layer, a seal layer and a first conductive pattern. The substrate has a first region and a second region, and the first plug is disposed on a dielectric layer disposed on the substrate, within the first region. The MRAM structure is disposed in the dielectric layer and electrically connected to the first plug. The spacer layer is disposed both within the first region and the second region, to cover the MRAM structure. The seal layer is disposed on the MRAM structure and the first plug, only within the first region. The first conductive pattern penetrates through the seal layer to electrically connect the MRAM structure.
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公开(公告)号:US20190273083A1
公开(公告)日:2019-09-05
申请号:US15936396
申请日:2018-03-26
Inventor: En-Chiuan Liou , Yu-Cheng Tung , Chih-Wei Yang , Sho-Shen Lee
IPC: H01L27/108 , G11C11/401
Abstract: The present invention provides a dynamic random access memory structure, comprising a substrate defining a cell region and a peripheral region on the substrate, a shallow trench isolation structure located in the peripheral region adjacent to the cell region, wherein the shallow trench isolation structure has a concave top surface, a first dummy bit line gate located within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate located in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
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公开(公告)号:US20190267373A1
公开(公告)日:2019-08-29
申请号:US16407188
申请日:2019-05-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: En-Chiuan Liou , Yu-Cheng Tung , Chih-Wei Yang
IPC: H01L27/088 , H01L29/78 , H01L29/66 , H01L21/762 , H01L21/8234
Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate including at least one fin structure is provided. A gate material layer is formed on the semiconductor substrate, and the fin structure is covered by the gate material layer. A trench is formed partly in the gate material layer and partly in the fin structure. An isolation structure is formed partly in the trench and partly outside the trench. At least one gate structure is formed straddling the fin structure by patterning the gate material layer after the step of forming the isolation structure. A top surface of the isolation structure is higher than a top surface of the gate structure in a vertical direction for enhancing the isolation performance of the isolation structure. A sidewall spacer is formed on sidewalls of the isolation structure, and there is no gate structure formed on the isolation structure.
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公开(公告)号:US10396157B1
公开(公告)日:2019-08-27
申请号:US15913533
申请日:2018-03-06
Applicant: United Microelectronics Corp.
Inventor: Shin-Hung Li , Kuan-Chuan Chen , Nien-Chung Li , Wen-Fang Lee , Chih-Chung Wang
IPC: H01L27/06 , H01L29/08 , H01L29/66 , H01L29/06 , H01L21/762
Abstract: A semiconductor device includes semiconductor layer having first device region and second device region. A shallow trench isolation (STI) structure is in the semiconductor layer and located at periphery of the first and second device regions. A first and second insulating layers are on the semiconductor layer and respectively located in the first and second device regions. A first gate structure is located on the first insulating layer. A source region and a drain region are in the semiconductor layer and are located at two sides of the first gate structure. A gate doped region is in a surface region of the semiconductor layer in the second device region to serve as a second gate structure. A channel layer is located on the second insulating layer. A source layer and a drain layer are on the STI structure and are located at two sides of the channel layer.
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公开(公告)号:US10396073B2
公开(公告)日:2019-08-27
申请号:US15610642
申请日:2017-06-01
Inventor: Li-Wei Feng , Chien-Ting Ho , Shih-Fang Tzou
IPC: H01L27/088 , H01L29/06 , H01L29/423 , H01L29/66 , H01L27/108 , H01L21/8234
Abstract: A method for fabricating semiconductor device includes the steps of first forming a first trench and a second trench in a substrate and then forming a shallow trench isolation (STI) in the first trench, in which the STI comprises a top portion and a bottom portion and a top surface of the top portion is even with or higher than a bottom surface of the second trench. Next, a conductive layer is formed in the first trench and the second trench to form a first gate structure and a second gate structure.
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公开(公告)号:US10396064B2
公开(公告)日:2019-08-27
申请号:US16171339
申请日:2018-10-25
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Jun-Jie Wang , Yu-Lin Wang , Tzu-Feng Chang , Wei-Chi Lee
IPC: H01L27/02 , G03F1/36 , G06F17/50 , G11C11/419 , G11C11/412 , H01L27/11
Abstract: The present invention provides a layout pattern of a static random access memory (SRAM). The layout pattern includes a first inverter and a second inverter constituting a latch circuit, wherein the latch circuit includes four transistors, a first access transistor (PG1) and a second access transistor (PG2) being electrically connected to the latch circuit, wherein the first access transistor is electrically connected to a first word line and a first bit line, and the second access transistor is electrically connected to a second word line and a second bit line, the first access transistor has a first gate length, the first access transistor has a second gate length, and the first gate length is different from the second gate length, and two read transistors series connected to each other, wherein one of the two read transistors is connected to the latch circuit.
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公开(公告)号:US10395991B2
公开(公告)日:2019-08-27
申请号:US15830008
申请日:2017-12-04
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Kai Hsu , Ssu-I Fu , Yu-Hsiang Hung , Chun-Ya Chiu , Chin-Hung Chen , Chi-Ting Wu , Yu-Hsiang Lin
IPC: H01L27/088 , H01L21/8234 , H01L21/311 , H01L21/768 , H01L23/535 , H01L29/49 , H01L29/66
Abstract: A method for fabricating semiconductor device includes the steps of: forming a first gate structure and a second gate structure on a substrate and an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; transforming the first gate structure into a first metal gate and the second gate structure into a second metal gate; removing part of the ILD layer between the first metal gate and the second metal gate to form a recess; forming a first spacer and a second spacer in the a recess; performing a first etching process to form a first contact hole; and performing a second etching process to extend the first contact hole into a second contact hole.
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