Abstract:
Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
Abstract:
Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.
Abstract:
A check valve for a pump of an electronically controlled brake system includes a valve body provided with a fluid path, a spring seat placed in an outlet of the fluid path of the valve body, a valve rod fitted at a lower end thereof into an inlet of the fluid path of the valve body, a valve piston provided with a through hole that is selectively opened and closed by an upper end of the valve rod, as the valve piston moves upward and downward along an inner wall of the valve body, and a spring interposed between the spring seat and the valve piston.
Abstract:
Provided are a vertical cavity surface emitting laser (VCSEL) module providing accurate alignment between a VCSEL and a monitoring photodiode (MPD) for efficiently detecting light emitted by the VCSEL and a method of fabricating the VCSEL module. The VCSEL module includes: a first mirror layer, a first semiconductor conducting layer, an active layer, a tunnel junction layer, and a second semiconductor conducting layer sequentially formed on a first region in a substrate having first and second regions; a MPD disposed on a portion of the second semiconductor conducting layer in the first region; and a VCSEL including layers having the same shapes as the first mirror layer, the first semiconductor conducting layer, the active layer, the tunnel junction layer and the second semiconductor conducting layer in the first region, and a second mirror layer formed on a portion of the second semiconductor conducting layer, and sequentially formed on the second region in the substrate. The predetermined distance is set so that light emitted by the VCSEL can be detected by the MPD.
Abstract:
Provided is a method of fabricating a vertical cavity surface emitting laser among semiconductor optical devices, comprising: bonding a dielectric mirror layer to an epi-structure having a mirror layer and an active layer; bonding these on a new substrate using a metal bonded method; removing the existing substrate; and fabricating a vertical cavity surface emitting laser on the new substrate. The method of fabricating the vertical cavity surface emitting laser is performed by moving and attaching a vertical cavity surface emitting laser to a new substrate using an external metallic bonding method, without electrically and optically affecting upper and lower mirrors and an active layer that constitutes the vertical cavity surface emitting laser. While using the existing method of fabricating the vertical cavity surface emitting laser, the VCSEL is fabricated by moving to a new substrate having good thermal characteristics so that good heat emission characteristics are accomplished, thus facilitating manufacture of the vertical cavity surface emitting laser having high reliability and good characteristics.
Abstract:
A check valve for a pump of an electronically controlled brake system includes a valve body provided with a fluid path, a spring seat placed in an outlet of the fluid path of the valve body, a valve rod fitted at a lower end thereof into an inlet of the fluid path of the valve body, a valve piston provided with a through hole that is selectively opened and closed by an upper end of the valve rod, as the valve piston moves upward and downward along an inner wall of the valve body, and a spring interposed between the spring seat and the valve piston.
Abstract:
A method for fabricating a multi-channel array optical device having uniform spacing between different wavelengths and for having precise wavelengths by accomplishing wavelength adjustment and by the forming of mirror layers simultaneously through a multi-layer binary mask and a selective oxidization process. This method is especially useful for fabricating multi-channel array optical devices including multi-channel passive filters and multi-channel surface emitting laser arrays. The method includes forming a plurality of semiconductor mirror layers on a semiconductor substrate; forming an oxidization protective layer on the plurality of semiconductor mirror layers; selectively removing the oxidization protective layer by using a binary mask to expose the semiconductor mirror layer which will adjust a wavelength; oxidizing the exposed semiconductor mirror layer.
Abstract:
A vertical modulator with a dual mode distributed Bragg reflection (DBR), includes a pair of integrated elements using different wavelengths to provide functions of logical operation, data switching and wavelength conversion. The optical device includes a first optical structure operating at a first wavelength (.lambda..sub.1) and a second optical structure operating at a second wavelength (.lambda..sub.2). The first and second optical structures are formed over a semiconductor substrate. The first optical structure, which operates at the first wavelength (.lambda..sub.1), transmits its data to the second optical structure so that data corresponding to the second wavelength (.lambda..sub.2) can be output. Since the wavelength of input light is different from the wavelength of output light, the optical device serves as a modulator which performs a logic operation and switching function while carrying out wavelength conversion.