Abstract:
A first semiconductor region and a second semiconductor region separated by a shallow trench isolation region are formed in a semiconductor substrate. A photoresist is applied and patterned so that the first semiconductor region is exposed, while the second semiconductor region is covered. Depending on the setting of parameters for the location of an edge of the patterned photoresist, the slope of sidewalls of the photoresist, the thickness of the photoresist, and the direction of ion implantation, ions may, or may not, be implanted into the entirety of the surface portion of the first semiconductor region by shading or non-shading of the first semiconductor region. The semiconductor substrate may further comprise a third semiconductor region into which the dopants are implanted irrespective of the shading or non-shading of the first semiconductor region. The selection of shading or non-shading may be changed from substrate to substrate in manufacturing.
Abstract:
The present invention provides a method of controlling bias in an electrical device including providing semiconductor devices on a bulk semiconductor substrate each including an active body region that is isolated from the active body region of adjacent devices, and providing a body resistor in electrical contact with the active body region of the bulk semiconductor substrate, wherein the body resistor provides for adjustability of the body potential of the semiconductor devices. In another aspect the present invention provides a semiconductor device including a bulk semiconductor substrate, at least one field effect transistor formed on the bulk semiconductor substrate including an isolated active body region, and a resistor in electrical communication with the isolated active body region.
Abstract:
Dual thickness devices and circuits using dual gate thickness devices. The devices include: one or more FETs of a first polarity and one or more FETs of a second and opposite polarity, the one or more FETs of the first polarity electrically connected to the one or more FETs of the second polarity in a same circuit, at least one of the one or more FETs of the first polarity having a gate dielectric consisting of a single layer of thermal silicon oxide and having a thickness different from a thickness of a gate dielectric consisting of a single layer of thermal silicon oxide of at least one of the one or more FETs of the second polarity.
Abstract:
A circuit having a precision passive circuit element, such as a resistor or a capacitor, with a target value of an electrical parameter is fabricated on a substrate with a plurality of independent parallel-connected passive circuit elements. The plurality of passive circuit elements are designed to have a plurality of values of the electrical parameter which are spaced or offset at or around the target value of the electrical parameter, such as three circuit elements with one having a value at the target value, one having a value above the target value, and one having a value below the target value. Each passive circuit element also has a fuse in series therewith. A reference calibration structure is also fabricated, which can be a passive circuit element having the target value of the electrical parameter, in a reference area of the substrate under the same conditions and at the same time as fabrication of the plurality of passive circuit elements. The actual component value of the reference calibration structure is then measured, and based upon the measurement a single precision passive element of the plurality of parallel passive circuit elements is selected by blowing the fuses of, and thus deselecting, the other independent parallel connected passive circuit elements.
Abstract:
A metal-on-semiconductor varactor with a high value of Cmax/Cmin comprises a semiconductor bottom plate with an array of semiconductor pillars. The pillars may be in an accumulation mode to provide a high capacitance or in a depletion mode to provide a low capacitance. The maximum capacitance in an accumulation mode is primarily determined by the capacitance of the semiconductor pillars. The minimum capacitance in a depletion mode is primarily determined by a capacitor formed on an inter-pillar semiconductor surface between the semiconductor pillars. The minimum capacitance, and hence the value of Cmax/Cmin may be tuned by adjusting process parameters, design parameters and by alterations in the MOS varactor structure such as forming a highly doped semiconductor layer beneath the inter-pillar semiconductor surface or forming a plate insulator.
Abstract translation:具有高值C max / C min以上的金属半导体变容二极管包括具有半导体柱阵列的半导体底板。 柱可以处于累积模式以提供高电容或耗尽模式以提供低电容。 累积模式下的最大电容主要由半导体支柱的电容决定。 耗尽模式中的最小电容主要由形成在半导体柱之间的柱间半导体表面上的电容器决定。 可以通过调整工艺参数,设计参数和通过MOS变容二极管结构中的改变来调整最小电容,并因此调整最小电容值,并因此调整最小电容值,例如形成 柱内半导体表面下方的高度掺杂的半导体层或形成板绝缘体。
Abstract:
A method and structure for suppressing localized metal precipitate formation (LMPF) in semiconductor processing. For each metal wire that is exposed to the manufacturing environment and is electrically coupled to an N region, at least one P+ region is formed electrically coupled to the same metal wire. As a result, few excess electrons are available to combine with metal ions to form localized metal precipitate at the metal wire. A monitoring ramp terminal can be formed around and electrically disconnected from the metal wire. By applying a voltage difference to the metal wire and the monitoring ramp terminal and measuring the resulting current flowing through the metal wire and the monitoring ramp terminal, it can be determined whether localized metal precipitate is formed at the metal wire.
Abstract:
A method for forming a CMOS well structure including forming a plurality of first conductivity type wells over a substrate, each of the plurality of first conductivity type wells formed in a respective opening in a first mask. A cap is formed over each of the first conductivity type wells, and the first mask is removed. Sidewall spacers are formed on sidewalls of each of the first conductivity type wells. A plurality of second conductivity type wells are formed, each of the plurality of second conductivity type wells are formed between respective first conductivity type wells. A plurality of shallow trench isolations are formed between the first conductivity type wells and second conductive type wells. The plurality of first conductivity type wells are formed by a first selective epitaxial growth process, and the plurality of second conductivity type wells are formed by a second selective epitaxial growth process.
Abstract:
A method and structure alters an integrated circuit design having silicon over insulator (SOI) transistors. The method/structure prevents damage from charging during processing to the gate of SOI transistors by tracing electrical nets in the integrated circuit design, identifying SOI transistors that have a voltage differential between the source/drain and gate as potentially damaged SOI transistors (based on the tracing of the electrical nets), and connecting a shunt device across the source/drain and the gate of each of the potentially damaged SOI transistors. Alternatively, the method/structure provides for connecting compensating conductors through a series device.
Abstract:
A circuit, including: a capacitor coupled between a first circuit node and a second circuit node and that leaks a leakage current from the first circuit node to the second circuit node; and a compensation circuit adapted to supply a compensatory current to compensate for the leakage current to the first circuit node.
Abstract:
A structure and associated method to determine an actual resistance value of a calibration resistor within a semiconductor device. The semiconductor device comprises a capacitor, a calibration resistor, and a calibration circuit. A voltage applied to the calibration resistor produces a current flow through the calibration resistor to charge the capacitor. The calibration circuit is adapted to measure an actual time required to charge the capacitor. The calibration circuit is further adapted calculate an actual resistance value of the calibration resistor based on the actual time required to charge the capacitor and a capacitance value of the capacitor.