Monomers for photoresists bearing acid-labile groups of reduced optical density
    62.
    发明申请
    Monomers for photoresists bearing acid-labile groups of reduced optical density 审中-公开
    用于具有降低光密度的酸不稳定组的光致抗蚀剂单体

    公开(公告)号:US20060008730A1

    公开(公告)日:2006-01-12

    申请号:US10888732

    申请日:2004-07-09

    IPC分类号: G03C1/492

    摘要: Monomers and polymers useful for forming photoresists are provided. More particularly, photoresists, as well as monomers and polymers for photoresists useful in micro-lithography, specifically monomers bearing acid-labile groups of reduced optical density. The resulting photoresists exhibit improved transparency to 157 nm light. The photoresist compositions are composed of a mixture of at least one water insoluble, acid decomposable polymer which is prepared from at least one monomeric unit which comprises an acid labile group of the formula —OC(CH3)2CF3 and which is substantially transparent to ultraviolet radiation at a wavelength of about 157 nm and at least one photoacid generator capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 157 nm.

    摘要翻译: 提供了可用于形成光致抗蚀剂的单体和聚合物。 更具体地,光致抗蚀剂以及用于微光刻的光致抗蚀剂的单体和聚合物,特别是带有降低光密度的酸不稳定基团的单体。 所得到的光致抗蚀剂显示出对157nm光的改善的透明度。 光致抗蚀剂组合物由至少一种不溶于水的可酸分解聚合物的混合物组成,该聚合物由至少一个单体单元制备,所述单体单元包含式-COC(CH 3 CH 3) 其对于大约157nm的波长的紫外线辐射基本上是透明的,并且至少一个光致酸发生器能够在暴露于足够的活化能的同时产生酸 波长约157nm。

    Radiation curable fluorinated vinyl ethers derived from hexafluoropropene
    66.
    发明授权
    Radiation curable fluorinated vinyl ethers derived from hexafluoropropene 失效
    衍生自六氟丙烯的可辐射固化氟化乙烯基醚

    公开(公告)号:US06308001B1

    公开(公告)日:2001-10-23

    申请号:US09218201

    申请日:1998-12-22

    IPC分类号: G02B600

    摘要: Vinyl ether compounds having the formula: R—O—X—O—CH═CH2 wherein R is a radical having the formula: R1—CFH—CF2— or R1—CF═CF—, wherein R1 is an unsubstituted or substituted aliphatic radical, unsubstituted or substituted cyclic aliphatic radical, an unsubstituted or substituted aromatic radical, an unsubstituted or substituted araliphatic radical, or an unsubstituted or substituted heterocyclic radical, and X is an unsubstituted or substituted aliphatic radical, an unsubstituted or substituted cyclic aliphatic radical, unsubstituted or substituted aromatic radical, unsubstituted or substituted araliphatic radical or an unsubstituted or substituted heterocyclic radical. Curable compositions containing the vinyl ether compounds and methods in which the substrate coating layers of the vinyl ether compositions are cured, particularly on optical devices, are also disclosed, as well as polymers polymerized from the vinyl ether compounds.

    摘要翻译: 具有下式的乙烯基醚化合物:其中R是具有下式的基团:R1-CFH-CF2-或R1-CF = CF-,其中R1是未取代或取代的脂族基团,未取代或取代的环状脂肪族基团,未取代或未取代的 取代的芳族基团,未取代或取代的芳脂族基团,或未取代或取代的杂环基团,X是未取代或取代的脂族基团,未取代或取代的环状脂族基团,未取代或取代的芳族基团,未取代或取代的芳脂族基团或 未取代或取代的杂环基。 还公开了含有乙烯基醚化合物的可固化组合物和其中乙烯基醚组合物的基底涂层被固化的方法,特别是在光学器件上,以及由乙烯基醚化合物聚合的聚合物。

    Fluorinated oxyvinyl compounds and methods of preparing and using same
    67.
    发明授权
    Fluorinated oxyvinyl compounds and methods of preparing and using same 失效
    氟化氧乙烯基化合物及其制备和使用方法

    公开(公告)号:US6133472A

    公开(公告)日:2000-10-17

    申请号:US9110

    申请日:1998-01-20

    摘要: Fluorine containing oxyvinyl compounds characterized by having one or more oxyvinyl groups separated from fluorine containing groups by at least one alkylene group having 2-8 carbon atoms and by at least one oxygen atom in addition to the oxygen on the oxyvinyl. In general the compounds of the invention have the generic formula:Rz(L).sub.a (Ry).sub.b OROCH.dbd.CH.sub.2.Where L is .dbd.CHCOOROCH.dbd.CH.sub.2 ; a is number of 0 to about 1; R.sub.y is --CO--; b is a number of 0 to about 1; R is cycloalkane or (CH.sub.2).sub.x --, where x is a number of about 2 through about 10; R.sub.z is R.sub.f C.sub.n H.sub.m where R.sub.f is a fluorinated alkylene moiety of about 1 to about 12 carbon atoms which may be linear or branch chained and may contain a further --OROCH.dbd.CH.sub.2 group; n is an integer of about 1 through about 6; and m is an integer of n to 2n. The compounds are suitable for use in optical devices such as fibers and waveguides, are readily radiation curable and curable by other means, and can be formulated to be of low viscosity when applied. The compounds are also suited for coatings, inks and adhesive and other applications. The invention includes methods for preparing and using the compounds and products employing the compounds. Intermediates to prepare the compounds and methods to prepare the intermediates are also included.

    摘要翻译: 含氟氧基乙烯基化合物的特征在于具有一个或多个氧基乙烯基,其含氟基团通过至少一个具有2-8个碳原子的亚烷基和至少一个氧原子与氧基乙烯基上的氧分开。 通常,本发明的化合物具有以下通式:Rz(L)a(Ry)bOROCH = CH 2。其中L = CHCOOROCH = CH 2; a是0到1的数字; Ry是-CO-; b是0到1的数; R是环烷烃或(CH 2)x - ,其中x是约2至约10的数; Rz是RfCnHm,其中Rf是约1至约12个碳原子的氟化亚烷基部分,其可以是直链或支链,并且可以含有另外的-OROCH = CH 2基团; n为约1至约6的整数; m为n〜2n的整数。 该化合物适用于诸如纤维和波导的光学装置,易于辐射固化并且可通过其它方法固化,并且可以在施用时配制成具有低粘度。 这些化合物也适用于涂料,油墨和粘合剂等应用。 本发明包括制备和使用化合物和使用该化合物的产品的方法。 还包括制备化合物的中间体和制备中间体的方法。

    Surfactants and drying and drycleaning compositions which utilize said
surfactants
    68.
    发明授权
    Surfactants and drying and drycleaning compositions which utilize said surfactants 失效
    使用所述表面活性剂的表面活性剂和干燥和干洗组合物

    公开(公告)号:US5868799A

    公开(公告)日:1999-02-09

    申请号:US761043

    申请日:1996-12-05

    IPC分类号: D06L1/04 C11D1/34 C11D1/62

    CPC分类号: D06L1/04

    摘要: Novel surfactants and drying, drycleaning and soil repellency compositions containing such surfactants which utilize such surfactants. The surfactants are fluorine containing quaternary ammonium salts, and the drying, drycleaning and soil repellency compositions contain at least one halocarbon component and at least one of the fluorine containing surfactants. These compositions have the ability to remove water or aqueous films from the surfaces of a broad range of substrates and impart soil repellency to fabrics.

    摘要翻译: 新型表面活性剂和含有这种表面活性剂的干燥,干洗和防污性组合物。 表面活性剂是含氟季铵盐,干燥,干洗和防污组合物含有至少一种卤代烃组分和至少一种含氟表面活性剂。 这些组合物具有从宽范围的基材的表面除去水或水性膜的能力,并赋予织物防污性。