摘要:
Provided in the present invention is an adjustment and design method of an illumination system matched with multiple objective lenses in an extreme ultraviolet lithography machine; the illumination system to which the method is applied comprises a light source, a collection lens, a field compound eye, a pupil compound eye and a relay lens group; the method specifically comprises the steps: before a projection objective lens of an extreme ultraviolet lithography machine is replaced, calculating aperture angles of emergent ray of a relay lens A on a meridian plane and a sagittal plane by means of ray tracing; after the projection objective lens of the extreme ultraviolet lithography machine is replaced, taking out a central point of a exit pupil plane as an object point for ray tracing; adjusting inclination angles and positions of the relay lens A and a relay lens B, and adjusting inclination angles of central compound eye units of the pupil compound eye and the field compound eye, till an image plane of a current illumination system approximates to an arc-shaped image plane corresponding to the projection objective lens. By adjusting the illumination system on the basis of the adjustment method of the present invention, an illumination system matched with the projection objective lens system can be obtained, which dramatically reduces the cost of designing a projection lithography machine.
摘要:
A display apparatus includes a planar waveguide optical element, a projection optical system, and a microdisplay device. By including free-form optics and waveguide technology, the volume and weight of the display apparatus can be reduced, and an optical system can be realized with improved image quality, structure, and performance parameters.
摘要:
Materials, including metals such as bulk metals, specialty alloys, metallic films and coatings, are made up of many tiny single crystals, which may also be referred to as grains. The boundaries between crystals are called grain boundaries and govern properties such as mechanical strength, deformation, and electrical resistivity. These properties are affected by not only the number of grain boundaries formed, but also the density and orientation of those grain boundaries. Twin boundaries are a special type of grain boundary which have symmetrical “mirror image” structures and preserve favorable qualities of grain boundaries while suppressing unfavorable properties such as the initiation of cracks, inclusions, and other unwanted flaws. Some metals and alloys form twins more easily than others during processing. Metals with low stacking fault energy (SFE) such as austenitic stainless steel, copper (Cu), and silver (Ag) form twin boundaries more easily than metals with high SFE such as Magnesium (Mg) and Aluminum (Al).
摘要:
A display apparatus includes a planar waveguide optical element, a projection optical system, and a microdisplay device. By including free-form optics and waveguide technology, the volume and weight of the display apparatus can be reduced, and an optical system can be realized with improved image quality, structure, and performance parameters.
摘要:
A CPP-GMR spin valve having a composite spacer layer comprised of at least one metal (M) layer and at least one semiconductor or semi-metal (S) layer is disclosed. The composite spacer may have a M/S, S/M, M/S/M, S/M/S, M/S/M/S/M, or a multilayer (M/S/M)n configuration where n is an integer≧1. The pinned layer preferably has an AP2/coupling/AP1 configuration wherein the AP2 portion is a FCC trilayer represented by CoZFe(100-Z)/FeYCo(100-Y)/CoZFe(100-Z) where y is 0 to 60 atomic %, and z is 75 to 100 atomic %. In one embodiment, M is Cu with a thickness from 0.5 to 50 Angstroms and S is ZnO with a thickness of 1 to 50 Angstroms. The S layer may be doped with one or more elements. The dR/R ratio of the spin valve is increased to 10% or greater while maintaining acceptable EM and RA performance.
摘要翻译:公开了具有由至少一个金属(M)层和至少一个半导体或半金属(S)层组成的复合间隔层的CPP-GMR自旋阀。 复合间隔物可以具有M / S,S / M,M / S / M,S / M / S,M / S / M / S / M或多层(M / S / M) 是整数≧1。 钉扎层优选具有AP2 /耦合/ AP1配置,其中AP2部分是由CoZFe(100-Z)/ FeYCo(100-Y)/ CoZFe(100-Z)表示的FCC三层,其中y为0至60原子% ,z为75〜100原子%。 在一个实施方案中,M是厚度为0.5至50埃的Cu,S是厚度为1至50埃的ZnO。 S层可以掺杂有一个或多个元素。 自旋阀的dR / R比提高到10%以上,同时保持可接受的EM和RA性能。
摘要:
A low profile solar collector having a number of light collecting lenses that fit closely together as an array on a flexible sheet. The lenses may focus light onto optical conveyance mechanisms which convey light from the lenses to a light-to-electrical converter or converters at an edge of the sheet. The lenses may alternatively focus light onto a light-to-electrical converter or converters. Conductors may convey electricity from the light-to-electrical converters to an electrical connection block at an edge of the sheet. The flexible sheet may be rolled, folded, or form fitted onto a non-planar surface. Two or more low profile solar collectors having a number of collecting lenses may be combined to form a larger sheet for solar collection. The electrical outputs of the collectors may be connected to provide one or more outputs as desired.
摘要:
A multi-layer workflow architecture for a print shop is disclosed. The workflow architecture includes a workflow front end, service bus, and service providers. The workflow front end provides an interface to print shop operators. The service providers are each associated with a device in the print shop. The service bus represents the layer between the workflow front end and the service providers. In operation, the service providers report device capabilities for devices to the service bus. The workflow front end receives the device capabilities from the service bus, and provides the device capabilities to a user to allow the user to define a job ticket based on the device capabilities. The service bus identifies the processes defined in the job ticket, and identifies the service providers operable to provide the processes. The service bus then routes process messages to the identified service providers to execute the processes on the devices.
摘要:
A heat pipe includes a tube body and a sealing member. The tube body is made of titanium and has a sealed end and an open end at two opposite ends of the tube body. The sealing member is attached to the open end and seals the open end of the tube body. The sealing member is made of a material selected from one of copper, aluminum, stainless steel, low-carbon steel, iron, nickel, tungsten, tantalum, molybdenum, rhenium and columbium. The sealing member seals the open end.
摘要:
Methods and apparatus for substantially automatically generating a device capabilities file for a device in a printing environment. Features and aspects hereof provide for providing an XML schema (XMLS) file representing the available features of the device and then substantially automatically generating a device capabilities file from the XMLS file. The XMLS file may be substantially automatically generated by appropriate computing tools based on provided JDF job tickets for the device or may be generated by any other means and provided for generation of the device capabilities file. The device capabilities file may be generated by parsing the hierarchical tree structured XMLS file to identify attributes and elements therein. Each attribute is then translated to a corresponding device capabilities entry representing the available features of the device and setting values for each feature to generate the device capabilities file.
摘要:
A device for detecting gas concentrations includes a movable coded filter. An optical element is positioned to receive gas filtered light and spectrally separate the gas filtered light. A photo detector is positioned to receive the spectrally separated light through slits in the moveable coded filter to provide an AC signal representative of a selected gas.