公开(公告)号：US07888642B2

公开(公告)日：2011-02-15

申请号：US12188567

申请日：2008-08-08

申请人： Mamoru Nakasuji ,  Nabuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

发明人： Mamoru Nakasuji ,  Nabuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC分类号： H01J49/48 ,  G21K5/04

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J37/06 ,  H01J37/063 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0435 ,  H01J2237/0635 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

摘要翻译： 本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。 在电子束装置中，电子枪具有用于发射一次电子束的阴极。 阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。 多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。

公开(公告)号：US07886398B2

公开(公告)日：2011-02-15

申请号：US11243457

申请日：2005-10-03

申请人： Toyoko Morita ,  Toshiaki Kobayashi ,  Takao Kato

发明人： Toyoko Morita ,  Toshiaki Kobayashi ,  Takao Kato

IPC分类号： A46B9/04

CPC分类号： A61N1/20 ,  A46B15/0002 ,  A46B15/0016 ,  A46B2200/1066 ,  A61N1/0548 ,  A61N1/32

摘要： An oral cavity cleaning tool for the purpose of sterilization of the inside of oral cavity is provided that carries out efficient sterilization by using effective chlorine that is obtained through electrolysis. The oral cavity cleaning tool comprises a block handle, a head section extending from the block handle, a pair of electrodes provided on the head section and a power source that supplies electric current to the pair of electrodes, wherein the electrodes are put into contact with an oral fluid that contains chloride ions thereby to cause electric current to flow between the electrodes, so that the chloride ions are transformed into effective chlorine.

摘要翻译： 提供用于灭菌口腔内部的口腔清洁工具，其通过使用通过电解获得的有效氯进行有效的灭菌。 所述口腔清洁工具包括块手柄，从所述块手柄延伸的头部，设置在所述头部上的一对电极和向所述一对电极提供电流的电源，其中所述电极与所述电极接触 含有氯离子的口服液体，从而使电流在电极之间流动，使得氯离子转化为有效的氯。

公开(公告)号：US07598471B2

公开(公告)日：2009-10-06

申请号：US11714885

申请日：2007-03-07

申请人： Muneki Hamashima ,  Takao Kato ,  Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake

发明人： Muneki Hamashima ,  Takao Kato ,  Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake

IPC分类号： B23H9/00 ,  B23H1/04

CPC分类号： F01N3/2828 ,  F01N2260/18 ,  F01N2330/06 ,  H01J37/06 ,  H01J37/28

摘要： A method of machining a cathode used in an electron gun. The method includes steps of placing an object to be machined, which is a material of the cathode, and a machining electrode in an electrically insulating oil; applying a discharge current to the machining electrode; and machining the object to be machined to have a shape corresponding to the shape of the machining electrode by means of electric discharge machining of the machining electrode. The machining electrode includes a disk, recesses formed on a front surface of the disk, a protrusion provided on a back surface of the disk, and a hole for mounting a lead wire for applying discharge current to the machining electrode. Bumps corresponding to the shape of the recesses of the machining electrode are formed on the object to be machined by means of the electric discharge machining.

摘要翻译： 一种加工电子枪阴极的方法。 该方法包括以下步骤：将作为阴极材料的待加工对象和电绝缘油中的加工电极放置; 向加工电极施加放电电流; 并且通过加工电极的放电加工将被加工物加工成具有与加工电极的形状对应的形状。 加工电极包括盘，形成在盘的前表面上的凹部，设置在盘的后表面上的突起，以及用于安装用于向加工电极施加放电电流的引线的孔。 通过放电加工在被加工物体上形成与加工电极的凹部的形状相对应的凸起。

公开(公告)号：US20090213421A1

公开(公告)日：2009-08-27

申请号：US12378554

申请日：2009-02-17

申请人： Takao Kato ,  Naoki Tanjima ,  Motonori Tanaka

发明人： Takao Kato ,  Naoki Tanjima ,  Motonori Tanaka

IPC分类号： G06F3/12

CPC分类号： G06F3/1228 ,  G03G15/5087 ,  G03G2215/00092 ,  G03G2215/00109 ,  G06F3/1204 ,  G06F3/1284 ,  H04N1/00204 ,  H04N1/00278 ,  H04N1/00347 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/00962 ,  H04N2201/0036 ,  H04N2201/0041 ,  H04N2201/0046 ,  H04N2201/0049 ,  H04N2201/3295

摘要： A personal computer connected to a USB port of a printer through a management table managing writing on an ordinary storage region in FLASH ROM recognizes the ordinary storage region in the FLASH ROM of the printer as a removable drive which is a USB mass storage class device. Accordingly, an execution file of an application program stored in a portion of the ordinary storage region in the FLASH ROM can be read with a usual access from the personal computer, enabling the application program to be executed without being installed. When the application program is executed on the personal computer, periodic accesses are made to the ordinary storage region of the printer, and when an access fails, the application program is terminated.

摘要翻译： 通过管理FLASH ROM中的普通存储区域中的写入的管理表，连接到打印机的USB端口的个人计算机将作为USB大容量存储设备的可移动驱动器的打印机的FLASH ROM中的普通存储区域识别。 因此，存储在FLASH ROM中的普通存储区域的一部分中的应用程序的执行文件可以用来自个人计算机的通常访问来读取，从而能够在不安装的情况下执行应用程序。 当在个人计算机上执行应用程序时，对打印机的普通存储区域进行周期性访问，并且当访问失败时，终止应用程序。

公开(公告)号：US07423267B2

公开(公告)日：2008-09-09

申请号：US11528673

申请日：2006-09-28

申请人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

发明人： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC分类号： G01N23/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J37/06 ,  H01J37/063 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0435 ,  H01J2237/0635 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

摘要翻译： 本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。 在电子束装置中，电子枪具有用于发射一次电子束的阴极。 阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。 多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。

公开(公告)号：US07312449B2

公开(公告)日：2007-12-25

申请号：US11034873

申请日：2005-01-14

申请人： Mamoru Nakasuji ,  Takao Kato ,  Tohru Satake ,  Kenji Watanabe ,  Takeshi Murakami ,  Nobuharu Noji

发明人： Mamoru Nakasuji ,  Takao Kato ,  Tohru Satake ,  Kenji Watanabe ,  Takeshi Murakami ,  Nobuharu Noji

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G01N23/04 ,  H01J2237/2817

摘要： An electron beam system wherein a shot noise of an electron beam can be reduced and a beam current can be made higher, and further a shaped beam is formed by a two-stage lenses so as to allow for an operation with high stability. In this electron beam system, an electron beam emitted from an electron gun is irradiated onto a sample and secondary electrons emanated from the sample are detected. The electron gun is a thermionic emission type and designed to operate in a space charge limited condition. A shaping aperture and a NA aperture are arranged in front locations of the electron gun. An image of the shaping aperture formed by an electron beam emitted from the thermionic emission electron gun is focused onto a surface of the sample through the two-stage lenses.

摘要翻译： 一种电子束系统，其中可以减少电子束的喷射噪声并且可以使束流更高，并且还可以通过两级透镜形成成形梁，以允许具有高稳定性的操作。 在该电子束系统中，从电子枪发射的电子束照射到样品上，并检测从样品发出的二次电子。 电子枪是一种热离子发射型，设计用于在空间电荷限制条件下工作。 成形孔径和NA孔径布置在电子枪的前部位置。 由从热电子发射电子枪发射的电子束形成的成形孔的图像通过两级透镜聚焦到样品的表面上。

公开(公告)号：US07235799B2

公开(公告)日：2007-06-26

申请号：US10998160

申请日：2004-11-29

申请人： Mamoru Nakasuji ,  Tohru Satake ,  Takao Kato ,  Nobuharu Noji

发明人： Mamoru Nakasuji ,  Tohru Satake ,  Takao Kato ,  Nobuharu Noji

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  B82Y10/00 ,  B82Y15/00 ,  H01J37/09 ,  H01J37/12 ,  H01J37/1474 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/06316 ,  H01J2237/244 ,  H01J2237/2538 ,  H01J2237/2817

摘要： An electron beam apparatus having a longer life time of cathode, and allowing a plurality of electron beams to be arranged adequately around an optical axis and five or more electron beams to be formed from a single electron gun. The electron beams emitted from a cathode made of ZrO/W (tungsten zirconium oxide) or a cathode made of carbide of transition metal to the off-optical axis directions may be converged on a sample to scan it. The apparatus includes a plate for reducing a vacuum conductance defined between the electron gun chamber side and the sample side, and apertures are formed through the plate at locations offset from the optical axis allowing for the passage of the electron beams. In order to evaluate a pattern on the sample, the electron beam emitted from the electron gun is incident to the sample surface via an objective lens. The objective lens is composed of a flat electrode having an aperture centered on the optical axis and placed in parallel with the sample surface and an electromagnetic lens including a gap formed in a side facing to the sample. Further, in order to inspect a mask, spacing among a plurality of electron beams after having passed through the mask are extended by a magnifying lens and thus widely spaced electron beams are then converted into optical signal in a scintillator.

摘要翻译： 一种电子束装置，具有较长的阴极使用寿命，并允许多个电子束在光轴周围适当布置，并可由单个电子枪形成五个或更多个电子束。 从由ZrO / W（钨氧化锆）制成的阴极或由过渡金属的碳化物制成的阴极发射到离轴方向的电子束可以会聚在样品上以进行扫描。 该装置包括用于减小限定在电子枪室侧和样品侧之间的真空电导的板，并且在偏离光轴的位置处穿过板形成允许电子束通过的孔。 为了评估样品上的图案，从电子枪发射的电子束通过物镜入射到样品表面。 物镜由平面电极构成，该平面电极具有以光轴为中心并且与样品表面平行放置的孔，以及包括在面向样品的一侧形成的间隙的电磁透镜。 此外，为了检查掩模，在通过掩模之后的多个电子束之间的间隔通过放大透镜延伸，并且因此在闪烁体中将大量间隔的电子束转换成光信号。

公开(公告)号：US07205540B2

公开(公告)日：2007-04-17

申请号：US11262844

申请日：2005-11-01

申请人： Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

发明人： Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

IPC分类号： G21K7/00 ,  H01J37/28 ,  H01L21/66 ,  G01N23/00

CPC分类号： B82Y10/00 ,  G01N23/225 ,  G01R31/307 ,  H01J37/242 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24507 ,  H01J2237/2817

摘要： An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises an electron-optical column for accommodating an electron beam source, an objective lens, an E×B separator, and a secondary electron beam detector; a stage for holding the sample, and relatively moving the sample with respect to the electron-optical column; a working chamber for accommodating the stage and capable of controlling the interior thereof in a vacuum atmosphere; a loader for supplying a sample to the stage; a voltage applying mechanism for applying a voltage to the sample, and capable of applying at least two voltages to a lower electrode of the objective lens; and an alignment mechanism for measuring a direction in which dies are arranged on the sample. When the sample is evaluated, a direction in which the stage is moved is corrected to align with the direction in which the dies are arranged.

摘要翻译： 提供电子束装置，用于以简单的结构以高通量可靠地测量电位对比度等。 用于照射形成有电子束图案的晶片的样品（如晶片）以评估样品的电子束装置包括用于容纳电子束源的电子 - 光学柱，物镜，ExB分离器和次级 电子束检测器 用于保持样品的阶段，并相对于电子 - 光学柱相对移动样品; 用于容纳舞台并能够在真空气氛中控制其内部的工作室; 用于将样品供应到载物台的装载机; 电压施加机构，用于向样品施加电压，并且能够向物镜的下电极施加至少两个电压; 以及用于测量模具布置在样品上的方向的对准机构。 当评估样品时，对载物台移动的方向进行校正，使其与模具的排列方向一致。

公开(公告)号：US20070018101A1

公开(公告)日：2007-01-25

申请号：US11528673

申请日：2006-09-28

申请人： Mamoru Nakasuji ,  Nobuhara Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

发明人： Mamoru Nakasuji ,  Nobuhara Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC分类号： G21K7/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J37/06 ,  H01J37/063 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0435 ,  H01J2237/0635 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

摘要翻译： 本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。 在电子束装置中，电子枪具有用于发射一次电子束的阴极。 阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。 多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。

公开(公告)号：US20070016924A1

公开(公告)日：2007-01-18

申请号：US11483492

申请日：2006-07-10

申请人： Minako Ishida ,  Hideo Ueno ,  Takao Kato ,  Naruhito Muto

发明人： Minako Ishida ,  Hideo Ueno ,  Takao Kato ,  Naruhito Muto

IPC分类号： H04N5/445 ,  H04N5/91

CPC分类号： G11B27/24 ,  B41J3/4075 ,  G11B2220/2562 ,  G11B2220/41 ,  H04N5/85 ,  H04N21/4117 ,  H04N21/42646 ,  H04N21/4821 ,  H04N21/84

摘要： For programs selected as those whose label is to be created, a list of available templates is displayed on a arrangement processing screen 200 together with contents of EPG information acquired from an EPG information DB. The EPG information is displayed on a left screen 210 and the templates list is displayed on a right screen 220, so that one template desired to be applied is selected on the right screen 220, according to which template, one or a plurality of the EPG information pieces whose label is desired to be created is selected on the left screen 210. Templates 230, 240, 250, and 260 constitute a label set comprised of a plurality of labels, thus enabling creating labels by incorporating information pieces of specified items.

摘要翻译： 对于被选择为要创建标签的节目，可以在排列处理屏幕200上显示可用模板的列表以及从EPG信息DB获取的EPG信息的内容。 EPG信息显示在左屏幕210上，并且模板列表显示在右屏幕220上，使得在右屏幕220上选择希望应用的一个模板，根据哪个模板，一个或多个EPG 在左画面210上选择希望创建标签的信息。 模板230,240,250和260构成由多个标签组成的标签集，从而能够通过并入指定项目的信息块来创建标签。