Apparatus and method for improving uniformity in electroplating
    61.
    发明授权
    Apparatus and method for improving uniformity in electroplating 有权
    改善电镀均匀性的装置和方法

    公开(公告)号:US07846306B2

    公开(公告)日:2010-12-07

    申请号:US11362433

    申请日:2006-02-24

    IPC分类号: G01N27/403 C25D17/00

    摘要: A method and apparatus for plating a metal onto a substrate. One embodiment of the present invention provides an apparatus for electroplating a substrate. The apparatus comprises a fluid basin, an anode disposed near a bottom of the fluid basin, a restrictor disposed above the anode, and a substrate support member configured to move the substrate within the fluid basin among different elevations relative to the restrictor. Plating profiles on the substrate may be adjusted by changing the elevation of the substrate during plating.

    摘要翻译: 一种用于将金属电镀到基底上的方法和装置。 本发明的一个实施例提供了一种用于电镀基板的装置。 该装置包括流体池,设置在流体池底部附近的阳极,设置在阳极上方的限流器,以及衬底支撑构件,其构造成使流体池内的衬底相对于限制器在不同的高度之间移动。 可以通过在电镀期间改变衬底的高度来调节衬底上的电镀轮廓。

    Apparatus and method for improving uniformity in electroplating
    63.
    发明申请
    Apparatus and method for improving uniformity in electroplating 有权
    改善电镀均匀性的装置和方法

    公开(公告)号:US20060201814A1

    公开(公告)日:2006-09-14

    申请号:US11362433

    申请日:2006-02-24

    IPC分类号: C25D5/18

    摘要: A method and apparatus for plating a metal onto a substrate. One embodiment of the present invention provides an apparatus for electroplating a substrate. The apparatus comprises a fluid basin, an anode disposed near a bottom of the fluid basin, a restrictor disposed above the anode, and a substrate support member configured to move the substrate within the fluid basin among different elevations relative to the restrictor. Plating profiles on the substrate may be adjusted by changing the elevation of the substrate during plating.

    摘要翻译: 一种用于将金属电镀到基底上的方法和装置。 本发明的一个实施例提供了一种用于电镀基板的装置。 该装置包括流体池,设置在流体池底部附近的阳极,设置在阳极上方的限流器,以及衬底支撑构件,其构造成使流体池内的衬底相对于限制器在不同的高度之间移动。 可以通过在电镀期间改变衬底的高度来调节衬底上的电镀轮廓。

    COMPOSITIONS COMPRISING A SHELF-LIFE STABILITY COMPONENT
    65.
    发明申请
    COMPOSITIONS COMPRISING A SHELF-LIFE STABILITY COMPONENT 审中-公开
    包含寿命稳定性组分的组合物

    公开(公告)号:US20130129869A1

    公开(公告)日:2013-05-23

    申请号:US13304260

    申请日:2011-11-23

    IPC分类号: A23L3/00

    CPC分类号: A23L3/00 A23L3/3427

    摘要: Compositions that include a shelf-life stability component are provided. In some instances, the compositions are ingestible compositions which include the shelf-life stability component and an ingestible component. Aspects of the invention further include methods of making and using the compositions.

    摘要翻译: 提供了包含保质期稳定性组分的组合物。 在一些情况下,组合物是包含保质期稳定性组分和可摄取组分的可摄取组合物。 本发明的方面还包括制备和使用组合物的方法。

    Solid-State Thin-Film Capacitor
    66.
    发明申请
    Solid-State Thin-Film Capacitor 有权
    固态薄膜电容器

    公开(公告)号:US20120018844A1

    公开(公告)日:2012-01-26

    申请号:US13260078

    申请日:2010-07-23

    申请人: Hooman Hafezi

    发明人: Hooman Hafezi

    IPC分类号: H01L29/92 H01L21/02

    CPC分类号: H01G4/33

    摘要: Solid-state thin-film capacitors are provided. Aspects of the solid-state thin-film capacitors include a first electrode layer of a transition metal, a dielectric layer of an oxide of the transition metal, and a second electrode layer of a metal oxide. Also provided are methods of making the solid-state thin-film capacitors, as well as devices that include the same. The capacitor may have one or more cathodic arc produced structures, i.e., structures produced using a cathodic arc deposition process. The structures may be stress-free metallic structures, porous layers and layers displaying crenulations. Aspects of the invention further include methods of producing capacitive structures using chemical vapor deposition and/or by sputter deposition.

    摘要翻译: 提供固态薄膜电容器。 固体薄膜电容器的方面包括过渡金属的第一电极层,过渡金属的氧化物的电介质层和金属氧化物的第二电极层。 还提供了制造固态薄膜电容器的方法以及包括它们的装置。 电容器可以具有一个或多个阴极电弧产生结构,即使用阴极电弧沉积工艺制造的结构。 这些结构可以是无应力的金属结构,多孔层和显示出齿的层。 本发明的方面还包括使用化学气相沉积和/或通过溅射沉积制造电容结构的方法。

    Method to deposit organic grafted film on barrier layer
    67.
    发明授权
    Method to deposit organic grafted film on barrier layer 有权
    将有机接枝膜沉积在阻挡层上的方法

    公开(公告)号:US07820026B2

    公开(公告)日:2010-10-26

    申请号:US11403566

    申请日:2006-04-13

    IPC分类号: C25D5/34

    摘要: Generally, the process includes depositing a barrier layer on a feature formed in a dielectric layer, decorating the barrier layer with a metal, performing a grafting process, initiating a copper layer and then filing the feature by use of a bulk copper fill process. Copper features formed according to aspects described herein have desirable adhesion properties to a barrier layer formed on a semiconductor substrate and demonstrate enhanced electromigration and stress migration results in the fabricated devices formed on the substrate.

    摘要翻译: 通常,该方法包括在形成在电介质层中的特征上沉积阻挡层,用金属装饰阻挡层,进行接枝过程,引发铜层,然后通过使用大块铜填充工艺来填充该特征。 根据本文描述的方面形成的铜特征对于形成在半导体衬底上的阻挡层具有期望的粘合性能,并且证明在形成在衬底上的制造器件中增强的电迁移和应力迁移。

    Grafted seed layer for electrochemical plating
    69.
    发明授权
    Grafted seed layer for electrochemical plating 有权
    用于电化学电镀的接枝种子层

    公开(公告)号:US07504335B2

    公开(公告)日:2009-03-17

    申请号:US11404058

    申请日:2006-04-13

    IPC分类号: H01L21/44

    摘要: Generally, the process includes depositing a barrier layer and seed layer on a feature formed in a dielectric layer, performing a grafting process, initiating a copper layer and then filing the feature by use of a bulk copper fill process. Copper features formed according to aspects described herein have desirable adhesion properties to a barrier and seed layers formed on a semiconductor substrate and demonstrate enhanced electromigration and stress migration results in the fabricated devices formed on the substrate.

    摘要翻译: 通常,该方法包括在形成在电介质层中的特征上沉积阻挡层和种子层,执行接枝过程,引发铜层,然后通过使用大量铜填充工艺来填充该特征。 根据本文描述的方面形成的铜特征对于形成在半导体衬底上的阻挡层和种子层具有期望的粘附性能,并且证明增强的电迁移和应力迁移导致形成在衬底上的制造器件。

    Personal paramedic
    70.
    发明申请
    Personal paramedic 审中-公开
    个人护理人员

    公开(公告)号:US20080058772A1

    公开(公告)日:2008-03-06

    申请号:US11897931

    申请日:2007-08-31

    IPC分类号: A61K9/22

    CPC分类号: A61K9/0024

    摘要: A drug delivery device is provided. The device is configured to be automatically activated by a wireless signal sent from a sensor or from another implantable device. Embodiments of the device include a drug reservoir, a delivery mechanism, an energy source, and a processor which activates the delivery mechanism upon receiving the wireless automatically generated signal. The device can operate with a battery, or with an energy source that can harvest ambient energy (e.g. from a defibrillator pulse). Also provided are systems and kits having components thereof, and methods of using the subject devices.

    摘要翻译: 提供药物输送装置。 该设备被配置为通过从传感器或另一个可植入设备发送的无线信号自动激活。 该装置的实施例包括药物储存器,递送机构,能量源和处理器,其在接收到无线自动生成的信号时激活传送机构。 该装置可以与电池一起操作,或者可以使用能够收集环境能量(例如来自除颤器脉冲)的能量源。 还提供了具有其组件的系统和套件以及使用主题装置的方法。