摘要:
A silica-based interlayer insulating layer having a low dielectric constant is formed with SOG material on a substrate, in which a wiring-layer forming space is then formed. If necessary, a UV ray irradiation is performed under an oxidizing atmosphere. A Si—OH bond is formed on a surface of the insulating layer. A monomolecular layer film is then adhered to the inner surface of the space, which is then modified to be a catalyst with a solution containing Pd compound. On the catalyst monomolecular layer, a copper-diffusion-resistant film is formed by electroless plating, on which a copper plate is then formed as a wiring layer.
摘要:
An input device contains a resistance-element series formed by series-connected resistance elements, low resistors opposing the resistance elements, an operating object which brings one of the low resistors into contact with one of the resistance elements and changes the contact area therebetween, an output point at the midpoint between resistance elements, and a controller. When the resistance element and low resistor are not in contact, the input device enters a sleep mode in which the resistance-element series or low resistors have a high potential and the other a low potential. In the sleep mode, determination that the operating object has been operated occurs when a change in voltage or current on the low potential side is detected. A voltage is applied across ends of the resistance-element series, and the device enters a detection mode in which the output is based on the contact area change.
摘要:
A respiratory function measuring device comprises: a three-dimensional measuring unit that measures a chest movement and an abdomen movement of a breathing animal; a first measuring unit that measures a time T1 where a rate of volume decrease of the abdomen is maximized in an expiration; a second measuring unit that measures a time T2 where a rate of volume decrease of the chest is maximized in the expiration; and a respiratory time difference outputting unit that computes and outputs a value Tde corresponding to T2-T1. This allows measuring respiratory function to diagnose an obstructive pulmonary disease, a restrictive pulmonary disease, and the like in a natural state, for a subject of a breathing animal, even if the subject does not have a sense of self-awareness.
摘要:
An input device contains a resistance-element series formed by series-connected resistance elements, low resistors opposing the resistance elements, an operating object which brings one of the low resistors into contact with one of the resistance elements and changes the contact area therebetween, an output point at the midpoint between resistance elements, and a controller. When the resistance element and low resistor are not in contact, the input device enters a sleep mode in which the resistance-element series or low resistors have a high potential and the other a low potential. In the sleep mode, determination that the operating object has been operated occurs when a change in voltage or current on the low potential side is detected. A voltage is applied across ends of the resistance-element series, and the device enters a detection mode in which the output is based on the contact area change.
摘要:
In an analog input device, a rubber member is provided between a key top and a movable electrode of an analog-quantity generating unit. A dead zone can be removed or reduced by forming a bottom portion of the rubber member of a flat or curved face. Furthermore, since first round surfaces are connected to an outer side face, the linearity of the input (e.g., a load)-output (voltage) characteristic can be enhanced.
摘要:
A control method of a gas turbine which is provided with a multi can type combustor consisting of a plurality of unit combustors, each of which has a first stage combustion section for diffusion combustion and a second stage combustion section for premix combustion. Combustion states in the first and second stage combustion sections are monitored to take in quantities representative of the combustion conditions as control factors. The combustion in the second stage combustion section is assumed to be abnormal when the taken in quantities exceed an allowable limit and the combustion in the first and second stage combustion sections is changed to independent combustion only in the first stage combustion section when the number of unit combustors, each of which is assumed to be abnormal, exceeds a predetermined number of the unit combustors.
摘要:
A control apparatus of a gas turbine combustor for effecting a stable combustion with limited NOx emission through a control of a fuel flow rate according to a turbine output and a control of a flow rate of intake air mixed with the fuel comprises: means for detecting at least one of the temperature and the humidity of an intake air to be taken into the combustor; means for determining and storing, in advance, a stable combustion limit line between a stable combustion region and an unstable combustion region, on a plane of coordinates of a ratio of fuel flow rate/intake air flow rate or an intake air flow rate and the temperature or the humidity of the intake air, on each turbine load; means for detecting an instant operational point of the combustor on the plane of coordinates; and means for correcting an intake air flow rate or a ratio of fuel flow rate to the intake air flow rate according to an increase in the detected temperature or humidity so that the operational point does not cross the stable combustion limit line.
摘要:
In a semiconductor memory device, a first load circuit is coupled with the column lines, first dummy cells are connected to a dummy column line, a second load circuit is connected to the dummy column line, a second dummy cell is connected to the dummy column line, and a sense amplifier senses the data stored in the memory cell in accordance with a potential difference between the column line and the dummy column line. In semiconductor memory devices thus arranged, the second dummy cell is set in an on state normally. The connection of the second dummy cell with the dummy line changes a current flowing to the dummy line at the time of row line switching, thereby to hold back a rise of the reference potential at the time of the row line switching.
摘要:
A nonvolatile semiconductor memory device includes a memory cell array including a plurality of memory cells each including a nonvolatile transistor, a plurality of row lines each connected to the memory cells arranged on a corresponding row, a plurality of column lines connected to the memory cells arranged on a corresponding column, an address buffer circuit for receiving external address signals at its address input terminal and for outputting internal address signals in response to the received external address signals, column line-select transistors connected to the column lines, a column-decoding circuit for selectively biasing the column line-select transistors, a row-decoding circuit for selectively biasing the row lines, and data-detecting circuit for detecting the potential of the column line selected by the column line-select transistor. The device further includes a control unit generating a control signal for controlling the address buffer circuit so that the internal address signal is set at a predetermined value, to set all the row lines in a non-selected state, thereby setting a column line, selected by the column line-select transistor, at a predetermined potential.