Charged particle beam apparatus
    61.
    发明申请
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US20060016990A1

    公开(公告)日:2006-01-26

    申请号:US11183906

    申请日:2005-07-19

    IPC分类号: H01J37/28 H01J37/256

    摘要: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    摘要翻译: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元,用于存储带电粒子光学系统的形状,位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元,用于计算带电粒子束路径附近的电磁场的电磁场计算单元,用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元,存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。

    Process for producing alkylnaphthalenes
    63.
    发明授权
    Process for producing alkylnaphthalenes 失效
    制备烷基萘的方法

    公开(公告)号:US3985819A

    公开(公告)日:1976-10-12

    申请号:US513188

    申请日:1974-10-08

    摘要: A process for producing alkylnaphthalenes by alkylating naphthalene with an olefin having 2 to 4 carbon atoms, which comprises (1) introducing the olefin into a solution of crude naphthalene containing thianaphthene as an impurity in a solvent having a boiling point sufficiently different from the boiling point of the naphthalene and alkylnaphthalenes produced that the solvent is separable by distillation in the presence of (i) an aluminum chloride complex consisting of (a) aluminum chloride, (b) hydrogen chloride and (c) an alkylated benzene or naphthalene, or (ii) a solid aluminum chloride which is dissolved into the reaction solution by adding gaseous hydrogen chloride simultaneously with or prior to the introducing of the olefin, (2) aging the reaction solution, and (3) recovering the resulting alkylnaphthalenes, whereby alkylnaphthalenes, containing as monoalkylnaphthalenes a predominant amount of a .beta.-monoalkylnaphthalene, are obtained in a high yield.

    摘要翻译: 通过用具有2〜4个碳原子的烯烃烷基化萘来制造烷基萘的方法,其包括:(1)将烯烃作为杂质引入到具有与沸点充分不同的沸点的溶剂中作为杂质, 的萘和烷基萘产生溶剂在(i)由(a)氯化铝,(b)氯化氢和(c)烷基化的苯或萘组成的氯化铝络合物存在下蒸馏分离,或(ii) )固体氯化铝,其通过在引入烯烃的同时或之前加入气态氯化氢而溶解到反应溶液中,(2)使反应溶液老化,和(3)回收所得的烷基萘,由此烷基萘含有 以高产率获得主要量的β-单烷基萘的单烷基萘。

    Charged particle beam apparatus and method for stably obtaining charged particle beam image
    67.
    发明授权
    Charged particle beam apparatus and method for stably obtaining charged particle beam image 失效
    带电粒子束装置和稳定获得带电粒子束图像的方法

    公开(公告)号:US08536540B2

    公开(公告)日:2013-09-17

    申请号:US13381953

    申请日:2010-05-14

    IPC分类号: H01J37/26

    摘要: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.

    摘要翻译: 由于待检查样品的外周部分和中心部分的充电特性不同,所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此,可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。

    CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR STABLY OBTAINING CHARGED PARTICLE BEAM IMAGE
    68.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR STABLY OBTAINING CHARGED PARTICLE BEAM IMAGE 失效
    充电颗粒光束装置和用于稳定获取的粒子束图像的方法

    公开(公告)号:US20120126118A1

    公开(公告)日:2012-05-24

    申请号:US13381953

    申请日:2010-05-14

    IPC分类号: H01J37/26 H01J37/20

    摘要: Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the outer circumferential portion and the center portion of the sample to be inspected. A sample cover is provided in the outer circumferential portion of a sample holder on which the sample to be inspected is placed. Charging characteristics of the sample cover are changed according to charging characteristics of the sample to be inspected. Consequently, uniform charged states can be formed in the outer circumferential portion and the center portion of the sample. Inspection/observation of the outer circumferential portion of the sample can be realized at higher sensitivity than in the past.

    摘要翻译: 由于待检查样品的外周部分和中心部分的充电特性不同,所以待检样品的外周部分和中心部分不能获得相同的检查灵敏度。 在待检测样品放置的样品架的外周部设置有样品盖。 样品盖的充电特性根据待检样品的充电特性而改变。 因此,可以在样品的外周部分和中心部分形成均匀的带电状态。 可以以比以往更高的灵敏度实现样品的外周部的检查/观察。

    Refrigeration system
    69.
    发明授权
    Refrigeration system 失效
    制冷系统

    公开(公告)号:US07765817B2

    公开(公告)日:2010-08-03

    申请号:US11631859

    申请日:2005-11-21

    IPC分类号: F25B49/00

    摘要: In a refrigeration system, a first non-inverter compressor (2B) backs up one of an inverter compressor (2A) and a second non-inverter compressor (2C) by switching of a third four-way selector valve (3C). The refrigeration system includes: a suction pressure detection section (81) for detecting the suction pressure of the first non-inverter compressor (2B) after the issue of a switching command to the third four-way selector valve (3C); a command holding section (82) for, when the detected pressure of the suction pressure detection section (81) becomes lower than a predetermined value, determining that the third four-way selector valve (3C) has malfunctioned and holding the switching command; and a compressor standby section (83) for, upon the command holding section (82) holding the switching command, stopping the first non-inverter compressor (2B) and putting it into standby for a predetermined time.

    摘要翻译: 在制冷系统中,通过切换第三四通换向阀(3C),第一非变频压缩机(2B)备用逆变器压缩机(2A)和第二非变频压缩机(2C)中的一个。 该制冷系统包括:在向第三四通换向阀(3C)发出切换指令之后,检测第一非变换器压缩机(2B)的吸入压力的吸入压力检测部(81) 指示保持部(82),当所述吸入压力检测部(81)的检测压力变得低于预定值时,确定所述第三四通换向阀(3C)发生故障并保持所述切换命令; 和压缩机待机部分(83),用于在保持切换命令的命令保持部分(82)上停止第一非逆变器压缩机(2B)并将其置于预定时间待机状态。

    Method of manufacturing display panel, and supporting bed for substrate of the display panel
    70.
    发明授权
    Method of manufacturing display panel, and supporting bed for substrate of the display panel 失效
    显示面板的制造方法以及显示面板的基板的支撑床

    公开(公告)号:US07534155B2

    公开(公告)日:2009-05-19

    申请号:US10589819

    申请日:2006-01-11

    IPC分类号: H01J9/00

    CPC分类号: H01J9/241

    摘要: A method of manufacturing display panels includes forming a material layer on a substrate, and baking the material layer formed on substrate which is placed on a supporting bed. The supporting bed is formed of a first supporting bed and a second supporting bed placed on the first supporting bed. A difference in thermal expansion coefficient between the second supporting bed and the substrate is smaller than a difference in thermal expansion coefficient between the first supporting bed and the substrate, and the substrate is placed on the second supporting bed such that the substrate is positioned entirely within the perimeter of the second supporting bed during the baking and heating. This structure allows reduction of scratches on a surface of the substrate.

    摘要翻译: 制造显示面板的方法包括在基板上形成材料层,并烘焙形成在放置在支撑床上的基板上的材料层。 支撑床由放置在第一支撑床上的第一支撑床和第二支撑床形成。 第二支撑床和基板之间的热膨胀系数的差异小于第一支撑床和基板之间的热膨胀系数差,并且将基板放置在第二支撑床上,使得基板完全位于 在烘烤和加热期间第二支撑床的周边。 这种结构允许减少基板表面上的划痕。