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公开(公告)号:US20150325567A1
公开(公告)日:2015-11-12
申请号:US14803365
申请日:2015-07-20
Applicant: Semiconductor Components Industries, LLC
Inventor: Gordon M. GRIVNA , Jefferson W. HALL , Mohammed Tanvir QUDDUS
IPC: H01L27/02 , H01L29/872 , H01L29/10 , H01L29/423 , H01L27/06 , H01L29/78
CPC classification number: H01L27/0255 , H01L21/76224 , H01L27/0629 , H01L29/0619 , H01L29/0623 , H01L29/1037 , H01L29/1045 , H01L29/105 , H01L29/402 , H01L29/42364 , H01L29/66143 , H01L29/7806 , H01L29/8725
Abstract: A diode (200) is disclosed having improved efficiency, smaller form factor, and reduced reverse biased leakage current. Schottky diodes (212) are formed on the sidewalls (210) of a mesa region (206). The mesa region (206) is a cathode of the Schottky diode (212). The current path through the mesa region (206) has a lateral and a vertical current path. The diode (200) further comprises a MOS structure (214), p-type regions (220), MOS structures (230), and p-type regions (232). MOS structure (214) with the p-type regions (220) pinch-off the lateral current path under reverse bias conditions. P-type regions (220), MOS structures (230), and p-type regions (232) each pinch-off the vertical current path under reverse bias conditions. MOS structure (214) and MOS structures (230) reduce resistance of the lateral and vertical current path under forward bias conditions. The mesa region (206) can have a uniform or non-uniform doping concentration.
Abstract translation: 公开了一种二极管(200),其具有改进的效率,较小的外形尺寸和减小的反向偏置漏电流。 肖特基二极管(212)形成在台面区域(206)的侧壁(210)上。 台面区域(206)是肖特基二极管(212)的阴极。 通过台面区域(206)的电流路径具有横向和垂直电流路径。 二极管(200)还包括MOS结构(214),p型区(220),MOS结构(230)和p型区(232)。 具有p型区域(220)的MOS结构(214)在反向偏压条件下夹紧横向电流路径。 P型区域(220),MOS结构(230)和p型区域(232)各自在反向偏置条件下夹紧垂直电流路径。 MOS结构(214)和MOS结构(230)在正向偏置条件下降低横向和垂直电流通路的电阻。 台面区域(206)可以具有均匀或不均匀的掺杂浓度。
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公开(公告)号:US20150027290A1
公开(公告)日:2015-01-29
申请号:US14484843
申请日:2014-09-12
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA , James M. PARSEY, JR.
CPC classification number: H01L21/67092 , B23P15/28 , B28D5/0005 , B28D5/0011 , H01L21/78 , H01L2224/48091 , Y10T83/0333 , H01L2924/00014
Abstract: In one embodiment, a method of singulating semiconductor die from a semiconductor wafer includes forming a material on a surface of a semiconductor wafer and reducing a thickness of portions of the material. Preferably, the thickness of the material is reduced near where singulation openings are to be formed in the semiconductor wafer.
Abstract translation: 在一个实施例中,从半导体晶片分离半导体管芯的方法包括在半导体晶片的表面上形成材料并减小部分材料的厚度。 优选地,在半导体晶片中将形成切割开口的地方,材料的厚度减小。
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公开(公告)号:US20240243014A1
公开(公告)日:2024-07-18
申请号:US18619594
申请日:2024-03-28
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA
IPC: H01L21/78 , H01L23/00 , H01L29/66 , H01L29/778
CPC classification number: H01L21/7806 , H01L21/78 , H01L24/94 , H01L24/96 , H01L29/66431 , H01L29/7786 , H01L2224/94
Abstract: A process can be used to allow processing of thin layers of a workpiece including dies. The workpiece can include a base substrate and a plurality of layers overlying the base substrate. The process can include forming a polymer support layer over the plurality of layers; thinning or removing the base substrate within a component region of the workpiece, wherein the component region includes an electronic device; and singulating the workpiece into a plurality of dies after thinning or removing the base substrate. In another aspect, an electronic device can be formed using such process. In an embodiment, the workpiece may have a size corresponding to a semiconductor wafer to allow wafer-level, as opposed to die-level, processing.
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公开(公告)号:US20230352525A1
公开(公告)日:2023-11-02
申请号:US18340650
申请日:2023-06-23
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Peter MOENS , Gordon M. GRIVNA , Yusheng LIN
IPC: H01L29/06 , H01L25/07 , H01L29/20 , H01L21/762
CPC classification number: H01L29/0649 , H01L25/071 , H01L29/2003 , H01L21/76224
Abstract: In a general aspect, a semiconductor device assembly includes a first portion of a semiconductor substrate; a second portion of the semiconductor substrate, and a semiconductor device layer disposed on the first portion of the semiconductor substrate and the second portion of the semiconductor substrate. The semiconductor device layer includes a first semiconductor device disposed on the first portion of the semiconductor substrate, and a second semiconductor device disposed on the second portion of the semiconductor substrate. The assembly also includes an isolation trench defined in the semiconductor substrate that has a dielectric material disposed therein. The isolation trench is disposed between the first portion of the semiconductor substrate and the second portion of the semiconductor substrate, and electrically isolates the first portion of the semiconductor substrate from the second portion of the semiconductor substrate. The semiconductor device layer excludes the isolation trench.
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公开(公告)号:US20220093745A1
公开(公告)日:2022-03-24
申请号:US16948491
申请日:2020-09-21
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA
IPC: H01L29/165 , H01L49/02 , H01L29/06 , H01L21/285
Abstract: A semiconductor device includes a substrate comprising a first material, a first major surface, and a second major surface opposite to the first major surface, the first material having a first coefficient of thermal expansion (CTE). A filled recessed structure having recesses extends into the substrate and has a pattern in a plan view. The recesses are spaced apart so that part of the substrate is interposed between each of the recesses, and a second material different than the first material is in the recesses. The second material has a second CTE. A structure is proximate to the first major surface over the filled recessed structure and has a third CTE. The third CTE and the second CTE are different than the first CTE. The filled recessed structure reduces stresses between the substrate and structure. In some examples, the structure comprises a MIM capacitor. In other examples, the structure comprises a heterojunction semiconductor material.
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公开(公告)号:US20210296482A1
公开(公告)日:2021-09-23
申请号:US16948880
申请日:2020-10-05
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA
Abstract: A semiconductor device includes a region of semiconductor material having a first side and a second side opposite to the first side. Active device structures are adjacent to the first side, the active device structures comprising source regions and gate electrodes. A first gate conductor is at the first side electrically connected to the gate electrodes, a drain region is at the second side, a second gate conductor is at the second side, and through-semiconductor vias extending from the first side towards the side and electrically connecting the first gate electrode to the second gate electrode. A source electrode is at the first side electrically connected to the source regions, and a drain electrode is at the second side electrically connected to the drain region. The through-semiconductor vias are electrically isolated from the source regions and the drain region. The structure provides a gate/drain up with a source-down configuration.
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公开(公告)号:US20190013290A1
公开(公告)日:2019-01-10
申请号:US16131401
申请日:2018-09-14
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Wentao QIN , Gordon M. GRIVNA , Harold ANDERSON , Thomas ANDERSON , George CHANG
IPC: H01L23/00
Abstract: A wire bond system. Implementations may include: a bond wire including copper (Cu), a bond pad including aluminum (Al) and a sacrificial anode electrically coupled with the bond pad, where the sacrificial anode includes one or more elements having a standard electrode potential below a standard electrode potential of Al.
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68.
公开(公告)号:US20180323153A1
公开(公告)日:2018-11-08
申请号:US16035838
申请日:2018-07-16
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA
IPC: H01L23/544 , H01L21/78 , H01L23/58
Abstract: A semiconductor substrate contains a plurality of openings extending partially into a surface of the semiconductor substrate. A conductive layer is formed with a first portion of the conductive layer over a remaining portion of the surface of the semiconductor substrate between the openings and a second portion of the conductive layer in the openings. The remaining portion of the surface of the semiconductor substrate is removed to lift-off the first portion of the conductive layer while leaving the second portion of the conductive layer in the openings. The semiconductor substrate is singulated to separate the semiconductor die leaving the second portion of the conductive layer over a surface of the semiconductor die. Alternatively, a plurality of openings is formed over each semiconductor die. A conductive layer is formed over a remaining portion of the surface of the semiconductor substrate between the openings and into the openings.
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69.
公开(公告)号:US20180269104A1
公开(公告)日:2018-09-20
申请号:US15977608
申请日:2018-05-11
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Gordon M. GRIVNA
IPC: H01L21/78 , H01L23/544 , H01L21/67 , H01L21/3065 , H01L21/683
CPC classification number: H01L21/78 , B28D5/0017 , H01L21/3065 , H01L21/477 , H01L21/67092 , H01L21/67098 , H01L21/67132 , H01L21/67144 , H01L21/6836 , H01L23/544 , H01L2221/68327 , H01L2223/54453 , Y02P80/30 , Y10T29/41 , Y10T225/304 , Y10T225/379 , Y10T225/386
Abstract: Die are singulated from a wafer having a back layer by placing the wafer onto a first carrier substrate with the back layer adjacent the carrier substrate, forming singulation lines through the wafer to expose the back layer within the singulation lines, and using a plate structure to apply a pressure to the wafer to separate the back layer in the singulation lines. The pressure can be applied through the first carrier substrate proximate to the back layer, or can be applied through a second carrier substrate attached to a front side of the wafer opposite to the back layer.
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70.
公开(公告)号:US20180096849A1
公开(公告)日:2018-04-05
申请号:US15708447
申请日:2017-09-19
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Peter A. BURKE , James KIMBALL , Gordon M. GRIVNA
IPC: H01L21/28 , H01L21/265 , H01L21/02 , H01L21/306 , H01L29/423 , H01L29/40 , H01L29/788 , H01L29/66
CPC classification number: H01L21/28114 , H01L21/02236 , H01L21/02238 , H01L21/02255 , H01L21/26506 , H01L21/26533 , H01L21/2658 , H01L21/26586 , H01L21/30604 , H01L29/407 , H01L29/417 , H01L29/42336 , H01L29/4236 , H01L29/66348 , H01L29/66825 , H01L29/7397 , H01L29/7889
Abstract: A process of forming electronic device can include providing a substrate having a first portion and a second portion; introducing a nitrogen-containing species into the second portion of the substrate; and exposing the substrate to an oxidizing ambient, wherein a thicker oxide is grown from the first portion as compared to the second portion. In an embodiment, the process can include removing the first portion while the second portion of the substrate that includes the nitrogen-containing species remains. In another embodiment, the process can be used to form different thicknesses of an oxide layer at different portions along a sidewall of a trench. The process may be used in other applications where different thicknesses of oxide layers are to be formed during the same oxidation cycle, such as forming a tunnel dielectric layer and a gate dielectric layer for a floating gate memory cell.
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