公开(公告)号：USD523381S1

公开(公告)日：2006-06-20

申请号：US29216891

申请日：2004-11-10

申请人： Masato Taguchi ,  Masato Takahashi

设计人： Masato Taguchi ,  Masato Takahashi

公开(公告)号：USD519226S1

公开(公告)日：2006-04-18

申请号：US29217683

申请日：2004-11-22

申请人： Masato Taguchi ,  Masato Takahashi

设计人： Masato Taguchi ,  Masato Takahashi

公开(公告)号：US20050161809A1

公开(公告)日：2005-07-28

申请号：US10505321

申请日：2003-04-04

申请人： Kinya Nakatsu ,  Koichi Yahata ,  Masato Takahashi ,  Mitsufumi Iwanaka ,  Ryuichi Saito ,  Haruki Hamada

发明人： Kinya Nakatsu ,  Koichi Yahata ,  Masato Takahashi ,  Mitsufumi Iwanaka ,  Ryuichi Saito ,  Haruki Hamada

IPC分类号： H02M7/00 ,  H01L23/48

CPC分类号： H02M7/003 ,  G01R15/202 ,  G01R15/207 ,  H01L2224/45124 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48472 ,  H01L2224/73265 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/3025 ,  H02M2001/0009 ,  H01L2924/00014 ,  H01L2924/00

摘要： To provide a power converter equipped with a current detector which is small and can carry out highly accurate current detection, in the power converter equipped with a power module 16 having a power controlling semiconductor element 7 disposed on the power module base 27 with a ceramic substrate 28 interposed, and a control unit 26 for controlling the operation of the power controlling semiconductor element 7, a current detector 40 having a magnetic detecting unit 47 which is disposed in the detection conductor 11, electrically connected to the power controlling semiconductor element 7 and disposed on the power module base 27 with the ceramic substrate 28 interposed, and has a magnetic detecting semiconductor element 43 electrically connected to the control unit 26 is provided in the power module 16; and relative distance between the detection conductor 11 and the power module base 27 is larger than the relative distance between the current detection electrode 42 and the power module base 27.

摘要翻译： 为了提供一种配备有电流检测器的电力转换器，该电力检测器体积小且可以执行高精度的电流检测，在具有功率模块16的电力转换器中，功率模块16具有设置在功率模块基座27上的功率控制半导体元件7，陶瓷基板 插入的控制单元26和用于控制功率控制半导体元件7的操作的控制单元26，具有设置在检测导体11中的磁检测单元47的电流检测器40，电连接到功率控制半导体元件7并且被布置 在功率模块基座27上插入有陶瓷基板28，并且具有与控制单元26电连接的磁检测半导体元件43设置在功率模块16中; 并且检测导体11和功率模块基座27之间的相对距离大于电流检测电极42与功率模块基座27之间的相对距离。

公开(公告)号：US20050048708A1

公开(公告)日：2005-03-03

申请号：US10923045

申请日：2004-08-23

申请人： Kentaro Yamada ,  Masato Takahashi ,  Tatsuyuki Konagaya ,  Takeshi Katoh ,  Masaki Sakashita ,  Koichiro Takei ,  Yasuhiro Obara ,  Yoshio Fukayama

发明人： Kentaro Yamada ,  Masato Takahashi ,  Tatsuyuki Konagaya ,  Takeshi Katoh ,  Masaki Sakashita ,  Koichiro Takei ,  Yasuhiro Obara ,  Yoshio Fukayama

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/8238 ,  H01L21/8242 ,  H01L21/8247 ,  H01L27/088 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L27/115 ,  H01L29/423 ,  H01L29/49 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  H01L21/311

CPC分类号： H01L27/11526 ,  H01L21/28035 ,  H01L21/28525 ,  H01L21/32053 ,  H01L21/76886 ,  H01L21/82345 ,  H01L21/823462 ,  H01L21/823842 ,  H01L21/823857 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11546 ,  H01L29/4916 ,  H01L29/6659 ,  H01L29/7833

摘要： For improving the reliability of a semiconductor device having a stacked structure of a polycrystalline silicon film and a tungsten silicide film, the device is manufactured by forming a polycrystalline silicon film, a tungsten silicide film and an insulating film successively over a gate insulating film disposed over the main surface of a semiconductor substrate, and patterning them to form a gate electrode having a stacked structure consisting of the polycrystalline silicon film and tungsten silicide film. The polycrystalline silicon film has two regions, one region formed by an impurity-doped polycrystalline silicon and the other one formed by non-doped polycrystalline silicon. The tungsten silicide film is deposited so that the resistivity of it upon film formation would exceed 1000 μΩcm.

摘要翻译： 为了提高具有多晶硅膜和硅化钨膜的堆叠结构的半导体器件的可靠性，通过在布置在其上的栅极绝缘膜上依次形成多晶硅膜，硅化钨膜和绝缘膜来制造器件 半导体衬底的主表面，并将其图形化以形成具有由多晶硅膜和硅化钨膜组成的堆叠结构的栅电极。 多晶硅膜具有两个区域，一个区域由杂质掺杂多晶硅形成，另一个区域由非掺杂多晶硅形成。 沉积硅化钨膜使其在成膜时的电阻率将超过1000微克。

公开(公告)号：US06657020B1

公开(公告)日：2003-12-02

申请号：US09554762

申请日：2000-07-20

申请人： Minoru Terano ,  Tetsuya Matsukawa ,  Hideshi Satake ,  Masato Takahashi

发明人： Minoru Terano ,  Tetsuya Matsukawa ,  Hideshi Satake ,  Masato Takahashi

IPC分类号： C08F201

CPC分类号： C08F297/083 ,  C08F210/16 ,  C08F4/6465 ,  C08F4/6495

摘要： A process for preparing polypropylene-b-poly(ethylene-co-propylene) by the use of a tubular continuous polymerizer in the presence of an olefin-polymerizing catalyst comprising a solid catalyst component (1) composed of titanium and halogen; an organosilicon compound (2); and, if necessary, at least one electron-donating compound (3) selected from the group consisting of organosilicon compounds represented by the general formula: RnSi(OR′)4−n (wherein R and R′ are each independently a C1-C10 hydrocarbon group; and n is an integer of 1 to 3) and nitrogenous heterocyclic compounds, wherein the solid catalyst component (1) is preliminarily brought into contact with the organosilicon compound (2) in the presence of the electron-donating compound (3), and then a polypropylene segment is formed through polymerization, followed by formation of a poly(ethylene-co-propylene) segment at the end of the polypropylene segment through polymerization. The process enables efficient preparation of the polymer with a reduced content of inorganic contaminants, even when the polymer is one having a weight-average molecular weight of as high as 100,000 or more.

摘要翻译： 在包含由钛和卤素组成的固体催化剂组分（1）的烯烃聚合催化剂存在下，通过使用管状连续聚合反应器制备聚丙烯-b-聚（乙烯 - 共 - 丙烯）的方法; 有机硅化合物（2）; 和（如果需要）至少一种供体化合物（3），其选自由通式RnSi（OR'）4-n表示的有机硅化合物（其中R和R'各自独立地为C1-C10 烃基，n为1〜3的整数）和含氮杂环化合物，其中固体催化剂组分（1）在电子给予化合物（3）的存在下预先与有机硅化合物（2）接触， ，然后通过聚合形成聚丙烯链段，随后通过聚合在聚丙烯部分的末端形成聚（乙烯 - 共 - 丙烯）链段。 该方法即使当聚合物的重均分子量高达100,000或更高时，即可有效地制备具有降低的无机污染物含量的聚合物。

公开(公告)号：US06542115B2

公开(公告)日：2003-04-01

申请号：US09995597

申请日：2001-11-29

申请人： Masato Takahashi

发明人： Masato Takahashi

IPC分类号： H04D7185

CPC分类号： G01S19/53 ,  G01S3/28

摘要： A GPS receiver includes an antenna unit, a GPS receiver unit, a result output unit, a data transmitting unit, a data receiving unit, a data processing unit for carrying out calculation on data containing a strength value of each received GPS satellite signal to limit or determine an azimuth of a measurement direction, and a use mode control switch.

摘要翻译： GPS接收机包括天线单元，GPS接收单元，结果输出单元，数据发送单元，数据接收单元，数据处理单元，用于对包含每个接收的GPS卫星信号的强度值的数据进行计算以限制 或确定测量方向的方位角，以及使用模式控制开关。

公开(公告)号：US06441884B1

公开(公告)日：2002-08-27

申请号：US09567000

申请日：2000-05-09

申请人： Masato Takahashi ,  Futoshi Mori

发明人： Masato Takahashi ,  Futoshi Mori

IPC分类号： G03B2742

CPC分类号： G03F7/70066 ,  G03F7/2002 ,  G03F7/70766 ,  G03F7/70833 ,  G03F7/709

摘要： An optical system for illumination is divided into a first optical system (10A) and a second optical system (10B). The second optical system (10B) is fixed to an exposure apparatus main body (SP). The exposure apparatus main body (SP) is provided to a base frame (41) via hard rubbers (31A and 32B) and piezo actuators (32A and 32B), and isolates vibration from the surface of the floor. The first optical system (10A) is supported separately from the exposure apparatus (SP) via actuators such as air mounts (14A and 14B) and voice coil motors (VCMs) (12A, 12B, 13A, and 13B) etc. A control system (50) compensates for the relative positional deviation between the first optical system (10A) and the second optical system (10B) detected by displacement sensors (26A and 26B) by controlling the position of the first optical system (10A) by driving the above described actuators.

摘要翻译： 用于照明的光学系统被分为第一光学系统（10A）和第二光学系统（10B）。 第二光学系统（10B）固定在曝光装置主体（SP）上。 曝光装置主体（SP）通过硬橡胶（31A和32B）和压电致动器（32A和32B）设置到基座框架（41），并且隔离来自地板表面的振动。 第一光学系统（10A）通过诸如空气支架（14A和14B）和音圈电机（VCM）（12A，12B，13A和13B）等的致动器与曝光装置（SP）分开支撑。控制系统 （50）通过驱动上述方式来控制第一光学系统（10A）的位置来补偿由位移传感器（26A和26B）检测到的第一光学系统（10A）和第二光学系统（10B）之间的相对位置偏差 描述的致动器。

公开(公告)号：US06392741B1

公开(公告)日：2002-05-21

申请号：US09476211

申请日：1999-12-30

申请人： Futoshi Mori ,  Masato Takahashi

发明人： Futoshi Mori ,  Masato Takahashi

IPC分类号： G03B2742

CPC分类号： G03F7/70725 ,  F16F15/02 ,  F16F15/03 ,  G03F7/70833 ,  G03F7/709

摘要： A projection exposure apparatus transferring a pattern from a reticle to a wafer includes at least three vibration isolating pads, a vibration isolating stand on the vibration stand, a plurality of actuators driving the vibration isolating stand in a vertical direction, at least two stages over the vibration isolating stand, the stages mounting the wafer and the reticle, at least one displacement sensor at the vibration isolating stand and detecting a displacement of the vibration isolating stand, at least one acceleration sensor at the vibration isolating stand and detecting an acceleration and deceleration of the vibration isolating stand, a vibration control system coupled to the displacement sensors and the acceleration sensors, and controlling the actuators based on outputs of the displacement sensors and the acceleration sensor, a position measuring device positioned on the vibration isolating pads and measuring a position of the stages, and a vibration compensating system coupled to the vibration control system and receiving a command value to cancel a reaction force caused by the acceleration and deceleration of the stages in advance.

摘要翻译： 将图案从掩模版传送到晶片的投影曝光装置包括至少三个隔振垫，振动台上的隔振支架，在垂直方向上驱动隔振支架的多个致动器，至少两个阶段 隔振台，安装晶片和掩模版的台阶，隔振台上的至少一个位移传感器，并检测隔振台的位移，隔振台上的至少一个加速度传感器，并检测振动隔离台的加速和减速 隔振支架，耦合到位移传感器和加速度传感器的振动控制系统，并且基于位移传感器和加速度传感器的输出来控制致动器;位置测量装置，其位于振动隔离垫上并测量位置传感器的位置; 阶段和振动补偿系统耦合 d到振动控制系统并且接收预先取消由级的加速和减速引起的反作用力的指令值。

公开(公告)号：US06297594B1

公开(公告)日：2001-10-02

申请号：US09495455

申请日：2000-02-01

申请人： Shigeki Sakai ,  Masato Takahashi

发明人： Shigeki Sakai ,  Masato Takahashi

IPC分类号： H01J724

CPC分类号： H01J37/32192 ,  H01J37/32357 ,  H01J37/32678

摘要： A plasma source includes a magnetic field generating unit for generating within a plasma chamber a magnetic field B for electron cyclotron resonance, which has a direction crossing a direction in which the plasma is discharged through a plasma emission aperture. The plasma source is applied to an ion implanting apparatus.

摘要翻译： 等离子体源包括用于在等离子体室内产生用于电子回旋共振的磁场B的磁场产生单元，该磁场具有与通过等离子体发射孔排出等离子体的方向相交叉的方向。 将等离子体源施加到离子注入装置。

公开(公告)号：US5026272A

公开(公告)日：1991-06-25

申请号：US356203

申请日：1989-05-23

申请人： Masato Takahashi ,  Kazuo Seki ,  Tetsuya Yamada ,  Yukuo Morohoshi

发明人： Masato Takahashi ,  Kazuo Seki ,  Tetsuya Yamada ,  Yukuo Morohoshi

IPC分类号： F23N5/08 ,  F23N5/24

CPC分类号： F23N5/082 ,  F23N5/242 ,  F23N2029/06 ,  F23N2031/00 ,  F23N5/08

摘要： A combustion control device capable of detecting a self-discharge state caused by a failure of an ultraviolet ray detecting tube by interrupting flames from a combustion mechanism to an ultraviolet ray detecting tube by opening and closing a shutter, integrating, by an integrating circuit, detection signals from this ultraviolet ray detecting tube only when the shutter is closed, comparing the result of this integration with a preset judgement level by use of a first judgement circuit, and determining a failure by comparing a result of this comparison with a preset failure judgement frequency by use of a second judgement circuit, thereby improving maintainability.

摘要翻译： 一种燃烧控制装置，其能够通过打开和关闭快门来中断来自燃烧机构的火焰到紫外线检测管的紫外线检测管的故障而检测自身放电状态，通过积分电路将检测 仅当快门关闭时来自该紫外线检测管的信号，通过使用第一判断电路将该积分的结果与预设判断水平进行比较，并且通过将该比较的结果与预设的故障判断频率进行比较来确定故障 通过使用第二判断电路，从而提高可维护性。