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61.发明申请公开(公告)号：US20100148636A1
公开(公告)日：2010-06-17
申请号：US12642048
申请日：2009-12-18
申请人： Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Masanori Ueda
发明人： Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Masanori Ueda
IPC分类号： H01L41/047
CPC分类号： H03H9/174 , H03H9/02015 , H03H9/02118 , H03H9/02157 , H03H9/13 , H03H9/132 , H03H9/175 , H03H9/568 , H03H2003/0428
摘要： A piezoelectric thin film resonant element includes a resonant portion having a laminate structure made up of a lower electrode, an upper electrode and a piezoelectric film arranged between these two electrodes. The lower electrode has an ellipsoidal plan-view shape and an outer circumference formed with an inclined portion inclined at an angle (about 30° for example) lying within a range of 25° through 55°. The upper electrode has an ellipsoidal plan-view shape. An additional film is provided on the upper electrode at a portion corresponding to the inclined portion of the lower electrode.
摘要翻译： 压电薄膜谐振元件包括具有由下电极，上电极和布置在这两个电极之间的压电薄膜构成的层叠结构的谐振部分。 下电极具有椭圆形平面形状，外周形成为倾斜角度（例如约30°）倾斜的倾斜部分，其位于25°至55°的范围内。 上部电极具有椭圆形平面形状。 在对应于下电极的倾斜部分的部分的上电极上设置附加膜。
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公开(公告)号：US07737806B2
公开(公告)日：2010-06-15
申请号：US12122246
申请日：2008-05-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
CPC分类号： H03H9/174 , H03H9/0211 , H03H9/02133 , H03H9/132 , H03H9/173
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。
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公开(公告)号：US20090166068A1
公开(公告)日：2009-07-02
申请号：US12343784
申请日：2008-12-24
CPC分类号： H05K1/16 , H01L2224/16 , H05K1/0306 , H05K1/113 , H05K3/246 , H05K3/4061 , H05K3/4611 , H05K3/4629 , H05K2201/0195 , H05K2201/0347 , H05K2201/09436
摘要： An electronic component includes: a multilayer ceramic substrate that has a penetration electrode formed therein, and has a passive element provided on the upper face thereof; an insulating film that is provided on the multilayer ceramic substrate, and has an opening above the penetration electrode; a first connecting terminal that is provided on the insulating film so as to cover the opening, and is electrically connected to the penetration electrode; and a second connecting terminal that is provided on a region of the insulating film other than the opening region.
摘要翻译： 电子部件包括：多层陶瓷基板，其具有形成在其中的穿透电极，并且在其上表面上设置无源元件; 绝缘膜，设置在所述多层陶瓷基板上，并且在所述贯通电极的上方具有开口部; 第一连接端子，设置在绝缘膜上以覆盖开口，并且电连接到穿透电极; 以及第二连接端子，其设置在除了开口区域之外的绝缘膜的区域上。
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公开(公告)号：US20080284543A1
公开(公告)日：2008-11-20
申请号：US12122246
申请日：2008-05-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
IPC分类号： H03H9/54 , H01L41/047
CPC分类号： H03H9/174 , H03H9/0211 , H03H9/02133 , H03H9/132 , H03H9/173
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。
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65.发明申请PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE 审中-公开压电薄膜共振器，声波装置和用于制造声波装置的方法公开(公告)号：US20080169885A1
公开(公告)日：2008-07-17
申请号：US11972316
申请日：2008-01-10
申请人： Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
发明人： Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
CPC分类号： H03H3/04 , H03H9/174 , H03H2003/0428 , Y10T29/42
摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.
摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 设置在下电极上的压电膜; 设置在所述压电膜上以与所述下电极相对的所述压电膜的上电极，从而限定谐振部; 以及设置在所述上部电极上的重量载荷膜，所述重量载荷膜设置在所述共振部分中并且具有小于所述共振部分的面积的面积。
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公开(公告)号：US20080129417A1
公开(公告)日：2008-06-05
申请号：US11907704
申请日：2007-10-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H03H9/56
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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公开(公告)号：US08941450B2
公开(公告)日：2015-01-27
申请号：US13431669
申请日：2012-03-27
CPC分类号： H03H9/173 , H03H3/04 , H03H9/0095 , H03H9/02086 , H03H9/131 , H03H9/132 , H03H9/568 , H03H9/605 , H03H2003/0471
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 频率控制膜设置在谐振区域的上侧，其中上电极和下电极在主谐振器和子谐振器中的至少一个中彼此面对。 频率控制膜具有多个凸形图案，并且凸形图案以公共间距布置以进行杂散调整，并且在主谐振器和子谐振器中具有不同的区域。
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公开(公告)号：US08756777B2
公开(公告)日：2014-06-24
申请号：US12647794
申请日：2009-12-28
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H04R17/00 , H03H9/205 , H03H9/56 , H03H9/64 , H03H9/15 , H03H9/17 , H03H9/54 , H03H9/60 , H03H3/00 , H03H3/007
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.
摘要翻译： 一种制造包括第一和第二谐振器的梯形滤波器的方法包括：在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜，在压电膜上形成导电膜， 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜，在第二区域中形成第一膜，第二膜和导电膜的图案，并且在第一区域中形成第一膜和导电膜的图案，以从导体形成相应的上电极 电影; 然后蚀刻压电膜，分别在第一和第二区域形成压电膜的各自图案。
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公开(公告)号：US08344590B2
公开(公告)日：2013-01-01
申请号：US13431642
申请日：2012-03-27
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜，频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。
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70.发明授权公开(公告)号：US08125123B2
公开(公告)日：2012-02-28
申请号：US12642048
申请日：2009-12-18
申请人： Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Masanori Ueda
发明人： Tokihiro Nishihara , Motoaki Hara , Shinji Taniguchi , Masafumi Iwaki , Tsuyoshi Yokoyama , Masanori Ueda
IPC分类号： H01L41/047
CPC分类号： H03H9/174 , H03H9/02015 , H03H9/02118 , H03H9/02157 , H03H9/13 , H03H9/132 , H03H9/175 , H03H9/568 , H03H2003/0428
摘要： A piezoelectric thin film resonant element includes a resonant portion having a laminate structure made up of a lower electrode, an upper electrode and a piezoelectric film arranged between these two electrodes. The lower electrode has an ellipsoidal plan-view shape and an outer circumference formed with an inclined portion inclined at an angle (about 30° for example) lying within a range of 25° through 55°. The upper electrode has an ellipsoidal plan-view shape. An additional film is provided on the upper electrode at a portion corresponding to the inclined portion of the lower electrode.
摘要翻译： 压电薄膜谐振元件包括具有由下电极，上电极和布置在这两个电极之间的压电薄膜构成的层叠结构的谐振部分。 下电极具有椭圆形平面形状，外周形成为倾斜角度（例如约30°）倾斜的倾斜部分，其位于25°至55°的范围内。 上部电极具有椭圆形平面形状。 在对应于下电极的倾斜部分的部分的上电极上设置附加膜。
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