Method for depositing magnetic film on both substrate surfaces and
mechanism for performing same
    71.
    发明授权
    Method for depositing magnetic film on both substrate surfaces and mechanism for performing same 失效
    在两个基板表面上沉积磁性膜的方法和用于执行它们的机构

    公开(公告)号:US5762766A

    公开(公告)日:1998-06-09

    申请号:US747834

    申请日:1996-11-13

    摘要: A sputtering method includes depositing a magnetic thin film on both surfaces of a substrate by magnetron sputtering, wherein magnetic assemblies of magnetron cathodes form a magnetic field asymmetric to a rotation axis perpendicular to the substrate on a target, and a pair of magnet assemblies of magnetron cathodes opposing each other rotate at the same speed and in the same direction. A sputtering mechanism for depositing a magnetic thin film on both surfaces of the substrate by magnetron sputtering, includes a controller system for controlling a rotation drive unit of each magnet assembly on a pair of magnetron cathodes being held in common.

    摘要翻译: 溅射方法包括通过磁控溅射在基板的两个表面上沉积磁性薄膜,其中磁控阴极的磁性组件形成与靶材上垂直于基板的旋转轴不对称的磁场,以及磁控管的一对磁体组件 彼此相对的阴极以相同的速度和相同的方向旋转。 用于通过磁控溅射在基板的两个表面上沉积磁性薄膜的溅射机构包括控制系统,用于控制一对共同保持的一对磁控阴极上的每个磁体组件的旋转驱动单元。

    Reciprocating magnetic heat pump apparatus with multiple permanent magnets in different configurations
    74.
    发明授权
    Reciprocating magnetic heat pump apparatus with multiple permanent magnets in different configurations 有权
    具有不同结构的多个永磁体的往复式磁热泵装置

    公开(公告)号:US09546803B2

    公开(公告)日:2017-01-17

    申请号:US13453216

    申请日:2012-04-23

    IPC分类号: F25B21/00 F25B25/00

    摘要: A magnetic heat pump cycle has a first to a fourth steps, which are repeatedly carried out. In the first step, a movement of heat medium is stopped by a pressure valve and a pressure accumulating tank and a magnetic field is applied by a magnetic-field control unit to a magnetic working material. In the second step, the pressure valve is opened so that the heat medium flows in a working chamber from a second axial end to a first axial end, and the magnetic field is increased depending on a moving speed of the heat medium. In the third step, the movement of the heat medium is stopped and the magnetic field is decreased. In the fourth step, the heat medium is moved in a reversed direction and the magnetic field is decreased depending on the moving speed of the heat medium.

    摘要翻译: 磁热循环具有反复进行的第一至第四步骤。 在第一步骤中,通过压力阀和蓄压池停止热介质的移动,并且磁场控制单元将磁场施加到磁性加工材料。 在第二步骤中,打开压力阀,使得热介质在工作室中从第二轴向端流到第一轴向端,并且磁场根据热介质的移动速度增加。 在第三步骤中,停止热介质的移动并减小磁场。 在第四步骤中,热介质沿相反方向移动,磁场根据热介质的移动速度而减小。

    Magneto-caloric effect type heat pump apparatus
    75.
    发明授权
    Magneto-caloric effect type heat pump apparatus 有权
    磁热效应式热泵装置

    公开(公告)号:US09534814B2

    公开(公告)日:2017-01-03

    申请号:US13450622

    申请日:2012-04-19

    IPC分类号: F25B21/00 B60H1/00 B60H1/32

    摘要: A magneto-caloric effect type heat pump apparatus includes a magneto-caloric element which generates heat when an external magnetic field is applied to and which absorbs heat when the external magnetic field is removed from; a magnetic field switcher which switches the applying and the removal of the external magnetic field from each other; a pump pumping a heat transport medium between a low-temperature end and a high-temperature end of the magneto-caloric element; and an auxiliary heat source device which supplies heat of a heating element to the magneto-caloric element.

    摘要翻译: 磁热效应式热泵装置包括:当施加外部磁场并在外部磁场被去除时吸收热量时产生热的磁热量元件; 切换外部磁场的施加和去除的磁场切换器; 泵送在所述磁热量元件的低温端和高温端之间的热传输介质; 以及将加热元件的热​​量提供给磁热量元件的辅助热源装置。

    Sputtering device and sputtering method
    77.
    发明授权
    Sputtering device and sputtering method 有权
    溅射装置和溅射法

    公开(公告)号:US08968538B2

    公开(公告)日:2015-03-03

    申请号:US13121338

    申请日:2009-09-29

    摘要: A magnetic film having excellent uniformity in in-plane distribution of film thickness or sheet resistance is formed when the film is formed by forming a magnetic field on a processing surface of a substrate (21) and performing oblique incidence sputtering by using high discharge power.A sputtering apparatus (1) is provided with a substrate holder (22) for holding rotatably the substrate (21) in the surface direction of the processing surface of the substrate; a substrate magnetic field forming device (30) which is disposed to surround the substrate (21) and forms a magnetic field on the processing surface of the substrate (21); cathodes (41) which are arranged diagonally above the substrate (21) and are supplied with electric discharge power; a position detecting device (23) for detecting a rotation position of the substrate (21); and a control device (50) which adjusts the rotation speed of the substrate (21) in accordance with the rotation position detected by the position detecting device (23).

    摘要翻译: 当通过在基板(21)的处理表面上形成磁场并且通过使用高放电电力进行倾斜入射溅射形成膜时,形成膜厚度或薄层电阻的面内分布均匀性优异的磁性膜。 溅射装置(1)设置有用于在基板的处理表面的表面方向上可旋转地保持基板(21)的基板保持器(22) 衬底磁场形成装置(30),被设置为围绕所述衬底(21)并在所述衬底(21)的所述处理表面上形成磁场; 在基板(21)上方对角配置并供给放电电力的阴极(41) 位置检测装置,用于检测所述基板的旋转位置; 以及根据由位置检测装置(23)检测到的旋转位置来调整基板(21)的转速的控制装置(50)。

    Rotor for axial gap-type permanent magnetic rotating machine
    79.
    发明授权
    Rotor for axial gap-type permanent magnetic rotating machine 有权
    转子用于轴向间隙式永磁旋转机

    公开(公告)号:US08823235B2

    公开(公告)日:2014-09-02

    申请号:US12889849

    申请日:2010-09-24

    IPC分类号: H02K1/27

    CPC分类号: H02K1/2793 H01F41/0293

    摘要: An axial gap-type permanent magnetic rotating machine comprises a rotor comprising a rotating shaft having an axis of rotation, a rotor yoke of disc shape radially extending from the shaft, and a plurality of permanent magnet segments circumferentially arranged on a surface of the rotor yoke such that each permanent magnet segment may have a magnetization direction parallel to the axis of rotation, and a stator having a plurality of circumferentially arranged coils and disposed to define an axial gap with the rotor. In the rotor, each permanent magnet segment is an assembly of two or more divided permanent magnet pieces, and the coercive force near the surface of the magnet piece is higher than that in the interior of the magnet piece.

    摘要翻译: 一种轴向间隙型永磁旋转机械,包括:转子,其包括具有旋转轴的旋转轴,从轴径向延伸的盘形转子轭,以及周向布置在转子轭的表面上的多个永磁体段 使得每个永磁体段可以具有平行于旋转轴线的磁化方向,以及具有多个周向排列的线圈并且被设置成限定与转子的轴向间隙的定子。 在转子中,每个永磁体段是两个或更多个分开的永磁体片的组件,并且磁体片表面附近的矫顽力高于磁片内部的矫顽力。