公开(公告)号：US08197915B2

公开(公告)日：2012-06-12

申请号：US12416809

申请日：2009-04-01

申请人： Takahiro Oka ,  Akira Shimizu

发明人： Takahiro Oka ,  Akira Shimizu

IPC分类号： H05H1/24 ,  C23C16/00

CPC分类号： C23C16/402 ,  C23C16/45542 ,  G03F7/40 ,  H01L21/02164 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/0337 ,  H01L21/32139

摘要： A method of depositing a silicon oxide film on a resist pattern or etched lines formed on a substrate by plasma enhanced atomic layer deposition (PEALD) includes: providing a substrate on which a resist pattern or etched lines are formed in a PEALD reactor; controlling a temperature of a susceptor on which the substrate is placed at less than 50° C. as a deposition temperature; introducing a silicon-containing precursor and an oxygen-supplying reactant to the PEALD reactor and applying RF power therein in a cycle, while the deposition temperature is controlled substantially or nearly at a constant temperature of less than 50° C., thereby depositing a silicon oxide atomic layer on the resist pattern or etched lines; and repeating the cycle multiple times substantially or nearly at the constant temperature to deposit a silicon oxide atomic film on the resist pattern or etched lines.

摘要翻译： 通过等离子体增强原子层沉积（PEALD）在抗蚀剂图案或在衬底上形成的蚀刻线上沉积氧化硅膜的方法包括：提供在其中在PEALD反应器中形成抗蚀剂图案或蚀刻线的衬底; 将其上放置基板的基座的温度控制在低于50℃作为沉积温度; 在PEALD反应器中引入含硅前体和供氧反应物并在其中施加RF功率，同时基本上或几乎处于小于50℃的恒定温度下控制沉积温度，从而沉积硅 抗蚀剂图案或蚀刻线上的氧化物原子层; 并且在恒定温度下基本上或接近多次重复该循环，以将氧化硅原子膜沉积在抗蚀剂图案或蚀刻线上。

公开(公告)号：US20120028381A1

公开(公告)日：2012-02-02

申请号：US13264524

申请日：2010-04-12

申请人： Shinsuke Tachibana ,  Akira Shimizu

发明人： Shinsuke Tachibana ,  Akira Shimizu

IPC分类号： H01L21/66 ,  G01R31/26

CPC分类号： G01R31/2605 ,  H02S50/10

摘要： A solar battery panel inspection apparatus is an apparatus for inspecting a solar battery panel including a transparent insulating substrate having a main surface, and a transparent electrode layer, a semiconductor photoelectric conversion layer and a back electrode layer which are sequentially stacked and having an outer circumferential insulating region in which the main surface is exposed, to check the insulation performance of the outer circumferential insulating region. The solar battery panel inspection apparatus includes the first terminal to be brought into contact with the back electrode layer; the second terminal to be brought into contact with a region of or in proximity to an outer circumferential edge of the outer circumferential insulating region; one or more third terminals to be brought into contact with the outer circumferential insulating region between the first terminal and the second terminal; a voltage application unit for applying a voltage each between two terminals selected from these terminals; and a current detection unit detecting a current flowing between the two terminals to which a voltage is applied.

摘要翻译： 太阳能电池面板检查装置是一种用于检查包括具有主表面的透明绝缘基板和透明电极层，半导体光电转换层和背电极层的太阳能电池面板的装置，其依次层叠并具有外周 绝缘区域，其中主表面被暴露，以检查外周绝缘区域的绝缘性能。 太阳能电池面板检查装置包括与背面电极层接触的第一端子; 所述第二端子与所述外周绝缘区域的外周边缘的区域接近或接近; 一个或多个第三端子与第一端子和第二端子之间的外周绝缘区域接触; 电压施加单元，用于在从这些端子中选择的两个端子之间施加电压; 以及电流检测单元，检测在施加了电压的两个端子之间流动的电流。

公开(公告)号：US20110265845A1

公开(公告)日：2011-11-03

申请号：US13143811

申请日：2010-01-04

申请人： Yoshiyuki Nasuno ,  Takanori Nakano ,  Akira Shimizu

发明人： Yoshiyuki Nasuno ,  Takanori Nakano ,  Akira Shimizu

IPC分类号： H01L31/05 ,  H01L31/042

CPC分类号： H01L31/1804 ,  H01L31/02 ,  H01L31/0201 ,  H01L31/044 ,  H01L31/046 ,  H01L31/0463 ,  Y02E10/547 ,  Y02P70/521

摘要： The thin-film solar cell module according to the present invention has: a substrate; and a cell module having three or more cell strings, each of which has a constant width, wherein each cell string has a plurality of solar cells having the same width as the cell string and connected in series, the cell strings have the same length as the solar cells connected in series and are provided on the substrate in parallel connection so as to be aligned, the solar cells respectively have a front surface electrode, a photoelectric conversion layer and a rear surface electrode layered in this order, each cell string has contact lines electrically connecting the front surface electrode of a first solar cell to the rear surface electrode of a second solar cell, and the cell strings at both ends in the three or more cell strings have a width narrower than the other cell string.

摘要翻译： 根据本发明的薄膜太阳能电池模块具有：基板; 以及具有三个以上的单元串的单元模块，每个单元串均具有恒定的宽度，其中每个单元串具有多个具有与单元串相同宽度的太阳能电池并串联连接，单元串的长度与 太阳能电池串联连接并且设置在基板上并联连接以对准，太阳能电池分别具有依次层叠的前表面电极，光电转换层和背面电极，每个电池串具有接触 将第一太阳能电池的前表面电极电连接到第二太阳能电池的背面电极的线，并且三个或更多个电池串中的两端的电池串的宽度比其他电池串窄。

公开(公告)号：US20110217838A1

公开(公告)日：2011-09-08

申请号：US12718731

申请日：2010-03-05

申请人： Julian J. Hsieh ,  Nobuyoshi Kobayashi ,  Akira Shimizu ,  Kiyohiro Matsushita ,  Atsuki Fukazawa

发明人： Julian J. Hsieh ,  Nobuyoshi Kobayashi ,  Akira Shimizu ,  Kiyohiro Matsushita ,  Atsuki Fukazawa

IPC分类号： H01L21/768

CPC分类号： H01L21/768

摘要： A method for forming an interconnect structure with airgaps, includes: providing a structure having a trench formed on a substrate; depositing a spacer oxide layer on sidewalls of the trench as sidewall spacers by plasma enhanced atomic layer deposition; filling the trench having the sidewall spacers with copper; removing the sidewall spacers to form an airgap structure; and encapsulating the airgap structure, wherein airgaps are formed between the filled copper and the sidewalls of the trench.

摘要翻译： 一种用气隙形成互连结构的方法，包括：提供在衬底上形成沟槽的结构; 通过等离子体增强的原子层沉积在沟槽的侧壁上沉积间隔氧化物层作为侧壁间隔物; 用铜填充具有侧壁间隔物的沟槽; 去除侧壁间隔件以形成气隙结构; 并且封装气隙结构，其中在填充的铜和沟槽的侧壁之间形成气隙。

公开(公告)号：US20110073362A1

公开(公告)日：2011-03-31

申请号：US12996432

申请日：2009-06-03

申请人： Akira Shimizu

发明人： Akira Shimizu

IPC分类号： H05K5/00

CPC分类号： H01L31/02008 ,  H02S40/34 ,  Y02E10/50

摘要： According to one embodiment, a terminal box includes a box case placed on and fixed to a back film of a solar cell string and a terminal panel formed on the box case. The box case includes a case main body placed on and fixed to the back film of the solar cell string and a terminal panel fixing portion for placing and fixing the terminal panel above the case main body. An opening for passing an output lead wire through the terminal panel is formed continuously from the bottom face of the case main body to the top face of the terminal panel. One edge of the terminal panel is provided so as to protrude from the terminal panel fixing portion such that the tip of the output lead wire can be bent and latched on.

摘要翻译： 根据一个实施例，接线盒包括放置在太阳能电池串的背膜上并固定到盒子壳体上形成的端子板的盒壳体。 箱体包括放置在太阳能电池串的背膜上并固定到太阳能电池串的背膜上的壳体主体和用于将端子板放置和固定在壳体主体上方的端子板固定部分。 用于使输出引线通过端子板的开口从壳体主体的底面到端子板的顶面连续地形成。 端子板的一个边缘设置成从端子板固定部分突出，使得输出引线的尖端可以被弯曲和锁定。

公开(公告)号：US07902451B2

公开(公告)日：2011-03-08

申请号：US11884357

申请日：2006-02-08

申请人： Akira Shimizu

发明人： Akira Shimizu

IPC分类号： H01L31/042

CPC分类号： H01L31/02008 ,  H01L31/02 ,  H01L31/046 ,  H01L31/0504 ,  H02S20/23 ,  Y02B10/12 ,  Y02E10/50

摘要： A plurality of photoelectric conversion elements delimited by connection line regions and isolation line regions are provided on a glass substrate having an external profile of a right triangle. A connection line region is configured to connect photoelectric conversion elements in series. An isolation line region is configured to electrically isolate adjacent photoelectric conversion elements and to separate (divide) photoelectric conversion elements by a predetermined area. A connection line region is orthogonal to an isolation line region. The external profile of a photoelectric conversion elements represents a rectangle. An external interconnection to electrically connect photoelectric conversion elements is formed at an outer circumferential region of the glass substrate at the side outer to the region where photoelectric conversion elements are formed. Thus, there can be obtained an integrated type solar cell allowing connection between photoelectric conversion elements without difficulty and of efficient photoelectric conversion property.

摘要翻译： 在具有直角三角形的外部轮廓的玻璃基板上设置由连接线区域和隔离线区域界定的多个光电转换元件。 连接线区域被配置为串联连接光电转换元件。 隔离线区域被配置为电隔离相邻的光电转换元件并将光电转换元件分离（划分）预定区域。 连接线区域与隔离线区域正交。 光电转换元件的外部轮廓表示矩形。 在光电转换元件的形成区域的外侧的一侧的玻璃基板的外周区域形成有用于电连接光电转换元件的外部互连。 因此，可以获得容易连接光电转换元件和有效的光电转换特性的集成型太阳能电池。

公开(公告)号：US20100293156A1

公开(公告)日：2010-11-18

申请号：US12712662

申请日：2010-02-25

申请人： Michiko Tanaka ,  Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Shinji Fujiwara ,  Nobuo Kawamura

发明人： Michiko Tanaka ,  Kazutomo Ushijima ,  Akira Shimizu ,  Seisuke Tokuda ,  Shinji Fujiwara ,  Nobuo Kawamura

IPC分类号： G06F17/30

CPC分类号： G06F17/30306

摘要： Provided is a database processing system including: a computer for outputting data in response to a received query request; and a storage system including a storage device for storing the data, in which: the storage device stores a plurality of partial indices indicating a storage location of the data; the data stored in the storage device is grouped; and the computer is configured to: receive the query request for the data; acquire one of the plurality of partial indices; specify, based on the query request for the data and the acquired one of the plurality of partial indices, a location at which the requested data is stored; and send a request to acquire the data stored at the specified location to the storage system. Accordingly, in the database processing system, a time period necessary to input and output the data is shortened.

摘要翻译： 提供了一种数据库处理系统，包括：计算机，用于响应于接收的查询请求输出数据; 以及存储系统，包括用于存储数据的存储装置，其中：所述存储装置存储指示所述数据的存储位置的多个部分索引; 存储在存储设备中的数据被分组; 并且计算机被配置为：接收对数据的查询请求; 获取所述多个部分索引中的一个; 基于所述数据的查询请求和所述多个部分索引中获取的一个部分索引，指定存储所请求的数据的位置; 并发送请求以将存储在指定位置的数据存储到存储系统。 因此，在数据库处理系统中，输入和输出数据所需的时间段被缩短。

公开(公告)号：US07734638B2

公开(公告)日：2010-06-08

申请号：US11637763

申请日：2006-12-13

申请人： Akira Shimizu ,  Takaki Nakamura

发明人： Akira Shimizu ,  Takaki Nakamura

IPC分类号： G06F7/00 ,  G06F17/30

CPC分类号： G06F17/30067 ,  Y10S707/99933

摘要： A file system program that controls a processor to create an attribute information area in which a registered keyword as metadata of the data attached to the file; wherein the file system program comprises: a file access control module that controls access to the file; and a file search module that searches for the file using an inputted keyword, wherein the file search module comprises: an attribute information search module that searches for a file by comparing the registered keyword and the inputted keyword; and an entire document search module that searches for a file by comparing the entire file and the inputted keyword, and wherein the file access control module comprises an. attribute information change module that changes the registered keyword based on a result of the search by the entire document search module.

摘要翻译： 一种文件系统程序，其控制处理器创建属性信息区域，其中注册的关键字作为附加到该文件的数据的元数据; 其中所述文件系统程序包括：文件访问控制模块，其控制对所述文件的访问; 以及文件搜索模块，其使用输入的关键字搜索所述文件，其中所述文件搜索模块包括：属性信息搜索模块，通过比较所述注册的关键字和所输入的关键字来搜索文件; 以及整个文档搜索模块，通过比较整个文件和输入的关键字来搜索文件，并且其中文件访问控制模块包括一个。 属性信息改变模块，其基于整个文档搜索模块的搜索结果来改变所登记的关键字。

公开(公告)号：US20100136313A1

公开(公告)日：2010-06-03

申请号：US12326000

申请日：2008-12-01

申请人： Akira Shimizu ,  Akiko Kobayashi ,  Suvi Haukka

发明人： Akira Shimizu ,  Akiko Kobayashi ,  Suvi Haukka

IPC分类号： C23C16/34 ,  B32B9/00 ,  C01B33/00

CPC分类号： C23C16/34 ,  C01B33/00 ,  C23C16/45531

摘要： A process for forming metallic nitride film by atomic layer deposition (ALD), which comprises steps for feeding into a reaction space vapor phase alternated pulses of metal source material and silicon source material in a plurality of cycles, and feeding into the reaction space vapor phase pulses of nitrogen source material. wherein a nitrogen source pulse is fed intermittently in selected cycles such that a ratio of nitrogen source pulses to silicon source pulses is less than 1:1 and a ratio of nitrogen source pulses to metal source pulses is less than 1:1, the ratio selected to produce the thin film with a resistivity between 1,000 μΩcm and 15,000 μΩcm.

摘要翻译： 一种用于通过原子层沉积（ALD）形成金属氮化物膜的方法，包括以多个循环的方式将金属源材料和硅源材料的交替脉冲进入反应空间的步骤，并将其进料到反应空间气相 脉冲氮源材料。 其中氮源脉冲以选定的循环间歇地进给，使得氮源脉冲与硅源脉冲的比例小于1:1，并且氮源脉冲与金属源脉冲的比率小于1:1，选择的比率 以产生电阻率在1000μΩ-OHgr·cm和15000μ＆OHgr·cm之间的薄膜。

公开(公告)号：US07472125B2

公开(公告)日：2008-12-30

申请号：US11144626

申请日：2005-06-06

申请人： Akira Shimizu ,  Daisuke Ito

发明人： Akira Shimizu ,  Daisuke Ito

IPC分类号： G06F7/00 ,  G06F17/30

CPC分类号： G06F11/1471 ,  G06F11/1446 ,  G06F11/1456 ,  G06F11/1469 ,  G06F2201/80 ,  Y10S707/99938

摘要： To provide a database which has plural log storage areas, and eliminates the sort in the restoration process by means of the application of logs, thereby carrying out the restoration quickly. A management server allocates DB servers to a corresponding one of plural data storage areas so as to access the corresponding one. The DB servers store data to the allocated data storage areas. When the data is referenced or updated, a log representing a data change history is stored in preset log areas for each data server. When the management server transmits a notification to change the data storage areas, area remapping logs are stored in log areas.

摘要翻译： 为了提供具有多个日志存储区域的数据库，并且通过应用日志来消除在恢复过程中的排序，从而快速地进行恢复。 管理服务器将DB服务器分配给多个数据存储区域中的相应的一个，以访问相应的数据。 数据库服务器将数据存储到分配的数据存储区域。 当引用或更新数据时，表示数据更改历史的日志将存储在每个数据服务器的预设日志区域中。 当管理服务器发送更改数据存储区域的通知时，区域重映射日志将存储在日志区域中。