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公开(公告)号：US20100136313A1
公开(公告)日：2010-06-03
申请号：US12326000
申请日：2008-12-01
申请人： Akira Shimizu , Akiko Kobayashi , Suvi Haukka
发明人： Akira Shimizu , Akiko Kobayashi , Suvi Haukka
CPC分类号： C23C16/34 , C01B33/00 , C23C16/45531
摘要： A process for forming metallic nitride film by atomic layer deposition (ALD), which comprises steps for feeding into a reaction space vapor phase alternated pulses of metal source material and silicon source material in a plurality of cycles, and feeding into the reaction space vapor phase pulses of nitrogen source material. wherein a nitrogen source pulse is fed intermittently in selected cycles such that a ratio of nitrogen source pulses to silicon source pulses is less than 1:1 and a ratio of nitrogen source pulses to metal source pulses is less than 1:1, the ratio selected to produce the thin film with a resistivity between 1,000 μΩcm and 15,000 μΩcm.
摘要翻译： 一种用于通过原子层沉积（ALD）形成金属氮化物膜的方法，包括以多个循环的方式将金属源材料和硅源材料的交替脉冲进入反应空间的步骤，并将其进料到反应空间气相 脉冲氮源材料。 其中氮源脉冲以选定的循环间歇地进给，使得氮源脉冲与硅源脉冲的比例小于1:1，并且氮源脉冲与金属源脉冲的比率小于1:1，选择的比率 以产生电阻率在1000μΩ-OHgr·cm和15000μ＆OHgr·cm之间的薄膜。
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公开(公告)号：US20100124621A1
公开(公告)日：2010-05-20
申请号：US12618355
申请日：2009-11-13
IPC分类号： C23C16/48
CPC分类号： C23C16/402 , C23C16/325 , C23C16/345 , C23C16/45542 , C23C16/45553 , H01L21/0214 , H01L21/02164 , H01L21/0217 , H01L21/02219 , H01L21/02274 , H01L21/0228
摘要： A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.
摘要翻译： 一种通过交替多次交替形成绝缘膜的方法，将前体吸附到基底上的方法和使用反应气体和等离子体处理吸附表面的方法，其中在提供前体的过程中施加等离子体 。
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公开(公告)号：US08151814B2
公开(公告)日：2012-04-10
申请号：US12353076
申请日：2009-01-13
申请人： Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
发明人： Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
IPC分类号： F17D1/17 , C23C16/448
CPC分类号： F17D1/16 , C23C16/45544 , C23C16/45561 , Y10T137/0396
摘要： A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to a precursor reservoir; outputting the mixture of the vaporized precursor and the carrier gas from the precursor reservoir; and supplying the mixture to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice.
摘要翻译： 用于控制液体前体的流动和浓缩的方法包括：将载气供应到第一自动压力调节器，并将载体气体以第一压力从其输出到前体储存器; 从前体储存器输出蒸发的前体和载气的混合物; 以及将所述混合物供应到第二自动压力调节器，并且通过孔口将所述混合物以第二压力从所述反应器输出。
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公开(公告)号：US20100124618A1
公开(公告)日：2010-05-20
申请号：US12618419
申请日：2009-11-13
IPC分类号： B05D3/04
CPC分类号： C23C16/45542 , C23C16/345 , C23C16/56
摘要： A film forming cycle based on pulse CVD or ALD is repeated multiple times to form a single layer of insulation film, while a reforming cycle is implemented in the aforementioned process, either once or multiple times per each film forming cycle, by treating the surface of formed film using a treating gas that has been activated by a plasma.
摘要翻译： 基于脉冲CVD或ALD的成膜循环重复多次以形成单层绝缘膜，而在上述过程中重整循环是每个成膜循环一次或多次，通过处理 使用已经被等离子体激活的处理气体形成膜。
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公开(公告)号：US10378106B2
公开(公告)日：2019-08-13
申请号：US12618355
申请日：2009-11-13
摘要： A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.
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公开(公告)号：US08647722B2
公开(公告)日：2014-02-11
申请号：US12618419
申请日：2009-11-13
IPC分类号： H05H1/24
CPC分类号： C23C16/45542 , C23C16/345 , C23C16/56
摘要： A film forming cycle based on pulse CVD or ALD is repeated multiple times to form a single layer of insulation film, while a reforming cycle is implemented in the aforementioned process, either once or multiple times per each film forming cycle, by treating the surface of formed film using a treating gas that has been activated by a plasma.
摘要翻译： 基于脉冲CVD或ALD的成膜循环重复多次以形成单层绝缘膜，而在上述过程中重整循环是每个成膜循环一次或多次，通过处理 使用已经被等离子体激活的处理气体形成膜。
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公开(公告)号：US20100178423A1
公开(公告)日：2010-07-15
申请号：US12353076
申请日：2009-01-13
申请人： Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
发明人： Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
IPC分类号： C23C16/455 , F17D1/16
CPC分类号： F17D1/16 , C23C16/45544 , C23C16/45561 , Y10T137/0396
摘要： A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to a precursor reservoir; outputting the mixture of the vaporized precursor and the carrier gas from the precursor reservoir; and supplying the mixture to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice.
摘要翻译： 用于控制液体前体的流动和浓缩的方法包括：将载气供应到第一自动压力调节器，并将载体气体以第一压力从其输出到前体储存器; 从前体储存器输出蒸发的前体和载气的混合物; 以及将所述混合物供应到第二自动压力调节器，并且通过孔口将所述混合物以第二压力从所述反应器输出。
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公开(公告)号：US20170190341A1
公开(公告)日：2017-07-06
申请号：US14985938
申请日：2015-12-31
申请人： Akiko Kobayashi
发明人： Akiko Kobayashi
CPC分类号： B62B3/02 , G06K7/10861 , G06Q90/00
摘要： Disclosed is a shopping cart comprising a cart body comprising one or more shelves and one or more trays configured to be detachably attachable to the one or more shelves, respectively, and reusable. The one or more trays are configured to be owned by a user, be transported by the user to a store, be attached to the one or more shelves, respectively, by the user, be loaded with items picked up by the user in the store go through in-situ scanning of the items therein for checkout, be detached from the one or more shelves, respectively, and be transported with the purchased items therein to the user's home or a destination, wherein the in-situ scanning is done by using a scanner to scan codes on the items while they are in the one or more trays.
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公开(公告)号：US06562219B2
公开(公告)日：2003-05-13
申请号：US09987940
申请日：2001-11-16
申请人： Akiko Kobayashi , Atsushi Sekiguchi , Tomoaki Koide , Minjuan Zhang , Hideki Sunayama , Shiqin Xiao , Kaoru Suzuki
发明人： Akiko Kobayashi , Atsushi Sekiguchi , Tomoaki Koide , Minjuan Zhang , Hideki Sunayama , Shiqin Xiao , Kaoru Suzuki
IPC分类号： C23C2802
CPC分类号： H01L21/76843 , C23C26/00 , C23C28/322 , C23C28/34 , C23C28/36 , C25D7/123 , H01L21/76864 , H01L21/76873
摘要： A method for the formation of copper wiring films includes the steps of forming a first copper film by a CVD method on a diffusion barrier film, which diffusion barrier film has been formed on a semiconductor substrate and in which a concavity has been established; heating the first copper film to a temperature within the range from 200 to 500° C.; and subsequently forming a second copper film on the first copper film by a plating method using the first copper film as an electrode.
摘要翻译： 形成铜布线膜的方法包括以下步骤：通过CVD方法在扩散阻挡膜上形成第一铜膜，该扩散阻挡膜已经形成在半导体衬底上并且已经建立了凹陷; 将第一铜膜加热至200〜500℃的温度范围。 并且随后通过使用第一铜膜作为电极的镀覆方法在第一铜膜上形成第二铜膜。
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公开(公告)号：US06407984B2
公开(公告)日：2002-06-18
申请号：US09042978
申请日：1998-03-17
IPC分类号： H04L1226
CPC分类号： H04L49/3081 , H04L2012/5627 , H04Q11/0478
摘要： To prevent erroneous recognitions of line failures by a network apparatus, an alarm notifying controller region is provided independent from an actual data region in a connection between a line interface of the network apparatus and a terminal interface unit (line set). When a line is set within the network apparatus, an alarm notification path from the line interface to the line set is simultaneously set. When a line failure is detected by the line interface, information is notified the alarm notification path to all of the line sets connected to this line interface. In the line sets, a signal state of an interface is changed with respect to each sort of terminal interfaces, so that the line failure is notified to the terminal.
摘要翻译： 为了防止网络装置的线路故障的错误识别，提供与网络装置的线路接口和终端接口单元（线路组）的连接中的实际数据区域独立地提供报警通知控制器区域。 当在网络设备内设置线路时，同时设置从线路接口到线路组的告警通知路径。 当线路接口检测到线路故障时，会将告警通知路径通知给与此线路接口连接的所有线路组。 在线路组中，接口的信号状态相对于每种终端接口而改变，从而将线路故障通知终端。
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