公开(公告)号：US09843779B2

公开(公告)日：2017-12-12

申请号：US15162367

申请日：2016-05-23

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Roberto Carminati

IPC: G02B26/08 ,  H04N9/31 ,  G02B26/10 ,  G02B7/182

CPC classification number: H04N9/3135 ,  B81B3/0045 ,  G02B7/1821 ,  G02B26/0858 ,  G02B26/101 ,  G02B26/105 ,  H04N9/3173

Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.

公开(公告)号：US09628919B2

公开(公告)日：2017-04-18

申请号：US14265053

申请日：2014-04-29

Applicant: STMicroelectronics S.r.l.

Inventor： Sebastiano Conti ,  Matteo Perletti ,  Roberto Carminati ,  Lorenzo Baldo ,  Alessandro Morcelli

IPC: H01L29/84 ,  H04R19/00 ,  H04R1/04 ,  H04R19/04

CPC classification number: H04R19/005 ,  H01L29/84 ,  H04R1/04 ,  H04R19/04

Abstract: An assembly of a MEMS sensor device envisages: a first die, integrating a micromechanical detection structure and having an external main face; a second die, integrating an electronic circuit operatively coupled to the micromechanical detection structure, electrically and mechanically coupled to the first die and having a respective external main face. Both of the external main faces of the first die and of the second die are set in direct contact with an environment external to the assembly, without interposition of a package.

公开(公告)号：US09544573B2

公开(公告)日：2017-01-10

申请号：US14151471

申请日：2014-01-09

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti ,  Sonia Costantini

IPC: G02B26/08 ,  H04N13/02 ,  G01B11/25 ,  G02B26/10 ,  H04N5/225

CPC classification number: G02B26/0833 ,  G01B11/2518 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/105 ,  G03B21/008 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2257 ,  H04N13/211 ,  H04N13/236 ,  H04N13/254 ,  Y10T29/49

Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。

公开(公告)号：US20160094831A1

公开(公告)日：2016-03-31

申请号：US14961507

申请日：2015-12-07

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti ,  Sonia Constantini

IPC: H04N13/02 ,  G02B26/08

CPC classification number: G02B26/0833 ,  G01B11/2518 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/105 ,  G03B21/008 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2257 ,  H04N13/211 ,  H04N13/236 ,  H04N13/254 ,  Y10T29/49

Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。

公开(公告)号：US20150377624A1

公开(公告)日：2015-12-31

申请号：US14750840

申请日：2015-06-25

Applicant: STMICROELECTRONICS, S.R.L.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

Abstract translation: MEMS器件具有通过第一弹性元件弹性地携带悬挂质量的支撑区域。 调谐动态吸收器弹性耦合到悬挂质量并且被配置为在动态吸收体的固有振荡频率下抑制作用在悬浮质量上的正交力。 调谐动态吸收器由通过第二弹性元件联接到悬挂质量的阻尼物质形成。 在一个实施例中，悬挂质量和阻尼质量形成在相同的结构层中，例如半导体材料，并且阻尼块被悬挂质量包围。

公开(公告)号：US20140353780A1

公开(公告)日：2014-12-04

申请号：US14288106

申请日：2014-05-27

Applicant: STMicroelectronics S.r.l.

Inventor： Matteo Perletti ,  Sebastiano Conti ,  Roberto Carminati ,  Marcella Capezzuto

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R19/005

Abstract: A micromechanical structure for a MEMS capacitive acoustic transducer, has: a substrate of semiconductor material; a rigid electrode, at least in part of conductive material, coupled to the substrate; a membrane, at least in part of conductive material, facing the rigid electrode and coupled to the substrate, which undergoes deformation in the presence of incident acoustic pressure waves and is arranged between the substrate and the rigid electrode and has a first surface and a second surface, in fluid communication, respectively, with a first chamber and a second chamber, the first chamber being delimited at least in part by a first wall portion and by a second wall portion formed by the substrate, and the second chamber being delimited at least in part by the rigid electrode; and a stopper element, connected between the first and second wall portions for limiting the deformations of the membrane. At least one electrode-anchorage element couples the rigid electrode to the stopper element.

Abstract translation: 用于MEMS电容式声学换能器的微机械结构具有：半导体材料的衬底; 耦合到所述衬底的至少部分导电材料的刚性电极; 至少部分导电材料的膜面向刚性电极并且耦合到衬底，所述衬底在存在入射声压波的情况下经历变形，并且布置在衬底和刚性电极之间并且具有第一表面和第二表面 分别与第一室和第二室分别流体连通的表面，第一室至少部分地由第一壁部分和由衬底形成的第二壁部分限定，并且第二室至少界定 部分由刚性电极; 以及连接在第一和第二壁部分之间以限制膜的变形的止动元件。 至少一个电极固定元件将刚性电极连接到止动元件。