摘要:
A resist composition including a base component (A) that exhibits changed solubility in an alkali developing solution under the action of acid, and an acid generator component (B) that generates acid upon exposure, wherein the acid generator component (B) includes an acid generator (B1) consisting of a compound represented by general formula (b1-2) shown below: [Chemical Formula 1] A+Z− (b1-2) wherein A+ represents an organic cation; and Z− represents an anionic cyclic group, wherein the cyclic group includes an ester linkage within the ring structure, two mutually different groups are bonded to the ring structure, one of these groups includes an ester linkage in which a carbon atom that constitutes part of the ester linkage is bonded directly to the ring structure, and the other group includes an anion moiety.
摘要翻译:一种抗蚀剂组合物,其包含在酸性作用下在碱性显影液中表现出改变的溶解性的碱成分(A)和曝光时产生酸的酸产生剂成分(B),其中,所述酸发生剂成分(B)含有酸 [化学式1] A + Z-(b1-2)其中A +表示有机阳离子,由式(b1-2)表示的化合物组成的发生剂(B1) Z-表示阴离子性环状基团,其中环状基团在环结构中包含酯键,两个相互不同的基团与环结构键合,这些基团之一包括酯键,其中构成 酯键直接键合到环结构上,另一个基团包括阴离子部分。
摘要:
A vehicular backing operation assist apparatus is coupled with a movement direction demand unit for demanding a forward or backward movement of the vehicle and a change detection unit for detecting a change of a state of the vehicle taking place in association with a start-up of the vehicle. A reverse departure, which is a backing operation for exiting a parking state, is determined to be performed if a transit period from when the change of the state is detected to when the backward movement is demanded, is within a predetermined period. A reverse parking, which is a backing operation for entering a parking state, is performed, if the transit period is greater than or equal to the predetermined period. An assist control unit then provides an assist item for a backing operation relative to either the reverse departure or the reverse parking, which is determined to be performed.
摘要:
A current source circuit has a voltage application terminal that is applied with a prescribed voltage; an output terminal that outputs the current; a first MOS transistor of which a source is connected to the voltage application terminal; a second MOS transistor of which a source is connected to a drain of the first MOS transistor and a drain is connected to the output terminal; a third MOS transistor of which a source is connected to the voltage application terminal; a fourth MOS transistor of which a source is connected to a drain of the third MOS transistor and a drain is connected to the output terminal. The current source circuit, in a state where the bias voltage is applied to the first input terminal such that the predetermined current flows into the first and fourth MOS transistors, controls turning ON/OFF of the second MOS transistor and the third MOS transistor so as to synchronize according to the switch voltage applied to the second input terminal.
摘要:
A compound represented by general formula (I) shown below; and a polymeric compound having a structural unit (a0) represented by general formula (a0-1) shown below: wherein R1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; A represents a divalent hydrocarbon group of 2 or more carbon atoms which may have a substituent; B represents a divalent hydrocarbon group of 1 or more carbon atoms which may have a substituent; and R2 represents an acid dissociable, dissolution inhibiting group.
摘要:
A positive resist composition including a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0-1) (R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R2 represents a divalent linking group, R3 represents a cyclic group containing —SO2— within the ring skeleton thereof) and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group, an acid-generator component (B) and a fluorine-containing polymeric compound (F1) having a structural unit containing a base dissociable group.
摘要:
A positive resist composition including: a polymeric compound (A1) having a structural unit (a0) that contains a “cyclic group containing —SO2—” on the side chain terminal, and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group; an acid generator component (B); and a fluorine-containing resin component having a structural unit (f1) represented by general formula (f1-0): wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; Q0 represents a single bond or a divalent linking group having a fluorine atom; and RX0 represents an acid dissociable, dissolution inhibiting group-containing group which may contain a fluorine atom, with the provision that at least one fluorine atom is contained in formula (f1-0).
摘要:
A compound represented by general formula (b-14); and acid generator consisting of the compound; and a resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-14): wherein R7″ to R9″ each independently represents an aryl group or an alkyl group, wherein two of R7″ to R9″ may be bonded to each other to form a ring with the sulfur atom, and at least one of R7″ to R9″ represents a substituted aryl group in which a portion or all of the hydrogen atoms are substituted with an alkoxyalkyloxy group or an alkoxycarbonylalkyloxy group; and X− represents an anion.
摘要:
A positive resist composition including a resin component (A) which exhibits increased solubility in an alkali developing solution under action of acid and has a structural unit (a1) represented by general formula (a1-0-2) shown below, and an acid-generator component (B) which generates acid upon exposure and includes an acid generator (B1) consisting of a compound represented by general formula (b1-12) shown below: wherein R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; X2 represents an acid dissociable, dissolution inhibiting group; and Y2 represents an alkylene group or a divalent aliphatic cyclic group; and R2—O—Y1—SO3−A+ (b1-12) wherein R2 represents a monovalent aromatic organic group; Y1 represents an alkylene group of 1 to 4 carbon atoms which may be substituted with a fluorine atom; and A+ represents a cation.
摘要:
A resist composition including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid; and an acid-generator component (B) which generates acid upon exposure, wherein said acid-generator component (B) comprises an acid generator (B1) including a compound represented by general formula (b1-11) shown below:wherein R7″ to R9″ each independently represent an aryl group or an alkyl group, wherein two of R7″ to R9″ may be bonded to each other to form a ring with the sulfur atom, and at least one of R7″ to R9″ represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent; X− represents an anion; and Rf represents a fluorinated alkyl group.
摘要:
A moving object trajectory estimating device has: a surrounding information acquisition part that acquires information on surroundings of a moving object; a trajectory estimating part that specifies another moving object around the moving object based on the acquired surrounding information and estimates a trajectory of the specified moving object; and a recognition information acquisition part that acquires recognition information on a recognizable area of the specified moving object, and the trajectory estimating part estimates a trajectory of the specified moving object, based on the acquired recognition information of the specified moving object.