Method for manufacturing SOI wafer
    71.
    发明申请
    Method for manufacturing SOI wafer 有权
    制造SOI晶圆的方法

    公开(公告)号:US20090023270A1

    公开(公告)日:2009-01-22

    申请号:US12153160

    申请日:2008-05-14

    IPC分类号: H01L21/762

    CPC分类号: H01L21/76254

    摘要: There is disclosed a method for manufacturing an SOI wafer comprising at least: implanting a hydrogen ion, a rare gas ion, or both the ions into a donor wafer formed of a silicon wafer or a silicon wafer having an oxide film formed on a surface thereof from a surface of the donor wafer, thereby forming an ion implanted layer; performing a plasma activation treatment with respect to at least one of an ion implanted surface of the donor wafer and a surface of a handle wafer, the surface of the handle wafer is to be bonded to the ion implanted surface; closely bonding these surfaces to each other; mechanically delaminating the donor wafer at the ion implanted layer as a boundary and thereby reducing a film thickness thereof to provide an SOI layer, and performing a heat treatment at 600 to 1000° C.; and polishing a surface of the SOI layer for 10 to 50 nm based on chemical mechanical polishing.A method for manufacturing with excellent productivity an SOI wafer having an SOI layer with a mirror-finished surface and high film thickness uniformity can be provided.

    摘要翻译: 公开了一种制造SOI晶片的方法,该方法至少包括:将氢离子,稀有气体离子或两者离子注入到由硅晶片或具有在其表面上形成的氧化膜的硅晶片形成的施主晶片中 从施主晶片的表面,从而形成离子注入层; 对施主晶片的离子注入表面和处理晶片的表面中的至少一个进行等离子体激活处理,把手晶片的表面与离子注入表面结合; 将这些表面彼此紧密结合; 以离子注入层的施主晶片作为边界进行机械分层,由此降低其膜厚以提供SOI层,并在600〜1000℃下进行热处理。 并且基于化学机械抛光将SOI层的表面抛光10至50nm。 可以提供具有优异的生产率的具有SOI层的具有镜面精加工表面和高膜厚均匀性的SOI晶片的方法。

    Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell
    72.
    发明申请
    Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell 有权
    单晶硅太阳能电池和单晶硅太阳能电池的制造方法

    公开(公告)号:US20080245408A1

    公开(公告)日:2008-10-09

    申请号:US12076916

    申请日:2008-03-25

    IPC分类号: H01L31/04 H01L31/028

    摘要: There is disclosed a method for manufacturing a single-crystal silicon solar cell including the steps of: implanting a hydrogen ion or a rare gas ion into a single-crystal silicon substrate; forming a transparent insulator layer on a metal substrate; performing a surface activation treatment with respect to at least one of the ion implanted surface and a surface of the transparent insulator layer; bonding these surfaces; mechanically delaminating the single-crystal silicon substrate to provide a single-crystal silicon layer; forming a plurality of second conductivity type diffusion regions in the delaminated surface side of the single-crystal silicon layer so that a plurality of first conductivity type regions and the plurality of second conductivity regions are present in the delaminated surface of the single-crystal silicon layer; respectively forming a plurality of individual electrodes on the plurality of first and second conductivity type regions of the single-crystal silicon layer; forming respective collecting electrodes; and forming a transparent protective film.

    摘要翻译: 公开了一种制造单晶硅太阳能电池的方法,包括以下步骤:将氢离子或稀有气体离子注入到单晶硅衬底中; 在金属基板上形成透明绝缘体层; 对所述离子注入表面和所述透明绝缘体层的表面中的至少一个进行表面活化处理; 粘合这些表面; 机械分层单晶硅衬底以提供单晶硅层; 在单晶硅层的分层表面侧形成多个第二导电型扩散区域,使得多个第一导电型区域和多个第二导电区域存在于单晶硅层的分层表面 ; 分别在单晶硅层的多个第一和第二导电类型区域上形成多个单独电极; 形成各个集电极; 并形成透明保护膜。

    Method for manufacturing SOQ substrate
    73.
    发明申请
    Method for manufacturing SOQ substrate 有权
    制造SOQ基板的方法

    公开(公告)号:US20080118757A1

    公开(公告)日:2008-05-22

    申请号:US11979447

    申请日:2007-11-02

    IPC分类号: B32B9/00 B29C65/00

    摘要: Hydrogen ions are implanted to a surface (main surface) of the single crystal Si substrate 10 to form the hydrogen ion implanted layer (ion-implanted damage layer) 11. As a result of the hydrogen ion implantation, the hydrogen ion implanted boundary 12 is formed. The single crystal Si substrate 10 is bonded to the quartz substrate 20 having a carbon concentration of 100 ppm or higher, and an external shock is applied near the ion-implanted damage layer 11 to delaminate the Si crystal film along the hydrogen ion implanted boundary 12 of the single crystal Si substrate 10 out of the bonded substrate. Then, the surface of the resultant silicon thin film 13 is polished to remove a damaged portion, so that an SOQ substrate can be fabricated. There can be provided an SOQ substrate highly adaptable to a semiconductor device manufacturing process.

    摘要翻译: 将氢离子注入单晶Si衬底10的表面(主表面),以形成氢离子注入层(离子注入损伤层)11。 作为氢离子注入的结果,形成氢离子注入边界12。 将单晶Si衬底10接合到碳浓度为100ppm以上的石英衬底20上,并且在离子注入损伤层11附近施加外部冲击,以沿着氢离子注入边界12剥离Si晶体膜 的单晶Si衬底10。 然后,对所得的硅薄膜13的表面进行抛光以去除损坏部分,从而可以制造出SOQ基板。 可以提供高度适应于半导体器件制造工艺的SOQ衬底。

    Method for producing single crystal silicon solar cell and single crystal silicon solar cell
    74.
    发明申请
    Method for producing single crystal silicon solar cell and single crystal silicon solar cell 有权
    单晶硅太阳能电池和单晶硅太阳能电池的制造方法

    公开(公告)号:US20080099067A1

    公开(公告)日:2008-05-01

    申请号:US11976026

    申请日:2007-10-19

    IPC分类号: B05D5/12 H01L31/00

    摘要: There is disclosed a method for producing a single crystal silicon solar cell comprising the steps of: implanting hydrogen ions or rare gas ions into a single crystal silicon substrate through an ion implanting surface thereof to form an ion implanted layer in the single crystal silicon substrate; closely contacting the single crystal silicon substrate and a transparent insulator substrate with each other via a transparent adhesive while using the ion implanting surface as a bonding surface; curing the transparent adhesive; applying an impact to the ion implanted layer to mechanically delaminate the single crystal silicon substrate thereat to leave a single crystal silicon layer; forming a plurality of diffusion regions having a second conductivity type at the delaminated surface side of the single crystal silicon layer, in a manner that a plurality of first conductivity-type regions and a plurality of second conductivity-type regions are present at the delaminated surface of the single crystal silicon layer; forming pluralities of individual electrodes on the pluralities of first and second conductivity-type regions of the single crystal silicon layer, respectively; and forming collector electrodes for the individual electrodes, respectively. There can be provided a single crystal silicon solar cell as a see-through type solar cell, including a thin-film light conversion layer made of single crystal silicon having a higher crystallinity.

    摘要翻译: 公开了一种用于制造单晶硅太阳能电池的方法,包括以下步骤:通过其离子注入表面将氢离子或稀有气体离子注入到单晶硅衬底中,以在单晶硅衬底中形成离子注入层; 通过透明粘合剂将单晶硅衬底和透明绝缘体衬底彼此紧密接触,同时使用离子注入表面作为结合表面; 固化透明胶; 对离子注入层施加冲击以在其上机械分层单晶硅衬底以留下单晶硅层; 在单晶硅层的分层表面侧形成具有第二导电类型的多个扩散区域,使得多个第一导电类型区域和多个第二导电类型区域存在于分层表面 的单晶硅层; 在单晶硅层的多个第一和第二导电类型区域上分别形成多个独立电极; 并分别形成各个电极的集电极。 可以提供作为透明型太阳能电池的单晶硅太阳能电池,其包括由具有较高结晶度的单晶硅制成的薄膜光转换层。

    Vehicle monitoring system
    75.
    发明授权
    Vehicle monitoring system 有权
    车辆监控系统

    公开(公告)号:US06819236B2

    公开(公告)日:2004-11-16

    申请号:US09804184

    申请日:2001-03-13

    IPC分类号: G08B108

    CPC分类号: G08G1/205 G07C5/008

    摘要: The vehicle monitoring system comprises: an on-vehicle unit provided in a vehicle, the on-vehicle unit comprising: a vehicle condition monitor for monitoring a condition of the vehicle and outputting vehicle condition data; and an on-vehicle communicator for sending the vehicle condition data output from the vehicle condition monitor; a data server for communicating with the on-vehicle unit, the data server comprising a server communicator for receiving the vehicle condition data sent from the on-vehicle communicator; a storage section for storing the vehicle condition data; and an abnormality determining section for determining whether an abnormality has occurred in the vehicle, based on the vehicle condition data stored in the storage section, and for outputting an abnormality informing signal when the abnormality has occurred in the vehicle.

    摘要翻译: 所述车辆监视系统包括:设置在车辆中的车载单元,所述车载单元包括:车辆状态监视器,用于监视所述车辆的状态并输出车辆状况数据; 以及车载通信器,用于发送从车辆状态监视器输出的车辆状态数据; 用于与车载单元通信的数据服务器,所述数据服务器包括用于接收从车载通信器发送的车辆状态数据的服务器通信器; 用于存储车辆状态数据的存储部分; 以及异常判定部,其基于存储在存储部中的车辆状况数据,判断车辆是否发生异常,并且在车辆发生异常时输出异常通知信号。

    Silicon electrode plate
    77.
    发明授权
    Silicon electrode plate 失效
    硅电极板

    公开(公告)号:US06376977B1

    公开(公告)日:2002-04-23

    申请号:US09580638

    申请日:2000-05-30

    IPC分类号: G01M1102

    摘要: There is disclosed a silicon electrode plate including silicon single crystal used as an upper electrode in a plasma etching apparatus wherein concentration of interstitial oxygen contained in the silicon electrode plate is not less than 5×1017 atoms/cm3 and not more than 1.5×1018 atoms/cm3, and the silicon electrode plate wherein nitrogen concentration in the silicon electrode plate is not less than 5×1013 atoms/cm3 and not more than 5×1015 atoms/cm3. There can be provided a silicon electrode plate consisting of silicon single crystal used as an upper electrode in a plasma etching apparatus wherein problems due to adhesion of impurities such as heavy metal or the like can be prevented.

    摘要翻译: 公开了一种在等离子体蚀刻装置中用作上电极的硅单晶的硅电极板,其中硅电极板中所含的间隙氧的浓度不小于5×10 17原子/ cm 3且不大于1.5×10 18原子/ cm 3, 硅电极板中的氮浓度不小于5×10 13原子/ cm 3且不大于5×10 15原子/ cm 3的硅电极板。 在等离子体蚀刻装置中可以提供由用作上电极的硅单晶组成的硅电极板,其中可以防止由于诸如重金属等的杂质的附着而引起的问题。

    Pyridylfuran and pyridylthiophene compounds
    78.
    发明授权
    Pyridylfuran and pyridylthiophene compounds 失效
    吡啶基呋喃和吡啶基噻吩化合物

    公开(公告)号:US6048880A

    公开(公告)日:2000-04-11

    申请号:US3108

    申请日:1998-01-06

    摘要: A compound of the formula: ##STR1## and its pharmaceutically effective salts, wherein R.sup.1 and R.sup.2 are independently selected from the following:(a) hydrogen, halo, R.sup.5 --, C.sub.2-6 alkenyl, C.sub.2-6 alkynyl, hydroxy-R.sup.5 --, R.sup.5 --O--R.sup.5 --, or the like; (b) Ar--, Ar--R.sup.5 --, Ar--C.sub.2-6 alkenyl, Ar--C.sub.2-6 alkynyl, Ar--O--, Ar--O--R.sup.5 -- or the like; (c) R.sup.5 --C(O)--, --NO.sub.2, cyano, NH.sub.2 --C(O)--, R.sup.5 --NH--C(O)--, (R.sup.5).sub.2 --N--C(O)--, Ar--C(O)-- or the like; and (d) R.sup.5 --C(O)--NH--, Ar--C(O)--NH-- or the like; wherein Ar is optionally substituted aryl or heteroaryl such as phenyl and pyridyl; and wherein R.sup.5 is optionally halo-substituted C.sub.1-6 alkyl; R.sup.3 is selected from the following: (e) cyano, formyl, tetrazolyl, triazolyl, imidazolyl, oxazolyl, thiazolyl, R.sup.5 --C(O)--, C.sub.2-6 alkenyl-C(O)--, C.sub.2-6 alkynyl-C(O)--, R.sup.5 --C(O)--R.sup.5 --, or the like; (f) R.sup.5 --C(O)--NH--, Ar--C(O)--NH--, or the like; (g) R.sup.5 --S--, R.sup.5 --S(O)--, R.sup.5 --NH--S(O).sub.2 --, or the like; and (h) Ar--C(O)--, Ar--R.sup.5 --C(O)--, Ar--C.sub.2-6 alkenylene-C(O)-- or the like; or two of R.sup.1, R.sup.2 and R.sup.3 together form a group of the formula --A.sup.1 --B.sup.1 --A.sup.2 -- or --A.sup.1 --B.sup.1 --A.sup.3 --B.sup.2 --A.sup.2 -- such as cyclic alkyl optionally substituted with oxo; R.sup.4 is hydrogen, halo, R.sup.5 --C(O)-- and the like; X is O, S, S(O) or S(O).sub.2 ; m is 0, 1, 2, 3 or 4. The present invention also provides processes for the preparation thereof, the use thereof in treating cytokine mediated diseases and/or cell adhesion molecule (CAM) mediated diseases and pharmaceutical compositions for use in such therapy.

    摘要翻译: 下式的化合物及其药学上有效的盐,其中R 1和R 2独立地选自以下:(a)氢,卤素,R 5 - ,C 2-6烯基,C 2-6炔基,羟基-R 5 - ,R 5 - O-R 5 - 等; (b)Ar-,Ar-R5-,Ar-C2-6烯基,Ar-C2-6炔基,Ar-O-,Ar-O-R5-等; (C)R 5 -C(O) - , - O 2,氰基,NH 2 -C(O) - ,R 5 -NH-C(O) - ,(R 5)2-NC(O) ) - 等等; 和(d)R 5 -C(O)-NH-,Ar-C(O)-NH-等; 其中Ar是任选取代的芳基或杂芳基,例如苯基和吡啶基; 并且其中R 5任选为卤素取代的C 1-6烷基; R3选自如下:(e)氰基,甲酰基,四唑基,三唑基,咪唑基,恶唑基,噻唑基,R5-C(O) - ,C2-6烯基-C(O) - ,C2-6炔基-C( O) - ,R 5 -C(O)-R 5 - 等; (f)R5-C(O)-NH-,Ar-C(O)-NH-等; (g)R5-S-,R5-S(O) - ,R5-NH-S(O)2 - 等; 和(h)Ar-C(O) - ,Ar-R 5 -C(O) - ,Ar-C 2-6亚烯基-C(O) - 等; 或两个R 1,R 2和R 3一起形成式-A1-B1-A2-或-A1-B1-A3-B2-A2-的基团,例如任选被氧代取代的环烷基; R4是氢,卤素,R5-C(O) - 等; X是O,S,S(O)或S(O)2; 本发明还提供其制备方法,其用于治疗细胞因子介导的疾病和/或细胞粘附分子(CAM)介导的疾病的用途和用于这种治疗的药物组合物 。

    Piston assembly for internal combustion engine
    79.
    发明授权
    Piston assembly for internal combustion engine 失效
    内燃机活塞组件

    公开(公告)号:US4941397A

    公开(公告)日:1990-07-17

    申请号:US283211

    申请日:1989-05-18

    IPC分类号: F02F3/00 F02F3/10 F16J1/16

    摘要: A piston member for an internal combustion engine of, for example, a motor bicycle is provided with bosses having inner end surfaces opposing to each other into which a piston pin is inserted. A connecting rod has small and large end portions and the small end portion is slidably coupled with the end surfaces when the connecting rod is inserted into the body of the piston member through a cutout portion formed at one end thereof to form a skirt portion. The sizes, dimensions, and structures of the end surfaces of the bosses, the cutout portion, and the associated elements are determined to be suitable for coating thin films of metallic particles on the end surfaces by flame coating means.

    摘要翻译: 用于例如电动自行车的内燃机的活塞构件设置有凸起,其具有彼此相对的内端面,活塞销插入该凸起部。 连杆具有小的和大的端部,并且当连杆通过形成在其一端的切口部分插入到活塞构件的主体中时,小端部与端面可滑动地联接以形成裙部。 凸起,切口部分和相关元件的端面的尺寸,尺寸和结构被确定为适合于通过火焰涂覆装置在端面上涂覆金属颗粒的薄膜。

    Liquid level gauge
    80.
    发明授权
    Liquid level gauge 失效
    液位计

    公开(公告)号:US4891980A

    公开(公告)日:1990-01-09

    申请号:US199154

    申请日:1988-05-26

    IPC分类号: G01F23/62 G01F23/68 G01V3/10

    CPC分类号: G01F23/68 G01V3/102

    摘要: A liquid level gauge comprising a core disposed inside a liquid container that has a cross sectional configuration that varies in the direction of its height, the core extending in the vertical direction and isolated from the liquid, a coil wound around the core in the direction of the length of the core, the coil comprising a densely wound portion formed at one end of the core and a thinly wound portion wound around the remaining part of the core, a conductor ring disposed around the outer circumference of the coil and is movable in the direction of the length of the coil according to the liquid level inside the container, a detecting portion that detects the change in the inductance of the coil according to the displacement of the conductor ring, a transforming portion that transforms the change in the inductance of the coil to a change in an electric signal, and a display portion that displays the quantity of the liquid inside te container, corresponding to the electric signal, the thinly wound portion having a winding density that varies in steps along the length of the core and the display portion displaying a value proportional to the quantity of the liquid inside the container.

    摘要翻译: 一种液位计,包括设置在液体容器内部的芯体,所述芯体具有在其高度方向上变化的横截面形状,所述芯体在垂直方向上延伸并且与液体隔离;线圈, 芯的长度,线圈包括形成在芯的一端处的致密缠绕部分和缠绕在芯的剩余部分上的薄卷绕部分,导体环设置在线圈的外周周围并且可在该线圈的外周移动 根据容器内的液面的线圈长度的方向,检测部,根据导体环的位移检测线圈的电感变化;变换部,其变换电感的变化, 线圈到电信号的变化,以及显示部分,其显示对应于电信号的te容器内的液体的量, 具有卷绕密度的薄卷绕部分,该卷绕密度沿着芯的长度逐步变化,并且显示部分显示与容器内的液体量成比例的值。