Method of forming active region structure
    81.
    发明授权
    Method of forming active region structure 有权
    形成有源区结构的方法

    公开(公告)号:US08187935B2

    公开(公告)日:2012-05-29

    申请号:US12795025

    申请日:2010-06-07

    CPC classification number: H01L21/76229 H01L21/823481 H01L27/1052

    Abstract: A method of forming an active region structure includes preparing a semiconductor substrate having a cell array region and a peripheral circuit region, forming upper cell mask patterns having a line shape in the cell array region, forming first and second peripheral mask patterns in the peripheral circuit region, the first and second peripheral mask patterns being stacked in sequence and covering the peripheral circuit region, and upper surfaces of the upper cell mask patterns forming a step difference with an upper surface of the second peripheral mask pattern, forming spacers on sidewalls of the upper cell mask patterns to expose lower portions of the upper cell mask patterns and the second peripheral mask pattern, and removing the lower portions of the upper cell mask patterns using the spacers and the first and second peripheral mask patterns as an etch mask.

    Abstract translation: 形成有源区域结构的方法包括制备具有单元阵列区域和外围电路区域的半导体衬底,在单元阵列区域中形成具有线状的上层单元掩模图案,在外围电路中形成第一和第二外围掩模图案 区域,第一外围掩模图案和第二外围掩模图案依次堆叠并覆盖外围电路区域,并且上部单元掩模图案的上表面与第二外围掩模图案的上表面形成阶梯差,在第二外围掩模图案的侧壁上形成间隔物 上部单元掩模图案以暴露上部单元掩模图案和第二外围掩模图案的下部,并且使用间隔件和第一外围掩模图案和第二外围掩模图案作为蚀刻掩模去除上部单元掩模图案的下部。

    SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURING THE SAME
    82.
    发明申请
    SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURING THE SAME 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20110227231A1

    公开(公告)日:2011-09-22

    申请号:US13111100

    申请日:2011-05-19

    CPC classification number: H01L21/76816 H01L21/31144

    Abstract: A semiconductor device may include plugs disposed in a zigzag pattern, interconnections electrically connected to the plugs and a protection pattern which is interposed between the plugs and the interconnections to selectively expose the plugs. The interconnections may include a connection portion which is in contact with plugs selectively exposed by the protection pattern. A method of manufacturing a semiconductor device includes, after forming a molding pattern and a mask pattern, selectively etching a protection layer using the mask pattern to form a protection pattern exposing a plug.

    Abstract translation: 半导体器件可以包括以锯齿形图案布置的插塞,电连接到插头的互连和插入在插头和互连之间的保护图案以选择性地暴露插头。 互连可以包括与由保护图案选择性地暴露的插头接触的连接部分。 制造半导体器件的方法包括:在形成模制图案和掩模图案之后,使用掩模图案选择性地蚀刻保护层以形成露出插头的保护图案。

    Semiconductor device and methods of manufacturing the same
    83.
    发明授权
    Semiconductor device and methods of manufacturing the same 有权
    半导体器件及其制造方法

    公开(公告)号:US07968447B2

    公开(公告)日:2011-06-28

    申请号:US12465013

    申请日:2009-05-13

    CPC classification number: H01L21/76816 H01L21/31144

    Abstract: A semiconductor device may include plugs disposed in a zigzag pattern, interconnections electrically connected to the plugs and a protection pattern which is interposed between the plugs and the interconnections to selectively expose the plugs. The interconnections may include a connection portion which is in contact with plugs selectively exposed by the protection pattern. A method of manufacturing a semiconductor device includes, after forming a molding pattern and a mask pattern, selectively etching a protection layer using the mask pattern to form a protection pattern exposing a plug.

    Abstract translation: 半导体器件可以包括以锯齿形图案布置的插塞,电连接到插头的互连和插入在插头和互连之间的保护图案以选择性地暴露插头。 互连可以包括与由保护图案选择性地暴露的插头接触的连接部分。 制造半导体器件的方法包括:在形成模制图案和掩模图案之后,使用掩模图案选择性地蚀刻保护层以形成露出插头的保护图案。

    SEMICONDUCTOR DEVICE WITH ONE-SIDE-CONTACT AND METHOD FOR FABRICATING THE SAME
    84.
    发明申请
    SEMICONDUCTOR DEVICE WITH ONE-SIDE-CONTACT AND METHOD FOR FABRICATING THE SAME 有权
    具有单面接触的半导体器件及其制造方法

    公开(公告)号:US20110073940A1

    公开(公告)日:2011-03-31

    申请号:US12649999

    申请日:2009-12-30

    Abstract: A method for fabricating a semiconductor device includes forming a first conductive layer doped with an impurity for forming a cell junction over a semiconductor substrate, forming a second conductive layer over the first conductive layer, forming a plurality of active regions by etching the second conductive layer and the first conductive layer, the plurality of the active regions being separated from one another by trenches, forming a side contact connected to a sidewall of the first conductive layer, and forming a plurality of metal bit lines each connected to the side contact and filling a portion of each trench.

    Abstract translation: 一种制造半导体器件的方法包括:在半导体衬底上形成掺杂有用于形成电池结的杂质的第一导电层,在第一导电层上形成第二导电层,通过蚀刻第二导电层形成多个有源区 和所述第一导电层,所述多个有源区域通过沟槽彼此分开,形成连接到所述第一导电层的侧壁的侧面接触,以及形成多个金属位线,每个金属位线连接到所述侧面接触和填充 每个沟槽的一部分。

    POWER AMPLIFIER MODULE
    85.
    发明申请
    POWER AMPLIFIER MODULE 审中-公开
    功率放大器模块

    公开(公告)号:US20110001576A1

    公开(公告)日:2011-01-06

    申请号:US12497601

    申请日:2009-07-03

    CPC classification number: H01P5/187

    Abstract: A power amplifier module comprises a power amplifier disposed in a coreless substrate and a directional coupler disposed in a coreless substrate and connected to the power amplifier.

    Abstract translation: 功率放大器模块包括设置在无芯基板中的功率放大器和布置在无芯基板中并连接到功率放大器的定向耦合器。

    METHODS OF FORMING FINE PATTERNS IN INTEGRATED CIRCUIT DEVICES
    87.
    发明申请
    METHODS OF FORMING FINE PATTERNS IN INTEGRATED CIRCUIT DEVICES 有权
    在集成电路设备中形成精细图案的方法

    公开(公告)号:US20100096719A1

    公开(公告)日:2010-04-22

    申请号:US12418023

    申请日:2009-04-03

    Abstract: A method of fabricating an integrated circuit device includes forming first and second mask structures on respective first and second regions of a feature layer. Each of the first and second mask structures includes a dual mask pattern and an etch mask pattern thereon having an etch selectivity relative to the dual mask pattern. The etch mask patterns of the first and second mask structures are isotropically etched to remove the etch mask pattern from the first mask structure while maintaining at least a portion of the etch mask pattern on the second mask structure. Spacers are formed on opposing sidewalls of the first and second mask structures. The first mask structure is selectively removed from between the spacers in the first region using the portion of the etch mask pattern on the second mask structure as a mask to define a first mask pattern including the opposing sidewall spacers with a void therebetween in the first region, and a second mask pattern including the opposing sidewall spacers with the second mask structure therebetween in the second region. The feature layer may be patterned using the first mask pattern as a mask to define a first feature on the first region, and using the second mask pattern as a mask to define a second feature on the second region having a greater width than the first feature.

    Abstract translation: 制造集成电路器件的方法包括在特征层的相应的第一和第二区域上形成第一和第二掩模结构。 第一和第二掩模结构中的每一个包括双掩模图案和其上具有相对于双掩模图案的蚀刻选择性的蚀刻掩模图案。 各向同性蚀刻第一和第二掩模结构的蚀刻掩模图案以从第一掩模结构去除蚀刻掩模图案,同时将蚀刻掩模图案的至少一部分保持在第二掩模结构上。 间隔件形成在第一和第二掩模结构的相对侧壁上。 使用第二掩模结构上的蚀刻掩模图案的部分作为掩模,第一掩模结构从第一区域中的间隔物之间​​选择性地移除,以限定第一掩模图案,其包括在第一区域中具有空隙的相对的侧壁间隔物 以及第二掩模图案,其包括在第二区域中具有第二掩模结构的相对的侧壁间隔物。 可以使用第一掩模图案作为掩模来对特征层进行图案化,以在第一区域上限定第一特征,并且使用第二掩模图案作为掩模来限定具有比第一特征宽的宽度的第二区域上的第二特征 。

    Semiconductor device having contact plug formed in double structure by using epitaxial stack and metal layer and method for fabricating the same
    89.
    发明授权
    Semiconductor device having contact plug formed in double structure by using epitaxial stack and metal layer and method for fabricating the same 失效
    具有通过使用外延堆叠和金属层形成双重结构的接触插塞的半导体器件及其制造方法

    公开(公告)号:US07605070B2

    公开(公告)日:2009-10-20

    申请号:US11154474

    申请日:2005-06-17

    Applicant: Young-Ho Lee

    Inventor: Young-Ho Lee

    Abstract: Disclosed are a contact plug of a semiconductor device and a method for fabricating the same. The semiconductor device includes: an epitaxial stack formed by inserting a heteroepitaxy layer between a pair of homoepitaxy layers; and a contact plug including a metal layer on the epitaxial stack. Accordingly, in accordance with the present invention, the contact plug is selectively doped in a high concentration, thereby reducing a contact resistance. Furthermore, the present invention also provides an effect of reducing degradation in a device property without decreasing yields of products by minimizing a thermal budget through using a SEG-silicon germanium layer capable of obtaining a high doping concentration and a high deposition speed.

    Abstract translation: 公开了半导体器件的接触插头及其制造方法。 半导体器件包括:通过在一对同质外延层之间插入异质外延层而形成的外延堆叠; 以及包括外延层上的金属层的接触插塞。 因此,根据本发明,以高浓度选择性地掺杂接触插塞,从而降低接触电阻。 此外,本发明还提供了通过使用能够获得高掺杂浓度和高沉积速度的SEG硅锗层,通过最小化热预算来降低器件特性降低而不降低产品产量的效果。

    Memory module
    90.
    发明申请
    Memory module 有权
    内存模块

    公开(公告)号:US20090154212A1

    公开(公告)日:2009-06-18

    申请号:US12292700

    申请日:2008-11-24

    Abstract: A memory module, includes a memory module board and a plurality of memory devices on the memory module board. The memory module board includes one or more first input terminals configured to receive first signals to individually control the memory devices, and one or more second input terminals configured to receive second signals to commonly control the memory devices. Each of the memory devices includes a plurality of first signal input units configured to receive the first signals through one or more first input pins, a plurality of second signal input units configured to receive the second signals through one or more second input pins, and a plurality of dummy units, the dummy units being respectively connected to the first signal input units in parallel, and being configured to receive the first signals through one or more third input pins and to compensate for a signal line load.

    Abstract translation: 存储器模块包括存储器模块板和存储器模块板上的多个存储器件。 存储器模块板包括被配置为接收第一信号以单独控制存储器件的一个或多个第一输入端子,以及被配置为接收第二信号以共同控制存储器件的一个或多个第二输入端子。 每个存储器件包括多个第一信号输入单元,其被配置为通过一个或多个第一输入引脚接收第一信号;多个第二信号输入单元,被配置为通过一个或多个第二输入引脚接收第二信号;以及 多个虚拟单元,虚拟单元分别并联连接到第一信号输入单元,并且被配置为通过一个或多个第三输入引脚接收第一信号并补偿信号线负载。

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