摘要:
A first transistor group, a second transistor group, and an electrode pad are formed on a semiconductor substrate. A first protective film is formed so as to cover the semiconductor substrate except for an upper region of the electrode pad. The second protective film which generates a stress in a projecting direction is formed so as to cover the first protective film except for an upper region of the first transistor group. A transistor ability of the first transistor group is varied to be relatively higher due to a presence of the second protective film, based on a transistor ability of the second transistor group, as a reference.
摘要:
A maintenance information management method comprising steps of: by a terminal processing apparatus, transmitting, to a management apparatus via a network, maintenance work information about an analyzer on which maintenance work has been performed; storing, in a maintenance work information storage section of the management apparatus, the maintenance work information transmitted via the network; and transmitting, to the terminal processing apparatus via the network, the maintenance work information of the analyzer, which is stored in the maintenance work information storage section.
摘要:
A substrate processing apparatus can efficiently perform a trial operation in conditions close to those of an actual operation. In the substrate processing apparatus 1 for taking substrates W out of a transfer chamber (FOUPs 1 to 4), processing the substrates W in each of processing modules 2 and returning the processed substrates W to the transfer chamber, a mode selection unit 31 selects an operation check mode for performing an operation check of wafer transfer devices 15 and 17 or the processing modules 2. Further, a job setting unit 32 sets control jobs for the operation check and a process job as a recipe executed on the substrate W. A controller 3 determines whether or not a first control job and a second control job to be executed subsequently after the first control job are allowed to be executed in parallel.
摘要:
An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.
摘要:
Methods and apparatus for producing a semiconductor structure include: subjecting an implantation surface of a semiconductor wafer to an ion implantation process to create an exfoliation layer therein, wherein the ion implantation process includes simultaneously implanting two different species of ions into the implantation surface of the semiconductor wafer.
摘要:
At least one embodiment of the invention provides a multi-modal rechargeable battery pack that can switch between charging algorithms dynamically. This dynamic switching can be accomplished in a wide variety of ways, for example via external command or automatically. At least one embodiment of the invention provides a system that can switch a multi-modal rechargeable battery pack between one or more of a runtime mode, a lifespan mode, and a quick charge mode.
摘要:
A microfluidic device for performing a test on the reagent includes a fill port formed on the chip to inject the reagent into at least one of the channels, one or more heating portions for performing a test on the reagent injected into the channel, and a micropump. An inside of the micropump and a vicinity of the channel connecting to an inlet and an outlet of the micropump are filled with a drive solution that is driven by the micropump, a gas is sealed between the reagent and the drive solution in the channel to prevent the reagent from contacting the drive solution directly, and the micropump directly drives the drive solution in the forward and backward directions, so that the reagent is repeatedly moved to the test portions through the gas in an indirect manner or is repeatedly passed through the test portions through the gas.
摘要:
The present invention enables a user to photograph and edit a photograph suiting one's taste slowly and while having fun. The automatic photo studio of this invention has a counter for a person to receive a user, a plurality of satellites having a function of receiving operations of a user and a function of showing various displays to the user, and a plurality of studios for photographing a subject. The automatic photo studio further includes a counter system provided in the vicinity of the counter for performing visitor processing and checkout processing to the user, a printer system provided in the vicinity of the counter for printing images based on subject images photographed in the studio, a satellite system provided to the satellite for enabling the user to edit the subject images photographed in the studio, and a studio system provided to the studio for controlling the photo shooting conditions and photo shoot timing. The satellite system and the studio system determine whether the user is an authorized user based on information written in a player information storage medium as an information storage medium in the possession of the user, and permit the user to use the satellite or the studio when the user is an official user as the authorized user.
摘要:
A semiconductor laser includes an active layer, a first GaAs layer formed on the active layer, the first GaAs layer including a plurality of recessed portions periodically arranged, each of the recessed portions including a bottom surface of a (100) crystal surface and a slope including a (111) A crystal surface at least in parts, the recessed portion being disposed in contact with each other or with a minimal gap between each of adjacent ones of the recessed portions, the width of the bottom surface being greater than the minimal gaps, an InGaP layer formed on the recessed portion, and a second GaAs layer formed on the InGaAs layer over the recessed portion.
摘要:
When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.