Semiconductor device
    81.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08686564B2

    公开(公告)日:2014-04-01

    申请号:US13404189

    申请日:2012-02-24

    申请人: Takeshi Matsumoto

    发明人: Takeshi Matsumoto

    IPC分类号: H01L23/48

    摘要: A first transistor group, a second transistor group, and an electrode pad are formed on a semiconductor substrate. A first protective film is formed so as to cover the semiconductor substrate except for an upper region of the electrode pad. The second protective film which generates a stress in a projecting direction is formed so as to cover the first protective film except for an upper region of the first transistor group. A transistor ability of the first transistor group is varied to be relatively higher due to a presence of the second protective film, based on a transistor ability of the second transistor group, as a reference.

    摘要翻译: 第一晶体管组,第二晶体管组和电极焊盘形成在半导体衬底上。 形成第一保护膜以覆盖半导体衬底,除了电极焊盘的上部区域之外。 形成沿着突出方向产生应力的第二保护膜,以覆盖除了第一晶体管组的上部区域之外的第一保护膜。 基于第二晶体管组的晶体管能力,由于第二保护膜的存在而使第一晶体管组的晶体管能力变得相对较高。

    Maintenance information management system, management apparatus, and maintenance information management method
    82.
    发明授权
    Maintenance information management system, management apparatus, and maintenance information management method 有权
    维护信息管理系统,管理设备和维护信息管理方法

    公开(公告)号:US08402082B2

    公开(公告)日:2013-03-19

    申请号:US12401049

    申请日:2009-03-10

    IPC分类号: G06F15/16

    CPC分类号: G06Q10/06

    摘要: A maintenance information management method comprising steps of: by a terminal processing apparatus, transmitting, to a management apparatus via a network, maintenance work information about an analyzer on which maintenance work has been performed; storing, in a maintenance work information storage section of the management apparatus, the maintenance work information transmitted via the network; and transmitting, to the terminal processing apparatus via the network, the maintenance work information of the analyzer, which is stored in the maintenance work information storage section.

    摘要翻译: 一种维护信息管理方法,包括以下步骤:通过终端处理装置,经由网络向管理装置发送关于进行了维护工作的分析器的维护工作信息; 将经由网络发送的维护工作信息存储在管理装置的维护工作信息存储部中; 以及经由网络向终端处理装置发送存储在维护作业信息存储部中的分析器的维护工作信息。

    SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
    83.
    发明申请
    SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM 有权
    基板加工设备,基板加工方法和储存介质

    公开(公告)号:US20120271444A1

    公开(公告)日:2012-10-25

    申请号:US13450590

    申请日:2012-04-19

    申请人: Takeshi Matsumoto

    发明人: Takeshi Matsumoto

    IPC分类号: G06F19/00

    CPC分类号: H01L21/67276

    摘要: A substrate processing apparatus can efficiently perform a trial operation in conditions close to those of an actual operation. In the substrate processing apparatus 1 for taking substrates W out of a transfer chamber (FOUPs 1 to 4), processing the substrates W in each of processing modules 2 and returning the processed substrates W to the transfer chamber, a mode selection unit 31 selects an operation check mode for performing an operation check of wafer transfer devices 15 and 17 or the processing modules 2. Further, a job setting unit 32 sets control jobs for the operation check and a process job as a recipe executed on the substrate W. A controller 3 determines whether or not a first control job and a second control job to be executed subsequently after the first control job are allowed to be executed in parallel.

    摘要翻译: 基板处理装置可以在与实际操作相近的条件下有效地进行试运行。 在将基板W从传送室(FOUP1〜4)中取出的基板处理装置1中,对处理模块2的各处理基板W进行处理,并将处理后的基板W返回到搬送室,模式选择部31选择 操作检查模式,用于执行晶片传送装置15和17或处理模块2的操作检查。此外,作业设置单元32设置用于操作检查的控制作业和作为在基板W上执行的配方的处理作业。控制器 3确定是否允许并行执行在第一控制作业之后执行的第一控制作业和第二控制作业。

    ION SOURCE
    84.
    发明申请
    ION SOURCE 失效
    离子源

    公开(公告)号:US20120229012A1

    公开(公告)日:2012-09-13

    申请号:US13416369

    申请日:2012-03-09

    IPC分类号: H01J27/02

    摘要: An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.

    摘要翻译: 离子源包括等离子体生成室,设置在等离子体生成室内的至少一根细丝,与等离子体生成室对置配置的至少一个电极,构成为从等离子体产生室取出离子束, 以及多个永久磁铁,其设置在等离子体生成室的外部,并且被构造成在等离子体生成室内部形成锐化的磁场,以及与等离子体产生室的壁的内表面平行设置的防沉积板。 沉积防止板具有形成在与各永磁体相对的位置处的凹部,其中介于其间的等离子体产生室的壁。

    Microfluidic device, method for testing reagent and system for testing reagent
    87.
    发明授权
    Microfluidic device, method for testing reagent and system for testing reagent 失效
    微流控装置,试剂检测方法及试剂检测系统

    公开(公告)号:US07749444B2

    公开(公告)日:2010-07-06

    申请号:US11024592

    申请日:2004-12-29

    IPC分类号: B01N3/00

    摘要: A microfluidic device for performing a test on the reagent includes a fill port formed on the chip to inject the reagent into at least one of the channels, one or more heating portions for performing a test on the reagent injected into the channel, and a micropump. An inside of the micropump and a vicinity of the channel connecting to an inlet and an outlet of the micropump are filled with a drive solution that is driven by the micropump, a gas is sealed between the reagent and the drive solution in the channel to prevent the reagent from contacting the drive solution directly, and the micropump directly drives the drive solution in the forward and backward directions, so that the reagent is repeatedly moved to the test portions through the gas in an indirect manner or is repeatedly passed through the test portions through the gas.

    摘要翻译: 用于对试剂进行试验的微流体装置包括形成在芯片上的填充口,用于将试剂注入到至少一个通道中,一个或多个用于对注入通道的试剂进行测试的加热部分,以及微型泵 。 微型泵的内部和连接到微型泵的入口和出口的通道的附近填充有由微型泵驱动的驱动溶液,气体被密封在试剂和通道中的驱动溶液之间,以防止 试剂直接接触驱动溶液,微泵直接驱动驱动溶液的前后方向,使试剂以间接的方式重复地通过气体移动到试验部分,或重复通过试验部分 通过气体。

    Automatic photo studio
    88.
    发明授权
    Automatic photo studio 失效
    自动摄影棚

    公开(公告)号:US07668446B2

    公开(公告)日:2010-02-23

    申请号:US11476863

    申请日:2006-06-29

    IPC分类号: G03B15/00

    摘要: The present invention enables a user to photograph and edit a photograph suiting one's taste slowly and while having fun. The automatic photo studio of this invention has a counter for a person to receive a user, a plurality of satellites having a function of receiving operations of a user and a function of showing various displays to the user, and a plurality of studios for photographing a subject. The automatic photo studio further includes a counter system provided in the vicinity of the counter for performing visitor processing and checkout processing to the user, a printer system provided in the vicinity of the counter for printing images based on subject images photographed in the studio, a satellite system provided to the satellite for enabling the user to edit the subject images photographed in the studio, and a studio system provided to the studio for controlling the photo shooting conditions and photo shoot timing. The satellite system and the studio system determine whether the user is an authorized user based on information written in a player information storage medium as an information storage medium in the possession of the user, and permit the user to use the satellite or the studio when the user is an official user as the authorized user.

    摘要翻译: 本发明使用户能够缓慢地拍摄和编辑适合自己的口味的照片,同时乐趣。 本发明的自动摄影棚具有用于接收用户的人的计数器,具有接收用户的操作的功能的多个卫星和向用户显示各种显示的功能,以及用于拍摄用户的多个工作室 学科。 自动摄影棚还包括设置在计数器附近的计数器系统,用于对用户执行访问者处理和检验处理;设置在计数器附近的基于在演播室拍摄的被摄体图像打印图像的打印机系统, 提供给卫星的卫星系统使得用户能够编辑在演播室中拍摄的被摄体图像,以及提供给演播室的演播室系统,用于控制照片拍摄条件和摄影时间。 卫星系统和演播室系统基于作为用户拥有的信息存储介质的玩家信息存储介质中写入的信息来确定用户是否是授权用户,并且当用户使用卫星或演播室时 用户是作为授权用户的官方用户。

    SEMICONDUCTOR LASER
    89.
    发明申请
    SEMICONDUCTOR LASER 有权
    半导体激光器

    公开(公告)号:US20100040100A1

    公开(公告)日:2010-02-18

    申请号:US12535463

    申请日:2009-08-04

    IPC分类号: H01S5/026 H01L21/02

    摘要: A semiconductor laser includes an active layer, a first GaAs layer formed on the active layer, the first GaAs layer including a plurality of recessed portions periodically arranged, each of the recessed portions including a bottom surface of a (100) crystal surface and a slope including a (111) A crystal surface at least in parts, the recessed portion being disposed in contact with each other or with a minimal gap between each of adjacent ones of the recessed portions, the width of the bottom surface being greater than the minimal gaps, an InGaP layer formed on the recessed portion, and a second GaAs layer formed on the InGaAs layer over the recessed portion.

    摘要翻译: 半导体激光器包括有源层,在有源层上形成的第一GaAs层,第一GaAs层包括周期性排列的多个凹部,每个凹部包括(100)晶体表面的底面和斜面 包括至少部分的(111)A晶体表面,所述凹部被设置成彼此接触或者在每个相邻的凹部之间具有最小间隙,所述底表面的宽度大于所述最小间隙 ,形成在凹部上的InGaP层和在凹部上形成在InGaAs层上的第二GaAs层。

    COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM
    90.
    发明申请
    COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM 有权
    涂料和开发设备,涂料和开发方法和储存介质

    公开(公告)号:US20090299515A1

    公开(公告)日:2009-12-03

    申请号:US12427123

    申请日:2009-04-21

    IPC分类号: G05B19/406 B65G35/00

    摘要: When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.

    摘要翻译: 当产品基板通过在传送路径中的检查模块前方的第n个模块的参考模块时,将用于对产品基板所属的批次进行检查的检查预约信号输出到检查模块。 当检查模块处于故障状态时,禁止输出用于产品基板的检查预约信号,并且要传送到检查模块的产品基板以转移顺序传送到检查模块旁边的模块。 当检查模块的故障已经解决,并且用于确认检查的基板优先地传送到检查模块时,输出用于确认检查的基板的检查预约信号,用于确认检查的基板被传送到检查模块,并且 执行检查模块的确认检查。