公开(公告)号：US07560377B2

公开(公告)日：2009-07-14

申请号：US11087393

申请日：2005-03-22

申请人： David Cheung ,  Wai-Fan Yau ,  Robert P. Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf B. Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Wing Poon

发明人： David Cheung ,  Wai-Fan Yau ,  Robert P. Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf B. Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Wing Poon

IPC分类号： H01L21/4763 ,  H01L21/461

CPC分类号： H01L21/76835 ,  C23C16/401 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02208 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/31612 ,  H01L21/76801 ,  H01L21/76808 ,  H01L21/7681 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76834 ,  H01L2221/1031 ,  Y10T428/24926 ,  Y10T428/31663

摘要： A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas comprising carbon at a constant RF power level. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers.

摘要翻译： 一种通过有机硅化合物和包含碳的氧化气体以恒定的RF功率水平的反应沉积低介电常数膜的方法和装置。 在与有机硅化合物混合之前，优选在单独的微波室内可以提高氧化气体的离解，以帮助控制沉积膜的碳含量。 氧化的有机硅烷或有机硅氧烷膜具有良好的屏障性能，用作邻近其它介电层的衬垫层或盖层。 氧化的有机硅烷或有机硅氧烷膜也可以用作蚀刻停止层和用于制造双镶嵌结构的金属间介电层。 氧化的有机硅烷或有机硅氧烷膜也在不同的介电层之间提供优异的粘附性。

公开(公告)号：US07517469B2

公开(公告)日：2009-04-14

申请号：US11380913

申请日：2006-04-28

申请人： Harald Herchen ,  Erica Porras ,  Tetsuya Ishikawa

发明人： Harald Herchen ,  Erica Porras ,  Tetsuya Ishikawa

IPC分类号： B44C1/22 ,  G05D7/00

CPC分类号： G01F1/7086 ,  B05B12/082 ,  H01L21/6715 ,  H01L21/67225

摘要： Systems, devices and methods of measuring a flow of a liquid stream for a semiconductor process are provided. The liquid stream is delivered through a liquid delivery nozzle. The nozzle is adapted to deliver the liquid stream for the semiconductor process. The free stream extends from an upstream location near the nozzle to a downstream location. The stream is marked at the upstream location and measured at the downstream location to determine the flow.

摘要翻译： 提供了测量半导体工艺的液体流的流量的系统，装置和方法。 液体流通过液体输送喷嘴输送。 喷嘴适于输送用于半导体工艺的液体流。 自由流从喷嘴附近的上游位置延伸到下游位置。 流在上游位置标记并在下游位置测量以确定流。

公开(公告)号：US07508538B2

公开(公告)日：2009-03-24

申请号：US10971324

申请日：2004-10-22

申请人： Tomoya Ogawa ,  Tomohiro Suzuki ,  Yuji Tamura ,  Tetsuya Ishikawa ,  Hiroyasu Nishimura ,  Fumikage Uchida ,  Nao Moromizato ,  Masayuki Yasukaga

发明人： Tomoya Ogawa ,  Tomohiro Suzuki ,  Yuji Tamura ,  Tetsuya Ishikawa ,  Hiroyasu Nishimura ,  Fumikage Uchida ,  Nao Moromizato ,  Masayuki Yasukaga

IPC分类号： H04N1/40

CPC分类号： H04N1/3877

摘要： An image processing apparatus includes: a first memory for storing 2-D image data wherein pixels are arranged in a matrix in the main scanning direction and sub-scanning direction orthogonal to each other; a second memory; and a data control section for controlling the first memory and second memory, wherein at least one of the first and second memories is constituted by a SDRAM. The data control section reads the image data from the first memory in blocks of m pixels in the main scanning direction and n pixels in the sub-scanning direction (where n and m are natural numbers), writes the read data into the second memory, and transmits data to the memory composed of the SDRAM by burst transmission and continuous supply of desired column addresses, thereby allowing the read image data to be rotated.

摘要翻译： 一种图像处理装置包括：第一存储器，用于存储其中像素沿主扫描方向和副扫描方向彼此正交的矩阵排列的二维图像数据; 第二个记忆; 以及用于控制第一存储器和第二存储器的数据控制部分，其中第一和第二存储器中的至少一个由SDRAM构成。 数据控制部分以主扫描方向的m个像素的块和副扫描方向上的n个像素（其中n和m是自然数）读取来自第一存储器的图像数据，将读取的数据写入第二存储器， 并且通过突发传输将数据发送到由SDRAM组成的存储器，并连续提供所需的列地址，从而允许读取的图像数据旋转。

公开(公告)号：US20080268753A1

公开(公告)日：2008-10-30

申请号：US11739450

申请日：2007-04-24

申请人： Tetsuya Ishikawa ,  Donald J.K. Olgado ,  Hung Chih Chen

发明人： Tetsuya Ishikawa ,  Donald J.K. Olgado ,  Hung Chih Chen

IPC分类号： B24B1/00

CPC分类号： B24B37/30 ,  H01L21/6838

摘要： The present invention relates to a load cup configured to speed up substrate transferring to and from a carrier head and to reduce corrosion during the transferring. One embodiment of the present invention provides a non-contact substrate holder comprising a pedestal having a top surface configured to support a substrate, and at least one injection port configured to eject a high velocity liquid stream on the top surface of the pedestal, wherein the liquid stream in configured to secure the substrate on the pedestal without the substrate contacting the top surface of the pedestal.

摘要翻译： 本发明涉及一种负载杯，其被配置为加速基板向载体头转移和从载体头转移并减少转印期间的腐蚀。 本发明的一个实施例提供了一种非接触衬底保持器，其包括具有构造成支撑衬底的顶表面的基座和被配置为在基座的顶表面上喷射高速液体流的至少一个注入端口，其中， 液体流被配置成将基板固定在基座上，而基板不接触基座的顶面。

公开(公告)号：US20080103420A1

公开(公告)日：2008-05-01

申请号：US11941184

申请日：2007-11-16

申请人： Fumitaka Ishiguro ,  Tetsuya Ishikawa

发明人： Fumitaka Ishiguro ,  Tetsuya Ishikawa

IPC分类号： A61H7/00

CPC分类号： A61H15/0078 ,  A61H2015/0035 ,  A61H2205/12

摘要： A massage device. The massage device includes a pair of therapeutic elements and a bottom therapeutic member. The therapeutic elements are rotated by a driving shaft, driven by a driving mechanism, for supporting and massaging feet. The bottom therapeutic member is disposed between two therapeutic elements, supporting the instep of a foot. The therapeutic elements are formed along the instep.

摘要翻译： 按摩器具 按摩装置包括一对治疗元件和底部治疗构件。 治疗元件由驱动轴旋转，由驱动机构驱动，用于支撑和按摩脚。 底部治疗构件设置在两个治疗元件之间，支撑脚的脚背。 治疗元件沿脚背形成。

公开(公告)号：US20080086586A1

公开(公告)日：2008-04-10

申请号：US11866641

申请日：2007-10-03

申请人： Tomoya Ogawa ,  Tomohiro Suzuki ,  Yuji Tamura ,  Tetsuya Ishikawa ,  Hiroyasu Nishimura ,  Fumikage Uchida ,  Nao Moromizato ,  Munetoshi Eguchi ,  Kenji Okuyama

发明人： Tomoya Ogawa ,  Tomohiro Suzuki ,  Yuji Tamura ,  Tetsuya Ishikawa ,  Hiroyasu Nishimura ,  Fumikage Uchida ,  Nao Moromizato ,  Munetoshi Eguchi ,  Kenji Okuyama

IPC分类号： G06F12/16

CPC分类号： G06F11/1441

摘要： An information processing apparatus including: a nonvolatile memory; a volatile system memory in which predetermined data stored in the nonvolatile memory is developed; a control section to save the predetermined data stored in the system memory in the nonvolatile memory when a start of power-off operation is detected; and a storage section that stores a first timing information representing a time point of terminating the operation of saving the predetermined data in the nonvolatile memory, and a second timing information representing a power-off time point, wherein the control section compares the first timing information stored in the storage section with the second timing information, subsequent to the next operation of turning on of the power.

摘要翻译： 一种信息处理设备，包括：非易失性存储器; 其中开发存储在非易失性存储器中的预定数据的易失性系统存储器; 控制部分，当检测到电源关闭操作开始时，将存储在系统存储器中的预定数据保存在非易失性存储器中; 以及存储部，其存储表示将所述预定数据保存在所述非易失性存储器中的操作的终止的时刻的第一定时信息和表示断电时间点的第二定时信息，所述控制部将所述第一定时信息 存储在具有第二定时信息的存储部分中，在接通电源的下一个操作之后。

公开(公告)号：US20080085555A1

公开(公告)日：2008-04-10

申请号：US11885112

申请日：2006-02-22

申请人： Takayuki Asahara ,  Tetsuya Ishikawa

发明人： Takayuki Asahara ,  Tetsuya Ishikawa

IPC分类号： C12N5/06

CPC分类号： C12N5/0647 ,  C12N5/0692 ,  C12N2500/36 ,  C12N2500/90 ,  C12N2501/23

摘要： The present invention provides a method of efficiently expanding non-adhesive adult stem cells in vitro. More specifically, the present invention provides a method of expanding non-adhesive adult stem cells, comprising culturing non-adhesive adult stem cells in the co-presence of adhesive feeder cells and non-adhesive non-stem cells in serum-free medium, wherein the ratio of non-adhesive adult stem cell count to total cell count in the medium is kept low; non-adhesive adult stem cells obtained by the expansion method and differentiated cells thereof, and a composition comprising them; and a serum-free medium comprising a specified factor, and a kit for its preparation and the like.

摘要翻译： 本发明提供了一种在体外有效扩张非粘性成体干细胞的方法。 更具体地，本发明提供了扩展非粘性成体干细胞的方法，包括在无血清培养基中的粘合剂喂养细胞和非粘性非干细胞的共存下培养非粘性成体干细胞，其中 培养基中非粘性成体干细胞计数与总细胞计数的比例保持不变; 通过膨胀法和分化细胞获得的非粘性成体干细胞及其组成; 和包含特定因子的无血清培养基，以及用于其制备的试剂盒等。

公开(公告)号：US20080050679A1

公开(公告)日：2008-02-28

申请号：US11678034

申请日：2007-02-22

申请人： Mohsen Salek ,  Tetsuya Ishikawa ,  Christoper Beaudry ,  Steven Verhaverbeke ,  Helen Armer ,  Harald Herchen ,  Leon Volfovsky

发明人： Mohsen Salek ,  Tetsuya Ishikawa ,  Christoper Beaudry ,  Steven Verhaverbeke ,  Helen Armer ,  Harald Herchen ,  Leon Volfovsky

IPC分类号： G03C5/29 ,  G03B27/58

CPC分类号： G03B27/58 ,  G03F7/70341

摘要： A method of processing a substrate includes forming a coating layer over a front surface of the substrate and exposing the coating layer in an immersion scanner. The coating layer may include a photoresist layer. The method also includes performing one or more immersion processes on the substrate after exposure. As an example, the one or more immersion processes include an immersion post-exposure bake process.

摘要翻译： 一种处理衬底的方法包括在衬底的前表面上形成涂层，并在浸没式扫描仪中曝光该涂层。 涂层可以包括光致抗蚀剂层。 该方法还包括在曝光之后在衬底上执行一个或多个浸渍处理。 作为示例，一个或多个浸渍处理包括浸渍曝光后烘烤处理。

公开(公告)号：US20080023143A1

公开(公告)日：2008-01-31

申请号：US11881801

申请日：2007-07-27

申请人： Daniel Hoffman ,  Matthew Miller ,  Jang Yang ,  Heeyeop Chae ,  Michael Barnes ,  Tetsuya Ishikawa ,  Yan Ye

发明人： Daniel Hoffman ,  Matthew Miller ,  Jang Yang ,  Heeyeop Chae ,  Michael Barnes ,  Tetsuya Ishikawa ,  Yan Ye

IPC分类号： H01L21/3065 ,  H01L21/285

CPC分类号： H01J37/32091 ,  H01J37/3244 ,  H01J37/32623 ,  H01J37/3266

摘要： A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry.

摘要翻译： 等离子体反应器包括真空外壳，其包括限定真空室的侧壁和顶板，以及腔室内的工件支撑件，并面向天花板以支撑平面工件，工件支撑件和天花板一起限定了工件之间的加工区域 支持和天花板。 工艺气体入口将工艺气体提供到腔室中。 等离子体源功率电极连接到RF功率发生器，用于将等离子体源功率电容耦合到腔室中，以在腔室内维持等离子体。 反应器还包括至少第一架空螺线管电磁体，靠近天花板，架空螺线管电磁体，天花板，侧壁和工件支撑件沿着共同的对称轴线定位。

公开(公告)号：US20070201781A1

公开(公告)日：2007-08-30

申请号：US11512298

申请日：2006-08-30

申请人： Ken Adachi ,  Youichi Tsuzaki ,  Masaru Deguchi ,  Tetsuya Ishikawa

发明人： Ken Adachi ,  Youichi Tsuzaki ,  Masaru Deguchi ,  Tetsuya Ishikawa

IPC分类号： F16C33/76

CPC分类号： F16J15/3456 ,  B60B27/00 ,  F16C19/386 ,  F16C33/7886 ,  F16C33/7896 ,  F16C2326/02

摘要： A rolling bearing assembly includes: an outer ring member; an inner ring member; a hub wheel formed with a flange at one axial end thereof; and a seal member for sealing a space between one axial end of the outer ring member and an inside surface of the flange, which axially opposes the one end of the outer ring member. The seal member includes: a cylindrical core fitted on the one axial end of the outer ring member and axially extended from the one end toward the flange; and an annular lip portion secured to the core and formed from an elastic material as axially extended from the core to the inside surface of the flange.

摘要翻译： 滚动轴承组件包括：外圈构件; 内圈构件; 在其一个轴向端部形成有凸缘的轮毂轮; 以及密封构件，用于密封外圈构件的一个轴向端部与轴向相对于外圈构件的一端的凸缘的内表面之间的空间。 密封构件包括：安装在外圈构件的一个轴向端部并且从一端朝向凸缘轴向延伸的圆柱形芯; 以及固定到所述芯部并由弹性材料形成的环形唇部，所述弹性材料从所述芯部到所述凸缘的内表面轴向延伸。