摘要:
A product pattern and a test pattern for managing a focus offset value are patterned onto a product wafer by means of exposure, and is patterned onto the product wafer by means of exposure. The exposed product wafer is developed. A measurement section measures the dimension of the test pattern patterned on the product wafer. On the basis of the thus-measured dimension of the test pattern, the focus off set value set in a system for manufacturing a semiconductor device is computed by a computation section. The focus offset value set in a projection optical system of the system for manufacturing a semiconductor device is adjusted by means of an adjustment section so as to become identical with the computed focus offset value.
摘要:
Waste carbon dioxide gas discharged in large quantities from stationary gas generating facilities such as thermal power plants, is dissolved in sea water and isolated deep in the sea to prevent global warming. A vessel is installed in the sea or at the water surface or in the vicinity thereof. A pipe forming a short leg is open at a lower end, functions as a dissolving pipe, and is equipped with a device for blowing a water-soluble gas. A pipe forming a long leg is open at a lower end portion and functions as a sinking pipe. The pipe forming a short leg and the pipe forming a long leg are connected through the vessel, and undissolved gas is diffused into the atmosphere or into the sea from the liquid surface within the vessel.
摘要:
There is disclosed a method of separating and recovering carbon dioxide from combustion exhausted gas, which method includes: bringing the combustion exhausted gas in contact with water, under a pressure-increased condition, to form carbon dioxide hydrate; and thus separating and recovering carbon dioxide contained in the combustion exhausted gas. According to the method, CO2 of high purity can be separated and recovered from the combustion exhausted gas at low cost and with low energy consumption. There is also disclosed an apparatus for separation and recovery of CO2 which apparatus is employed in the method.
摘要:
Corrosion resistant material is used for lead wires of the thermistor, and an exposed portion of electrodes of the thermistor and a portion surrounding a weld portion of the lead wires are coated with corrosion resistant material. Since the lead wires themselves are made of corrosion resistant material, no corrosion occurs in the welding portion and a cut working portion. Further, the lead wires and the exposed portion of the electrodes are coated with corrosion resistant material. Thereby an electronic device having extremely high corrosion resistivity and hence high durability and reliability is produced, with the result that the electronic device can be used for a long period without corrosion under the heavily corrosive environment, such as sulfur dioxide gas atmosphere.
摘要:
A hot plate unit includes a cover. The cover includes an inner wall and an outlet. There is provided immediately under the outlet a plate having a ventilation hole. The distance between the plate and a main surface is identical to the distance between the main surface and the internal wall face. The hot plate unit has an displacement control valve for restricting displacement at a level in the range from at least 0.1 L/min to at most 1 L/min.
摘要:
A thermal type air flow measuring instrument is mounted to a main passage forming an intake air passage of an internal combustion engine and is provided with an auxiliary passage which includes a heating resistor and a temperature sensing resistor therein and an electronic circuit which is electrically connected to the heating resistor and the temperature sensing resistor. The auxiliary passage is a passage including at least one bent portion composed of a first path substantially parallel to the main passage and a second path having a path different in flow direction from the first path. A member forming the auxiliary passage is fixed in a united form to only a case member for interiorly protecting the electronic circuit, and the case member is fixed to the outer wall surface of the intake air passage. The auxiliary passage structure capable of being handled as a single module united to the case member is effective to the mass production of an air flow control system and the reduction in cost thereof since the structure can be mounted to different kinds of internal combustion engines.
摘要:
In an ozonized water producing apparatus in which a pressurized ozone gas generated by an electric discharge type ozonizer is dissolved in water to be treated through a porous hollow-fiber membrane, an infinite variable-speed control type pump is provided upstream of the hollow-fiber membrane to maintain the water pressure inside the hollow fibers higher than the ozone gas pressure and to control the water pressure and flow rate, and a control mechanism is provided to control the ozone concentration in the treated water on the basis of the ozone gas concentration. Thereby treated water containing neither tiny bubbles nor impurities is obtained, and the concentration, flow rate and pressure of the treated water are controlled at constant levels.
摘要:
A phenolic polymer obtained by reacting a phenolic compound with a bis(hydroxyalkyl)benzene, followed by alkylation of ortho positions or para position with respect to the hydroxyl group of the terminal phenol groups of the produced polymer is suitable for use as a heat resistant antioxidant for thermoplastic resins.
摘要:
Disclosed herein is a method and device for molding a skin-covered foamed plastic article with a bore formed therein. A split mold is used which comprises a lower mold part with a recess and an upper mold part with a through bore. The upper mold part is placeable on the lower mold part to form a combined cavity by the through bore and the recess. In order to provide the foamed product with a desirable bore, first and second shaping dies are employed which are combinable with each other to form a combined shaping body which is, upon molding, projected into the combined cavity of the split mold. Upon hardening of the product, the second and first shaping dies are dismantled from the split mold in this order.