摘要:
An HTB gas and a disilane gas are introduced into a process chamber (1), and a hafnium silicate film is formed on a silicon substrate (W) by CVD. The film is formed while controlling the substrate temperature by a heater (5) embedded in a susceptor (2) supporting the substrate. The substrate temperature during film formation is controlled not less than the temperature at which HTB is decomposed into hafnium hydroxide and isobutylene and less than the autolysis temperature of the disilane gas, preferably not less than 350° C. and not more than 450° C.
摘要:
A media storage device reads and writes data from and to a storage medium using a head and prevents in advance data loss due to thermal relaxation of data recorded on the storage medium. Table stores information which is related to a read error detected by a channel circuit in record units. The channel circuit measures information which is related to a read error and updates the information in the table. Further, data degradation is judged by this information which is related to the read error. Degradation of recorded data due to thermal relaxation can be detected accurately, and data loss can be prevented.
摘要:
The method of manufacturing a recording head has a flow path wall forming step of forming flow path walls on a substrate having energy generating elements formed thereon, an imbedded material depositing step of depositing an imbedded material between the flow path walls and on a top of each flow path wall, a flattening step of polishing a top of the deposited imbedded material, until the top of the flow path wall is exposed, and a step of forming an orifice plate on the tops of the polished imbedded material and the exposed flow path wall. In the step of forming the flow path walls, patterning of a close contact property improvement layer is simultaneously performed to improve a close contact property between the flow path wall and the substrate.
摘要:
In an existing optical semiconductor integrated circuit device, a silicon nitride film that is an anti-reflection film is used as an etching stopper film at the etching of an insulating film and by means of wet etching the insulating film is removed once for all. Accordingly, there is a problem in that the processing accuracy is poor. In an optical semiconductor integrated circuit device according to the present invention, after a multi-layered wiring layer is formed on a top surface of a silicon substrate, an insulating layer on a top surface of an anti-reflection film of a photodiode is removed by means of dry etching. At this time, a polycrystal silicon film is used as an etching stopper film. Thereby, in the photodiode according to the invention, although the dry etching is used, since a silicon nitride film that is an anti-reflection film is not over-etched, the dispersion of film thickness thereof can be inhibited from occurring. As a result, a photodiode according to the present invention can realize an improvement in the sensitivity of incident light and a miniaturization structure can be realized.
摘要:
The invention provides a stator for a dynamo-electric machine capable of preventing deterioration of efficiency. In the stator for dynamo-electric machine of which rotor is disposed inside the stator, a stator core 11 comprises: an inside ring core 9 formed annularly by laminating plate-type magnetic members in which a plurality of teeth are provided on one side of a yoke portion, disposing coils 8 in slots each formed between the teeth, bending the plate-type magnetic members so that the coils 8 are located inside, and bringing two end faces into contact with each other; and an outside ring core 10, being made of magnetic members and formed cylindrical in shape, which is fitted on outside of the inside ring 9 and holds the inside ring core 9.
摘要:
A falling sensor is provided, which detects a falling of a magnetic disk drive or an information processing device installed with the magnetic disk drive and which is effective for avoiding physical damage of magnetic heads and magnetic disk media. The magnetic disk drive or the information processing device, include an unload mechanism moving or evacuating the magnetic head from a surface of the magnetic disk media, and a falling sensor comprising a conductive flexible beam or member having a compatible function, a conductive weight supported by these beams and a conductive wall arranged to be made in contact or non-contact with the weight. The sensor can detect a falling of the magnetic disk drive or the information processing device, which is typically a notebook personal computer installed with the magnetic disk drive, and evacuate the magnetic head by the unload mechanism.
摘要:
A film forming apparatus according to the present invention has a source material supply section, a vaporizer, and a film forming chamber. The vaporizer comprises a nozzle which spays the liquid material supplied from the source material supply section, a vaporization chamber which has one end in which the nozzle opens and a closed other end and in which the misty liquid material sprayed through the nozzle is vaporized to generate the material gas, a heater which heats the vaporization chamber, and an outlet port which opens in the vaporization chamber in the vicinity of the nozzle and through which the material gas is discharged from the vaporization chamber. The closed other end of the vaporization chamber is kept at a long enough distance from the nozzle to allow the liquid source material injected through the nozzle to vaporize.
摘要:
The present invention provides a printer capable of separately processing a plurality of print data corresponding to an image to be printed on the same page, each of the print data having an attribute, in accordance with the attribute. The printer has an image, a plurality of video interfaces, a print data integration circuit, and an output mechanism. The image buffer stores each of the print data in accordance with the attribute. Each of the video interfaces reads each of the print data stored in the image buffer. The print data integration circuit integrates the plurality of print data read by the video interfaces into a piece of print data for the same page. The output mechanism outputs the image of the same page based on the print data integrated by the print data integration circuit. Therefore, the plurality of print data can be separately processed and output in accordance with the attribute.
摘要:
In a stator core having a plurality of teeth, which elongate in an inner radial direction and slots, which are configured among the teeth, powder is caused to adhere to the stator core, the powder adhering to an inner peripheral face of the stator core is removed, and the stator core is heated to melt and harden the powder.
摘要:
In a stator core having a plurality of teeth, which elongate in an inner radial direction and slots, which are configured among the teeth, powder is caused to adhere to the stator core, the powder adhering to an inner peripheral face of the stator core is removed, and the stator core is heated to melt and harden the powder.