Method and apparatus for forming metal silicate film, and method for manufacturing semiconductor device
    81.
    发明申请
    Method and apparatus for forming metal silicate film, and method for manufacturing semiconductor device 审中-公开
    用于形成金属硅酸盐膜的方法和装置,以及半导体装置的制造方法

    公开(公告)号:US20070141257A1

    公开(公告)日:2007-06-21

    申请号:US10593254

    申请日:2005-03-30

    IPC分类号: C23C16/00 C23C16/40 H01L21/31

    摘要: An HTB gas and a disilane gas are introduced into a process chamber (1), and a hafnium silicate film is formed on a silicon substrate (W) by CVD. The film is formed while controlling the substrate temperature by a heater (5) embedded in a susceptor (2) supporting the substrate. The substrate temperature during film formation is controlled not less than the temperature at which HTB is decomposed into hafnium hydroxide and isobutylene and less than the autolysis temperature of the disilane gas, preferably not less than 350° C. and not more than 450° C.

    摘要翻译: 将HTB气体和乙硅烷气体引入到处理室(1)中,并且通过CVD在硅衬底(W)上形成硅酸铪膜。 通过嵌入在支撑衬底的基座(2)中的加热器(5)来控制衬底温度而形成膜。 控制成膜时的基板温度不低于HTB分解为氢氧化铪和异丁烯的温度,低于乙硅烷气体的自溶温度,优选为350℃以上450℃以下。

    Data loss prevention method of a media storage device and media storage device
    82.
    发明申请
    Data loss prevention method of a media storage device and media storage device 有权
    媒体存储设备和媒体存储设备的数据丢失防范方法

    公开(公告)号:US20070041118A1

    公开(公告)日:2007-02-22

    申请号:US11318765

    申请日:2005-12-27

    IPC分类号: G11B5/09

    摘要: A media storage device reads and writes data from and to a storage medium using a head and prevents in advance data loss due to thermal relaxation of data recorded on the storage medium. Table stores information which is related to a read error detected by a channel circuit in record units. The channel circuit measures information which is related to a read error and updates the information in the table. Further, data degradation is judged by this information which is related to the read error. Degradation of recorded data due to thermal relaxation can be detected accurately, and data loss can be prevented.

    摘要翻译: 媒体存储设备使用磁头从存储介质读取和写入数据,并且由于记录在存储介质上的数据的热松弛而预先防止数据丢失。 表存储与由通道电路以记录单位检测到的读取错误相关的信息。 信道电路测量与读取错误相关的信息,并更新表中的信息。 此外,通过与读取错误相关的该信息来判断数据劣化。 可以准确检测由于热松弛引起的记录数据的劣化,可以防止数据丢失。

    Method of manufacturing optical semiconductor integrated circuit device
    84.
    发明授权
    Method of manufacturing optical semiconductor integrated circuit device 失效
    光半导体集成电路器件的制造方法

    公开(公告)号:US07067347B2

    公开(公告)日:2006-06-27

    申请号:US10948740

    申请日:2004-09-24

    IPC分类号: H01L21/00

    CPC分类号: H01L31/18 H01L27/14683

    摘要: In an existing optical semiconductor integrated circuit device, a silicon nitride film that is an anti-reflection film is used as an etching stopper film at the etching of an insulating film and by means of wet etching the insulating film is removed once for all. Accordingly, there is a problem in that the processing accuracy is poor. In an optical semiconductor integrated circuit device according to the present invention, after a multi-layered wiring layer is formed on a top surface of a silicon substrate, an insulating layer on a top surface of an anti-reflection film of a photodiode is removed by means of dry etching. At this time, a polycrystal silicon film is used as an etching stopper film. Thereby, in the photodiode according to the invention, although the dry etching is used, since a silicon nitride film that is an anti-reflection film is not over-etched, the dispersion of film thickness thereof can be inhibited from occurring. As a result, a photodiode according to the present invention can realize an improvement in the sensitivity of incident light and a miniaturization structure can be realized.

    摘要翻译: 在现有的光学半导体集成电路器件中,作为防反射膜的氮化硅膜在蚀刻绝缘膜时用作蚀刻阻挡膜,并且通过湿蚀刻,绝缘膜全部被去除一次。 因此,存在加工精度差的问题。 在根据本发明的光半导体集成电路器件中,在硅衬底的顶表面上形成多层布线层之后,通过光电二极管的抗反射膜的顶表面上的绝缘层被除去 干蚀刻手段。 此时,使用多晶硅膜作为蚀刻停止膜。 因此,在根据本发明的光电二极管中,尽管使用干法蚀刻,但是由于作为防反射膜的氮化硅膜未被过度蚀刻,所以可以抑制其膜厚分散。 结果,根据本发明的光电二极管可以实现入射光的灵敏度的提高,并且可以实现小型化结构。

    Stator for dynamo-electric machine
    85.
    发明授权
    Stator for dynamo-electric machine 有权
    发电机定子

    公开(公告)号:US07049726B2

    公开(公告)日:2006-05-23

    申请号:US10377740

    申请日:2003-03-04

    IPC分类号: H02K1/12

    CPC分类号: H02K1/16 Y10T29/49009

    摘要: The invention provides a stator for a dynamo-electric machine capable of preventing deterioration of efficiency. In the stator for dynamo-electric machine of which rotor is disposed inside the stator, a stator core 11 comprises: an inside ring core 9 formed annularly by laminating plate-type magnetic members in which a plurality of teeth are provided on one side of a yoke portion, disposing coils 8 in slots each formed between the teeth, bending the plate-type magnetic members so that the coils 8 are located inside, and bringing two end faces into contact with each other; and an outside ring core 10, being made of magnetic members and formed cylindrical in shape, which is fitted on outside of the inside ring 9 and holds the inside ring core 9.

    摘要翻译: 本发明提供一种能够防止效率劣化的发电机的定子。 在转子配置在定子内部的发电机的定子中,定子芯11包括:内环芯9,其通过层压板状磁性构件而形成,其中多个齿在其一侧设置 将线圈8设置在形成在齿之间的槽中,弯曲板状磁性构件,使得线圈8位于内部并使两个端面彼此接触; 以及由磁性部件制成并形成为圆筒状的外圈磁芯10,该外圈磁芯10安装在内圈9的外侧并保持内环芯9。

    Falling sensor and the information processing device making use of it
    86.
    发明授权
    Falling sensor and the information processing device making use of it 失效
    落下的传感器和使用它的信息处理设备

    公开(公告)号:US06995939B2

    公开(公告)日:2006-02-07

    申请号:US10882327

    申请日:2004-07-02

    IPC分类号: G11B21/02

    摘要: A falling sensor is provided, which detects a falling of a magnetic disk drive or an information processing device installed with the magnetic disk drive and which is effective for avoiding physical damage of magnetic heads and magnetic disk media. The magnetic disk drive or the information processing device, include an unload mechanism moving or evacuating the magnetic head from a surface of the magnetic disk media, and a falling sensor comprising a conductive flexible beam or member having a compatible function, a conductive weight supported by these beams and a conductive wall arranged to be made in contact or non-contact with the weight. The sensor can detect a falling of the magnetic disk drive or the information processing device, which is typically a notebook personal computer installed with the magnetic disk drive, and evacuate the magnetic head by the unload mechanism.

    摘要翻译: 提供了一种下降传感器,其检测磁盘驱动器或安装有磁盘驱动器的信息处理装置的下落,并且其有效地避免磁头和磁盘介质的物理损坏。 磁盘驱动器或信息处理装置包括从磁盘介质的表面移动或抽出磁头的卸载机构,以及包括具有兼容功能的导电柔性梁或构件的下落传感器,由 这些梁和导电壁布置成与重物接触或不接触。 该传感器可以检测磁盘驱动器或信息处理装置的下落,该装置通常是安装有磁盘驱动器的笔记本个人计算机,并通过卸载机构排出磁头。

    Film forming apparatus
    87.
    发明申请
    Film forming apparatus 审中-公开
    成膜装置

    公开(公告)号:US20050223987A1

    公开(公告)日:2005-10-13

    申请号:US11054381

    申请日:2005-02-10

    摘要: A film forming apparatus according to the present invention has a source material supply section, a vaporizer, and a film forming chamber. The vaporizer comprises a nozzle which spays the liquid material supplied from the source material supply section, a vaporization chamber which has one end in which the nozzle opens and a closed other end and in which the misty liquid material sprayed through the nozzle is vaporized to generate the material gas, a heater which heats the vaporization chamber, and an outlet port which opens in the vaporization chamber in the vicinity of the nozzle and through which the material gas is discharged from the vaporization chamber. The closed other end of the vaporization chamber is kept at a long enough distance from the nozzle to allow the liquid source material injected through the nozzle to vaporize.

    摘要翻译: 根据本发明的成膜装置具有源材料供给部,蒸发器和成膜室。 蒸发器包括喷嘴,其喷射从源材料供应部分供应的液体材料,蒸发室,其具有喷嘴打开的一端和封闭的另一端,并且其中通过喷嘴喷射的雾状液体材料被蒸发以产生 材料气体,加热蒸发室的加热器和在喷嘴附近在蒸发室中开口的出口,并且材料气体从气化室排出。 蒸发室的封闭的另一端保持与喷嘴足够长的距离,以允许通过喷嘴喷射的液体源材料蒸发。

    Printing method and apparatus for separately processing a plurality of print data
    88.
    发明授权
    Printing method and apparatus for separately processing a plurality of print data 失效
    用于分开处理多个打印数据的打印方法和装置

    公开(公告)号:US06914697B2

    公开(公告)日:2005-07-05

    申请号:US09138378

    申请日:1998-08-24

    CPC分类号: G06F3/1296 G06F3/1297

    摘要: The present invention provides a printer capable of separately processing a plurality of print data corresponding to an image to be printed on the same page, each of the print data having an attribute, in accordance with the attribute. The printer has an image, a plurality of video interfaces, a print data integration circuit, and an output mechanism. The image buffer stores each of the print data in accordance with the attribute. Each of the video interfaces reads each of the print data stored in the image buffer. The print data integration circuit integrates the plurality of print data read by the video interfaces into a piece of print data for the same page. The output mechanism outputs the image of the same page based on the print data integrated by the print data integration circuit. Therefore, the plurality of print data can be separately processed and output in accordance with the attribute.

    摘要翻译: 本发明提供一种打印机,其能够根据该属性分别处理与要打印在同一页上的图像相对应的多个打印数据,每个打印数据具有属性。 打印机具有图像,多个视频接口,打印数据集成电路和输出机构。 图像缓冲器根据该属性存储每个打印数据。 每个视频接口读取存储在图像缓冲器中的每个打印数据。 打印数据集成电路将由视频接口读取的多个打印数据集成为同一页面的打印数据。 输出机构基于由打印数据集成电路集成的打印数据输出同一页面的图像。 因此,可以根据该属性单独处理并输出多个打印数据。