摘要:
Provided is a method of manufacturing a display device having a step of forming a resin material layer by curing a resin coated on the main surface of a glass substrate; a step of forming a display circuit configured by a plurality of lamination material layers on the main surface side of said resin material layer; and a step of generating exfoliation at the interface between said resin material layer and said glass substrate, by irradiating a ultraviolet ray from the surface on the opposite side to the surface provided with said display circuit of said glass substrate, and said resin material layer, from which said glass substrate is removed, is used as a substrate provided with said display circuit.
摘要:
The present invention provides a method of manufacturing a heat exchanger tube in which a tube for a heat exchanger formed by brazing is manufactured using a sheet material, wherein a filler metal melted during brazing can be prevented from entering an opening formed in an opposing portion or a parallel portion formed when bending a sheet material into a tube shape or an opening facing toward the outside of the tube. The opposing portion, the parallel portion, or the opening facing toward the outside of the tube is sealed. As the sealing means, friction welding is preferable.
摘要:
With the tendency of reducing the size of semiconductor circuit patterns, edge roughness on a resist pattern is increased when pattern dimensions required are close to the size of the resist molecules. The present invention provides a technique for preventing degradation of the device performance and negative effects over the system performance caused by the phenomena. A photoresist compound is used, which is a molecule having functional groups that are chemically converted due to an action of an acid with reduced solubility in alkaline developer.
摘要:
There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.
摘要:
A lithium secondary battery comprising a positive electrode, a negative electrode of artificial graphite or natural graphite and a nonaqueous electrolytic solution having an electrolyte dissolved in a nonaqueous solvent, wherein 0.1 to 20 wt. % of a cyclohexylbenzene having a halogen atom bonded to a benzene ring thereof is contained in the nonaqueous electrolytic solution exhibits large electric capacity and excellent cycle performance.
摘要:
There is provided a negative radiation-sensitive composition, which is suitable for exposure of a far ultraviolet light comprising a wavelength 193 nm of ArF excimer-laser, freed from causes of resolution deterioration such as swelling due to permeation of a developer and residual of a resist film between lines of the pattern, and capable of forming a high resolution pattern. The radiation-sensitive composition comprises a polymer of an acrylic acid ester having a &ggr;-hydroxycarboxylic acid in its ester moiety and a photo-acid generator.
摘要:
A method for manufacturing an electronic device is provided. In one example of the method, the method prevents deformation of a resist mask caused by the irradiation of exposure light. The resist mask has a resist as an opaque element, and can afford mask patterns undergoing little change even with an increase in the number of wafers subjected to exposure processing. The resist mask maintains a high dimensional accuracy. A photomask pattern is formed using as an opaque element a resist comprising a base resin and Si incorporated therein or a resist with a metal such as Si incorporated thereby by a silylation process, to improve the resistance to active oxygen. The deformation of a resist opaque pattern in a photomask is prevented. The dimensional accuracy of patterns transferred onto a Si wafer is improved in repeated use of the photomask.
摘要:
A circuit pattern, a reticle alignment mark, a bar code, and a discrimination mark which are formed on a glass plate of a photo mask is constituted of a photo sensitive and photo attenuative material containing a fine particle material and a binder. Discrimination of the photo mask is performed by irradiating predetermined discrimination light on the discrimination mark or the bar code. Alignment of the photo mask by an aligner is performed by irradiating predetermined detection light on the reticle alignment mark. In an exposure process, the pattern on the photo mask is transferred onto a semiconductor wafer by using exposure light having a wavelength different from that of the discrimination light or that of the detection light.
摘要:
A storage battery including an electrode and an electrolyte material, in which the electrode has a grid with a mesh area of about 50 mm2 or less and an active material provided on the grid. Accordingly, it is made possible to prevent a decrease in the negative electrode's conductivity due to a contraction of the negative electrode active material that takes place extensively when a cycle of charge and discharge is repeated particularly at high temperatures with a resulting remarkable improvement in cycle life characteristics of a lead-acid storage battery.
摘要:
An enclosed lead storage battery includes an enclosed container, a group of electrode plates including positive electrode plates and negative electrode plates, and separators, with the group of electrode plates and the separators being housed in the container. The positive electrode plates, negative electrode plates, and separators are layered side by side, with each of the positive electrode plates and negative electrode plates including a top side, a bottom side, and opposite lateral sides. At least one of the positive electrode plates and at least one of the negative electrode plates provide a grid having no frames at opposite lateral sides of the grid, such as an expanded grid. To prevent a short-circuit between the positive and negative electrode plates, the battery includes a porous mat disposed between the container and the opposite lateral sides of the grid.