摘要:
Collectors are provided on a pair of exhaust passages extending in parallel from an internal combustion engine respectively. Each of the collectors collects black smoke particles (unclean substance) included in exhaust gas. One of a pair of differential pressure detectors detects a first differential pressure between upstream and downstream of one of the collectors while the other differential pressure detector detects a second differential pressure between upstream and downstream of the other collector. Upon finishing a regeneration process of removing the black smoke particles in each of the collectors, a control computer estimates an exhaust gas flow rate of each of the exhaust passages based on the first differential pressure and the second differential pressure.
摘要:
A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.
摘要:
The semiconductor device is formed according to the following steps. A TiN film 71 and a W film 72 are deposited on a silicon oxide film 64 including the inside of a via-hole 66 by the CVD method and thereafter, the W film 72 and TiN film 71 on the silicon oxide film 64 are etched back to leave only the inside of the via-hole 66 and form a plug 73. Then, a TiN film 74, Al-alloy film 75, and Ti film 76 are deposited on the silicon oxide film 64 including the surface of the plug 73 by the sputtering method and thereafter, the Ti film 76, Al-alloy film 75, and TiN film 74 are patterned to form second-layer wirings 77 and 78.
摘要:
A method of manufacturing a semiconductor memory according to the present invention includes steps of forming an insulating film, into which a conductive plug connected to a source or a drain in a transistor in a memory cell region and into which a first conductive layer which will become a part of a circuit in a peripheral circuit region are buried, on a semiconductor substrate, forming a first interlayer insulating film on the insulating film, forming, in the first interlayer insulating film, conductive plugs for connecting a first conductive layer and a second conductive layer arranged in a layer upper than the first interlayer insulating film, forming lower electrode of the capacitor in the first interlayer insulating film after the connection plugs are formed, forming capacitance insulating film, and forming upper electrode of the capacitor.
摘要:
The present invention is directed to a rotary joint that includes a power slip ring and an electric signal slip ring, both for passing electricity between a stator and a rotor The system includes a plurality of slip rings (21,31) and a plurality of circumferentially extending fluid flow annular passages (12, 13, 14) formed in axially aligned relaation between the stator and the rotor. Water passages are constituted by some of the annual passages (12,13) and one of the annular passages (14), typically the lowest one, is used an air passage for air under pressure or an air-filled drain so that water leakage can be absorbed into the air passage or drain and does not penetrate into the region of the slip rings. The slip ring (21) with collector rings (22) is used for power and slip rings (31) are used for signals. Water passages are constituted by the annular passages, other than one of the annular passages located towards the power slip ring and the electric signal slip ring.
摘要:
A semiconductor device includes cylindrical capacitors each including corresponding cylindrical electrodes. Each cylindrical electrode includes hemispherical silicon grains. The hemispherical silicon grains protruding from an upper region of the cylindrical electrode have a large size, and the hemispherical silicon grains protruding from a lower region of the cylindrical electrode have a small size or the lower region of the cylindrical electrode has no hemispherical silicon grains.
摘要:
A semiconductor device equipped with information storage capacitor comprising a first capacitor electrode, an oxide film, a second capacitor electrode and insulating films containing silicon as a main constituting element, wherein at least one of first and second capacitor electrodes contains as a main constituting element at least one element selected from rhodium, ruthenium, iridium, osmium and platinum, and as an adding element at least one element selected from palladium, nickel, cobalt and titanium, is excellent in adhesiveness between the capacitor electrodes and the insulating films.
摘要:
A piezoelectric electroacoustic transducer is miniaturized and has a reduced frequency, and even when a diaphragm has a warp or winding, the resonance frequency is be stabilized. The piezoelectric electroacoustic transducer includes a substantially rectangular piezoelectric diaphragm flexurally vibrating in a thickness direction in response to the application of an alternating signal between electrodes and a casing for accommodating the piezoelectric diaphragm, wherein the casing is provided with supporting members for supporting four corners of the piezoelectric diaphragm.
摘要:
The semiconductor device is formed according to the following steps. A TiN film 71 and a W film 72 are deposited on a silicon oxide film 64 including the inside of a via-hole 66 by the CVD method and thereafter, the W film 72 and TiN film 71 on the silicon oxide film 64 are etched back to leave only the inside of the via-hole 66 and form a plug 73. Then, a TiN film 74, Al-alloy film 75, and Ti film 76 are deposited on the silicon oxide film 64 including the surface of the plug 73 by the sputtering method and thereafter, the Ti film 76, Al-alloy film 75, and TiN film 74 are patterned to form second-layer wirings 77 and 78.
摘要:
A TV phone apparatus includes an image sensing element, ROM, CG processing section, and radio antenna. The image sensing element photographs a real video of a speaker. The ROM stores in advance at least one substitute video of the speaker. The CG processing section extracts substitute video data from the ROM in place of real video data output from the image sensing element and executes graphics processing. The radio antenna transmits the substitute video data output from the CG processing section to a partner of speech communication.