公开(公告)号：US09727052B2

公开(公告)日：2017-08-08

申请号：US14414653

申请日：2014-02-14

Applicant: Halliburton Energy Services, Inc.

Inventor： James M Price ,  Aditya B. Nayak ,  David L. Perkins

IPC: G01J3/00 ,  G05B19/4099 ,  G01J3/28 ,  G01N21/31 ,  B29D11/00 ,  G01N21/84 ,  G02B5/28 ,  B32B3/26

CPC classification number: G05B19/4099 ,  B29D11/0073 ,  B32B3/266 ,  B32B2307/40 ,  B32B2307/418 ,  B32B2307/732 ,  B32B2551/00 ,  G01J3/0264 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/12 ,  G01J3/28 ,  G01J3/45 ,  G01J2003/1226 ,  G01N21/31 ,  G01N21/8422 ,  G01N2021/8438 ,  G02B5/285 ,  G02B5/287 ,  G05B2219/49023

Abstract: Technologies are described for monitoring characteristics of layers of integrated computational elements (ICEs) during fabrication using an in-situ spectrometer operated in step-scan mode in combination with lock-in or time-gated detection. As part of the step-scan mode, a wavelength selecting element of the spectrometer is discretely scanned to provide spectrally different instances of probe-light, such that each of the spectrally different instances of the probe-light is provided for a finite time interval. Additionally, an instance of the probe-light interacted during the finite time interval with the ICE layers includes a modulation that is being detected by the lock-in or time-gated detection over the finite time interval.

公开(公告)号：US08860939B2

公开(公告)日：2014-10-14

申请号：US13916813

申请日：2013-06-13

Applicant: The Royal Institution for the Advancement of Learning / McGill University

Inventor： Patanjali Kambhampati ,  Jonathan Saari ,  Pooja Tyagi

IPC: G01J4/00 ,  G01J3/10 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0224 ,  G01J3/08 ,  G01J3/1256 ,  G01J3/433 ,  G01J3/453 ,  G01J9/02

Abstract: Two dimensional (2D) optical spectroscopy, wherein the spectrum has an excitation and an emission axis, reveals information formerly hidden in one-dimensional (1D) optical spectroscopy. However, current two dimensional optical spectroscopy systems are complex laboratory arrangements and accordingly limited in deployment. According to embodiments of the invention a monolithic platform providing significantly reduced complexity and increased robustness is provided allowing for “black-box” modules allowing commercial deployment of 2D optical spectroscopy instruments. Additionally, the invention supports high pulse repetition rates as well as one quantum and two quantum measurements under electronic control.

Abstract translation: 二维（2D）光谱，其中光谱具有激发和发射轴，揭示了先前隐藏在一维（1D）光谱中的信息。 然而，目前的二维光谱系统是复杂的实验室布置，因此在部署方面受到限制。 根据本发明的实施例，提供了提供显着降低的复杂性和增强的鲁棒性的单片平台，允许允许商业部署2D光谱仪器的“黑箱”模块。 此外，本发明支持高脉冲重复率以及电子控制下的一个量子和两个量子测量。

公开(公告)号：US08696992B2

公开(公告)日：2014-04-15

申请号：US13388885

申请日：2010-08-05

Applicant: Hideji Tajima

Inventor： Hideji Tajima

IPC: G01N21/00 ,  G01N21/76 ,  C12M1/34 ,  G01N21/25

CPC classification number: G01N21/6452 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/32 ,  G01J3/4406 ,  G01J2003/1213 ,  G01N21/253 ,  G01N35/028 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833 ,  G02B6/4298

Abstract: Disclosed is a highly reliable optical fiber measurement device and measurement method having a simple and compact structure. The device includes a planar liquid holder having a plurality of liquid holding portions arranged along a flat face; a plurality of light receiving optical fibers for transmitting fluorescence generated in the liquid holding portions; a plurality of light emitting optical fibers for transmitting excitation light into the liquid holding portions; a measurement head capable of being positioned in the each liquid holding portion while supporting a plurality of measurement ends having a bundle of one light receiving end of the light receiving optical fibers and one light emitting end of light emitting optical fibers; a light reception selecting element that, by sequentially selecting one by one from plural the light receiving optical fibers and sequentially selecting one by one from plural kinds of wavelength or wavelength bands, sequentially guides the light of the selected wavelength or wavelength band of the fluorescence received by the selected light receiving optical fibers to one photoelectric element; and a photoelectric element for sequentially conducting photoelectric conversion on the guided fluorescence.

Abstract translation: 公开了一种具有简单紧凑结构的高度可靠的光纤测量装置和测量方法。 该装置包括具有沿着平坦表面布置的多个液体保持部分的平面液体保持器; 多个用于透射在液体保持部分中产生的荧光的光接收光纤; 用于将激发光发射到液体保持部分中的多个发光光纤; 测量头，其能够定位在每个液体保持部分中，同时支撑具有光接收光纤的一个光接收端的束和发光光纤的一个发光端的多个测量端; 光接收选择元件，通过从多个光接收光纤中逐一选择并从多种波长或波长带中逐个选择一个顺序地选择所接收的荧光的所选波长或波长带的光， 通过所选择的光接收光纤到一个光电元件; 以及用于对引导荧光进行光电转换的光电元件。

公开(公告)号：US20140022414A1

公开(公告)日：2014-01-23

申请号：US13555428

申请日：2012-07-23

Applicant: Vikram Bhatia ,  Carl Edgar Crossland ,  Paul G. Dewa ,  Michael Lucien Genier

Inventor： Vikram Bhatia ,  Carl Edgar Crossland ,  Paul G. Dewa ,  Michael Lucien Genier

IPC: H04N5/347 ,  H04N5/262

CPC classification number: G01J3/021 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/08 ,  G01J3/2823 ,  G01J3/36

Abstract: A hyperspectral imaging system and method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). The hyperspectral imaging system includes at least one optic, a scannable slit mechanism, a spectrometer, a two-dimensional image sensor, and a controller. The scannable slit mechanism can be a micro-electromechanical system spatial light modulator (MEMS SLM), a diffractive Micro-Opto-Electro-Mechanical Systems (MOEMS) spatial light modulator (SLM), a digital light processing (DLP) system, a liquid crystal display, a rotating drum with at least one slit formed therein, or a rotating disk with at least one slit formed therein.

Abstract translation: 本文描述了一种用于提供远程对象（例如，感兴趣的场景）的区域的高光谱图像的高光谱成像系统和方法。 高光谱成像系统包括至少一个光学元件，可扫描狭缝机构，光谱仪，二维图像传感器和控制器。 可扫描狭缝机构可以是微机电系统空间光调制器（MEMS SLM），衍射微光电机械系统（MOEMS）空间光调制器（SLM），数字光处理（DLP）系统，液体 晶体显示器，其中形成有至少一个狭缝的旋转滚筒或其中形成有至少一个狭缝的旋转盘。

公开(公告)号：US08564780B2

公开(公告)日：2013-10-22

申请号：US12844851

申请日：2010-07-28

Applicant: Phillip Walsh ,  Dale Harrison

Inventor： Phillip Walsh ,  Dale Harrison

IPC: G01N21/55

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步的细化使用r-θ级来进一步减少占地面积。

公开(公告)号：US08400637B2

公开(公告)日：2013-03-19

申请号：US13540109

申请日：2012-07-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to an apparatus and related method of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本发明涉及在产品生产过程中产品样品的高速分析的装置和相关方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US20120190034A1

公开(公告)日：2012-07-26

申请号：US13388885

申请日：2010-08-05

Applicant: Hideji Tajima

Inventor： Hideji Tajima

IPC: G01N21/76 ,  C12M1/34

CPC classification number: G01N21/6452 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/32 ,  G01J3/4406 ,  G01J2003/1213 ,  G01N21/253 ,  G01N35/028 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833 ,  G02B6/4298

Abstract: Disclosed is a highly reliable optical fiber measurement device and measurement method having a simple and compact structure. The device includes a planar liquid holder having a plurality of liquid holding portions arranged along a flat face; a plurality of light receiving optical fibers for transmitting fluorescence generated in the liquid holding portions; a plurality of light emitting optical fibers for transmitting excitation light into the liquid holding portions; a measurement head capable of being positioned in the each liquid holding portion while supporting a plurality of measurement ends having a bundle of one light receiving end of the light receiving optical fibers and one light emitting end of light emitting optical fibers; a light reception selecting element that, by sequentially selecting one by one from plural the light receiving optical fibers and sequentially selecting one by one from plural kinds of wavelength or wavelength bands, sequentially guides the light of the selected wavelength or wavelength band of the fluorescence received by the selected light receiving optical fibers to one photoelectric element; and a photoelectric element for sequentially conducting photoelectric conversion on the guided fluorescence.

Abstract translation: 公开了一种具有简单紧凑结构的高度可靠的光纤测量装置和测量方法。 该装置包括具有沿着平坦表面布置的多个液体保持部分的平面液体保持器; 多个用于透射在液体保持部分中产生的荧光的光接收光纤; 用于将激发光发射到液体保持部分中的多个发光光纤; 测量头，其能够定位在每个液体保持部分中，同时支撑具有光接收光纤的一个光接收端的束和发光光纤的一个发光端的多个测量端; 光接收选择元件，通过从多个光接收光纤中逐一选择并从多种波长或波长带中逐个选择一个顺序地选择所接收的荧光的所选波长或波长带的光， 通过所选择的光接收光纤到一个光电元件; 以及用于对引导荧光进行光电转换的光电元件。

公开(公告)号：US20120026484A1

公开(公告)日：2012-02-02

申请号：US13196802

申请日：2011-08-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/01

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品生产过程中产品样品的高速分析方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US08054453B2

公开(公告)日：2011-11-08

申请号：US12876242

申请日：2010-09-07

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01J3/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US08049881B2

公开(公告)日：2011-11-01

申请号：US12094469

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

Inventor： Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

IPC: G01J3/40

CPC classification number: G01J3/08 ,  A61K8/046 ,  A61K8/25 ,  A61K8/26 ,  A61K8/44 ,  A61Q11/00 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/28 ,  G01N21/274 ,  G01N21/31

Abstract: A method of arranging and utilizing a multivariate optical computing and analysis system includes transmitting light from a light source; reflecting the light from the sample; directing a portion of the light reflected from the sample with a beamsplitter; and arranging an optical filter mechanism in a normal incidence orientation to receive the light reflected from the sample, the optical filter mechanism configured to filter and measure data carried by the light reflected from the sample.

Abstract translation: 一种布置和利用多变量光学计算和分析系统的方法，包括从光源发射光; 反映样品的光; 用分束器引导从样品反射的一部分光; 以及将法兰入射方向的滤光器机构布置成接收从样品反射的光，所述滤光器机构被配置为过滤和测量由样品反射的光携带的数据。