公开(公告)号：US5915396A

公开(公告)日：1999-06-29

申请号：US881920

申请日：1997-06-25

申请人： Kazuo Kinose

发明人： Kazuo Kinose

IPC分类号： B65G49/07 ,  H01L21/677 ,  B08B3/02

CPC分类号： H01L21/67745 ,  H01L21/67184 ,  Y10S134/902

摘要： A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first transportation mechanism movable along a first transportation path in a predetermined transportation direction; a cassette load portion provided on one side of the transportation path; a plurality of unit portions arranged in a direction crossing the transportation direction on the other side of the first transportation path; and a second transportation mechanism disposed between each two adjacent unit portions and movable along a second transportation path in the transportation direction. The first transportation mechanism can perform a substrate transferring operation with respect to a cassette placed on the cassette load portion and a processing unit in a unit portion disposed in closest proximity to the first transportation path among the plurality of unit portions. The second transportation mechanism can perform a substrate transferring operation with respect to any processing units included in unit portions disposed on opposite sides of the second transportation path.

摘要翻译： 提供了一种基板处理装置，其需要减小的安装空间并且允许准备改变处理顺序。 一种基板处理装置，包括：沿预定的输送方向沿第一输送路径移动的第一输送机构; 设置在所述传送路径的一侧的盒装载部; 多个单元部，沿与第一输送路径另一侧的输送方向交叉的方向配置; 以及第二输送机构，其设置在两个相邻的单元部分之间，并且沿着输送方向沿着第二输送路径移动。 第一输送机构可以相对于放置在盒装载部分上的盒子和在多个单元部分中最靠近第一传送路径设置的单元部分中的处理单元执行基板传送操作。 第二输送机构可以相对于设置在第二输送路径的相对侧的单元部分中包含的任何处理单元执行基板转印操作。

公开(公告)号：US5875804A

公开(公告)日：1999-03-02

申请号：US877008

申请日：1997-06-16

申请人： Masato Tanaka ,  Teruyuki Kobayashi

发明人： Masato Tanaka ,  Teruyuki Kobayashi

IPC分类号： B08B3/04 ,  B08B3/10 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

CPC分类号： H01L21/67057 ,  B08B3/10 ,  H01L21/67051 ,  Y10S134/902

摘要： A substrate treating apparatus adapted for treating a substrate with treating fluid therein, the substrate treating apparatus includes a processing bath; a baffle plate with a plurality of holes disposed therein for dividing the processing bath into an upper region and a lower region, the holes allowing communication of the treating liquid between the upper region and the lower region. The baffle plate is composed of a material exhibiting a property that the contact angle of a bubble generated in the treating liquid with respect to the baffle plate is smaller than a predetermined value.

摘要翻译： 一种基板处理装置，其特征在于，用于处理基板，处理流体，基板处理装置包括处理槽; 挡板，其中设置有多个孔，用于将处理槽分成上部区域和下部区域，所述孔允许处理液体在上部区域和下部区域之间连通。 挡板由表现出处理液中产生的气泡相对于挡板的接触角小于预定值的材料构成。

公开(公告)号：US5689368A

公开(公告)日：1997-11-18

申请号：US592997

申请日：1996-01-29

申请人： Masahide Okazaki

发明人： Masahide Okazaki

IPC分类号： B41B19/00 ,  G02B26/10 ,  G02B27/28 ,  G06K15/12 ,  H04N1/06 ,  H04N1/191 ,  G02B5/30 ,  G02B26/08

CPC分类号： H04N1/0635 ,  B41B19/00 ,  G02B26/10 ,  G02B26/108 ,  G02B27/283 ,  G06K15/12 ,  G06K15/1257 ,  H04N1/0607 ,  H04N1/0678 ,  H04N1/1911

摘要： The present invention allows image recording with plural light beams while eliminating alignment changes of light spots on the inner face of a drum. A light beam output unit 212 combines two circularly polarized light beams having opposite handedness to each other to produce a composite light beam CB. A polarization beam splitter 203 and mirrors 205 and 207 change the course of the light beam towards the inner face of a drum 120. A quarter-wave plate 202 is included, and the polarization beam splitter 203 splits the composite light beam to two separate light beams as a function of the handedness of the circularly polarized light. The optical elements 202, 203, 205, and 207 are integrally rotated around the axis of the drum 120 by a main scanning motor 230, thus scanning a photosensitive material 110 held on the inner face of the drum 120 with the light beams.

摘要翻译： 本发明允许利用多个光束进行图像记录，同时消除滚筒内表面上的光斑的取向变化。 光束输出单元212将具有相反手性的两个圆偏振光束组合以产生复合光束CB。 偏振分束器203和反射镜205和207将光束的过程改变到滚筒120的内表面。包括四分之一波片202，并且偏振分束器203将复合光束分成两个分开的光 光束作为圆偏振光的旋转性的函数。 光学元件202,203,205和207通过主扫描电动机230围绕滚筒120的轴线一体地旋转，从而用光束扫描保持在滚筒120的内表面上的感光材料110。

公开(公告)号：US5674410A

公开(公告)日：1997-10-07

申请号：US271081

申请日：1994-07-06

申请人： Kazuo Nakajima ,  Katsunori Tanaka

发明人： Kazuo Nakajima ,  Katsunori Tanaka

IPC分类号： G03F7/30 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/304 ,  H01L21/306

CPC分类号： H01L21/67057 ,  H01L21/30604 ,  H01L21/67051

摘要： The purity of a liquid chemical agent is improved simultaneously with obtaining a homogeneous concentration of a specific chemical in the agent, thereby improving the quality of substrate processing steps. Pure water is supplied from a pure water supply (30) into a process tank (1) by opening an opening/closing valve (33) on a pure water supply system (7) and by closing an opening/closing valve (19) on a circulation system (5). After the process tank (1) is completely charged with pure water, the opening/closing valve (33) is closed while the opening/closing valve (19) is opened. This closes a pipe conduit (11) of the circulation system (5) and allows pure water in the process tank (1) to be circulated through the circulation system (5) by a pump (13). A first opening/closing valve (49) on a gas supply system (9) is subsequently opened to allow hydrogen chloride gas from a hydrogen chloride gas supply (40) to be fed into a mixing unit (17) of the circulation system (5). This results in mixing of the hydrogen chloride gas with pure water in the mixing unit (17) to make a liquid chemical agent.

摘要翻译： 同时提高液体化学试剂的纯度，同时获得试剂中特定化学物质的均匀浓度，从而提高底物处理步骤的质量。 通过打开纯净水供应系统（7）上的打开/关闭阀（33）并通过关闭打开/关闭阀（19）将净水从纯净水供应（30）供应到处理罐（1）中 循环系统（5）。 在处理罐（1）完全充满纯水之后，打开/关闭阀（19）打开时关闭阀（33）。 这封闭了循环系统（5）的管道导管（11），并允许处理罐（1）中的纯水通过泵（13）循环通过循环系统（5）。 随后打开气体供应系统（9）上的第一开/关阀（49），以便将来自氯化氢气体供应源（40）的氯化氢气体送入循环系统（5）的混合单元（17） ）。 这导致在混合单元（17）中将氯化氢气体与纯水混合以制备液体化学试剂。

公开(公告)号：US5671004A

公开(公告)日：1997-09-23

申请号：US421060

申请日：1995-04-12

申请人： Yoshiaki Morizumi

发明人： Yoshiaki Morizumi

IPC分类号： B41J2/47 ,  G02B26/10

CPC分类号： G02B26/10 ,  B41J2/47

摘要： An image recording apparatus in which at least one light beam scans over an inner surface of a cylindrical member to record an image on a recording medium held on the inner surface. A light beam from light beam outputting means advances along a central axis of a cylindrical member and enters an optical head which includes deflecting means and an imaging optical system. The deflecting means and the imaging optical system rotate as one unit. The nodal point of the imaging optical system is located at or close to a point on the central axis which is nearest a beam irradiation position on the recording medium. Hence, displacement of the imaging position is prevented which makes it possible to record a high quality image, even if the optical head wobbles.

摘要翻译： 一种图像记录装置，其中至少一个光束在圆柱形构件的内表面上扫描以在保持在内表面上的记录介质上记录图像。 来自光束输出装置的光束沿着圆柱形构件的中心轴线前进，并进入包括偏转装置和成像光学系统的光学头。 偏转装置和成像光学系统作为一个单元旋转。 成像光学系统的节点位于或接近中心轴上最靠近记录介质上的光束照射位置的点。 因此，防止成像位置的位移，这使得即使光头摆动也能够记录高质量图像。

公开(公告)号：US4615521A

公开(公告)日：1986-10-07

申请号：US585470

申请日：1984-03-02

申请人： Noriaki Mori

发明人： Noriaki Mori

IPC分类号： H05K13/02 ,  B65G15/14 ,  B65G47/52 ,  B65G47/57 ,  B65G47/64 ,  B65G49/06 ,  B65H5/02 ,  B65H5/04 ,  B65H5/00

CPC分类号： B65H5/04 ,  B65G47/643

摘要： An apparatus for transferring a sheet-like article such as a wafer between a first horizontal passage defining a first plane and a second horizontal passage defining a second plane at a different level from said first plane comprising a carriage vertically movable between said first and second planes for transferring said sheet-like article between said first and second horizontal passages.

摘要翻译： 一种用于在限定第一平面的第一水平通道和限定与所述第一平面不同的水平面之间限定第二平面的第二水平通道之间转移诸如晶片的片状物品的装置，包括可在所述第一和第二平面之间垂直移动的托架 用于在所述第一和第二水平通道之间转移所述片状物品。

公开(公告)号：US4478511A

公开(公告)日：1984-10-23

申请号：US400163

申请日：1982-07-20

申请人： Yoshio Miyauchi

发明人： Yoshio Miyauchi

IPC分类号： G03B27/58 ,  G03B27/32 ,  G03B29/00

CPC分类号： G03B27/32 ,  G03B27/323

摘要： A photographing station of a copying camera is disclosed comprising a film supporting surface rotatable about its axis between a first position and a second position. The surface receives and holds a predetermined length of unexposed film in the first position, turns to the second position for exposing the film and then resumes the first position to remove the exposed film for developing.

摘要翻译： 公开了一种复印相机的拍摄台，其包括可在其第一位置和第二位置之间围绕其轴线旋转的胶片支撑表面。 表面在第一位置接收并保持预定长度的未曝光胶片，转到第二位置以曝光胶片，然后恢复第一位置以除去曝光的胶片以进行显影。

公开(公告)号：US4390269A

公开(公告)日：1983-06-28

申请号：US279949

申请日：1981-07-02

申请人： Kojiro Henmi ,  Kiyosi Takenaka

发明人： Kojiro Henmi ,  Kiyosi Takenaka

IPC分类号： G03B27/50 ,  G03B27/32 ,  G03B27/52 ,  G03F7/20 ,  G03G15/04

CPC分类号： G03B27/527 ,  G03B27/32

摘要： Disclosed is a copying machine for use in photomechanical process, which has a substantially box-shaped structure in appearance and employs a slit exposure system. A sensitive material is transferred along the ceiling surface, side wall and bottom surface of the box-shaped body of the machine in this order so that it can be exposed, developed and dried successively while it is being transferred. A slit exposure scanner makes reciprocatory movements horizontally in a space between an exposure zone positioned below the ceiling surface where the sensitive material is exposed while it is transferred horizontally along the ceiling surface and an original picture stand arranged immediately below the exposure zone so as to oppose thereto. On the bottom surface of the body, there are arranged a development tank, drying means, and a take-out tray for taking out the sensitive material after developed and dried.

摘要翻译： 公开了一种用于光机械加工的复印机，其外观上具有基本上为盒状的结构，并采用狭缝曝光系统。 敏感材料依次沿着机器的箱体的顶面，侧壁和底面传送，使其在被转印时可以相继曝光，显影和干燥。 狭缝曝光扫描器在位于天花板表面下方的暴露区域之间的空间中水平地进行水平移动，其中敏感材料在沿天花板表面水平传播的同时暴露于其中，并且布置在曝光区域正下方的原始图像架，以便反对 到此。 在身体的底面上设置有显影罐，干燥装置和用于在显影和干燥后取出敏感材料的取出托盘。

公开(公告)号：US4327167A

公开(公告)日：1982-04-27

申请号：US207199

申请日：1980-11-14

申请人： Osamu Tanabe

发明人： Osamu Tanabe

IPC分类号： H05K3/42 ,  G03G15/22 ,  H05K3/00 ,  H05K3/06 ,  H05K3/40 ,  G03G13/22 ,  B44C1/22

CPC分类号： H05K3/065 ,  H05K3/0094 ,  H05K2201/09581 ,  H05K2203/0517 ,  H05K3/427

摘要： A method of producing printed circuit boards according to this invention consists of the steps of coating an electrophotographic photosensitive film on both sides of a substrate which consists of a synthetic resin plate with a conductive metal layer on each side; forming a wiring pattern of an acid-resistant toner on the photosensitive film by means of the electrophotography; and etching the substrate to remove unnecessary parts of the conductive metal layers that are not covered with the protective toner and the photosensitive film. With this method, copper-walled holes can be formed easily and accurately.

摘要翻译： 根据本发明的制造印刷电路板的方法包括以下步骤：在基板的两侧涂布电子照相感光膜，每个合成树脂板在每侧具有导电金属层; 通过电子照相法在感光膜上形成耐酸调色剂的布线图案; 并蚀刻基板以去除未被保护调色剂和感光膜覆盖的导电金属层的不必要部分。 通过这种方法，可以容易且准确地形成铜壁孔。

公开(公告)号：US4312586A

公开(公告)日：1982-01-26

申请号：US155089

申请日：1980-06-02

申请人： Masami Ohtani

发明人： Masami Ohtani

IPC分类号： G03D3/06 ,  G03D3/13

CPC分类号： G03D3/06 ,  G03D3/132 ,  Y10T137/85954 ,  Y10T137/86196

摘要： This invention is concerned with a method and apparatus for the development of photographic films in a photographic film processor in which the films are developed when the exposed films pass through a developing tank containing developer. The object of said invention is to attain uniform development with a simple method, that is, to make the change of the activity of the developer during the development of the films to be treated very small from the leading end to the trailing end of the film. The said invention makes the influence of the momentarily changing activity of the developer in contact with the films as small as possible by compensating for the decrease of the activity due to the exhaustion of the developer by gradually increasing the immersion time of the films in the developer from the leading end toward the trailing end of the photographic films by gradually changing the relative level of the liquid surface when the films are fed into the developer.

摘要翻译： 本发明涉及用于在照相胶片处理器中开发照相胶片的方法和装置，其中当曝光的胶片通过含有显影剂的显影槽时，显影胶片。 本发明的目的是通过简单的方法来实现均匀显影，即，使得待处理的膜的显影期间显影剂的活性从薄膜的前端到尾端变化很小 。 所述发明通过逐渐增加膜在显影剂中的浸渍时间来补偿由于显影剂耗尽而导致的活性降低，使得显影剂与膜接触的瞬时变化的影响尽可能小 通过在将膜馈送到显影剂中时逐渐改变液面的相对水平，从照相胶卷的前端到尾端。