公开(公告)号：US06943089B2

公开(公告)日：2005-09-13

申请号：US09983355

申请日：2001-10-24

申请人： Yushin Takasawa ,  Hajime Karasawa

发明人： Yushin Takasawa ,  Hajime Karasawa

IPC分类号： H01L27/108 ,  C23C16/24 ,  C23C16/44 ,  H01L21/02 ,  H01L21/8242 ,  H01L21/20

CPC分类号： C23C16/24 ,  C23C16/4401 ,  H01L28/84 ,  Y10S438/964

摘要： A hemispherical grain (HSG) formation process for enlarging the surface area of a capacitor electrode, wherein stable, defect-free HSG, having outstanding selectivity, is formed. An amorphous silicon layer, which constitutes a capacitor electrode, is formed on an Si wafer, on which is formed a silicon-based dielectric layer, which constitutes an interlevel dielectric layer. An HSG layer, in which there exists practically no defects, is formed on the amorphous silicon layer at a crystal nuclei formation temperature of under 620° C. Further, in accordance with properly controlling the crystal nuclei formation temperature, and the flow rate of monosilane (SiH4), which is supplied for crystal nuclei formation, it is possible to furnish selectivity such that HSG nuclei are formed solely on the amorphous silicon layer, without being formed on a silicon-based dielectric layer.

摘要翻译： 形成用于扩大电容器电极的表面积的半球形晶粒（HSG）形成方法，其中具有优异选择性的稳定的，无缺陷的HSG。 构成电容器电极的非晶硅层形成在构成层间电介质层的Si晶片上，形成硅基电介质层。 在620℃以下的晶核形成温度下，在非晶硅层上形成实际上没有缺陷的HSG层。此外，根据适当控制晶核形成温度和甲硅烷的流量 （SiH 4 O 4），其被提供用于晶核形成，可以提供选择性，使得HSG核仅形成在非晶硅层上，而不形成在硅基电介质层上。

公开(公告)号：US20020051484A1

公开(公告)日：2002-05-02

申请号：US09947344

申请日：2001-09-07

申请人： KOKUSAI ELECTRIC CO. LTD

发明人： Ichiro Imaizumi ,  Tetsuhiko Miyatani ,  Shunji Abe ,  Kenzo Urabe ,  Hitoshi Kato

IPC分类号： H04K001/00

CPC分类号： H04B1/70753 ,  H04B1/7095 ,  H04B2201/70709

摘要： There is disclosed a despreading circuit which can reduce a circuit scale and power consumption. In the despreading circuit of the present invention, A/D converter converts a CDMA modulated analog signal to a digital signal of N bits, a searcher detects a synchronization phase from high-order small bits of the N bits and outputs synchronization phase information to a control circuit, the control circuit transmits a signal for allowing despreading to be performed to a sliding correlator based on the phase information, and the sliding correlator despreads the N bit digital signal outputted by the A/D converter and transmits the resulting correlation output as a demodulated signal to the outside.

摘要翻译： 公开了可以减小电路规模和功耗的解扩电路。 在本发明的解扩电路中，A / D转换器将CDMA调制的模拟信号转换成N位的数字信号，搜索器从N位的高阶小位检测同步相位，并将同步相位信息输出到 控制电路根据相位信息，向滑动相关器发送允许去扩频的信号，并且滑动相关器对由A / D转换器输出的N位数字信号进行解扩，并将得到的相关输出作为 解调信号到外部。

公开(公告)号：US20010053011A1

公开(公告)日：2001-12-20

申请号：US09931111

申请日：2001-08-17

申请人： KOKUSAI ELECTRIC CO., LTD.

发明人： Yoshihiro Imajo

IPC分类号： H04J014/02 ,  H04B010/12

CPC分类号： H04B10/272 ,  H04B10/25754 ,  H04J3/1694 ,  H04J14/02

摘要： A wavelength division multiplex optical star coupler comprises an input port which inputs a first optical signal, a first optical coupler which divides the first optical signal input from the input port into a plurality of first optical signals, a plurality of input/output ports, each of which outputs one of the plurality of first optical signals divided by the first optical coupler and inputs a second optical signal, an output port which outputs the second optical signal, and a second optical coupler, provided between the input port and the first optical coupler or between the first optical coupler and the input/output ports, which provides the first optical signal to the input/output ports and the second optical signal to the output port.

摘要翻译： 一种波分复用光学星形耦合器包括：输入端口，其输入第一光信号;第一光耦合器，其将从输入端口输入的第一光信号分成多个第一光信号;多个输入/输出端口， 其输出由第一光耦合器划分的多个第一光信号中的一个，并输入第二光信号，输出第二光信号的输出端口和设置在输入端口和第一光耦合器之间的第二光耦合器 或者在第一光耦合器和输入/输出端口之间，其将第一光信号提供给输入/输出端口，并将第二光信号提供给输出端口。

公开(公告)号：US6143040A

公开(公告)日：2000-11-07

申请号：US31950

申请日：1998-02-27

申请人： Kouji Tometsuka ,  Mitsuhiro Hirano ,  Tetsuya Marubayashi

发明人： Kouji Tometsuka ,  Mitsuhiro Hirano ,  Tetsuya Marubayashi

IPC分类号： B65G49/07 ,  C23C14/56 ,  C23C16/54 ,  H01L21/677 ,  H01L21/00 ,  C23C14/00 ,  C23C16/00 ,  C25B9/00 ,  H01L21/64

CPC分类号： C23C14/56 ,  C23C16/54 ,  H01L21/67775 ,  Y10T29/41

摘要： A substrate processing apparatus comprises a semiconductor wafer processing chamber, a wafer transfer device, a wafer cassette holding unit, a wafer cassette transfer device and a wafer cassette bringing in/out section disposed in this order and a housing. The wafer cassette holding unit is movable between a wafer processing time position and a maintenance time position thereof and the wafer cassette transfer device is movable between a wafer processing time position and a maintenance time position thereof. The wafer cassette bringing in/out section is capable of rotating forward of the housing, whereby the front face of said housing is opened. With the wafer cassette holding unit being positioned at the maintenance time position thereof, the wafer cassette transfer device being positioned at the maintenance time position thereof and the wafer cassette bringing in/out section being rotated forward of the housing to open the front face thereof, maintenance of the wafer transfer device can be performed from the front face of the housing.

摘要翻译： 基板处理装置包括半导体晶片处理室，晶片转移装置，晶片盒保持单元，晶片盒转移装置和以该顺序布置的晶片盒导入/退出部分和壳体。 晶片盒保持单元可在晶片处理时间位置和其维护时间位置之间移动，并且晶片盒传送装置可在晶片处理时间位置与其维护时间位置之间移动。 进入/离开部分的晶片盒能够向壳体的前方转动，从而打开所述壳体的前表面。 在晶片盒保持单元位于其维护时间位置的同时，晶片盒传送装置位于其维护时间位置，并且晶片盒带入/退出部分旋转到壳体的前方以打开其前表面， 可以从壳体的正面进行晶片传送装置的维护。

公开(公告)号：US6051072A

公开(公告)日：2000-04-18

申请号：US80654

申请日：1998-05-18

申请人： Toru Harada

发明人： Toru Harada

IPC分类号： C23C8/28 ,  H01L21/31 ,  H01L21/316 ,  C23C16/00

CPC分类号： H01L21/02233 ,  H01L21/02255 ,  H01L21/31612

摘要： A method of semiconductor filming wherein a thin film is deposited on a wafer under an atmospheric pressure, which comprises the steps of simultaneously supplying a reactive gas and an inert gas to a reaction tube and maintaining a partial pressure of the reactive gas constant by adjusting the flow rates of those gases, whereby stability in film quality is improved.

摘要翻译： 一种半导体成膜方法，其中在大气压下将薄膜沉积在晶片上，该方法包括以下步骤：向反应管同时供应反应性气体和惰性气体，并通过调节反应气体来保持反应气体的分压恒定 这些气体的流量，从而提高了膜质量的稳定性。

公开(公告)号：US5957651A

公开(公告)日：1999-09-28

申请号：US776653

申请日：1997-07-21

申请人： Yuji Takebayashi ,  Tokunobu Akao ,  Yoshikazu Konno

发明人： Yuji Takebayashi ,  Tokunobu Akao ,  Yoshikazu Konno

IPC分类号： B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/67748 ,  H01L21/68 ,  H01L21/687 ,  H01L21/68707 ,  Y10S414/136 ,  Y10S414/14 ,  Y10S414/141

摘要： A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an end of the carrying arm and receives a substrate. A guide base is mounted on the rotary shaft on the lower side of the substrate receiver in such a manner that the guide base is approximately parallel to the substrate receiver, and a substrate alignment mechanism is attached to the rotary shaft via the guide base. The substrate alignment mechanism includes a pair of location correcting members which are coupled to air cylinders. The location correcting members are displaced by air cylinders to correct the location of substrate.

摘要翻译： PCT No.PCT / JP96 / 01531 Sec。 371日期1997年7月21日 102（e）1997年7月21日PCT PCT 1996年6月6日PCT公布。 WO96 / 42108 PCT公开号 日期1996年12月27日旋转轴由框架支撑，以便相对于框架可旋转并且可垂直移动。 承载臂枢转到旋转轴，并且衬底接收器附接到承载臂的端部并且接收衬底。 引导基座以这样的方式安装在基板接收器的下侧的旋转轴上，使得引导基座大致平行于基板接收器，并且基板对准机构经由引导基座附接到旋转轴。 基板对准机构包括耦合到气缸的一对位置校正构件。 位置校正构件被气缸移位以校正衬底的位置。

公开(公告)号：USD402957S

公开(公告)日：1998-12-22

申请号：US63465

申请日：1996-12-09

申请人： Tatsuo Kuwayama ,  Tetsufumi Takayasu ,  Hiroshi Fujiwara

设计人： Tatsuo Kuwayama ,  Tetsufumi Takayasu ,  Hiroshi Fujiwara

公开(公告)号：US5838770A

公开(公告)日：1998-11-17

申请号：US689359

申请日：1996-08-08

申请人： Yutaka Fukushima ,  Tetsuo Takemura ,  Shinichi Iwaki ,  Mitsuyoshi Hashida ,  Masao Wanami ,  Isao Shimbo ,  Mitsuhiro Wada ,  Hirofumi Udaki ,  Yoshihiro Kondo ,  Yoshinobu Yamamoto ,  Arata Nakagoshi ,  Kouichi Ohta ,  Hiroshi Kuwahara ,  Yumiko Watanabe

发明人： Yutaka Fukushima ,  Tetsuo Takemura ,  Shinichi Iwaki ,  Mitsuyoshi Hashida ,  Masao Wanami ,  Isao Shimbo ,  Mitsuhiro Wada ,  Hirofumi Udaki ,  Yoshihiro Kondo ,  Yoshinobu Yamamoto ,  Arata Nakagoshi ,  Kouichi Ohta ,  Hiroshi Kuwahara ,  Yumiko Watanabe

IPC分类号： H04B10/00 ,  H04B10/032 ,  H04B10/035 ,  H04B10/07 ,  H04B10/272 ,  H04B10/29 ,  H04M3/22 ,  H04W4/16 ,  H04W24/04 ,  H04W24/06 ,  H04W56/00 ,  H04W60/04 ,  H04W64/00 ,  H04W84/04 ,  H04W88/08 ,  H04W92/00 ,  H04M1/60

CPC分类号： H04W24/04 ,  H04B10/25754 ,  H04W84/042 ,  H04W24/06 ,  H04W4/16 ,  H04W60/04 ,  H04W64/006 ,  H04W88/08

摘要： Duplicate optical fibers connect between a base station controller and a radio base station for each route. The duplicate optical fiber is connected to each of the radio base stations for each route through a star coupler. The radio base stations are arranged in each of areas so that the radio base stations for different routes are arranged adjacent to each other.

公开(公告)号：US5809231A

公开(公告)日：1998-09-15

申请号：US617423

申请日：1996-03-18

申请人： Naoki Yokoyama ,  Ouichi Oyamada

发明人： Naoki Yokoyama ,  Ouichi Oyamada

IPC分类号： H04N19/00 ,  H04N1/41 ,  H04N1/415 ,  H04N19/102 ,  H04N19/132 ,  H04N19/134 ,  H04N19/166 ,  H04N19/176 ,  H04N19/196 ,  H04N19/423 ,  H04N19/59 ,  H04N19/625 ,  H04N19/65 ,  H04N19/67 ,  H04N19/85 ,  H04N19/89 ,  H04N19/895 ,  H04N19/91 ,  H03H1/00 ,  H04H1/00

CPC分类号： H04N19/895

摘要： An image transmission system and method for transmitting an image, which has been divided into a plurality of pixel blocks, comprising a transmitting device and a receiving device. The transmitting device includes an information source encoder for dividing an image to be transmitted into a plurality of pixel blocks in an original arrangement, a pixel block dispersing unit for arranging the pixel blocks of the image according to predetermined rules, and a modulator for successively modulating and transmitting the rearranged blocks. The receiving device includes a demodulator for successively receiving and demodulating the blocks transmitted from the modulator, a pixel block rearranging unit for rearranging the received blocks of the image back into the original arrangement according to the predetermined rules, an information source decoder for decoding the pixel blocks, and a pixel data interpolator for interpolating any block which has suffered a transmission error based on blocks adjacent thereto in the original arrangement. Since any block which has suffered a transmission error is interpolated using normal blocks, the original image can be reproduced with high quality by the receiving device.

摘要翻译： 一种图像传输系统和方法，用于发送已被划分为多个像素块的图像，包括发送装置和接收装置。 发送装置包括：信息源编码器，用于将要发送的图像原始排列成多个像素块;像素块分散单元，用于根据预定规则排列图像的像素块;以及调制器，用于依次调制 并传输重新排列的块。 接收装置包括用于连续地接收和解调从调制器发送的块的解调器，用于根据预定规则将接收到的图像块重新排列到原始装置中的像素块重排单元，用于对像素进行解码的信息源解码器 块，以及像素数据插值器，用于内插基于原始布置的与其相邻的块的传输错误的任何块。 由于使用正常块内插了传输错误的任何块，所以可以通过接收装置以高质量再现原始图像。

公开(公告)号：US5798141A

公开(公告)日：1998-08-25

申请号：US571538

申请日：1995-12-13

申请人： Toru Harada

发明人： Toru Harada

IPC分类号： C23C8/28 ,  H01L21/31 ,  H01L21/316 ,  C23C16/00

CPC分类号： H01L21/02233 ,  H01L21/02255 ,  H01L21/31612

摘要： A method of semiconductor filming wherein a thin film is deposited on a wafer under an atmospheric pressure, which comprises the steps of simultaneously supplying a reactive gas and an inert gas to a reaction tube and maintaining a partial pressure of the reactive gas constant by adjusting the flow rates of those gases, whereby stability in film quality is improved.

摘要翻译： 一种半导体成膜方法，其中在大气压下将薄膜沉积在晶片上，该方法包括以下步骤：向反应管同时供应反应性气体和惰性气体，并通过调节反应气体来保持反应气体的分压恒定 这些气体的流量，从而提高了膜质量的稳定性。