摘要:
A magnet unit for a magnetron sputtering system includes a base plate and a plurality of magnet parts each including a first magnet and a first supporting member. The first supporting member supports the first magnet and fixes the first magnet to the base plate. The magnet parts confine a plasma.
摘要:
According to an aspect of an embodiment, a magnetron sputtering apparatus sputtering a target by a plasma includes a plurality of magnets that are arranged in the vicinity of a position where the target is disposed. The plurality of magnets form a magnetic field for confining the plasma; and a rotating mechanism rotates the plurality of magnets around a rotation center.
摘要:
In a semiconductor device cooling apparatus which cools a semiconductor device uniformly with a simple structure, a coolant is supplied from a supply port to the center of a heat transmission plate on which a semiconductor device is disposed in intimate contact therewith, is radially flown toward the peripheral edge portion of the heat transmission plate through a gap-shaped flow path which is formed by a gap forming plate composed of two thin plate members of a gap interval plate acting as a spacer and a gap top plate disposed on the gap interval plate and has a small height, is collected by a collection groove formed around the peripheral edge portion, and is discharged from a discharge port.
摘要:
In a cooling structure for cooling circuit element modules that are mounted on a circuit board and has heat sinks, there are provided a main duct to which the circuit element modules are connected, and a coolant supplying device which is connected to the main duct and supplies a coolant to the main duct.
摘要:
A mesh number prediction method obtains a mesh length for a case in which a mesh having an arbitrary shape is created by approximating an entire analyzing target by a three-dimensional (3D) mesh model based on data of a 3D surface model of the analyzing target, obtains a mesh number of each part forming the analyzing target for a case in which a mesh having an arbitrary shape is created by approximating each part by a 3D mesh model based on the mesh length, and obtains a predicted total mesh number of the entire analyzing target from a ratio of volumes of the entire analyzing target and each part based on the mesh number.
摘要:
According to an aspect of an embodiment, a magnet unit for a magnetron sputtering system includes a base board, an inner magnet fixed to the base board and an outer magnet fixed to the base board. The outer magnet is fixed surround the inner magnet. At least one of a portion of the inner magnet or a portion of the outer magnet is displaceable on the base board.
摘要:
A static magnetic field structure data is read, a cross section which is parallel with the target surface and in which plasma is generated is specified at an arbitrary position, and an erosion center line segment having an endless shape which goes through the center of a region in which the magnetic field vertical to the plane of the specified cross section is zero is calculated. The static erosion rate distribution in the specified cross section of the magnetic field structure data is calculated based on the erosion rate of the erosion center line segment, the rotational erosion rate distribution caused along with rotation of the magnet is calculated, and the film formation rate distribution on the objective material is calculated by using the rotational erosion rate distribution.
摘要:
A mesh number prediction method obtains a mesh length for a case in which a mesh having an arbitrary shape is created by approximating an entire analyzing target by a three-dimensional (3D) mesh model based on data of a 3D surface model of the analyzing target, obtains a mesh number of each part forming the analyzing target for a case in which a mesh having an arbitrary shape is created by approximating each part by a 3D mesh model based on the mesh length, and obtains a predicted total mesh number of the entire analyzing target from a ratio of volumes of the entire analyzing target and each part based on the mesh number.
摘要:
A semiconductor element cooling apparatus adapted to cool at least one semiconductor element mounted on a circuit substrate. The semiconductor element cooling apparatus includes a first mechanism for generating a coolant flow by flowing a coolant over a top surface of the semiconductor element, and a second mechanism for obliquely obstructing the coolant flowing over the semiconductor element from an upstream side towards a downstream side of the coolant flow.
摘要:
A cooling system for an electronic device includes a circulatory system having a pump with an inlet and an outlet for circulating a coolant in the circulatory system, a heat exchanger for cooling the coolant, a cooling module for cooling the electronic device by the coolant and a tank for reserving the coolant which is connected to the circulatory system via inflow and outflow bypass channels. The inflow bypass channel is connected to the circulatory system at a first connection node between the pump outlet and the cooling module. The outflow bypass channel is connected to the circulatory system at a second connection node between the cooling module and the pump inlet.