Method for Direct Manipulation and Visualization of the 3D Internal Structures of a Tubular Object as They are in Reality Without Any Noticeable Distortion

    公开(公告)号:US20220284685A1

    公开(公告)日:2022-09-08

    申请号:US17674004

    申请日:2022-02-17

    Abstract: In many applications, the assessment of the internal structures of tubular structures (such as in medical imaging, blood vessels, bronchi, and colon) has become a topic of high interest. Many 3D visualization techniques, such as “fly-through” and curved planar reformation (CPR), have been used for visualization of the lumens for medical applications. However, all the existing visualization techniques generate highly distorted images of real objects. This invention provides direct manipulation based on the centerline of the object and visualization of the 3D internal structures of a tubular object without any noticeable distortion. For the first time ever, the lumens of a human colon is visualized as it is in reality. In many medical applications, this can be used for diagnosis, planning of surgery or stent placements, etc. and consequently improves the quality of healthcare significantly. The same technique can be used in many other applications.

    Composite dummy gate with conformal polysilicon layer for FinFET device
    4.
    发明授权
    Composite dummy gate with conformal polysilicon layer for FinFET device 有权
    用于FinFET器件的具有适形多晶硅层的复合伪栅极

    公开(公告)号:US09287179B2

    公开(公告)日:2016-03-15

    申请号:US13353975

    申请日:2012-01-19

    Abstract: The present disclosure involves a FinFET. The FinFET includes a fin structure formed over a substrate. A gate dielectric layer is least partially wrapped around a segment of the fin structure. The gate dielectric layer contains a high-k gate dielectric material. The FinFET includes a polysilicon layer conformally formed on the gate dielectric layer. The FinFET includes a metal gate electrode layer formed over the polysilicon layer. The present disclosure provides a method of fabricating a FinFET. The method includes providing a fin structure containing a semiconductor material. The method includes forming a gate dielectric layer over the fin structure, the gate dielectric layer being at least partially wrapped around the fin structure. The method includes forming a polysilicon layer over the gate dielectric layer, wherein the polysilicon layer is formed in a conformal manner. The method includes forming a dummy gate layer over the polysilicon layer.

    Abstract translation: 本公开涉及FinFET。 FinFET包括在衬底上形成的翅片结构。 栅介质层最少部分地缠绕在翅片结构的一段上。 栅介质层包含高k栅介质材料。 FinFET包括在栅介质层上共形形成的多晶硅层。 FinFET包括在多晶硅层上形成的金属栅极电极层。 本公开提供了制造FinFET的方法。 该方法包括提供包含半导体材料的翅片结构。 该方法包括在鳍结构上方形成栅极电介质层,栅介质层至少部分地围绕翅片结构缠绕。 该方法包括在栅介质层上形成多晶硅层,其中多晶硅层以保形方式形成。 该方法包括在多晶硅层上形成伪栅极层。

    Bottle-neck recess in a semiconductor device
    5.
    发明授权
    Bottle-neck recess in a semiconductor device 有权
    半导体器件中的瓶颈凹槽

    公开(公告)号:US09054130B2

    公开(公告)日:2015-06-09

    申请号:US12841763

    申请日:2010-07-22

    Abstract: The present disclosure provides a method for fabricating a semiconductor device that includes providing a silicon substrate, forming a gate stack over the silicon substrate, performing a biased dry etching process to the substrate to remove a portion of the silicon substrate, thereby forming a recess region in the silicon substrate, performing a non-biased etching process to the recess region in the silicon substrate, thereby forming a bottle-neck shaped recess region in the silicon substrate, and epi-growing a semiconductor material in the bottle-neck shaped recess region in the silicon substrate. An embodiment may include a biased dry etching process including adding HeO2 gas and HBr gas. An embodiment may include performing a first biased dry etching process including N2 gas and performing a second biased dry etching process not including N2 gas. An embodiment may include performing an oxidation process to the recess region in the silicon substrate by adding oxygen gas to form silicon oxide on a portion of the recess region in the silicon substrate. As such, these processes form polymer protection to help form the bottle-neck shaped recess.

    Abstract translation: 本公开提供了一种制造半导体器件的方法,其包括提供硅衬底,在硅衬底上形成栅极堆叠,对衬底执行偏置的干蚀刻工艺以去除硅衬底的一部分,从而形成凹陷区域 在硅衬底中,对硅衬底中的凹陷区域进行非偏置蚀刻工艺,从而在硅衬底中形成瓶颈形凹部区域,并且在瓶颈形凹部区域中生长半导体材料 在硅衬底中。 一个实施例可以包括偏置的干蚀刻工艺,包括加入HeO2气体和HBr气体。 实施例可以包括执行包括N 2气体的第一偏压干法蚀刻工艺,并执行不包括N 2气体的第二偏压干式蚀刻工艺。 一个实施例可以包括通过在硅衬底中的一部分凹陷区域上添加氧气以形成氧化硅,来对硅衬底中的凹陷区域进行氧化处理。 因此,这些方法形成聚合物保护以帮助形成瓶颈形凹部。

    Method for backside polymer reduction in dry-etch process
    8.
    发明授权
    Method for backside polymer reduction in dry-etch process 有权
    干蚀刻工艺中背面聚合物还原的方法

    公开(公告)号:US08529783B2

    公开(公告)日:2013-09-10

    申请号:US12798201

    申请日:2010-03-30

    Abstract: A method for preventing the formation of contaminating polymeric films on the backsides of semiconductor substrates includes providing an oxygen-impregnated focus ring and/or an oxygen-impregnated chuck that releases oxygen during etching operations. The method further provides delivering oxygen gas to the substrate by mixing oxygen in the cooling gas mixture, maintaining the focus ring at a temperature no greater than the substrate temperature during etching and cleaning the substrate using a two step plasma cleaning sequence that includes suspending the substrate above the chuck.

    Abstract translation: 防止在半导体衬底的背面形成污染性聚合物膜的方法包括提供在蚀刻操作期间释放氧气的氧浸渍聚焦环和/或氧浸渍卡盘。 该方法还通过在冷却气体混合物中混合氧将氧气输送到衬底,在蚀刻和清洁衬底期间将聚焦环保持在不高于衬底温度的温度,使用包括悬浮衬底的两步骤等离子体清洗序列 在卡盘上方

    PERSONAL SERVICE MENU CONSTRUCTION SYSTEM AND METHOD AND PERSONAL SERVICE MENU PROVISION METHOD THEREOF
    9.
    发明申请
    PERSONAL SERVICE MENU CONSTRUCTION SYSTEM AND METHOD AND PERSONAL SERVICE MENU PROVISION METHOD THEREOF 审中-公开
    个人服务菜单建筑系统及方法和个人服务菜单提供方法

    公开(公告)号:US20130047101A1

    公开(公告)日:2013-02-21

    申请号:US13586856

    申请日:2012-08-15

    CPC classification number: G06F3/0482 G06F8/38

    Abstract: A personal service menu construction system is provided for an application software to construct a homemade function menu, including: a selection module for setting required function options from a plurality of function options of the application software; an integration module for receiving the function options set by the selection module such that the function options set by the selection module are edited or packaged and integrated as a personal service menu; and a construction module for inputting the personal service menu to the application software. A personal service menu provision method is provided such that the personal service menu can be saved in a storage device and inputted to the same application software of another electronic device.

    Abstract translation: 提供个人服务菜单构建系统,用于应用软件构建自制功能菜单,包括:选择模块,用于根据应用软件的多个功能选项设置所需的功能选项; 集成模块,用于接收由选择模块设置的功能选项,使得由选择模块设置的功能选项被编辑或打包并集成为个人服务菜单; 以及用于将个人服务菜单输入到应用软件的构建模块。 提供个人服务菜单提供方法,使得个人服务菜单可以保存在存储设备中并输入到另一电子设备的相同应用软件。

    Patterning Methodology for Uniformity Control
    10.
    发明申请
    Patterning Methodology for Uniformity Control 有权
    均匀性控制的图案化方法

    公开(公告)号:US20120108046A1

    公开(公告)日:2012-05-03

    申请号:US13281862

    申请日:2011-10-26

    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a patternable layer over a substrate. The method includes forming a first layer over the patternable layer. The method includes forming a second layer over the first layer. The second layer is substantially thinner than the first layer. The method includes patterning the second layer with a photoresist material through a first etching process to form a patterned second layer. The method includes patterning the first layer with the patterned second layer through a second etching process to form a patterned first layer. The first and second layers have substantially different etching rates during the second etching process. The method includes patterning the patternable layer with the patterned first layer through a third etching process.

    Abstract translation: 本公开提供了制造半导体器件的方法。 该方法包括在衬底上形成可图案化层。 该方法包括在可图案层上形成第一层。 该方法包括在第一层上形成第二层。 第二层比第一层薄得多。 该方法包括通过第一蚀刻工艺用光致抗蚀剂材料图案化第二层以形成图案化的第二层。 该方法包括通过第二蚀刻工艺将具有图案化的第二层的第一层图案化以形成图案化的第一层。 第一和第二层在第二蚀刻工艺期间具有显着不同的蚀刻速率。 该方法包括通过第三蚀刻工艺对具有图案化的第一层的图案化层进行图案化。

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