MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    4.
    发明授权
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号:US07495430B2

    公开(公告)日:2009-02-24

    申请号:US11506988

    申请日:2006-08-18

    IPC分类号: G01R33/00

    摘要: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译: 微机电系统(MEMS)电流传感器被描述为包括第一导体,用于使由第一导体中的电流产生的磁场成形的磁场成形部件,以及包括磁 - 用于感测成形磁场的MEMS组件,并且响应于此,提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法,包括使用在第一导体中的电流产生的磁场成形,用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测部件感测成形的磁场 并且提供第一导体中的电流的指示。

    Micro-electromechanical system (MEMS) based current and magnetic field sensor using tunneling current sensing
    7.
    发明授权
    Micro-electromechanical system (MEMS) based current and magnetic field sensor using tunneling current sensing 有权
    基于微机电系统(MEMS)的电流和磁场传感器使用隧道电流检测

    公开(公告)号:US07741832B2

    公开(公告)日:2010-06-22

    申请号:US11736678

    申请日:2007-04-18

    IPC分类号: G01R33/00

    摘要: A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.

    摘要翻译: 用于感测由在导体中流动的电流产生的磁场的微机电系统(MEMS)电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开,并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动,以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器,以及隧道电流监视器,用于响应于机械指示监视隧道电流的变化,以提供电气值的指示 电流在导体中。