公开(公告)号：US20090050899A1

公开(公告)日：2009-02-26

申请号：US12153752

申请日：2008-05-23

申请人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata ,  Ramanujam Kumaresan ,  Natsuo Tatsumi

发明人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata ,  Ramanujam Kumaresan ,  Natsuo Tatsumi

IPC分类号： H01L29/15

CPC分类号： H01L29/872 ,  H01L23/291 ,  H01L23/3171 ,  H01L29/1602 ,  H01L29/402 ,  H01L2924/0002 ,  H01L2924/3025 ,  H01L2924/00

摘要： The present invention relates to a high-output diamond semiconductor element, including a Schottky electrode as a cathode, a diamond P− drift layer, a diamond p+ ohmic layer, an ohmic electrode as an anode, and an insulating film layer disposed to surround a circumference of the Schottky electrode. It also relates to a high-output diamond semiconductor element, including a Schottky electrode as a cathode, a diamond P− drift layer, a diamond p+ ohmic layer, an ohmic electrode as an anode, a dielectric layer disposed on a part of a junction surface of the Schottky electrode and the diamond p− drift layer, and a field plate containing a conductor, the field plate being disposed on an external surface of the dielectric layer to surround a circumference of the Schottky electrode.

摘要翻译： 本发明涉及一种高输出金刚石半导体元件，其包括作为阴极的肖特基电极，金刚石P漂移层，金刚石p +欧姆层，作为阳极的欧姆电极和设置成围绕 肖特基电极的周长。 它还涉及一种高输出金刚石半导体元件，其包括作为阴极的肖特基电极，金刚石P-漂移层，金刚石p +欧姆层，作为阳极的欧姆电极，设置在结的一部分上的电介质层 肖特基电极和金刚石p-漂移层的表面和包含导体的场板，场板设置在电介质层的外表面上以围绕肖特基电极的周围。

公开(公告)号：US07165755B2

公开(公告)日：2007-01-23

申请号：US11209443

申请日：2005-08-23

申请人： Hitoshi Umezawa ,  Yasushi Inoue

发明人： Hitoshi Umezawa ,  Yasushi Inoue

IPC分类号： F16K31/04

CPC分类号： F16K31/047 ,  F25B41/062 ,  F25B2309/061 ,  F25B2341/0653 ,  Y02B30/72

摘要： A motor-operated valve comprising a valve stem having a valve plug; a valve body having a valve seat with which the valve plug is enabled to removably contact; a can fixed to the valve body; a rotor disposed coaxially in the can; a stator disposed around an outer circumferential surface of the can; a guide bush fixedly secured to the valve body and having an axial hollow portion in which the valve stem is permitted to slidably move; and a valve stem holder; wherein the valve stem is enabled to rotate integral with the valve stem holder and to move in the longitudinal direction thereof relative to the valve stem holder. The motor-operated valve is further provided with a flow rate adjusting feed screw mechanism which is constituted by a first stationary threaded portion and a first movable threaded portion; and with a rotation regulating feed screw mechanism which is constituted by a second stationary threaded portion and a second movable threaded portion. The pitch of the flow rate adjusting feed screw mechanism is made smaller than the pitch of the rotation regulating feed screw mechanism.

摘要翻译： 一种电动阀，包括具有阀塞的阀杆; 阀体，其具有阀座，阀塞能够通过该阀座可拆卸地接触; 一个可固定在阀体上的罐; 同轴地设置在罐中的转子; 定子，其围绕所述罐的外周面设置; 导向衬套，固定地固定到阀体上并具有轴向中空部分，阀杆允许滑动地移动; 和阀杆支架; 其中所述阀杆能够与所述阀杆保持器一体地旋转并且相对于所述阀杆保持器在其纵向方向上移动。 电动阀还具有由第一静止螺纹部和第一可动螺纹部构成的流量调整进给螺杆机构， 并具有由第二静止螺纹部和第二可动螺纹部构成的旋转调节进给螺杆机构。 流量调节进给螺杆机构的间距小于旋转调节进给螺杆机构的间距。

公开(公告)号：US20060261302A1

公开(公告)日：2006-11-23

申请号：US11414930

申请日：2006-05-01

申请人： Yasushi Inoue ,  Kouji Higuchi ,  Hitoshi Umezawa

发明人： Yasushi Inoue ,  Kouji Higuchi ,  Hitoshi Umezawa

IPC分类号： F16K31/02

CPC分类号： F16K31/506 ,  F02M26/54 ,  F16K1/04 ,  F16K31/04

摘要： A motor-operated valve has a rotor unit in a can, and is rotationally driven by a stator unit. The rotation of the rotor unit is transmitted to a screw feed member. A stem member fixed to a valve body is engaged threadedly with the screw feed member by a first screw portion. At the same time, the screw feed member is engaged threadedly with an external thread portion fixed to a valve stem by the second screw portion. The first screw portion and the second screw portion constitute a differential screw mechanism, and feeds the valve stem according to a difference in pitch.

公开(公告)号：US08237170B2

公开(公告)日：2012-08-07

申请号：US12597578

申请日：2008-04-14

申请人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata

发明人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata

IPC分类号： H01L29/15

CPC分类号： H01L29/47 ,  C22C5/04 ,  H01L21/0435 ,  H01L29/1602 ,  H01L29/6603 ,  H01L29/872

摘要： To provide a Schottky electrode in a diamond semiconductor, which has a good adhesion properties to diamonds, has a contacting surface which does not become peeled due to an irregularity in an external mechanical pressure, does not cause a reduction in yield in a diode forming process and does not cause deterioration in current-voltage characteristics, and a method of manufacturing the Schottky electrode.A Schottky electrode which includes: scattered island-form pattern Pt-group alloy thin films which are formed on a diamond surface formed on a substrate, in which the Pt-group alloy includes 50 to 99.9 mass % of Pt and 0.1 to 50 mass % of Ru and/or Ir, or which includes electrodes in a scattered island pattern, including: scattered island-form pattern metal thin films which are formed on a diamond surface formed on a substrate and include one selected from Pt and Pd; and metal thin films which include one selected from Ru, Ir and Rh and are provided on all of the metal thin films which include one selected from Pt and Pd, and a method of manufacturing the Schottky electrode.

摘要翻译： 为了在金刚石半导体中提供肖特基电极，该金刚石半导体具有良好的金刚石粘合性，具有由于外部机械压力不均匀而不会剥离的接触表面，在二极管形成过程中不会导致产率降低 并且不会导致电流 - 电压特性的劣化，以及制造肖特基电极的方法。 一种肖特基电极，其包括：形成在形成于基板上的金刚石表面上的散射岛状图案Pt族合金薄膜，其中Pt族合金包含Pt为50〜99.9质量％，0.1〜50质量％ 包括：散射岛状图案金属薄膜，其形成在形成于基板上的金刚石表面上，并且包括选自Pt和Pd中的一种; 以及包括选自Ru，Ir和Rh中的一种并且设置在包括选自Pt和Pd中的一种的所有金属薄膜上的金属薄膜和制造肖特基电极的方法。

公开(公告)号：US20090127566A1

公开(公告)日：2009-05-21

申请号：US12227163

申请日：2007-04-23

申请人： Norio Tokuda ,  Hitoshi Umezawa ,  Satoshi Yamasaki

发明人： Norio Tokuda ,  Hitoshi Umezawa ,  Satoshi Yamasaki

IPC分类号： H01L29/16 ,  C30B23/02 ,  C01B31/06

CPC分类号： C23C16/279 ,  C23C16/27 ,  C30B25/205 ,  C30B29/04 ,  H01L21/02376 ,  H01L21/02433 ,  H01L21/02527 ,  H01L21/02576 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/02634 ,  H01L21/02636

摘要： [Object]The present invention provides a method of selectively forming a flat plane on an atomic level on a diamond (001), (110) or (111) surface.[Means for Solving Problems]A method of selectively forming a flat plane on a diamond surface comprising growing diamond on a stepped diamond surface of any of crystal structures (001), (110) and (111) by CVD (Chemical Vapor Deposition) under growth conditions such that step-flow growth of diamond is carried out thereafter.

摘要翻译： 本发明提供一种在金刚石（001），（110）或（111）表面上以原子水平选择性地形成平面的方法。 用于解决问题的方法在金刚石表面上选择性地形成平面的方法，包括通过CVD（化学气相沉积）下的任何晶体结构（001），（110）和（111）的阶梯金刚石表面上生长金刚石， 此后进行金刚石的阶梯流生长的生长条件。

公开(公告)号：US20100117098A1

公开(公告)日：2010-05-13

申请号：US12597578

申请日：2008-04-14

申请人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata

发明人： Kazuhiro Ikeda ,  Hitoshi Umezawa ,  Shinichi Shikata

IPC分类号： H01L29/47 ,  H01L29/12 ,  H01L21/04

CPC分类号： H01L29/47 ,  C22C5/04 ,  H01L21/0435 ,  H01L29/1602 ,  H01L29/6603 ,  H01L29/872

摘要： To provide a Schottky electrode in a diamond semiconductor, which has a good adhesion properties to diamonds, has a contacting surface which does not become peeled due to an irregularity in an external mechanical pressure, does not cause a reduction in yield in a diode forming process and does not cause deterioration in current-voltage characteristics, and a method of manufacturing the Schottky electrode.A Schottky electrode which includes: scattered island-form pattern Pt-group alloy thin films which are formed on a diamond surface formed on a substrate, in which the Pt-group alloy includes 50 to 99.9 mass % of Pt and 0.1 to 50 mass % of Ru and/or Ir, or which includes electrodes in a scattered island pattern, including: scattered island-form pattern metal thin films which are formed on a diamond surface formed on a substrate and include one selected from Pt and Pd; and metal thin films which include one selected from Ru, Ir and Rh and are provided on all of the metal thin films which include one selected from Pt and Pd, and a method of manufacturing the Schottky electrode.

摘要翻译： 为了在金刚石半导体中提供肖特基电极，该金刚石半导体具有良好的金刚石粘合性，具有由于外部机械压力不均匀而不会剥离的接触表面，在二极管形成过程中不会导致产率降低 并且不会导致电流 - 电压特性的劣化，以及制造肖特基电极的方法。 一种肖特基电极，其包括：形成在形成于基板上的金刚石表面上的散射岛状图案Pt族合金薄膜，其中Pt族合金包含Pt为50〜99.9质量％，0.1〜50质量％ 包括：散射岛状图案金属薄膜，其形成在形成于基板上的金刚石表面上，并且包括选自Pt和Pd中的一种; 以及包括选自Ru，Ir和Rh中的一种并且设置在包括选自Pt和Pd中的一种的所有金属薄膜上的金属薄膜和制造肖特基电极的方法。

公开(公告)号：US20090140263A1

公开(公告)日：2009-06-04

申请号：US12300040

申请日：2007-04-27

申请人： Hitoshi Umezawa ,  Shinichi Shikata ,  Kazuhiro Ikeda

发明人： Hitoshi Umezawa ,  Shinichi Shikata ,  Kazuhiro Ikeda

IPC分类号： H01L29/16 ,  H01L21/22

CPC分类号： H01L29/1602 ,  H01L21/268 ,  H01L29/47 ,  H01L29/66143 ,  H01L29/868 ,  H01L29/872

摘要： A method for surface treatment of diamond comprising exposing the surface of diamond to UV light containing wavelengths of 172 nm to 184.9 nm and 253.7 nm at an integrated exposure of 10 to 5,000 J/cm2 in an environment of an atmosphere having an oxygen concentration of 20 to 100% and an ozone concentration of 10 to 500,000 ppm to adsorb oxygen on the surface of diamond.

摘要翻译： 一种用于金刚石表面处理的方法，其特征在于，在氧浓度为20的气氛中，将金刚石的表面暴露于波长为172nm至184.9nm和253.7nm的紫外光，在10至5,000J / cm 2的整体曝光下 至100％，臭氧浓度为10〜500,000ppm，以吸附金刚石表面的氧。

公开(公告)号：US07494108B2

公开(公告)日：2009-02-24

申请号：US11414930

申请日：2006-05-01

申请人： Yasushi Inoue ,  Kouji Higuchi ,  Hitoshi Umezawa

发明人： Yasushi Inoue ,  Kouji Higuchi ,  Hitoshi Umezawa

IPC分类号： F16K31/12

CPC分类号： F16K31/506 ,  F02M26/54 ,  F16K1/04 ,  F16K31/04

摘要： A motor-operated valve has a rotor unit in a can, and is rotationally driven by a stator unit. The rotation of the rotor unit is transmitted to a screw feed member. A stem member fixed to a valve body is engaged threadedly with the screw feed member by a first screw portion. At the same time, the screw feed member is engaged threadedly with an external thread portion fixed to a valve stem by the second screw portion. The first screw portion and the second screw portion constitute a differential screw mechanism, and feeds the valve stem according to a difference in pitch.

摘要翻译： 电动阀具有在罐中的转子单元，并且由定子单元旋转驱动。 转子单元的旋转传递到螺杆进给构件。 固定在阀体上的阀杆部件通过第一螺纹部分与螺杆进给部件螺纹接合。 同时，螺杆进给构件通过第二螺钉部分与固定到阀杆的外螺纹部分螺纹接合。 第一螺纹部分和第二螺纹部分构成差速螺旋机构，并且根据间距的差异供给阀杆。

公开(公告)号：US20080067464A1

公开(公告)日：2008-03-20

申请号：US11899517

申请日：2007-09-06

申请人： Yusuke Arai ,  Hitoshi Umezawa

发明人： Yusuke Arai ,  Hitoshi Umezawa

IPC分类号： F16K1/02

CPC分类号： F16K31/04 ,  F16K31/53 ,  F25B2600/2515

摘要： A motor-operated valve includes a driving unit including a rotor and a stator, a feed screw mechanism, and a valve main body unit. In order to remove backlash intrinsic in the feed screw mechanism, a coil spring that urges a valve body in a direction away from a valve seat is arranged in a valve chamber. A spring bearing that forms a housing, in which the coil spring is housed, in the valve chamber is provided. Therefore, the large valve chamber is secured in the valve main body unit and passing sound is reduced when a fluid passes the motor-operated valve. Contact surfaces of the valve body and the coil spring can be aligning curved surfaces that absorb a bend of the coil spring.

摘要翻译： 电动阀包括具有转子和定子的驱动单元，进给螺杆机构和阀主体单元。 为了消除进给螺杆机构中固有的反向间隙，在阀室中布置有沿远离阀座的方向推压阀体的螺旋弹簧。 提供一种弹簧轴承，其形成容纳螺旋弹簧的壳体在阀室中的壳体。 因此，大的阀室被固定在阀主体单元中，并且当流体通过电动阀时传递声音减小。 阀体和螺旋弹簧的接触表面可以对准吸收螺旋弹簧弯曲部的曲面。

公开(公告)号：US07325780B2

公开(公告)日：2008-02-05

申请号：US11298048

申请日：2005-12-09

申请人： Yusuke Arai ,  Eiichi Sasada ,  Tomoari Ouchi ,  Hitoshi Umezawa

发明人： Yusuke Arai ,  Eiichi Sasada ,  Tomoari Ouchi ,  Hitoshi Umezawa

IPC分类号： F16K31/04

CPC分类号： F16K31/04 ,  F16H25/20 ,  F16H2001/2881 ,  F16H2025/2087

摘要： A small-sized motor operated valve is disclosed that has high output and high resolution by housing a reduction gear together with a rotor in a single can. A valve shaft 32 having a valve member 30 is inserted to a motor operated valve body 10. A rotor 170 is disposed inside a can 100 attached to the body 10, and inside the rotor 170 is housed a reduction gear 200. The output of the rotor is input to a sun gear 220 and transmitted to planetary gears 230. The planetary gears 230 are engaged both with the fixed gear 250 and the output gear 260, and the output gear 260 is driven at reduced speed by a large reduction ratio. The output of the output gear 260 is transmitted via a driver 300 to a screw shaft 320, where it is converted into a linear movement and transmitted to the valve shaft 32.

摘要翻译： 公开了一种小型电动阀，其通过将减速齿轮与转子一起容纳在单个罐中而具有高输出和高分辨率。 具有阀构件30的阀轴32插入电动阀体10。 转子170设置在安装在主体10上的罐体100内部，转子170的内部容纳有减速齿轮200。 转子的输出被输入到太阳齿轮220并传递到行星齿轮230。 行星齿轮230与固定齿轮250和输出齿轮260啮合，输出齿轮260以大的减速比以减速的速度被驱动。 输出齿轮260的输出经由驱动器300传递到螺杆轴320，在此转换成直线运动并传递到阀轴32。