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12 条记录 (耗时 0.024 秒)

    Electrostatic actuator
    4.
    发明授权
    Electrostatic actuator 有权
    静电执行机构

    公开(公告)号：US08120451B2

    公开(公告)日：2012-02-21

    申请号：US12091555

    申请日：2008-03-06

    申请人： Jun-Bo Yoon ,  Hyun-Ho Yang ,  Dong-Hoon Choi

    发明人： Jun-Bo Yoon ,  Hyun-Ho Yang ,  Dong-Hoon Choi

    IPC分类号： H01H51/22

    CPC分类号： H02N1/006

    摘要： The present invention relates to a micro-electromechanical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit. In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided. In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided.

    摘要翻译： 微机电系统（MEMS）技术领域本发明涉及一种微机电系统（MEMS），更具体地涉及静电致动器及其驱动方法及其应用装置。 根据本发明的静电致动器包括固定电极，与固定电极电绝缘的充电充电单元和与固定电极和电荷充电单元间隔开的移动电极。 根据本发明，提供了与常规静电致动器相比具有非常低的驱动电压和任意可控的驱动电压的静电致动器。 此外，提供了具有耐外部噪声的耐久性并且实现可靠的连续操作的静电致动器。 此外，根据本发明，提供非易失性机械存储器，逻辑电路和采用静电致动器的开关。

    Electrostatic Actuator
    5.
    发明申请
    Electrostatic Actuator 有权
    静电执行器

    公开(公告)号：US20100163376A1

    公开(公告)日：2010-07-01

    申请号：US12091555

    申请日：2008-03-06

    申请人： Jun-Bo Yoon ,  Hyun-Ho Yang ,  Dong-Hun Choi

    发明人： Jun-Bo Yoon ,  Hyun-Ho Yang ,  Dong-Hun Choi

    IPC分类号： H01H59/00 ,  H02N11/00 ,  H03K19/00 ,  G11C11/00

    CPC分类号： H02N1/006

    摘要： The present invention relates to a micro-electromechnical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof.The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit.In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided.In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided,

    摘要翻译： 微电子技术系统（MEMS）技术领域本发明涉及微电子技术系统（MEMS），更具体地，涉及一种静电致动器及其驱动方法及其应用装置。 根据本发明的静电致动器包括固定电极，与固定电极电绝缘的充电充电单元和与固定电极和电荷充电单元间隔开的移动电极。 根据本发明，提供了与常规静电致动器相比具有非常低的驱动电压和任意可控的驱动电压的静电致动器。 此外，提供了具有耐外部噪声的耐久性并且实现可靠的连续操作的静电致动器。 此外，根据本发明，提供非易失性机械存储器，逻辑电路和采用静电致动器的开关，

    HUMIDITY SENSOR, HUMIDITY SENSING METHOD AND TRANSISTOR THEREFOR
    6.
    发明申请
    HUMIDITY SENSOR, HUMIDITY SENSING METHOD AND TRANSISTOR THEREFOR 有权
    湿度传感器，湿度传感方法和晶体管

    公开(公告)号：US20140298904A1

    公开(公告)日：2014-10-09

    申请号：US14110059

    申请日：2012-02-15

    申请人： Jun Bo Yoon ,  Hyun Ho Yang ,  Seok Ho Song

    发明人： Jun Bo Yoon ,  Hyun Ho Yang ,  Seok Ho Song

    IPC分类号： G01N27/04

    CPC分类号： G01N27/048 ,  G01N27/4141

    摘要： Disclosed is a humidity sensor including: a conductive material in which electric charges are charged; a charger which charges the electric charges in the conductive material; and a measurer which measures a change amount of the electric charges charged in the conductive material.

    摘要翻译： 公开了一种湿度传感器，包括：电荷被充电的导电材料; 对导电材料中的电荷进行充电的充电器; 以及测量器，其测量在导电材料中充电的电荷的变化量。

    METHOD FOR MANUFACTURING 3-DIMENSIONAL STRUCTURES USING THIN FILM WITH COLUMNAR NANO PORES AND MANUFACTURE THEREOF
    10.
    发明申请
    METHOD FOR MANUFACTURING 3-DIMENSIONAL STRUCTURES USING THIN FILM WITH COLUMNAR NANO PORES AND MANUFACTURE THEREOF 有权
    使用薄膜与三角纳米孔制造三维结构的方法及其制造方法

    公开(公告)号：US20110233737A1

    公开(公告)日：2011-09-29

    申请号：US12992555

    申请日：2010-05-28

    申请人： Jun-Bo Yoon ,  Byung-Kee Lee ,  Dong-Hoon Choi ,  Hyun-Ho Yang

    发明人： Jun-Bo Yoon ,  Byung-Kee Lee ,  Dong-Hoon Choi ,  Hyun-Ho Yang

    IPC分类号： H01L23/58 ,  H01L21/56 ,  B05D5/12

    CPC分类号： B81C1/00333 ,  B81C2203/0145

    摘要： Disclosed is a method for manufacturing 3-dimensional structure using a thin film with a columnar nano pores and a manufacture thereof. A method for packaging an MEMS device or an NEMS device in accordance with an embodiment of the present invention includes: forming a sacrificial layer; forming a thin film having columnar nano pores formed therein by depositing one of a metallic material, an oxide, a nitride and a fluoride on the sacrificial layer; forming a support layer on the thin film and patterning the support layer; removing the sacrificial layer through use of the nano pores of the thin film parts of which are exposed by patterning the support layer; and forming a shielding layer on the thin film and the support layer.

    摘要翻译： 公开了使用具有柱状纳米孔的薄膜及其制造的三维结构的制造方法。 根据本发明的实施例的用于封装MEMS器件或NEMS器件的方法包括：形成牺牲层; 通过在牺牲层上沉积金属材料，氧化物，氮化物和氟化物中的一种，形成其中形成有柱状纳米孔的薄膜; 在薄膜上形成支撑层并图案化支撑层; 通过利用其薄膜部分的纳米孔通过图案化载体层而去除牺牲层; 以及在所述薄膜和所述支撑层上形成屏蔽层。