摘要:
A neural probe is disclosed for optically stimulating or silencing neurons and recording electrical responses to the stimulus. Using patterning techniques, an integral optical waveguide may be fabricated on the probe for transmitting neuron-affecting light from a light source to a probe tip. The probe tip may include one or more electrodes to receive electrical responses from stimulated neurons for recording or further processing. According to various embodiments, the disclosed neural probes may utilize multiple light sources simultaneously, switch between multiple light sources, or utilize a single light source to stimulate or silence multiple neuron locations simultaneously via multiple probe tips or via multiple light-emitting sites located along the length of the probe. Neural probes are thereby provided that have sufficient spatial resolution to accurately target, stimulate, and record the reaction of neurons, or as few as a single neuron, utilizing a slim, compact structure.
摘要:
A probe is provided for an SPM (Scanning Probe Microscope), and a method is provided for fabricating the probe in which a double side alignment process is not required to simplify the fabricating. The probe includes a cantilever; a body supporting the cantilever; and a tip formed at an end of the cantilever, wherein the cantilever, the body and the tip are made of silicon, and boron is diffused into the cantilever and a predetermined area of the body. The method includes steps of: forming a first mask layer on an area of a silicon substrate to be formed with the body and the tip; etching the silicon substrate in a predetermined depth using the first mask layer to form the tip; removing the first mask and forming a second mask layer on an area of the silicon substrate except for an area to be formed with the body and the cantilever; forming a boron-diffused layer by diffusing boron into an area to be formed with the cantilever and a predetermined area of the body using the second mask; removing the second mask layer and forming a third mask layer on the boron-diffused layer; and etching the silicon substrate using the third mask layer to form the body and the cantilever.
摘要:
A neural probe is disclosed for optically stimulating or silencing neurons and recording electrical responses to the stimulus. Using patterning techniques, an integral optical waveguide may be fabricated on the probe for transmitting neuron-affecting light from a light source to a probe tip. The probe tip may include one or more electrodes to receive electrical responses from stimulated neurons for recording or further processing. According to various embodiments, the disclosed neural probes may utilize multiple light sources simultaneously, switch between multiple light sources, or utilize a single light source to stimulate or silence multiple neuron locations simultaneously via multiple probe tips or via multiple light-emitting sites located along the length of the probe. Neural probes are thereby provided that have sufficient spatial resolution to accurately target, stimulate, and record the reaction of neurons, or as few as a single neuron, utilizing a slim, compact structure.
摘要:
Disclosed are an optical stimulation probe structure having a probe body inserted into a subject, a fixing body that fixes the probe body and a light radiator that transmits an optical signal to the probe body, wherein the probe body is made of an optical transmission material capable of transmitting an optical signal, such that the optical signal transmitted from the light radiator is transmitted through the probe body to the subject, and a method for manufacturing the same.
摘要:
A tetrode for measuring bio-signals, the tetrode including four electrodes which extend in a lengthwise direction of the tetrode and are symmertrically arranged; and an insulation layer which surrounds the four electrodes to insulate the electrodes from each others. A method of manufacturing a tetrode for measuring bio-signals, the method including forming a first insulation layer; forming first and second electrodes on the first insulation layer and forming a second insulation layer on the first and second electrodes; and forming third and fourth electrodes on the second insulation layer and forming a third insulation layer on the third and fourth electrodes.
摘要:
Disclosed is a micromirror actuator having a two-axis freedom and actuated by an electromagnetic force and fabrication method thereof. The micromirror actuator includes a substrate, a frame configured to be connected with the substrate, a micromirror configured to be connected with the frame, first and second torsion bars connecting the substrate with the frame, third and fourth torsion bars connecting the frame with the micromirror, four interdigitated cantilevers configured to be connected to the substrate, four connecting bars connecting the four interdigitated cantilevers with the frame, interconnection lines formed on the four interdigitated cantilevers and the micromirror, and first and second magnets installed outside the substrate. Since the micromirror actuator of the present invention can be actuated around two axes by electromagnetic force generated by electromagnetic field applied from outside, it is possible to obtain large force and large rotational angle. In addition, the micromirror actuator has a mechanically robust structure endurable against external impact, and is operable at a low voltage of 5V or loss. Further, it is possible to obtain a flat mirror surface sine the upper silicon layer of the SOI substrate is used as the mirror surface.
摘要:
Disclosed are an optical stimulation probe structure having a probe body inserted into a subject, a fixing body that fixes the probe body and a light radiator that transmits an optical signal to the probe body, wherein the probe body is made of an optical transmission material capable of transmitting an optical signal, such that the optical signal transmitted from the light radiator is transmitted through the probe body to the subject, and a method for manufacturing the same.
摘要:
A tetrode for measuring bio-signals, the tetrode including four electrodes which extend in a lengthwise direction of the tetrode and are symmertrically arranged; and an insulation layer which surrounds the four electrodes to insulate the electrodes from each others. A method of manufacturing a tetrode for measuring bio-signals, the method including forming a first insulation layer; forming first and second electrodes on the first insulation layer and forming a second insulation layer on the first and second electrodes; and forming third and fourth electrodes on the second insulation layer and forming a third insulation layer on the third and fourth electrodes.
摘要:
Disclosed is a toggle type SPDT MEMS switch wherein an input port of the switch is always connected to one of two output ports of the switch while driving the switch by an electromagnetic force generated by a magnetic field and maintaining a switching state by an electrostatic force. Since the MEMS switch performs switching using the electromagnetic force which is stronger than the electrostatic force, it can perform reliable operation, have a mechanically robust structure, and handle high power signals. In addition, since initial displacement can become large, large isolation can be obtained when the switch is turned off. In addition, since the MEMS switch maintains an ON state using the electrostatic force in a state where a distance between two electrodes is small without using the electrostatic force after switching, it can be operated with a relatively low voltage. In addition, since current is applied only at the moment of switching in order to generate the electromagnetic force, power consumption is low. Further, since the MEMS switch is implemented by only one toggle type switch and is integrated on one substrate by a MEMS fabrication technique, the entire size of the switch is very small.