NEURAL PROBE WITH OPTICAL STIMULATION CAPABILITY
    1.
    发明申请
    NEURAL PROBE WITH OPTICAL STIMULATION CAPABILITY 有权
    具有光刺激能力的神经探针

    公开(公告)号:US20130079615A1

    公开(公告)日:2013-03-28

    申请号:US13510822

    申请日:2010-11-19

    IPC分类号: A61B5/00

    摘要: A neural probe is disclosed for optically stimulating or silencing neurons and recording electrical responses to the stimulus. Using patterning techniques, an integral optical waveguide may be fabricated on the probe for transmitting neuron-affecting light from a light source to a probe tip. The probe tip may include one or more electrodes to receive electrical responses from stimulated neurons for recording or further processing. According to various embodiments, the disclosed neural probes may utilize multiple light sources simultaneously, switch between multiple light sources, or utilize a single light source to stimulate or silence multiple neuron locations simultaneously via multiple probe tips or via multiple light-emitting sites located along the length of the probe. Neural probes are thereby provided that have sufficient spatial resolution to accurately target, stimulate, and record the reaction of neurons, or as few as a single neuron, utilizing a slim, compact structure.

    摘要翻译: 公开了用于光学刺激或沉默神经元并记录对刺激的电响应的神经探针。 使用图案化技术,可以在探针上制造整体光波导,用于将从光源到探针尖端的影响影响的影响神经元的光发射。 探针尖端可以包括一个或多个电极,以接收来自被刺激的神经元的用于记录或进一步处理的电响应。 根据各种实施例,所公开的神经探针可以同时利用多个光源,在多个光源之间切换,或利用单个光源同时经由多个探针尖端刺激或沉默多个神经元位置,或经由多个发光部位沿着 探头的长度。 从而提供了具有足够的空间分辨率的神经探针,以利用纤细的紧凑结构精确地靶向,刺激和记录神经元或单个神经元的反应。

    Method of fabricating probe for scanning probe microscope
    2.
    发明授权
    Method of fabricating probe for scanning probe microscope 失效
    扫描探针显微镜制作探头的方法

    公开(公告)号:US07119332B2

    公开(公告)日:2006-10-10

    申请号:US10777941

    申请日:2004-02-12

    IPC分类号: G01N23/00 G21K7/00

    CPC分类号: G01Q70/16 G01N23/225

    摘要: A probe is provided for an SPM (Scanning Probe Microscope), and a method is provided for fabricating the probe in which a double side alignment process is not required to simplify the fabricating. The probe includes a cantilever; a body supporting the cantilever; and a tip formed at an end of the cantilever, wherein the cantilever, the body and the tip are made of silicon, and boron is diffused into the cantilever and a predetermined area of the body. The method includes steps of: forming a first mask layer on an area of a silicon substrate to be formed with the body and the tip; etching the silicon substrate in a predetermined depth using the first mask layer to form the tip; removing the first mask and forming a second mask layer on an area of the silicon substrate except for an area to be formed with the body and the cantilever; forming a boron-diffused layer by diffusing boron into an area to be formed with the cantilever and a predetermined area of the body using the second mask; removing the second mask layer and forming a third mask layer on the boron-diffused layer; and etching the silicon substrate using the third mask layer to form the body and the cantilever.

    摘要翻译: 提供了用于SPM(扫描探针显微镜)的探针,并且提供了一种用于制造探针的方法,其中不需要双侧对准工艺来简化制造。 探头包括悬臂; 支撑悬臂的身体; 以及形成在所述悬臂的端部的尖端,其中所述悬臂,所述主体和所述尖端由硅制成,并且硼扩散到所述悬臂和所述主体的预定区域。 该方法包括以下步骤:在要与主体和尖端形成的硅衬底的区域上形成第一掩模层; 使用第一掩模层以预定深度蚀刻硅衬底以形成尖端; 除去所述第一掩模并在所述硅衬底的除了要与所述主体和所述悬臂形成的区域之外的区域上形成第二掩模层; 通过使用第二掩模将硼扩散到与悬臂形成的区域和身体的预定区域中,形成硼扩散层; 去除所述第二掩模层并在所述硼扩散层上形成第三掩模层; 以及使用所述第三掩模层蚀刻所述硅衬底以形成所述主体和所述悬臂。

    Neural probe with optical stimulation capability
    3.
    发明授权
    Neural probe with optical stimulation capability 有权
    具有光刺激能力的神经探针

    公开(公告)号:US09247889B2

    公开(公告)日:2016-02-02

    申请号:US13510822

    申请日:2010-11-19

    摘要: A neural probe is disclosed for optically stimulating or silencing neurons and recording electrical responses to the stimulus. Using patterning techniques, an integral optical waveguide may be fabricated on the probe for transmitting neuron-affecting light from a light source to a probe tip. The probe tip may include one or more electrodes to receive electrical responses from stimulated neurons for recording or further processing. According to various embodiments, the disclosed neural probes may utilize multiple light sources simultaneously, switch between multiple light sources, or utilize a single light source to stimulate or silence multiple neuron locations simultaneously via multiple probe tips or via multiple light-emitting sites located along the length of the probe. Neural probes are thereby provided that have sufficient spatial resolution to accurately target, stimulate, and record the reaction of neurons, or as few as a single neuron, utilizing a slim, compact structure.

    摘要翻译: 公开了用于光学刺激或沉默神经元并记录对刺激的电响应的神经探针。 使用图案化技术,可以在探针上制造整体光波导,用于将从光源到探针尖端的影响影响的影响神经元的光发射。 探针尖端可以包括一个或多个电极,以接收来自被刺激的神经元的用于记录或进一步处理的电响应。 根据各种实施例,所公开的神经探针可以同时利用多个光源,在多个光源之间切换,或利用单个光源同时经由多个探针尖端刺激或沉默多个神经元位置,或经由多个发光部位沿着 探头的长度。 从而提供了具有足够的空间分辨率的神经探针,以利用纤细的紧凑结构精确地靶向,刺激和记录神经元或单个神经元的反应。

    Electromagnetically actuated micromirror actuator and fabrication method thereof
    6.
    发明授权
    Electromagnetically actuated micromirror actuator and fabrication method thereof 失效
    电磁致动微镜致动器及其制造方法

    公开(公告)号:US06781732B2

    公开(公告)日:2004-08-24

    申请号:US10342350

    申请日:2003-01-15

    IPC分类号: G02B2608

    摘要: Disclosed is a micromirror actuator having a two-axis freedom and actuated by an electromagnetic force and fabrication method thereof. The micromirror actuator includes a substrate, a frame configured to be connected with the substrate, a micromirror configured to be connected with the frame, first and second torsion bars connecting the substrate with the frame, third and fourth torsion bars connecting the frame with the micromirror, four interdigitated cantilevers configured to be connected to the substrate, four connecting bars connecting the four interdigitated cantilevers with the frame, interconnection lines formed on the four interdigitated cantilevers and the micromirror, and first and second magnets installed outside the substrate. Since the micromirror actuator of the present invention can be actuated around two axes by electromagnetic force generated by electromagnetic field applied from outside, it is possible to obtain large force and large rotational angle. In addition, the micromirror actuator has a mechanically robust structure endurable against external impact, and is operable at a low voltage of 5V or loss. Further, it is possible to obtain a flat mirror surface sine the upper silicon layer of the SOI substrate is used as the mirror surface.

    摘要翻译: 公开了一种具有双轴自由度并由电磁力驱动的微镜致动器及其制造方法。 微镜致动器包括基板,被配置为与基板连接的框架,构造成与框架连接的微镜,将基板与框架连接的第一和第二扭杆,将框架与微镜连接的第三和第四扭杆 配置为连接到基板的四个交叉悬臂,连接四个交叉悬臂与框架的四个连接杆,形成在四个叉指悬臂和微镜上的互连线,以及安装在基板外部的第一和第二磁体。 由于本发明的微镜驱动器可以通过从外部施加的电磁场产生的电磁力而围绕两个轴致动,因此可以获得大的力和大的旋转角度。 此外,微镜致动器具有耐外部冲击的机械坚固结构,并且可在5V或低损耗的低电压下操作。 此外,可以获得使用SOI衬底的上硅层作为镜面的平面镜面正弦。

    Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces
    9.
    发明申请
    Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces 审中-公开
    低电压和低功耗拨动式 - SPDT RF MEMS开关由电磁和静电力组合起动

    公开(公告)号:US20050104694A1

    公开(公告)日:2005-05-19

    申请号:US10980333

    申请日:2004-11-04

    摘要: Disclosed is a toggle type SPDT MEMS switch wherein an input port of the switch is always connected to one of two output ports of the switch while driving the switch by an electromagnetic force generated by a magnetic field and maintaining a switching state by an electrostatic force. Since the MEMS switch performs switching using the electromagnetic force which is stronger than the electrostatic force, it can perform reliable operation, have a mechanically robust structure, and handle high power signals. In addition, since initial displacement can become large, large isolation can be obtained when the switch is turned off. In addition, since the MEMS switch maintains an ON state using the electrostatic force in a state where a distance between two electrodes is small without using the electrostatic force after switching, it can be operated with a relatively low voltage. In addition, since current is applied only at the moment of switching in order to generate the electromagnetic force, power consumption is low. Further, since the MEMS switch is implemented by only one toggle type switch and is integrated on one substrate by a MEMS fabrication technique, the entire size of the switch is very small.

    摘要翻译: 公开了一种肘节型SPDT MEMS开关,其中开关的输入端口总是连接到开关的两个输出端口中的一个,同时通过由磁场产生的电磁力驱动开关,并通过静电力保持开关状态。 由于MEMS开关使用比静电力更强的电磁力进行切换,因此可以进行可靠的运行,具有机械坚固的结构,并处理高功率信号。 此外,由于初始位移可能变大,当开关断开时可以获得大的隔离度。 此外,由于在开关之前不使用静电力的情况下,在两电极之间的距离小的状态下,利用静电力使MEMS开关维持导通状态,所以能够以较低的电压进行动作。 此外,由于仅在切换时刻施加电流以产生电磁力,所以功耗低。 此外,由于MEMS开关仅由一个触发式开关实现,并且通过MEMS制造技术集成在一个基板上,因此开关的整体尺寸非常小。