INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS
    1.
    发明申请
    INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS 有权
    检测系统和方法与多图像相位移动分析

    公开(公告)号:US20100296104A1

    公开(公告)日:2010-11-25

    申请号:US12469893

    申请日:2009-05-21

    IPC分类号: G01B11/24

    摘要: An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.

    摘要翻译: 提供检查系统。 检查系统包括光源,光栅,相移单元,成像器和处理器。 光源被配置为产生光。 光栅处于所生成的光的路径中,并且被配置为在光通过光栅之后产生光栅图像。 相移单元被配置为将光栅图像的多个相移图案形成并反射到物体表面上以形成多个投影相移图案。 成像器被配置为获得投影的相移图案的图像数据。 处理器被配置为从图像数据重建物体表面。 还提出了检测方法和移相投影机。

    Inspection system and method with multi-image phase shift analysis
    8.
    发明授权
    Inspection system and method with multi-image phase shift analysis 有权
    多图像相移分析检测系统及方法

    公开(公告)号:US08045181B2

    公开(公告)日:2011-10-25

    申请号:US12469893

    申请日:2009-05-21

    IPC分类号: G01B11/24

    摘要: An inspection system is provided. The inspection system comprises a light source, a grating, a phase shifting unit, an imager, and a processor. The light source is configured to generate light. The grating is in a path of the generated light and is configured to produce a grating image after the light passes through the grating. The phase shifting unit is configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifting patterns. The imager is configured to obtain image data of the projected phase shifted patterns. The processor is configured to reconstruct the object surface from the image data. An inspection method and a phase shifting projector are also presented.

    摘要翻译: 提供检查系统。 检查系统包括光源,光栅,相移单元,成像器和处理器。 光源被配置为产生光。 光栅处于所生成的光的路径中,并且被配置为在光通过光栅之后产生光栅图像。 相移单元被配置为将光栅图像的多个相移图案形成并反射到物体表面上以形成多个投影相移图案。 成像器被配置为获得投影的相移图案的图像数据。 处理器被配置为从图像数据重建物体表面。 还提出了检测方法和移相投影机。