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    Pulsed laser anneal process for transistors with partial melt of a raised source-drain
    1.
    发明授权
    Pulsed laser anneal process for transistors with partial melt of a raised source-drain 有权
    脉冲激光退火工艺用于具有部分熔化的源极 - 漏极的晶体管

    公开(公告)号：US09006069B2

    公开(公告)日：2015-04-14

    申请号：US13976822

    申请日：2011-12-19

    申请人： Jacob Jensen ,  Tahir Ghani ,  Mark Y. Liu ,  Harold Kennel ,  Robert James

    发明人： Jacob Jensen ,  Tahir Ghani ,  Mark Y. Liu ,  Harold Kennel ,  Robert James

    IPC分类号： H01L21/268 ,  H01L29/66 ,  H01L29/78 ,  H01L21/265

    CPC分类号： H01L29/7848 ,  H01L21/26506 ,  H01L21/268 ,  H01L21/324 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/165 ,  H01L29/41783 ,  H01L29/66628 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7851

    摘要： A non-planar transistor including partially melted raised semiconductor source/drains disposed on opposite ends of a semiconductor fin with the gate stack disposed there between. The raised semiconductor source/drains comprise a super-activated dopant region above a melt depth and an activated dopant region below the melt depth. The super-activated dopant region has a higher activated dopant concentration than the activated dopant region and/or has an activated dopant concentration that is constant throughout the melt region. A fin is formed on a substrate and a semiconductor material or a semiconductor material stack is deposited on regions of the fin disposed on opposite sides of a channel region to form raised source/drains. A pulsed laser anneal is performed to melt only a portion of the deposited semiconductor material above a melt depth.

    摘要翻译： 一种非平面晶体管，其包括设置在半导体鳍片的相对端上的部分熔融的凸起半导体源极/漏极，其间设置有栅极堆叠。 升高的半导体源极/漏极包括在熔体深度之上的超激活掺杂剂区域和低于熔体深度的活化掺杂剂区域。 超活化掺杂剂区域具有比活化的掺杂剂区域更高的活化掺杂剂浓度和/或具有在整个熔融区域中恒定的活化的掺杂剂浓度。 翅片形成在基板上，并且半导体材料或半导体材料堆叠沉积在设置在沟道区域的相对侧上的翅片的区域上以形成升高的源极/漏极。 进行脉冲激光退火以仅将融化的半导体材料的一部分熔化在熔体深度之上。

    SYSTEM AND METHOD FOR FLOATING PORT CONFIGURATION
    4.
    发明申请
    SYSTEM AND METHOD FOR FLOATING PORT CONFIGURATION 有权
    用于浮动端口配置的系统和方法

    公开(公告)号：US20100180322A1

    公开(公告)日：2010-07-15

    申请号：US12750390

    申请日：2010-03-30

    申请人： Norman W. Finn ,  Jacob Jensen ,  John M. Schnizlein

    发明人： Norman W. Finn ,  Jacob Jensen ,  John M. Schnizlein

    IPC分类号： G06F17/30 ,  G06F15/177

    CPC分类号： H04L41/0856 ,  H04L12/4625 ,  H04L41/0806 ,  Y02D30/30

    摘要： A system and method automatically configures the interfaces of an intermediate network device. A discovery process operating at the device detects the identity or type of network entities actually coupled to the device's interfaces. Utilizing the identity or type of detected entities, a look-up is performed to obtain a configuration macro specially defined for each detected network entity. The retrieved configuration macros are executed and applied at the respective interfaces. During operation, the intermediate network device continues to monitor the identity and type of entities actually coupled to its interfaces. If a change is detected, such as an entity moving from a first to a second interface, the specially defined configuration macro for that entity floats from the first to the second interface where it is executed and applied.

    摘要翻译： 系统和方法自动配置中间网络设备的接口。 在设备上运行的发现过程检测实际耦合到设备接口的网络实体的身份或类型。 利用检测到的实体的身份或类型，执行查找以获得为每个检测到的网络实体特别定义的配置宏。 检索到的配置宏在相应的接口被执行和应用。 在操作期间，中间网络设备继续监视实际耦合到其接口的实体的身份和类型。 如果检测到更改，例如从第一个接口移动到第二个接口的实体，则该实体的特殊定义的配置宏将从执行和应用的第一个接口漂移到第二个接口。

    System and method for floating port configuration
    5.
    发明申请
    System and method for floating port configuration 有权
    浮动端口配置的系统和方法

    公开(公告)号：US20070064624A1

    公开(公告)日：2007-03-22

    申请号：US11230395

    申请日：2005-09-20

    申请人： Norman Finn ,  Jacob Jensen ,  John Schnizlein

    发明人： Norman Finn ,  Jacob Jensen ,  John Schnizlein

    IPC分类号： H04L12/28 ,  H04L12/66

    CPC分类号： H04L41/0856 ,  H04L12/4625 ,  H04L41/0806 ,  Y02D30/30

    摘要： A system and method automatically configures the interfaces of an intermediate network device. A discovery process operating at the device detects the identity or type of network entities actually coupled to the device's interfaces. Utilizing the identity or type of detected entities, a look-up is performed to obtain a configuration macro specially defined for each detected network entity. The retrieved configuration macros are executed and applied at the respective interfaces. During operation, the intermediate network device continues to monitor the identity and type of entities actually coupled to its interfaces. If a change is detected, such as an entity moving from a first to a second interface, the specially defined configuration macro for that entity floats from the first to the second interface where it is executed and applied.

    摘要翻译： 系统和方法自动配置中间网络设备的接口。 在设备上运行的发现过程检测实际耦合到设备接口的网络实体的身份或类型。 利用检测到的实体的身份或类型，执行查找以获得为每个检测到的网络实体特别定义的配置宏。 检索到的配置宏在相应的接口被执行和应用。 在操作期间，中间网络设备继续监视实际耦合到其接口的实体的身份和类型。 如果检测到更改，例如从第一个接口移动到第二个接口的实体，则该实体的特殊定义的配置宏将从执行和应用的第一个接口漂移到第二个接口。