HYBRID FILTER INCLUDING LC- AND MEMS-BASED RESONATORS
    1.
    发明申请
    HYBRID FILTER INCLUDING LC- AND MEMS-BASED RESONATORS 审中-公开
    混合滤波器,包括基于LC和MEMS的谐振器

    公开(公告)号:US20140035702A1

    公开(公告)日:2014-02-06

    申请号:US13563252

    申请日:2012-07-31

    IPC分类号: H03H9/00 H03H7/01

    摘要: This disclosure provides implementations of filters and filter topologies, circuits, structures, devices, apparatus, systems, and related processes. In one aspect, a device includes one or more LC resonant circuit stages. In some implementations, each LC stage includes an inductor and a capacitor. Each LC stage also has a corresponding resonant frequency. The one or more LC stages are arranged to produce an unmodified passband over a range of frequencies having a corresponding bandwidth. One or more microelectromechanical systems (MEMS) resonators are arranged with the one or more LC stages. The one or more MEMS resonators are arranged with the one or more LC stages so as to modify characteristics of the unmodified passband such that the hybrid filter produces a modified passband having a modified bandwidth and one or more other modified band characteristics.

    摘要翻译: 本公开提供了滤波器和滤波器拓扑,电路,结构,设备,装置,系统和相关过程的实现。 在一个方面,器件包括一个或多个LC谐振电路级。 在一些实现中,每个LC级包括电感器和电容器。 每个LC级还具有相应的谐振频率。 一个或多个LC级布置成在具有相应带宽的频率范围上产生未修改的通带。 一个或多个微机电系统(MEMS)谐振器与一个或多个LC级布置。 一个或多个MEMS谐振器被布置成具有一个或多个LC级,以便修改未修改的通带的特性,使得混合滤波器产生具有修改的带宽和一个或多个其它修改的频带特性的修改的通带。

    PIEZOELECTRIC RESONATOR WITH AIRGAP
    4.
    发明申请
    PIEZOELECTRIC RESONATOR WITH AIRGAP 审中-公开
    带气动压电谐振器

    公开(公告)号:US20130235001A1

    公开(公告)日:2013-09-12

    申请号:US13413613

    申请日:2012-03-06

    摘要: This disclosure provides implementations of electromechanical systems (EMS) piezoelectric resonator structures, transformers, devices, apparatus, systems, and related processes. In one aspect, a piezoelectric resonator structure includes a first conductive electrode layer, a second conductive electrode layer, and a piezoelectric layer arranged between the first and second conductive layers. In some implementations, the surface of the piezoelectric layer adjacent to the first conductive layer is separated from the first conductive layer by a first gap, and the surface of the piezoelectric layer adjacent to the second conductive layer is separated from the second conductive layer by a second gap. In some implementations, the resonator structure further includes an encapsulation layer arranged over the second conductive layer and providing physical support to the second conductive layer.

    摘要翻译: 本公开提供了机电系统(EMS)压电谐振器结构,变压器,设备,装置,系统和相关过程的实现。 一方面,压电谐振器结构包括第一导电电极层,第二导电电极层和布置在第一和第二导电层之间的压电层。 在一些实施方案中,与第一导电层相邻的压电层的表面通过第一间隙与第一导电层分离,并且与第二导电层相邻的压电层的表面与第二导电层相隔一个 第二个差距。 在一些实施方案中,谐振器结构还包括布置在第二导电层上的封装层,并为第二导电层提供物理支撑。