公开(公告)号：US08697341B2

公开(公告)日：2014-04-15

申请号：US13151531

申请日：2011-06-02

申请人： Kyong-Ho Yoon ,  Jin-Kuk Lee ,  Hwan-Sung Cheon ,  Min-Soo Kim ,  Jee-Yun Song

发明人： Kyong-Ho Yoon ,  Jin-Kuk Lee ,  Hwan-Sung Cheon ,  Min-Soo Kim ,  Jee-Yun Song

IPC分类号： G03F7/11

CPC分类号： C08L65/00 ,  C08G61/02 ,  C08G73/1039 ,  C08G73/1067 ,  C08G2261/3424 ,  C08L79/08 ,  G03F7/091 ,  G03F7/094

摘要： An aromatic ring-containing polymer, an underlayer composition including the same, and associated methods, the aromatic ring-containing polymer including a group represented by one of the following Chemical Formulae 1-1, 1-2, 2-1, and 2-2:

摘要翻译： 含有芳环的聚合物，含有该芳香族环的聚合物，含有该芳香族环的聚合物，下层组合物及其相关方法，含有芳香族环的聚合物包括由以下化学式1-1,1-2,2-1和2- 2：

公开(公告)号：US20110097672A1

公开(公告)日：2011-04-28

申请号：US12929072

申请日：2010-12-29

申请人： Kyong Ho Yoon ,  Jong Seob Kim ,  Dong Seon Uh ,  Chang Il Oh ,  Kyung Hee Hyung ,  Min Soo Kim ,  Jin Kuk Lee

发明人： Kyong Ho Yoon ,  Jong Seob Kim ,  Dong Seon Uh ,  Chang Il Oh ,  Kyung Hee Hyung ,  Min Soo Kim ,  Jin Kuk Lee

IPC分类号： G03F7/20 ,  C08G61/12 ,  C08L65/00

CPC分类号： G03F7/091 ,  C08G61/02 ,  C08G61/10 ,  G03F7/11 ,  Y10S438/952

摘要： An antireflective hardmask composition includes an organic solvent, an initiator, and at least one polymer represented by Formulae A, B, or C as set forth in the specification.

公开(公告)号：US20100320573A1

公开(公告)日：2010-12-23

申请号：US12868025

申请日：2010-08-25

申请人： Dong Seon Uh ,  Hui Chan Yun ,  Jin Kuk Lee ,  Chang Il Oh ,  Jong Seob Kim ,  Sang Kyun Kim ,  Sang Hak Lim ,  Min Soo Kim ,  Kyong Ho Yoon ,  Irina Nam

发明人： Dong Seon Uh ,  Hui Chan Yun ,  Jin Kuk Lee ,  Chang Il Oh ,  Jong Seob Kim ,  Sang Kyun Kim ,  Sang Hak Lim ,  Min Soo Kim ,  Kyong Ho Yoon ,  Irina Nam

IPC分类号： H01L29/00 ,  C08G77/12 ,  C08G77/14 ,  G03F1/00 ,  G03F7/20

CPC分类号： H01L21/31144 ,  C08G77/20 ,  G03F7/0752 ,  G03F7/091 ,  H01L21/3121

摘要： Provided herein, according to some embodiments of the invention, are organosilane polymers prepared by reacting organosilane compounds including(a) at least one compound of Formula I Si(OR1)(OR2)(OR3)R4  (I) wherein R1, R2 and R3 may each independently be an alkyl group, and R4 may be —(CH2)nR5, wherein R5 may be an aryl or a substituted aryl, and n may be 0 or a positive integer; and(b) at least one compound of Formula II Si(OR6)(OR7)(OR8)R9  (II) wherein R6, R7 and R8 may each independently an alkyl group or an aryl group; and R9 may be an alkyl group. Also provided are hardmask compositions including an organosilane compound according to an embodiment of the invention, or a hydrolysis product thereof. Methods of producing semiconductor devices using a hardmask compostion according to an embodiment of the invention, and semiconductor devices produced therefrom, are also provided.

摘要翻译： 根据本发明的一些实施方案，是通过有机硅烷化合物制备的有机硅烷聚合物，所述有机硅烷化合物包括（a）至少一种式I Si（OR1）（OR2）（OR3）R4（I）的化合物，其中R1，R2和R3 可以各自独立地为烷基，并且R 4可以是 - （CH 2）n R 5，其中R 5可以是芳基或取代的芳基，n可以是0或正整数; 和（b）至少一种式IISi（OR 6）（OR 7）（OR 8）R 9（II）的化合物，其中R 6，R 7和R 8可各自独立地为烷基或芳基; 并且R 9可以是烷基。 还提供了包含根据本发明实施方案的有机硅烷化合物或其水解产物的硬掩模组合物。 还提供了使用根据本发明的实施例的硬掩模组合的半导体器件的制造方法以及由其制造的半导体器件。

公开(公告)号：US07629260B2

公开(公告)日：2009-12-08

申请号：US11608451

申请日：2006-12-08

申请人： Dong Seon Uh ,  Hui Chan Yun ,  Jin Kuk Lee ,  Chang Il Oh ,  Jong Seob Kim ,  Sang-Kyun Kim ,  Sang Hak Lim

发明人： Dong Seon Uh ,  Hui Chan Yun ,  Jin Kuk Lee ,  Chang Il Oh ,  Jong Seob Kim ,  Sang-Kyun Kim ,  Sang Hak Lim

IPC分类号： H01L21/302

CPC分类号： H01L21/0276 ,  G03F7/0752 ,  G03F7/091 ,  G03F7/094 ,  G03F7/11

摘要： Provided herein are hardmask compositions that include an organosilane polymer prepared by the reaction of one or more compounds of Formula (I) Si(OR1)(OR2)(OR3)R4 wherein R1, R2 and R3 may each independently be alkyl acetoxy or oxime; and R4 may be hydrogen, alkyl, aryl or arylalkyl; and wherein the organosilane polymer has a polydispersity in a range of about 1.1 to about 2.

摘要翻译： 本文提供了包含通过一种或多种式（I）Si（OR 1）（OR 2）（OR 3）（OR 3）R 4）的化合物反应制备的有机硅烷聚合物的硬掩模组合物，其中R 1，R 2和R 3可各自独立地为烷基乙酰氧基或肟; 并且R 4可以是氢，烷基，芳基或芳基烷基; 并且其中所述有机硅烷聚合物的多分散性在约1.1至约2的范围内。

公开(公告)号：US20080305441A1

公开(公告)日：2008-12-11

申请号：US12155490

申请日：2008-06-05

申请人： Kyong Ho YOON ,  Jong Seob KIM ,  Dong Seon UH ,  Hwan Sung CHEON ,  Chang Il OH ,  Min Soo KIM ,  Jin Kuk LEE

发明人： Kyong Ho YOON ,  Jong Seob KIM ,  Dong Seon UH ,  Hwan Sung CHEON ,  Chang Il OH ,  Min Soo KIM ,  Jin Kuk LEE

IPC分类号： G03F7/26 ,  G03F1/00

CPC分类号： G03F7/091 ,  Y10S438/952

摘要： A hardmask composition includes an organic solvent and one or more aromatic ring-containing polymers represented by Formulae 1, 2 and 3:

摘要翻译： 硬掩模组合物包括有机溶剂和由式1,2和3表示的一种或多种含芳族环的聚合物：

公开(公告)号：US20080160460A1

公开(公告)日：2008-07-03

申请号：US12003731

申请日：2007-12-31

申请人： Kyong Ho Yoon ,  Jong Seob Kim ,  Dong Seon Uh ,  Chang Il Oh ,  Kyung Hee Hyung ,  Min Soo Kim ,  Jin Kuk Lee

发明人： Kyong Ho Yoon ,  Jong Seob Kim ,  Dong Seon Uh ,  Chang Il Oh ,  Kyung Hee Hyung ,  Min Soo Kim ,  Jin Kuk Lee

IPC分类号： G03F7/00 ,  C08G67/00 ,  G02B5/22

CPC分类号： G02B1/111 ,  C08G10/02 ,  C08G61/02 ,  G03F7/091

摘要： A naphthalene-backbone polymer represented by Formula 1: wherein n and m are independently at least 1 and less than about 190, R1 is a hydrogen, a hydroxyl, a hydrocarbon group of about 10 carbons or less, or a halogen, R2 is methylene or includes an aryl linking group, R3 is a conjugated diene group, and R4 is an unsaturated dienophile group.

摘要翻译： 由式1表示的萘主链聚合物：其中n和m独立地为至少1且小于约190，R 1是氢，羟基，约10个碳以下的烃基 或卤素，R 2是亚甲基或包括芳基连接基团，R 3是共轭二烯基团，R 4是 不饱和亲电子基团。

公开(公告)号：US20070148974A1

公开(公告)日：2007-06-28

申请号：US11508074

申请日：2006-08-22

申请人： Dong Seon Uh ,  Chang Il Oh ,  Do Hyeon Kim ,  Hui Chan Yun ,  Jin Kuk Lee ,  Irina Nam ,  Jong Seob Kim

发明人： Dong Seon Uh ,  Chang Il Oh ,  Do Hyeon Kim ,  Hui Chan Yun ,  Jin Kuk Lee ,  Irina Nam ,  Jong Seob Kim

IPC分类号： C23F1/00 ,  H01L21/302

CPC分类号： H01L21/0273 ,  G03F7/11

摘要： Provided herein are hardmask compositions for resist underlayer films, wherein according to some embodiments of the invention, hardmask compositions include a polymer prepared by the reaction of a compound of Formula 1 with a compound of Formula 2 (R)m—Si—(OCH3)4-m   (2) in the presence of a catalyst, wherein R is a monovalent organic group, n is an integer from 3 to 20, and m is 1 or 2; and an organic solvent.Also provided herein are methods for producing a semiconductor integrated circuit device using a hardmask composition according to an embodiment of the invention. Further provided are semiconductor integrated circuit devices produced by a method embodiment of the invention.

摘要翻译： 本文提供了用于抗蚀剂下层膜的硬掩模组合物，其中根据本发明的一些实施方案，硬掩模组合物包括通过式1的化合物与式2化合物的反应制备的聚合物， （2）（2）式（2）所示的化合物，其中R 1，R 2，R 3， 在存在催化剂的情况下，<？in-line-formula description =“In-line Formulas”end =“tail”？>，其中R为一价有机基团，n为3至20的整数，m为1 或2; 和有机溶剂。 本文还提供了使用根据本发明实施例的硬掩模组合物制造半导体集成电路器件的方法。 还提供了通过本发明的方法实施例生产的半导体集成电路器件。

公开(公告)号：US20070148586A1

公开(公告)日：2007-06-28

申请号：US11507701

申请日：2006-08-22

申请人： Dong Seon Uh ,  Chang Il Oh ,  Do Hyeon Kim ,  Hui Chan Yun ,  Jin Kuk Lee ,  Irina Nam ,  Jong Seob Kim

发明人： Dong Seon Uh ,  Chang Il Oh ,  Do Hyeon Kim ,  Hui Chan Yun ,  Jin Kuk Lee ,  Irina Nam ,  Jong Seob Kim

IPC分类号： G03C1/00

CPC分类号： G03F7/11 ,  G03F7/0752 ,  Y10S430/106 ,  Y10S430/111

摘要： Provided herein are hardmask compositions for resist underlayer films, wherein in some embodiments, the hardmask compositions include(a) a first polymer prepared by the reaction of a compound of Formula 1 wherein n is a number of 3 to 20, with a compound of Formula 2 (R)m—Si—(OCH3)4-m   (2) wherein R is a monovalent organic group and m is 0, 1 or 2;(b) a second polymer that includes at least one of the structures represented by Formulae 3-6;(c) an acid or base catalyst; and(d) an organic solvent.Further provided herein are methods for producing a semiconductor integrated circuit device using a hardmask composition according to an embodiment of the present invention.In addition, provided herein are semiconductor integrated circiut devices produced by a method embodiment of the invention.

摘要翻译： 本文提供了用于抗蚀剂下层膜的硬掩模组合物，其中在一些实施方案中，硬掩模组合物包括（a）通过其中n为3至20数的式1化合物与式1化合物的反应制备的第一聚合物 2 <？in-line-formula description =“In-line Formulas”end =“lead”？（R） -Si-（OCH 3 3）_{其中R是一价有机基团，m是0,1或2; （b）第二聚合物，其包含由式3-6表示的至少一种结构; （c）酸或碱催化剂; 和（d）有机溶剂。 本文还提供了使用根据本发明实施例的硬掩模组合物制造半导体集成电路器件的方法。 此外，本发明提供了通过本发明的方法实施例制造的半导体集成循环装置。}

公开(公告)号：US06563364B2

公开(公告)日：2003-05-13

申请号：US10044039

申请日：2002-01-11

申请人： Jin-kuk Lee ,  Dong-young Chang ,  You-jin Cha ,  Geun-soon Kang ,  Seung-hoon Lee

发明人： Jin-kuk Lee ,  Dong-young Chang ,  You-jin Cha ,  Geun-soon Kang ,  Seung-hoon Lee

IPC分类号： G06F764

CPC分类号： H03G1/0094 ,  G06G7/06 ,  G06J1/00

摘要： A gain controller using switched capacitors is provided. The gain controller is operable in a sampling mode or an amplifying mode and controls the gain of an analog input signal. The gain controller includes an operational amplifier, input capacitors, a feedback capacitor, and switches. The operational amplifier controls the gain of the analog input signal and generates an output signal having the controlled gain. The input capacitors are connected to the input side of the operational amplifier in parallel. The feedback capacitor is connected between the input side and the output side of the operational amplifier. The switches connect at least one of the input capacitors to the input signal or a reference voltage, in response to the kinds of operation modes and a predetermined externally applied digital gain control signal. According to the gain controller using switched capacitors, it is possible to automatically control the gain of an input signal at high speed and to reduce power consumption since the time required for settling the gain of the input signal to a desired value is short.

公开(公告)号：US06388500B1

公开(公告)日：2002-05-14

申请号：US09575994

申请日：2000-05-23

申请人： Jin-kuk Lee ,  Dong-young Chang ,  You-jin Cha ,  Geun-soon Kang ,  Seung-hoon Lee

发明人： Jin-kuk Lee ,  Dong-young Chang ,  You-jin Cha ,  Geun-soon Kang ,  Seung-hoon Lee

IPC分类号： G06G718

CPC分类号： H03G1/0094 ,  G06G7/06 ,  G06J1/00

摘要： A gain controller using switched capacitors is provided. The gain controller is operable in a sampling mode or an amplifying mode and controls the gain of an analog input signal. The gain controller includes an operational amplifier, input capacitors, a feedback capacitor, and switches. The operational amplifier controls the gain of the analog input signal and generates an output signal having the controlled gain. The input capacitors are connected to the input side of the operational amplifier in parallel. The feedback capacitor is connected between the input side and the output side of the operational amplifier. The switches connect at least one of the input capacitors to the input signal or a reference voltage, in response to the kinds of operation modes and a predetermined externally applied digital gain control signal. According to the gain controller using switched capacitors, it is possible to automatically control the gain of an input signal at high speed and to reduce power consumption since the time required for settling the gain of the input signal to a desired value is short.