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115 条记录 (耗时 0.029 秒)

    Small volume cell
    1.
    发明授权
    Small volume cell 有权
    小体积电池

    公开(公告)号：US08130375B1

    公开(公告)日：2012-03-06

    申请号：US12462002

    申请日：2009-07-28

    申请人： Galen L. Pfeiffer ,  Thomas E. Tiwald ,  Martin M. Liphardt

    发明人： Galen L. Pfeiffer ,  Thomas E. Tiwald ,  Martin M. Liphardt

    IPC分类号： G01N1/10

    CPC分类号： G01N21/211 ,  G01N21/0332 ,  G01N21/05 ,  G01N2021/0346 ,  G01N2021/054

    摘要： A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.

    摘要翻译： 具有流体入口的小的内部体积电池和出口端口，其中在与流体出口连续的流体路径中存在至少一个气泡阱。 进一步存在用于进入和退出电磁辐射的输入/输出孔径，其被定位成允许电磁辐射的输入束在其使用期间在其上的位置处撞击在样品基板上; 以及用于引导从所述样品基板反射并朝向和离开所述输入/输出孔的电磁辐射的反射镜; 以及其使用方法。

    Small volume cell
    2.
    发明授权
    Small volume cell 有权
    小体积电池

    公开(公告)号：US08493565B1

    公开(公告)日：2013-07-23

    申请号：US13385018

    申请日：2012-01-30

    申请人： Galen L. Pfeiffer ,  Thomas E. Tiwald ,  Martin M. Liphardt

    发明人： Galen L. Pfeiffer ,  Thomas E. Tiwald ,  Martin M. Liphardt

    IPC分类号： G01N21/55 ,  G01N1/10

    CPC分类号： G01N21/55 ,  G01N1/10 ,  G01N21/0332 ,  G01N21/05 ,  G01N21/211 ,  G01N2021/0346 ,  G01N2021/054

    摘要： A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.

    摘要翻译： 具有流体入口的小内部体积电池和出口端口，其中在与流体出口连续的流体路径中存在至少一个气泡阱。 进一步存在用于进入和退出电磁辐射的输入/输出孔径，其被定位成允许电磁辐射的输入束在其使用期间在其上的位置处撞击在样品基板上; 以及用于引导从所述样品基板反射并朝向和离开所述输入/输出孔的电磁辐射的反射镜; 以及其使用方法。

    Spectroscopic ellipsometer and polarimeter systems
    6.
    发明授权
    Spectroscopic ellipsometer and polarimeter systems 有权
    光谱椭偏仪和偏光计系统

    公开(公告)号：US07616319B1

    公开(公告)日：2009-11-10

    申请号：US11890354

    申请日：2007-08-05

    申请人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    发明人： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

    IPC分类号： G01B9/02 ,  G01J3/45 ,  G01J4/00

    CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

    摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

    摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。