Integrated Circuit with Airgaps to Control Capacitance

    公开(公告)号:US20200006115A1

    公开(公告)日:2020-01-02

    申请号:US16021352

    申请日:2018-06-28

    摘要: An embodiment includes first, second, and third metal layers; first, second, and third metal lines included in the second metal layer; a layer including airgaps, the first metal layer being between the layer including airgaps and the second metal layer; a first void between the first and second metal lines and a second void between the second and third metal lines; a conformal layer between the first and second metal lines; an additional layer between the first and second metal layers; wherein the first void includes air and the second void includes air; wherein a first axis intersects the first, second, and third metal lines and the first and second voids; wherein a second axis, orthogonal to the first axis, intersects the conformal layer and the additional layer; wherein a third axis, orthogonal to the first axis, intersects the second metal line and the additional layer.

    POLING STRUCTURES AND METHODS FOR PHOTONIC DEVICES EMPLOYING ELECTRO-OPTICAL POLYMERS
    2.
    发明申请
    POLING STRUCTURES AND METHODS FOR PHOTONIC DEVICES EMPLOYING ELECTRO-OPTICAL POLYMERS 审中-公开
    使用电光聚合物的光电器件的结构和方法

    公开(公告)号:US20140086523A1

    公开(公告)日:2014-03-27

    申请号:US13629396

    申请日:2012-09-27

    IPC分类号: G02B6/26 H05K13/00 G02F1/035

    摘要: EOP-based photonic devices employing coplanar electrodes and in-plane poled chromophores and methods of their manufacture. In an individual EOP-based photonic device, enhanced performance is achieved through in-plane poled chromophores having opposing polarities, enabling, for example, a push-pull optical modulator with reduced operational voltage and switching power relative to a conventional MZ modulator. For a plurality of EOP-based photonic devices, enhanced manufacturability is achieved through a sacrificial interconnect enabling concurrent in-plane poling of many EOP regions disposed on a substrate.

    摘要翻译: 采用共面电极和面内极化发色团的基于EOP的光子器件及其制造方法。 在单个基于EOP的光子器件中,通过具有相反极性的面内极化发色团实现了增强的性能,使得例如相对于常规MZ调制器具有降低的操作电压和开关功率的推挽式光调制器。 对于多个基于EOP的光子器件,通过牺牲互连实现增强的可制造性,从而使得能够在布置在衬底上的许多EOP区域同时进行面内极化。

    Waveguide photodetector device and manufacturing method thereof
    3.
    发明授权
    Waveguide photodetector device and manufacturing method thereof 有权
    波导光电探测器及其制造方法

    公开(公告)号:US08290325B2

    公开(公告)日:2012-10-16

    申请号:US12217066

    申请日:2008-06-30

    IPC分类号: G02B6/10

    摘要: Embodiments of the present invention describe a waveguide-based photodetector device and its methods of fabrication. The waveguide photodetector device comprises a substrate having a cladding structure formed thereon. A waveguide element for receiving optical signals is disposed within the cladding structure. A portion of the waveguide element is encapsulated by a photodetector element that detects the optical signal received by the waveguide element and generates an electrical signal based on the optical signal. Encapsulating the waveguide element in the photodetector element improves coupling efficiency and enables a waveguide photodetector device with higher speeds and higher responsivity.

    摘要翻译: 本发明的实施例描述了一种基于波导的光电检测器件及其制造方法。 波导光检测器件包括其上形成有包层结构的基板。 用于接收光信号的波导元件设置在包层结构内。 波导元件的一部分被检测由波导元件接收的光信号的光检测器元件封装,并且基于光信号产生电信号。 将光波导元件中的波导元件封装提高了耦合效率,并使波导光电探测器器件具有更高的速度和更高的响应度。