公开(公告)号：US5890367A

公开(公告)日：1999-04-06

申请号：US899388

申请日：1997-07-23

申请人： Nam-hee You ,  Jung-sung Hwang ,  Gee-do Kim ,  Young-jin Han

发明人： Nam-hee You ,  Jung-sung Hwang ,  Gee-do Kim ,  Young-jin Han

IPC分类号： F24F3/14 ,  B01D39/14 ,  F24F3/16 ,  F24F7/06 ,  H01L21/02 ,  B01L1/04 ,  F25D17/06

CPC分类号： F24F3/161 ,  F24F2003/1682

摘要： An air conditioning system for a semiconductor clean room includes a chemical filter between an air conditioner including a humidifier and a ULPA filter of the clean room, for ionizing chemical impurities using moisture supplied from the humidifier and then adsorbing the ionized chemical impurities by using the chemical filter. The chemical filter is installed downstream of the humidifier, which applies phosphoric acid for the prevention of scale-formation. This downstream location allows the chemical filter to prevent the phosphoric acid from being included in the fresh air as a new chemical impurity, which makes regulation of temperature and humidity of the air possible without having to use a special and expensive pure steam system.

摘要翻译： 用于半导体洁净室的空调系统包括在包括加湿器的空气调节器和洁净室的ULPA过滤器之间的化学过滤器，用于使用从加湿器供应的水分电离化学杂质，然后通过使用化学品吸附电离的化学杂质 过滤。 化学过滤器安装在加湿器的下游，该加湿器采用磷酸防止结垢形成。 该下游位置允许化学过滤器防止磷酸作为新的化学杂质被包含在新鲜空气中，这使得可以调节空气的温度和湿度，而不必使用特殊和昂贵的纯蒸汽系统。

公开(公告)号：US06176120B1

公开(公告)日：2001-01-23

申请号：US09330972

申请日：1999-06-11

申请人： Nam-hee You ,  Dong-soo Lee ,  Sun-young Lee ,  Jung-sung Hwang

发明人： Nam-hee You ,  Dong-soo Lee ,  Sun-young Lee ,  Jung-sung Hwang

IPC分类号： G01N1100

CPC分类号： G01N1/2202 ,  G01N1/24 ,  G01N2001/2223 ,  G01N2001/2282 ,  G01N2001/4066

摘要： Methods of analyzing water-soluble contaminants comprise providing reference air streams having gaseous water present therein; condensing the reference air streams such that the gaseous water liquefies; pressurizing the liquefied water; and supplying the liquefied water to analyzers. Systems for analyzing water-soluble contaminants comprise air inlets that absorb reference air containing gaseous water therein; valves that control the flow of the reference air in fluid communication with the air inlets; condensers that condense the gaseous water in the reference air in fluid communication with the valves; pressurization pumps that pressurize the water condensed from the reference air in fluid communication with the condensers; and discharge pumps that discharge an excessive amount of water contained in the reference air.

摘要翻译： 分析水溶性污染物的方法包括提供其中存在气态水的参考空气流; 冷凝参考气流，使气态水液化; 对液化水加压; 并将液化水供应给分析仪。 用于分析水溶性污染物的系统包括吸收其中含有气态水的参考空气的空气入口; 控制与空气入口流体连通的参考空气的流动的阀; 冷凝器，其将与参考空气中的气态水冷凝成与阀流体连通; 加压泵，其将与从冷凝器流体连通的参考空气冷凝的水加压; 以及排出包含在参考空气中的过量水的排出泵。

公开(公告)号：US5871812A

公开(公告)日：1999-02-16

申请号：US773879

申请日：1996-12-26

申请人： Jung-Sung Hwang ,  Dong-Joo Lee ,  Nam-Hee You ,  Sang-Young Moon

发明人： Jung-Sung Hwang ,  Dong-Joo Lee ,  Nam-Hee You ,  Sang-Young Moon

IPC分类号： G01N21/88 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  C30B31/06 ,  C30B33/00 ,  G01N21/94 ,  G01N21/956 ,  H01L21/02 ,  H01L21/20 ,  C23C16/00

CPC分类号： C23C16/45565 ,  C23C16/4401 ,  C23C16/448 ,  C23C16/45512 ,  C30B31/06 ,  C30B33/00

摘要： An apparatus for quantitatively depositing molecular impurities on a semiconductor wafer, includes a reaction chamber, a gas generator for generating a source gas serving as the molecular impurities, a humidifier for generating moisture vapour of a constant temperature, a mixer for mixing the source gas and the moisture vapour to generate a mixed gas, a gas injector for injecting the mixed gas into the reaction chamber, an exhausting part for initiating a vacuum condition in the reaction chamber before deposition of the molecular impurities and for exhausting a remaining gases after deposition of the molecular impurities, and a cleaning air supply portion for supplying a cleaning air into the reaction chamber before deposition of the molecular impurities. After fabricating a semiconductor device using the wafer processed as above, a defective source of mechanism of contamination can be traced by analysing the semiconductor device.

摘要翻译： 一种用于在半导体晶片上定量沉积分子杂质的装置包括反应室，用于产生用作分子杂质的源气体的气体发生器，用于产生恒温的湿气的加湿器，用于混合源气体的混合器和 产生混合气体的水分蒸汽，将混合气体注入反应室的气体注入器，用于在沉积分子杂质之前在反应室中引发真空状态并在沉积之后排出剩余气体的排气部分 分子杂质和用于在沉积分子杂质之前将清洁空气供应到反应室中的清洁空气供应部分。 在使用如上所述处理的晶片制造半导体器件之后，可以通过分析半导体器件来追踪污染机制的有缺陷的源。

公开(公告)号：US06295864B1

公开(公告)日：2001-10-02

申请号：US09236545

申请日：1999-01-26

申请人： Nam-hee You ,  Soon-young Lee ,  Jung-sung Hwang ,  Kwang-young Kim

发明人： Nam-hee You ,  Soon-young Lee ,  Jung-sung Hwang ,  Kwang-young Kim

IPC分类号： G01N1100

CPC分类号： G01N33/0016 ,  G01N1/22 ,  G01N1/34

摘要： An analysis system and method for a cleanroom environment is disclosed wherein on-line testing of water-soluble contaminants is performed by condensing water vapor from an air sample taken from the clean room. The condenser is connected to a analyzing unit that is used to measure and analyze the water-soluble contaminants in the condensed water received from the condensing unit.

摘要翻译： 公开了一种用于洁净室环境的分析系统和方法，其中水溶性污染物的在线测试是通过冷凝来自洁净室的空气样品的水蒸气来进行的。 冷凝器连接到用于测量和分析从冷凝单元接收的冷凝水中的水溶性污染物的分析单元。

公开(公告)号：US6015706A

公开(公告)日：2000-01-18

申请号：US27302

申请日：1998-02-20

申请人： In-seop Kim ,  Seung-uhn Kim ,  Nam-hee You ,  Soon-young Lee

发明人： In-seop Kim ,  Seung-uhn Kim ,  Nam-hee You ,  Soon-young Lee

IPC分类号： A61L2/26 ,  C02F1/50 ,  C02F3/34 ,  C12N1/00 ,  C12N1/20 ,  C12N9/08 ,  C12P19/04 ,  C12Q1/22 ,  C12R1/265

CPC分类号： C12N9/0065 ,  C12P19/04 ,  C12Q1/22 ,  C12R1/265 ,  C12Y111/01006

摘要： A novel isolated microorganism, Micrococcus luteus KCTC 0369BP, exhibits a linear survival curve versus the concentration of hydrogen peroxide and is thus useful in a method of determining the degree of sterilization of, for example, ultrapure water that has been sterilized by hydrogen peroxide. The novel isolated microorganism produces a surface polysaccharide and a catalase.

摘要翻译： 一种新型的分离的微生物，微生物微球菌KCTC 0369BP显示出线性存活曲线与过氧化氢浓度的关系，因此可用于确定例如已被过氧化氢消毒的超纯水的灭菌程度的方法。 新型分离的微生物产生表面多糖和过氧化氢酶。