摘要:
In a foreign matter inspection apparatus for a semiconductor wafer, a PMT which detects reflection light, an amplifier which amplifies a signal detected by the PMT and in which response characteristics of amplification are controlled by a control signal, an A/D converter which converts the signal amplified by the amplifier into a predetermined code and outputs the code, a control circuit which generates a control signal based on information of the semiconductor wafer having a correlation with the reflection light, and a data processing circuit which detects a foreign matter on the semiconductor wafer based on the code output from the A/D converter are provided.
摘要:
A magnetic characteristic inspecting apparatus including a plurality of disk rotating devices or a plurality of magnetic heads include a unit for switching output signals of write signal production units or allocating the output signals to the magnetic heads, a unit for switching signals read from the magnetic heads or allocating the read signals to measurement resources, and a unit for selecting any of the disk rotating devices synchronously with which the measurement resources will perform measurement. The write signal production units and measurement resources are shared among inspections of the plurality of disk rotating devices or the plurality of heads.
摘要:
The present invention relates to a data processing device for mass spectrometry, in which measurements are performed in a high dynamic range without causing an overrange in an A/D converter in any TOF scan. A data acquisition circuit of a mass spectrometer includes an amplitude value computing circuit which measures and stores a maximum amplitude value of an ion detection signal, a gain control circuit for determining and setting a gain amount for the next measurement, and others. From the immediately preceding TOF scan data or TOF scan data plural times before, the maximum amplitude value of the ion detection signal is extracted. Then, before the next TOF scan, an optimum gain amount is determined based on the extracted maximum amplitude value to adjust the gain of the input signal, and the ion signal is sampled in the A/D converter.
摘要:
A magnetic characteristic inspecting apparatus including a plurality of disk rotating devices or a plurality of magnetic heads include a unit for switching output signals of write signal production units or allocating the output signals to the magnetic heads, a unit for switching signals read from the magnetic heads or allocating the read signals to measurement resources, and a unit for selecting any of the disk rotating devices synchronously with which the measurement resources will perform measurement. The write signal production units and measurement resources are shared among inspections of the plurality of disk rotating devices or the plurality of heads.
摘要:
An output buffer includes inverters, a delay circuit for delaying an input signal, buffers and switches. The output buffer transmits a logic signal to a transmission path and, in accordance with an amount of signal attenuation in the transmission path, creates a waveform including four or more kinds of signal voltages. The buffers are redundantly connected in parallel, and the number of buffers concurrently turn ON is controlled by respective switches provided in series with output resistors of the buffers. By selecting the buffers of switches which are turned ON, the preemphasis amount and a number of preemphasis taps are adjusted through a selector logic selection signal so that the preemphasis amount is made variable and the ON resistance of the buffers is made constant.
摘要:
For the achievement of data transfer time reduction, removal of noise data, and analytical efficiency improvement in an ADC data processing function of a time-of-flight mass spectrometer, the mass spectrometer comprises a data acquisition circuit including: an ND converter; a signal intensity addition memory that stores data of ion signals such as a time range and the number of measurements and performs an addition process; a voltage value frequency addition memory that performs an addition process of frequencies of voltage values of the predetermined time range and the number of measurements and stores addition results; a threshold level computation circuit that computes a predetermined threshold level from the results in the memory; a compression memory that extracts only data exceeding the threshold level from the data in the signal intensity addition memory; and a counter that controls a measurement time for data acquisition and the operation of each circuit.
摘要:
In an output buffer circuit including Inverter 1 to Inverter 3, Delay Circuit 1 to Delay Circuit 3 for delaying an input signal for a specific time, Buffer 1 to Buffer 3, and a function for transmitting a logic signal to a transmission path and in accordance with an amount of signal attenuation in the transmission path, creating at a transmission side a waveform including four or more kinds of signal voltages, the preemphasis amount is made variable and the ON resistance Rs of the buffer is made constant. Selector circuit 1 to Selector circuit 3 are situated before the buffers, the inverter, capable of selecting through selector logic a signal to be inputted to the buffer, inverts a data signal, and the preemphasis amount and the number of preemphasis taps are adjusted through a selection signal for the selector logic.
摘要:
In order to easily perform a timing test on a memory interface included in a semiconductor device so as to satisfy a restriction on latency, the present invention provides a semiconductor device with the memory interface including: a clock output terminal that outputs a clock signal associated with an operation of a memory connected to the memory interface; a command terminal that outputs a command signal associated with control of a state of the memory; a data terminal that exchanges a data signal with the memory; and a data strobe terminal that exchanges a data strobe signal for establishing the data signal. This semiconductor device includes a testing terminal that outputs in advance a signal for starting a test on the memory interface apart from the command signal.
摘要:
In order to easily perform a timing test on a memory interface included in a semiconductor device so as to satisfy a restriction on latency, the present invention provides a semiconductor device with the memory interface including: a clock output terminal that outputs a clock signal associated with an operation of a memory connected to the memory interface; a command terminal that outputs a command signal associated with control of a state of the memory; a data terminal that exchanges a data signal with the memory; and a data strobe terminal that exchanges a data strobe signal for establishing the data signal. This semiconductor device includes a testing terminal that outputs in advance a signal for starting a test on the memory interface apart from the command signal.
摘要:
In an odd side storage circuit, logical values of a decision subject signal HCMP are stored in first and second FFs respectively at decision edges LH and HL generated from odd-numbered edges of a decision edge EH. Logical values of a delayed decision subject signal HCMP′ are stored in third and fourth FFs. According to a selection signal generated by a selection signal generation circuit based on outputs of the third and fourth FFs, a first selector selects an output of the first or second FF. An even side storage circuit operates similarly at even-numbered edges. A second selector selects the odd and even side storage circuits alternately. The FFs in the odd and even side storage circuits are reset by a decision edge LH′ of the even side and the decision edge HL of the odd side, respectively.