Active piezoelectric energy harvester with embedded variable capacitance layer and method of manufacturing the same
    1.
    发明授权
    Active piezoelectric energy harvester with embedded variable capacitance layer and method of manufacturing the same 有权
    具有嵌入式可变电容层的有源压电能量收集器及其制造方法

    公开(公告)号:US08471439B2

    公开(公告)日:2013-06-25

    申请号:US12899499

    申请日:2010-10-06

    IPC分类号: H02N2/18

    摘要: Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.

    摘要翻译: 提供了一种有源压电能量收集器,其可以控制施加到嵌入式可变电容层的直流电压,以实时精确地调节谐振频率,从而实现比传统调节器的常规电路更简单的结构和更小的尺寸 谐振频率使用外部提供的单独的可变电容器。 此外,即使在真实的自然振动环境中,随着时间的推移,振动频率随时间而变化,或者当其自身的谐振频率变差而发生变化时,有源压电能量收集器也可以精确地调节谐振频率,从而可以持续保持最佳 能量转换特性。

    ACTIVE PIEZOELECTRIC ENERGY HARVESTER WITH EMBEDDED VARIABLE CAPACITANCE LAYER AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    ACTIVE PIEZOELECTRIC ENERGY HARVESTER WITH EMBEDDED VARIABLE CAPACITANCE LAYER AND METHOD OF MANUFACTURING THE SAME 有权
    具有嵌入式可变电容层的有源压电式收发器及其制造方法

    公开(公告)号:US20110140579A1

    公开(公告)日:2011-06-16

    申请号:US12899499

    申请日:2010-10-06

    IPC分类号: H02N2/18 H01L41/22

    摘要: Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.

    摘要翻译: 提供了一种有源压电能量收集器,其可以控制施加到嵌入式可变电容层的直流电压,以实时精确地调节谐振频率,从而实现比传统调节器的传统电容器更简单的结构和更小的尺寸 谐振频率使用外部提供的单独的可变电容器。 此外,即使在真实的自然振动环境中,随着时间的推移,振动频率随时间而变化,或者当其自身的谐振频率变差而发生变化时,有源压电能量收集器也可以精确地调节谐振频率,从而可以持续保持最佳 能量转换特性。

    Optical microscope system for detecting nanowires using polarizer and fast fourier transform
    4.
    发明申请
    Optical microscope system for detecting nanowires using polarizer and fast fourier transform 失效
    用于使用偏振器和快速傅里叶变换检测纳米线的光学显微镜系统

    公开(公告)号:US20090195869A1

    公开(公告)日:2009-08-06

    申请号:US11940379

    申请日:2007-11-15

    IPC分类号: G02B21/06 G06K9/00

    摘要: Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires. The optical microscope system includes: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires. It is possible to obtain a distinct image of the nanowires having a nanometer line width by performing FFT on each pixel of reflected light images obtained at predetermined time intervals after light passing through the polarizer rotating in a predetermined period is incident on the nanowires.

    摘要翻译: 提供了一种用于检测纳米线的光学显微镜系统,其被设计为具有旋转偏振器和快速傅里叶变换(FFT),以允许使用现有的光学显微镜来制造具有纳米线的电子器件。 光学显微镜系统包括:用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜,用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机,用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换(FFT)的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。 通过在经过预定时间内旋转的偏振片的光入射到纳米线上之后,以预定时间间隔获得的反射光图像的每个像素执行FFT,可以获得具有纳米线宽度的纳米线的不同图像。

    METHOD OF FABRICATING NANO-WIRE ARRAY
    5.
    发明申请
    METHOD OF FABRICATING NANO-WIRE ARRAY 失效
    制作纳米线阵列的方法

    公开(公告)号:US20080233675A1

    公开(公告)日:2008-09-25

    申请号:US11927881

    申请日:2007-10-30

    IPC分类号: H01L21/00

    摘要: Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

    摘要翻译: 提供一种制造纳米线阵列的方法,包括以下步骤:在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域,然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线,其间插入图案化的纳米线; 形成多个漏电极,所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个,并且形成多个源电极,所述多个源电极的一端连接到所述源电极线并接触所述纳米线, 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域,以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此,即使在纳米线与电极线的不平行结构中,大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

    Ferroelectric/paraelectric multilayer thin film, method of forming the same, and high frequency variable device using the same
    7.
    发明授权
    Ferroelectric/paraelectric multilayer thin film, method of forming the same, and high frequency variable device using the same 失效
    铁电/顺电多层薄膜,其形成方法和使用其的高频可变装置

    公开(公告)号:US07274058B2

    公开(公告)日:2007-09-25

    申请号:US11180744

    申请日:2005-07-12

    IPC分类号: H01L29/76 H01L29/94 H01L31/00

    摘要: A ferroelectric/paraelectric multilayer thin film having a high tuning rate of a dielectric constant and small dielectric loss to overcome limitations of a tuning rate of a dielectric constant and dielectric loss of a ferroelectric thin film, a method of forming the same, and a high frequency variable device having the ferroelectric/paraelectric multilayer thin film are provided. The ferroelectric/paraelectric multilayer thin film includes a perovskite ABO3 structure paraelectric seed layer formed on a substrate, and an epitaxial ferroelectric (BaxSr1-x)TiO3 thin film formed on the paraelectric seed layer. The high frequency variable device can realize a RF frequency/phase variable device having a high speed, low power consumption, and low prices and excellent microwaves characteristics.

    摘要翻译: 具有介电常数高的调谐率和小的介电损耗的铁电/直流多层薄膜,以克服介电常数的调谐率和铁电薄膜的介电损耗的限制,其形成方法和高 提供具有铁电/顺电多层薄膜的高频可变器件。 铁电/顺电多层薄膜包括在基板上形成的钙钛矿ABO 3结构顺电晶种层,外延铁电(Ba x Sr Sr 1-x < / SUB>)TiO 3薄膜形成在顺电种子层上。 高频可变装置可以实现具有高速度,低功耗,低价格和优异的微波特性的RF频率/相位可变装置。

    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same
    9.
    发明授权
    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same 有权
    微机电系统使用具有许多孔的微加热器的半导体气体传感器及其制造方法

    公开(公告)号:US08683847B2

    公开(公告)日:2014-04-01

    申请号:US13345772

    申请日:2012-01-09

    IPC分类号: H01L21/02 G01N7/04

    CPC分类号: G01N27/128 G01N27/123

    摘要: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

    摘要翻译: 公开了使用具有许多孔的微加热器的MEMS型半导体气体传感器及其制造方法。 MEMS型半导体气体传感器包括:以预定厚度蚀刻中心区域的基板; 第二膜,形成在所述基板的中心区域的上部并具有许多孔; 形成在第二膜上并具有许多孔的发热电阻器; 形成在包括所述发热电阻器并具有许多孔的所述第二膜上的第一膜; 形成在第一膜上并具有许多孔的感测电极; 以及感测材料,形成在感测电极上。

    Optical microscope system for detecting nanowires using polarizer and fast fourier transform
    10.
    发明授权
    Optical microscope system for detecting nanowires using polarizer and fast fourier transform 失效
    用于使用偏振器和快速傅里叶变换检测纳米线的光学显微镜系统

    公开(公告)号:US07719760B2

    公开(公告)日:2010-05-18

    申请号:US11940379

    申请日:2007-11-15

    IPC分类号: G02B21/06

    摘要: Provided is an optical microscope system for detecting nanowires to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires and including: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires.

    摘要翻译: 提供了一种用于检测纳米线的光学显微镜系统,以允许使用现有的光学显微镜来制造具有纳米线的电子器件,并且包括:用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜,用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机,用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换(FFT)的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。