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公开(公告)号：US09829425B2
公开(公告)日：2017-11-28
申请号：US14253051
申请日：2014-04-15
CPC分类号： G01N15/1459 , B01L3/502707 , B01L3/502761 , B01L2200/0663 , B01L2300/0877 , B01L2300/0896 , G01N15/1434 , G01N15/1484 , G01N21/648 , G01N21/658 , G01N2015/0038 , G01N2021/6439
摘要： This disclosure provides systems, methods, and apparatus related to optofluidic devices. In one aspect, an optofluidic device includes a substrate, a first nanostructure, a second nanostructure, and a cover. A channel having cross-sectional dimensions of less than about 100 nanometers is defined in a surface of the substrate. The first nanostructure is disposed on the substrate on a first side of the channel and proximate the channel. The second nanostructure is disposed on the substrate on a second side of the channel and proximate the channel. The first and the second nanostructures are disposed on a line that passes across the channel. The cover is disposed on the surface of the substrate.
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2.发明申请公开(公告)号：US20140090118A1
公开(公告)日：2014-03-27
申请号：US14033070
申请日：2013-09-20
申请人： Alexander Weber-Bargioni , Stefano Cabrini , Wei Bao , Mauro Melli , Eli Yablonovitch , Peter J. Schuck
发明人： Alexander Weber-Bargioni , Stefano Cabrini , Wei Bao , Mauro Melli , Eli Yablonovitch , Peter J. Schuck
IPC分类号： G01Q60/22
摘要： This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
摘要翻译： 本公开提供了与多维纳米光谱成像探针有关的系统，方法和装置。 一方面，一种方法包括提供包括电介质材料的透明尖端。 使用聚焦离子束在透明尖端的顶点处形成四边形的金字塔形结构。 金属层沉积在四边形金字塔形结构的两个相对侧上。
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3.发明申请COMPOSITION FOR RESIST PATTERNING AND METHOD OF MANUFACTURING OPTICAL STRUCTURES USING IMPRINT LITHOGRAPHY 有权用于电阻图案的组合物和使用印刷层析法制造光学结构的方法公开(公告)号：US20160109799A1
公开(公告)日：2016-04-21
申请号：US14340539
申请日：2014-07-24
CPC分类号： G03F7/0275 , C08L25/00 , G03F7/0002 , G03F7/0047 , G03F7/028
摘要： Provided is a composition for resist patterning comprising a thiol; at least one -ene monomer; at least one polymerization initiator; and, optionally, a metal oxide used in an amount of 0.1 to 50 wt. % per weight of the composition; the thiol and -ene monomer are used in a stoichiometric ratio with a refractive index between 1.6 and 1.8. The composition is used in a patterning process wherein the composition is dispensed to the substrate, is covered with a mask, and is cured, e.g., by UV radiation, at room temperature with light having a wavelength in the range of 200 nm to 450 nm. The process may be carried out with thermal annealing.
摘要翻译： 提供了一种抗蚀剂图案化组合物，其包含硫醇; 至少一烯单体; 至少一种聚合引发剂; 和任选地，使用的金属氧化物的量为0.1-50wt。 组合物重量％ 硫醇和烯单体以折射率在1.6和1.8之间的化学计量比使用。 组合物用于图案化过程中，其中将组合物分配到基底，用掩模覆盖，并且在室温下通过UV辐射固化，其中波长在200nm至450nm范围内的光 。 该方法可以用热退火进行。
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4.发明授权公开(公告)号：US08984661B2
公开(公告)日：2015-03-17
申请号：US14033070
申请日：2013-09-20
申请人： Alexander Weber-Bargioni , Stefano Cabrini , Wei Bao , Mauro Melli , Eli Yablonovitch , Peter J. Schuck
发明人： Alexander Weber-Bargioni , Stefano Cabrini , Wei Bao , Mauro Melli , Eli Yablonovitch , Peter J. Schuck
摘要： This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
摘要翻译： 本公开提供了与多维纳米光谱成像探针有关的系统，方法和装置。 一方面，一种方法包括提供包括电介质材料的透明尖端。 使用聚焦离子束在透明尖端的顶点处形成四边形的金字塔形结构。 金属层沉积在四边形金字塔形结构的两个相对侧上。
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公开(公告)号：US20110249546A1
公开(公告)日：2011-10-13
申请号：US13083228
申请日：2011-04-08
CPC分类号： G02B6/1226 , B82Y20/00 , G11B7/1387 , G11B7/22 , Y10T29/49826 , Y10T428/24612
摘要： The present invention provides a plasmonic optical transformer to produce a highly focuses optical beam spot, where the transformer includes a first metal layer, a dielectric layer formed on the first metal layer, and a second metal layer formed on the dielectric layer, where the first metal layer, the dielectric layer, and the second layer are patterned to a shape including a first section having a first cross section, a second section following the first section having a cross-section tapering from the first section to a smaller cross-section, and a third section following the second section having a cross-section matching the tapered smaller cross-section of the second section,
摘要翻译： 本发明提供了一种等离子体激元光变换器，用于产生高度聚焦的光束点，其中变压器包括第一金属层，形成在第一金属层上的电介质层和形成在电介质层上的第二金属层，其中第一 金属层，电介质层和第二层被图案化为包括具有第一横截面的第一部分的形状，第一部分之后的第二部分具有从第一部分渐缩到较小横截面的横截面， 以及第二部分之后的第三部分，其具有与第二部分的锥形较小横截面匹配的横截面，
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6.发明授权Composition for resist patterning and method of manufacturing optical structures using imprint lithography 有权用于抗蚀剂图案的组合物和使用压印光刻制造光学结构的方法公开(公告)号：US09298089B1
公开(公告)日：2016-03-29
申请号：US14340539
申请日：2014-07-24
CPC分类号： G03F7/0275 , C08L25/00 , G03F7/0002 , G03F7/0047 , G03F7/028
摘要： Provided is a composition for resist patterning comprising a thiol; at least one -ene monomer; at least one polymerization initiator; and, optionally, a metal oxide used in an amount of 0.1 to 50 wt. % per weight of the composition; the thiol and -ene monomer are used in a stoichiometric ratio with a refractive index between 1.6 and 1.8. The composition is used in a patterning process wherein the composition is dispensed to the substrate, is covered with a mask, and is cured, e.g., by UV radiation, at room temperature with light having a wavelength in the range of 200 nm to 450 nm. The process may be carried out with thermal annealing.
摘要翻译： 提供了一种抗蚀剂图案化组合物，其包含硫醇; 至少一烯单体; 至少一种聚合引发剂; 和任选地，使用的金属氧化物的量为0.1-50wt。 组合物重量％ 硫醇和烯单体以折射率在1.6和1.8之间的化学计量比使用。 组合物用于图案化过程中，其中将组合物分配到基底，用掩模覆盖，并且在室温下通过UV辐射固化，其中波长在200nm至450nm范围内的光 。 该方法可以用热退火进行。
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公开(公告)号：US20140313507A1
公开(公告)日：2014-10-23
申请号：US14253051
申请日：2014-04-15
CPC分类号： G01N15/1459 , B01L3/502707 , B01L3/502761 , B01L2200/0663 , B01L2300/0877 , B01L2300/0896 , G01N15/1434 , G01N15/1484 , G01N21/648 , G01N21/658 , G01N2015/0038 , G01N2021/6439
摘要： This disclosure provides systems, methods, and apparatus related to optofluidic devices. In one aspect, an optofluidic device includes a substrate, a first nanostructure, a second nanostructure, and a cover. A channel having cross-sectional dimensions of less than about 100 nanometers is defined in a surface of the substrate. The first nanostructure is disposed on the substrate on a first side of the channel and proximate the channel. The second nanostructure is disposed on the substrate on a second side of the channel and proximate the channel. The first and the second nanostructures are disposed on a line that passes across the channel. The cover is disposed on the surface of the substrate.
摘要翻译： 本公开提供了与光流体装置相关的系统，方法和装置。 一方面，光流体装置包括基底，第一纳米结构，第二纳米结构和盖。 在衬底的表面中限定具有小于约100纳米的横截面尺寸的通道。 第一纳米结构设置在通道的第一侧上且靠近通道的衬底上。 第二纳米结构设置在通道的第二侧上且靠近通道的衬底上。 第一和第二纳米结构设置在穿过通道的线上。 盖设置在基板的表面上。
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公开(公告)号：US09052450B2
公开(公告)日：2015-06-09
申请号：US13083228
申请日：2011-04-08
IPC分类号： G11B5/02 , G02F1/035 , G11B5/127 , G11B11/00 , G02B6/122 , B82Y20/00 , G11B7/1387 , G11B7/22
CPC分类号： G02B6/1226 , B82Y20/00 , G11B7/1387 , G11B7/22 , Y10T29/49826 , Y10T428/24612
摘要： The present invention provides a plasmonic optical transformer to produce a highly focuses optical beam spot, where the transformer includes a first metal layer, a dielectric layer formed on the first metal layer, and a second metal layer formed on the dielectric layer, where the first metal layer, the dielectric layer, and the second layer are patterned to a shape including a first section having a first cross section, a second section following the first section having a cross-section tapering from the first section to a smaller cross-section, and a third section following the second section having a cross-section matching the tapered smaller cross-section of the second section.
摘要翻译： 本发明提供了一种等离子体激元光变换器，用于产生高度聚焦的光束点，其中变压器包括第一金属层，形成在第一金属层上的电介质层和形成在电介质层上的第二金属层，其中第一 金属层，电介质层和第二层被图案化为包括具有第一横截面的第一部分的形状，第一部分之后的第二部分具有从第一部分渐缩到较小横截面的横截面， 以及第二部分之后的第三部分具有匹配第二部分的锥形较小横截面的横截面。
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9.发明授权公开(公告)号：US07535564B2
公开(公告)日：2009-05-19
申请号：US10517657
申请日：2003-06-12
IPC分类号： G01N21/00
CPC分类号： A61B5/1076 , A61B5/1077 , G03H1/0493
摘要： An apparatus for determining the internal outline of a duct or cavity, comprises light-emitting means (71) suitable for generating a collimated light beam, an elongate probe element (51; 51′; 51″) suitable for being introduced into the duct and for guiding the collimated beam along a predetermined propagation direction, reflector means (52) supported by the probe element (51; 51′; 51″) and suitable for deflecting the collimated beam so as to illuminate the internal wall of the duct, and for deflecting the reflected or diffused light coming from an illuminated point (P) of the internal wall so as to guide it along the probe element (51; 51′; 51″), and detection means (76) suitable for receiving an image of the illuminated point (P), which image is correlated with the optical distance of the point from the detection means (76), and for providing a corresponding electrical signal. The image is formed by the light guided by the receiving reflector means (52). The reflector means comprise a micro-mirror element (52) articulated to a distal end of the probe element (51; 51′; 51″). The micro-mirror element (52) is orientable so as to deflect the collimated beam in selectively different directions.
摘要翻译： 一种用于确定管道或空腔的内部轮廓的装置包括适于产生准直光束的发光装置（71），适于被引入管道的细长探针元件（51; 51'; 51“） 并且用于沿着预定传播方向引导准直光束，由探头元件（51; 51'; 51“）支撑的适于偏转准直光束以便照亮管道内壁的反射器装置（52） 并且用于偏转来自内壁的照明点（P）的反射或漫射光，以沿着探针元件（51; 51'; 51“）引导它们;以及检测装置（76），适于接收 照明点（P）的图像，该图像与来自检测装置（76）的点的光学距离相关，并且用于提供相应的电信号。 该图像由接收反射器装置（52）引导的光形成。 反射器装置包括铰接到探针元件（51; 51'; 51“）的远端的微镜元件（52）。 微镜元件（52）是可取向的，以使准直束在选择性地不同的方向上偏转。
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10.发明申请公开(公告)号：US20060074509A1
公开(公告)日：2006-04-06
申请号：US10517657
申请日：2003-06-12
申请人： Enzo Di Fabrizio , Stefano Cabrini
发明人： Enzo Di Fabrizio , Stefano Cabrini
CPC分类号： A61B5/1076 , A61B5/1077 , G03H1/0493
摘要： An apparatus for determining the internal outline of a duct or cavity, comprises light-emitting means (71) suitable for generating a collimated light beam, an elongate probe element (51; 51′; 51″) suitable for being introduced into the duct and for guiding the collimated beam along a predetermined propagation direction, reflector means (52) supported by the probe element (51; 51′; 51″) and suitable for deflecting the collimated beam so as to illuminate the internal wall of the duct, and for deflecting the reflected or diffused light coming from an illuminated point (P) of the internal wall so as to guide it along the probe element (51; 51′; 51″), and detection means (76) suitable for receiving an image of the illuminated point (P), which image is correlated with the optical distance of the point from the detection means (76), and for providing a corresponding electrical signal. The image is formed by the light guided by the receiving reflector means (52). The reflector means comprise a micro-mirror element (52) articulated to a distal end of the probe element (51; 51′; 51″). The micro-mirror element (52) is orientable so as to deflect the collimated beam in selectively different directions.
摘要翻译： 一种用于确定管道或空腔的内部轮廓的装置包括适于产生准直光束的发光装置（71），适于被引入管道的细长探针元件（51; 51'; 51“） 并且用于沿着预定传播方向引导准直光束，由探头元件（51; 51'; 51“）支撑的适于偏转准直光束以便照亮管道内壁的反射器装置（52） 并且用于偏转来自内壁的照明点（P）的反射或漫射光，以沿着探针元件（51; 51'; 51“）引导它们;以及检测装置（76），适于接收 照明点（P）的图像，该图像与来自检测装置（76）的点的光学距离相关，并且用于提供相应的电信号。 该图像由接收反射器装置（52）引导的光形成。 反射器装置包括铰接到探针元件（51; 51'; 51“）的远端的微镜元件（52）。 微镜元件（52）是可取向的，以使准直束在选择性地不同的方向上偏转。
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